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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
11

Wavelength Multiplexing of MEMS Pressure and Temperature Sensors Using Fiber Bragg Gratings and Arrayed Waveguide Gratings

Li, Weizhuo January 2005 (has links)
No description available.
12

Laser de fibra dopada com érbio multifuncional

Demori, Cláudia Barros dos Santos 25 August 2015 (has links)
Made available in DSpace on 2016-03-15T19:38:55Z (GMT). No. of bitstreams: 1 CLAUDIA BARROS DOS SANTOS DEMORI.pdf: 3640553 bytes, checksum: 13700107293ec12ced27c0e70d6fb334 (MD5) Previous issue date: 2015-08-25 / This work shows an Erbium doped-fiber Laser with many frequencies and many operation regimes based on integration of two paired arrayed waveguide gratings (AWGs) into a ring cavity. The AWGs are highlighted, since 2000, as key technology for multifrequencies lasers for optical communications, spectroscopy, image, astronomy and others applications. Fundamentally, gratings work splitting waveguide signal and since insertion in the cavity they allow simultaneous operating of tens of wavelength. We explore each one of these wavelength withing Erbium gain region, doing channels in different regimes of operation. These regimes may be continuous or pulsed. The advantage is that each channel may be modulated independently. Simultaneous operation with high repetition rates at 10 and 40 GHz were demonstrated, as continuous wave. The laser is stable, versatile and multifunctional. It is possible that more operating regimes, as passive mode-locking, be explored. We showed by this work efficient way to passive mode-locking by carbon nanotubes as saturable absorbers. Soon, the passive mode-locking is a potential regime for the demonstrated laser. As the new bi-dimensional materials, that look efficient for passive mode-locking and in the future, hybrid mode-locking, as graphene and black phosphor. / Esta tese trata de demonstrar um Laser de fibra dopada com Érbio com múltiplas frequências e múltiplos regimes de operação simultâneos baseados na integração de duas grades de difração pareadas (Arrayed Waveguide Gratings, AWGs) dentro de uma cavidade de laser de fibra. As AWGs são apontadas, desde o ano 2000, como tecnologia fundamental em lasers de múltiplas frequencias para as comunicações ópticas, para espectroscopia, imageamento, astronomia, e outras aplicações. Fundamentalmente, as grades funcionam como divisores do sinal óptico e quando inseridas dentro da cavidade de um laser de fibra permitem a operação simultânea de dezenas de comprimentos de onda. Neste trabalho, exploramos cada comprimento de onda, dentro da região de ganho do Érbio, com um regime de operação diferente. Esse regime pode ser pulsado ou contínuo. A vantagem do laser apresentado é que cada comprimento de onda é um canal que pode ser modulado de forma independente. Pôde-se demonstrar operação simultânea com regimes a altas taxas de repetição como 10 GHz e 40 GHz, assim como CW. O laser é estável, versátil e multifuncional. É possível que mais regimes de operação, como o regime de acoplamento de modos passivo sejam explorados. Mostramos ao longo deste trabalho maneiras eficientes de acoplar modos passivamente, utilizando nanotubos de carbono como absorvedores saturáveis, logo a técnica de acoplamento de modos passivo é um dos regimes em potencial para este laser. Assim como, o uso de novos materiais bidimensionais, que se mostram eficientes para o acoplamento de modos passivo e futuramente híbrido, como o grafeno e o fósforo negro.
13

Analysis and Development of Fixed and Variable Waveband MUX/DEMUX Utilizing AWG Routing Functions

Kakehashi, Shoji, Hasegawa, Hiroshi, Sato, Ken-ichi, Moriwaki, Osamu, Kamei, Shin 01 January 2009 (has links)
No description available.
14

Technology for photonic components in silica/silicon material structure

Wosinski, Lech January 2003 (has links)
The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. Two strong absorption peaks thatappear at1.5 mm communication window due to N-H and Si-H bonds have beencompletely eliminated by process optimization. This openspossibilities for monolithic integration with other,temperature sensitive devices, such as semiconductor lasers anddetectors, or polymer-based structures on the common siliconplatform. PECVD technology for low loss amorphous silicon inapplication to SiO2/Si based photonic crystal structures hasbeen also optimized to remove hydrogen incorporated during thedeposition process, responsible for the porosity of thedeposited material and creation of similar to silica absorptionbands. Change of the refractive index of germanium doped silicaunder UV irradiation is commonly used for fabrication of UVinduced fiber Bragg gratings. Here we describe our achievementsin fabrication of fiber Bragg gratings and their application todistributed sensor systems. Recently we have built up a laserlab for UV treatment in application to planar technology. Wehave demonstrated the high photosensitivity of PECVD depositedGe-doped glasses (not thermally annealed) even without hydrogenloading, leading to a record transmission suppression of 47dBin a Bragg grating photoinduced in a straight buried channelwaveguide. We have also used a UV induced refractive indexchange to introduce other device modifications or functions,such as phase shift, wavelength trimming and control ofpolarization birefringence.The developed low temperature technology and the UVprocessing form a unique technology platform for development ofnovel integrated functional devices for optical communicationsystems. A substantial part of the thesis has been devoted tostudying different plasma deposition parameters and theirinfluence on the optical characteristics of fabricatedwaveguides to find the processing window giving the besttrade-off between the deposition rate,chamber temperatureduring the process, optical losses and presence of absorptionbands within the interesting wavelength range. The optimalconditions identified in this study are low pressure (300-400mTorr), high dilution of silane in nitrous oxide and high totalflow (2000 sccm), low frequency (380 KHz) RF source and high RFpower levels (800-1000 W). The thesis provides better understanding of the plasmareactions during the deposition process. RF Power is the keyparameter for increasing the rate of surface processes so as toaccommodate each atomic layer in the lowest energy statepossible. All the process conditions which favor a moreenergetic ion bombardment (i.e. low pressure, low frequency andhigh power) improve the quality of the material, making it moredense and similar to thermal oxide, but after a certain pointthe positive trend with increasing power saturates. As theenergy of the incoming ion increases, a competing effect setsin at the surface: ion induced damage and resputtering. Finally, the developed technologies were applied for thefabrication of some test and new concept devices for opticalcommunication systems including multimode interference (MMI)-based couplers/splitters, state-of-the-art arrayed waveguidegrating-based multi/ demultiplexers, the first Bragg gratingassisted MMI-based add-drop multiplexer, as well as moreresearch oriented devices such as a Mach-Zehnder switch basedon silica poling and a Photonic Crystal-based coupler. <b>Keywords:</b>silica-on-silicon technology, PECVD, plasmadeposition, photonic integrated circuits, planar waveguidedevices, UV Bragg gratings, photosensitivity, arrayed waveguidegratings, multimode interference couplers, add-dropmultiplexers.
15

Design, Fabrication, and Characterization of Nano-Photonic Components Based on Silicon and Plasmonic Material

Liu, Liu January 2006 (has links)
Size reduction is a key issue in the development of contemporary integrated photonics. This thesis is mainly devoted to study some integrated photonic components in sub-wavelength or nanometric scales, both theoretically and experimentally. The possible approaches to reduce the sizes or to increase the functionalities of photonic components are discussed, including waveguides and devices based on silicon nanowires, photonic crystals, surface plasmons, and some near-field plasmonic components. First, some numerical methods, including the finite-difference time-domain method and the full-vectorial finite-difference mode solver, are introduced. The finite-difference time-domain method can be used to investigate the interaction of light fields with virtually arbitrary structures. The full-vectorial finite-difference mode solver is mainly used for calculating the eigenmodes of a waveguide structure. The fabrication and characterization technologies for nano-photonic components are reviewed. The fabrications are mainly based on semiconductor cleanroom facilities, which include thin film deposition, electron beam lithography, and etching. The characterization setups with the end-fire coupling and the vertical grating coupling are also described. Silicon nanowire waveguides and related devices are studied. Arrayed waveguide gratings with 11nm and 1.6nm channel spacing are fabricated and characterized. The dimension of these arrayed waveguide gratings is around 100 μm, which is 1--2 order of magnitude smaller than conventional silica based arrayed waveguide gratings. A compact polarization beam splitter employing positive/negative refraction based on a photonic crystal of silicon pillars is designed and demonstrated. Extinction ratio of ~15dB is achieved experimentally in a wide wavelength range. Surface plasmon waveguides and devices are analyzed theoretically. With surface plasmons the light field can be confined in a sub-wavelength dimension. Some related photonic devices, e.g., directional couplers and ring resonators, are studied. We also show that some ideas and principles of microwave devices, e.g., a branch-line coupler, can be borrowed for building corresponding surface plasmon based devices. Near-field plasmonic components, including near-field scanning optical microscope probes and left handed material slab lenses, are also analyzed. Some novel designs are introduced to enhance the corresponding systems. / QC 20100908
16

Technology for photonic components in silica/silicon material structure

Wosinski, Lech January 2003 (has links)
<p>The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. Two strong absorption peaks thatappear at1.5 mm communication window due to N-H and Si-H bonds have beencompletely eliminated by process optimization. This openspossibilities for monolithic integration with other,temperature sensitive devices, such as semiconductor lasers anddetectors, or polymer-based structures on the common siliconplatform. PECVD technology for low loss amorphous silicon inapplication to SiO2/Si based photonic crystal structures hasbeen also optimized to remove hydrogen incorporated during thedeposition process, responsible for the porosity of thedeposited material and creation of similar to silica absorptionbands.</p><p>Change of the refractive index of germanium doped silicaunder UV irradiation is commonly used for fabrication of UVinduced fiber Bragg gratings. Here we describe our achievementsin fabrication of fiber Bragg gratings and their application todistributed sensor systems. Recently we have built up a laserlab for UV treatment in application to planar technology. Wehave demonstrated the high photosensitivity of PECVD depositedGe-doped glasses (not thermally annealed) even without hydrogenloading, leading to a record transmission suppression of 47dBin a Bragg grating photoinduced in a straight buried channelwaveguide. We have also used a UV induced refractive indexchange to introduce other device modifications or functions,such as phase shift, wavelength trimming and control ofpolarization birefringence.The developed low temperature technology and the UVprocessing form a unique technology platform for development ofnovel integrated functional devices for optical communicationsystems.</p><p>A substantial part of the thesis has been devoted tostudying different plasma deposition parameters and theirinfluence on the optical characteristics of fabricatedwaveguides to find the processing window giving the besttrade-off between the deposition rate,chamber temperatureduring the process, optical losses and presence of absorptionbands within the interesting wavelength range. The optimalconditions identified in this study are low pressure (300-400mTorr), high dilution of silane in nitrous oxide and high totalflow (2000 sccm), low frequency (380 KHz) RF source and high RFpower levels (800-1000 W).</p><p>The thesis provides better understanding of the plasmareactions during the deposition process. RF Power is the keyparameter for increasing the rate of surface processes so as toaccommodate each atomic layer in the lowest energy statepossible. All the process conditions which favor a moreenergetic ion bombardment (i.e. low pressure, low frequency andhigh power) improve the quality of the material, making it moredense and similar to thermal oxide, but after a certain pointthe positive trend with increasing power saturates. As theenergy of the incoming ion increases, a competing effect setsin at the surface: ion induced damage and resputtering.</p><p>Finally, the developed technologies were applied for thefabrication of some test and new concept devices for opticalcommunication systems including multimode interference (MMI)-based couplers/splitters, state-of-the-art arrayed waveguidegrating-based multi/ demultiplexers, the first Bragg gratingassisted MMI-based add-drop multiplexer, as well as moreresearch oriented devices such as a Mach-Zehnder switch basedon silica poling and a Photonic Crystal-based coupler.</p><p><b>Keywords:</b>silica-on-silicon technology, PECVD, plasmadeposition, photonic integrated circuits, planar waveguidedevices, UV Bragg gratings, photosensitivity, arrayed waveguidegratings, multimode interference couplers, add-dropmultiplexers.</p>
17

Advanced arrayed waveguide gratings: models, design strategies and experimental demonstration

Gargallo Jaquotot, Bernardo Andrés 28 November 2016 (has links)
[EN] The present PhD thesis deals on the model, design and experimental demonstration of Arrayed Waveguide Grating (AWG) with advanced features. Firstly, building upon existing AWG formulations, design equations are provided, libraries developed and all this is experimentally validated with devices in Indium Phosphide (InP) and Silicon-on-insulator (SOI) technologies. Next, a model and experimental validation is reported for an Interleave-Chirped Arrayed Waveguide Grating (IC-AWG), which is able to process optical signals as WDM demultiplexer, polarization splitter and phase diversity component all in a single device. This device was fabricated and tested in InP technology. The second innovative AWG demonstrated in this thesis, a Reflective type (R-AWG), whose layout allows for tailoring the pass-band shape and to change the spectral resolution. A demonstration of design and fabrication for this device is provided in SOI technology. The last AWG with innovative concepts is one driven by Surface Acoustic Waves (AWG-SAW), where the spectral channels can be tuned by means of acousto-optic effect. The device was fabricated in Aluminium Gallium Arsenide (AlGaAs) technology, and measurements are provided to validate the concept and design flow. In parallel this thesis has resulted in the development of different AWG layouts for a wide number of (generic) technologies and foundries, coded into design libraries, of use in a de-facto standard software employed for the design of photonic integrated circuits. These design libraries have been licensed to the UPV spin-off company VLC Photonics S.L. / [ES] La presente tesis se ha centrado en el modelado, diseño y demostración experimental del dispositivo Arrayed Waveguide Grating (AWG) con funcionalidades avanzadas. Primero, usando la formulación existente sobre AWGs se aportan ecuaciones y librerías de diseño, y se validan experimentalmente por medio de dispositivos fabricados en tecnologías de Indium Phosphide (InP) y Silicon-on-insulator (SOI). Después, se reporta un modelo y demostración experimental para un Interleave-Chirped Arrayed Waveguide Grating (IC-AWG), el cual es capaz de procesar señales ópticas como demultiplexor WDM, divisor de polarización y componente de diversidad de fase en un único dispositivo. Este dispositivo fue fabricado y probado en tecnología de InP. El segundo AWG innovador demostrado en esta tesis es de tipo Reflectante (R-AWG), cuyo diseño permite modificar la forma espectral del canal y cambiar su resolución espectral, incluyendo una demostración de diseño y fabricación de este dispositivo en tecnología de SOI. El último AWG que incluye conceptos innovadores es uno sintonizable por Acoustic Waves (AWGSAW), donde los canales espectrales pueden ser sintonizados por medio del efecto acusto-óptico. Dicho dispositivo fue fabricado en tecnología de Aluminium Gallium Arsenide (AlGaAs), y se han incluido medidas experimentales para validar el concepto y el flujo de diseño. En paralelo junto con esta tesis se han desarrollado diferentes diseños para el AWG en un amplio número de tecnologías (genéricas) y plataformas de fabricación, implementadas en unas librerías de diseño para uno de los softwares m¿as utilizados para el diseño de circuitos integrados ópticos, siendo actualmente el estándar de facto. Dichas librerías de diseño han sido licenciadas a la compañía VLC Photonics S.L., spin-off de la UPV. / [CAT] La present tesi ha estat centrada en el modelatge, disseny i demostració experimental del dispositiu Arrayed Waveguide Grating (AWG) amb funcionalitats avançades. Primer, usant la formulació existent sobre AWGs s'aporten equacions i llibreries de disseny, i es validen experimentalment per mitjà de dispositius fabricats en tecnologies de Indium Phosphide (InP) i Silicon-on-insulator (SOI). Després, es reporta un model i demostració experimental per a un Interleave-Chirped Arrayed Waveguide Grating (IC-AWG), el qual és capaç de processar senyals òptiques com demultiplexor WDM, divisor de polarització i component de diversitat de fase en un únic dispositiu. Aquest dispositiu va ser fabricat i provat en tecnologia de InP. El segon AWG innovador demostrat en aquesta tesi és de tipus Reflector (R-AWG), amb un disseny que permet modificar la forma espectral del canal i canviar la seua resolució espectral, incloent una demostració de disseny i fabricació d'aquest dispositiu en tecnologia de SOI. L'últim AWG que inclou conceptes innovadors és un sintonitzable per Acoustic Waves (AWG-SAW), on els canals espectrals poden ser sintonitzats per mitjà de l'efecte acusto-òptic. Aquest dispositiu va ser fabricat en tecnologia de Aluminium Gallium Arsenide (AlGaAs), i s'han inclòs mesures experimentals per validar el concepte i el flux de disseny. En paral.lel juntament amb aquesta tesi s'han desenvolupat diferents dissenys per al AWG en un ampli nombre de tecnologies (genèriques) i plataformes de fabricació, implementades en unes llibreries de disseny per a un dels programaris més utilitzats per al disseny de circuits integrats òptics, sent actualment l'estàndard de facto. Aquestes llibreries de disseny han estat llicenciades a la companyia VLC Photonics S.L., spin-off de la UPV. / Gargallo Jaquotot, BA. (2016). Advanced arrayed waveguide gratings: models, design strategies and experimental demonstration [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/74646 / TESIS
18

New photonic architectures for mid-infrared gaz sensors integrated on silicon / Nouvelles architectures photoniques pour capteurs de gaz infrarouge intégrés sur silicium

Koshkinbayeva, Ainur 10 March 2017 (has links)
Les travaux portent sur les multiplexeurs optiques fonctionnant à mi-IR pour la source à large bande dans l'application de détection de gaz. Deux configurations ont été étudiées: réseau de guides d'onde (AWG) et réseau concave planaire (PCG). Premièrement, le principe du fonctionnement a été compris afin de développer une solution analytique pour le champ de sortie en utilisant une approximation gaussienne du champ et de l'optique de Fourier. Ensuite, un outil de simulation semi-analytique de la réponse spectrale pour les deux configurations de multiplexeur a été développé dans MATLAB. La distribution normale des erreurs de phase a été introduite dans le modèle semi-analytique AWG, ce qui nous a permis d'étudier la corrélation entre l'écart-type des erreurs de phase et le niveau de diaphonie de la réponse spectrale AWG. AWG à 5,65 μm a été fabriqué à partir de la technologie SiGe / Si à l'aide de l'outil MATLAB pour le calcul des paramètres de conception et de l'outil P.Labeye pour le calcul de la géométrie AWG. Les dispositifs avec des paramètres légèrement variables ont été caractérisés: AWG1 avec guides d'ondes de 4,6 μm et MMI de 9 μm; AWG2 avec guides d'ondes de 4,6 μm et MMI de 11 μm; AWG3 avec guides d'ondes de 4,8 μm et MMI de 9 μm. Des mesures des dispositifs sur la puce 36 (centre de la plaquette) et sur la puce 32 (côté de la plaquette) ont été effectuées et analysées. Les mesures de température de AWG2 et AWG3 (puce 32 et puce 36) aux points cinq points de température ont montré une dépendance linéaire du déplacement spectral avec la température qui a une bonne corrélation avec les prédictions de simulation. / The work focuses on optical multiplexers operating in mid-IR for broadband source in gas sensing application. Two configurations were studies – arrayed waveguide grating (AWG) and planar concave grating (PCG). First, principle of operation was understood in order to develop analytical solution for output field using Gaussian approximation of the field and Fourier Optics. Then, semi-analytical simulation tool of the spectral response for both multiplexer configurations was developed in MATLAB. Normal distribution of phase errors was introduced to semi-analytical AWG model, which allowed us to study the correlation between standard deviation of phase errors and the level of crosstalk of AWG spectral response. AWG at 5.65 µm was fabricated based on SiGe/Si technology using the MATLAB tool for design parameters calculation and P.Labeye’s tool for AWG geometry calculation. Devices with slightly varying parameters were characterized: AWG1 with 4.6 µm waveguides and 9µm MMI; AWG2 with 4.6 µm waveguides and 11µm MMI; AWG3 with 4.8 µm waveguides and 9µm MMI. Measurements of devices on chip 36 (center of the wafer) and chip 32 (side of the wafer) were performed and analyzed. Temperature measurements of AWG2 and AWG3 (chip 32 and chip 36) at points five temperature points showed linear dependence of spectral shift with the temperature which has a good correlation with simulation predictions.
19

[en] WDM-PON PASSIVE OPTICAL NETWORKS MONITORING / [pt] SUPERVISÃO DE REDES OPTICAS PASSIVAS WDM-PON

DIEGO RODRIGO VILLAFANI CABALLERO 20 August 2014 (has links)
[pt] As redes ópticas passivas de nova geração 2 (NG-PON2) estão estudando e considerando o WDM-PON (Wavelength-Division-Multiplexed Passive Optical Networks) como a nova arquitetura para as redes de acesso, é provável que esta arquitetura seja adotada num futuro como o padrão. No entanto, algumas instalações já foram realizadas em todo o mundo, a maior parte delas na Coréia do Sul. Com o objetivo de reduzir os custos de operação (OPEX) e garantir a qualidade do serviço (QoS) um sistema de supervisão e localização de falhas é necessário. Neste trabalho é proposto e demonstrado um OTDR sintonizável (Optical Time-Domain Reflectometer) para realizar o monitoramento de redes WDMPON em serviço. O método apresentado é provado para diferentes fontes laser sintonizáveis CW (Continuous Wave) e utiliza um amplificador óptico semicondutor (SOA) como comutador para o sinal de prova. O sistema de monitoramento é provado experimentalmente numa rede WDM-PON simulada no laboratório a qual utiliza um AWG (Arrayed Waveguide Grating) como distribuidor. Os resultados foram melhorados utilizando diferentes métodos para mitigar os efeitos de interferência. / [en] The Next Generation Passive Optical Network 2 (NG-PON2) is considering and studying wavelength-division-multiplexed passive optical networks (WDM-PONs) as the new architecture for access networks, this architecture is likely to be adopted in near future as standard. However some deployments have been achieved worldwide, most of them in South Korea. In order to lower the operational expenditure (OPEX) and guarantee quality-of-service (QoS) an in-service monitoring and fault localization system is required. We propose and demonstrate a tunable optical time-domain reflectometer (T-OTDR) for in-service monitoring of (WDM-PONs). The proposed method is proved for different continuous wave tunable laser sources (CW TLS), and uses semiconductor optical amplifier (SOA) as a switch for the probe signal. This monitoring system is experimentally proved in a simulated WDMPON employing a cyclic AWG (Arrayed Waveguide Grating) as wavelength distributor. We improve the results using different methods to mitigate the interference effects.
20

Integrated Spectroscopic Sensor fabricated in a novel Si3N4 platform

Micó Cabanes, Gloria 17 January 2021 (has links)
[ES] Esta tesis se ha centrado en el modelado, diseño y demostración experimental de un sensor espectroscópico integrado basado en un AWG (del inglés Arrayed Waveguide Grating). El dispositivo ha sido diseñado y fabricado en una nueva plataforma de nitruro de silico (Si3N4) en oxido de silico (SiO2) desarrollada en España. El trabajo realizado en esta tesis se puede dividir en dos secciones principalmente. En la primera parte, se describe el panorama general de las plataformas de Si3N4 existentes y su estado del arte, junto con la descripción de los procesos de fabricación y caracterización de nuestra plataforma de Si3N4 con 300 nm de altura en la capa de guiado. En la segunda parte, se presenta el dispositivo bautizado como Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consiste en un AWG cuyo conjunto de guías de onda está dividido en dos subgupos diseñados para replicar los canales del AWG. Las guías de uno de los subgrupos contienen ventanas de sensado, que están definidas por secciones en las que el núcleo de las guías está al descubierto y, por tanto, en contacto con el medio que las rodea. De esta manera, el sensado se lleva a cabo mediante la interacción del campo evanescente con la muestra depositada. Las guías del segundo subconjunto permanecen inalteradas. Por lo tanto, el dispositivo proporciona al mismo tiempo los espectros de sensado y de referencia. El modelo matemático del IOSS, su procedimiento de diseño y la prueba de concepto del sensor configurado para espectroscopía de absorción se describen en esta tesis. / [CAT] La present tesi s'ha centrat en el modelatge, disseny i demostració experimental d'un sensor espectroscòpic integrat basat en un AWG (de l'anglès Arrayed Waveguide Grating). El dispositiu ha sigut dissenyat i fabricat en una nova plataforma de nitrur de silici (Si3N4) en òxid de silici (SiO2) desenvolupada a Espanya. El treball realitzat en aquesta tesi es pot dividir en dues seccions principalment. En la primera part, es descriu el panorama general de les plataformes de Si3N4 existents i el seu estat de l'art, juntament amb la descripció dels processos de fabricació i caracterització de la nostra plataforma de Si3N4 amb 300 nm d'altura en la capa de guiat. En la segona part, es presenta el dispositiu batejat com Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consisteix en un AWG en el que el seu conjunt de guies d'ona està dividit en dos subgrups dissenyats per a replicar els canals del AWG. Les guies d'un dels subgrups conté finestres de detecció, que estan definides per seccions en les quals el nucli de les guies d'ona està al descobert i en contacte amb el mitjà que li envolta. D'aquesta manera, la detecció es duu a terme mitjançant la interacció del camp evanescent amb la mostra depositada. Les guies del segon subconjunt romanen inalterades. Per tant, el dispositiu proporciona al mateix temps els espectres de detecció de referència. El model matemàtic del IOSS, el seu procediment de disseny i la prova de concepte del sensor configurat per a espectroscopia d'absorció es descriuen en aquesta tesi. / [EN] This thesis is focused on the model, design and experimental demonstration of an integrated spectroscopic sensor based on a modified Arrayed Waveguide Grating (AWG). The device has been designed and fabricated in a new silicon nitride (Si3N4) on silicon oxide (SiO2) platform developed in Spain. The work performed for this thesis can be then divided into two main sections. In the first part, an overview of the existing Si3N4 platforms and their state of art is described, alongside the report on the fabrication and characterization of our 300 nm guiding film height Si3N4 platform. On the second part, the device named Integrated Optical Spectroscopic Sensor (IOSS) is presented. The IOSS consists of an AWG which arrayed waveguides are divided into two sub-sets engineered to replicate the AWG channels. The waveguides of one of the sub-sets contain sensing windows, defined as waveguides sections which core is in contact with the surrounding media. Thus, the sensing is performed through evanescent field interaction with the sample deposited. The waveguides from the second sub-set remain isolated. Therefore, the device provides both sensing and reference spectra. The IOSS mathematical model, design procedure and proof of concept configured for absorption spectroscopy are reported in this thesis. / Micó Cabanes, G. (2020). Integrated Spectroscopic Sensor fabricated in a novel Si3N4 platform [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/159381 / TESIS

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