Fabrication of ordered anodic alumina nanopore arrays and anodization parameters including electrolyte, concentration, voltage, temperature and time have been investigated. Cobalt nanoparticles were electrodeposited at the bottom of the pores. Vertically aligned, open-tipped multi-walled carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. It is the cobalt catalyst particles, not the porous aluminum templates, help the growth of carbon nanotubes through graphitization and bonding of carbon nanotubes to the silicon substrates. Fabrication of nano-structures has been demonstrated. Nano-trenches of 20 nm have been achieved using single-walled nanotube bundles as shadow masks, which were aligned across electrodes under high frequency AC voltage.

A theoretical model is developed for calculating the sensitivity of resistive sensors based on aligned multiwall carbon nanotubes (MWCNT) embedded in the pores of alumina membranes. Aligned MWCNTs offer more surface area as each CNT acts as a landing site for detecting gas species. The MWCNTs behave as a p-type semiconducting layer; when the bus bar contacts are placed at either end of the top surface the resistance between the contacts responds to oxidizing (resistance decreases) and reducing gases (resistance increases). The model presented in this thesis aims to understand the device resistance dependence upon the MWCNT resistance, and the sensitivity dependence upon the device structure and design. The model was utilized for enhancing the sensitivity of MWCNT sensors for ammonia (30% sensitivity) and nitrogen dioxide (40% sensitivity) gases. Experimental results from sensitivity measurements are compared with theoretical predictions.

The ability to fabricate a charge-driven water pump is a crucial step toward mimicking the catalytic ability of natural enzyme systems. The first step towards making this water pump a reality is the ability to make a carbon nanotube (CNT) membrane with uniform, 0.8 nm pore diameter. Proposed in this work is a method for synthesizing these carbon nanotubes via VPI-5 zeolite templated, transition metal catalyzed pyrolysis. Using a membrane composed of these CNTs, it is possible to get water molecules to flow single file at a high flow rate, and to orient them in such a way that would maximize their ability to be catalyzed. Additionally, using the ability to plate a monolayer of precious metal catalyst molecules around the exit to the membrane, catalyst efficiency can be maximized by making every catalyst atom come into contact with a substrate molecule. In this work, we also demonstrate the ability to plate a monolayer of precious metal catalyst atoms onto an insulating, mesoporous, support material. By combining these two chemical processes, it is possible to mimic the catalytic efficiency of natural enzyme systems.

0.7nm single wall carbon nanotubes have been synthesized within VPI-5 zeolite channels with sucrose as carbon precursor. VPI-5 molecular sieves are synthesized hydrothermally under conventional heating. X-ray powder diffraction, micro raman, scanning electron microscope (SEM), transmission electron microscope (TEM), Thermogravimetric analysis have been used to investigate the structure of zeolite and thermal decoposition process of carbon precursors. 0.4nm single wall carbon nanotubes have also been fabricated within AlPO4-5 nanopores. A key challenge is to produce high yield single wall carbon nanotubes with uniform diameter. In order to improve the carbon nanotube yield, different organic precursors are employed. Although the problem is still the repetition and low yield of CNTs, it is still an improvement for 0.7nm SWNTs synthesis with the new template prolysis method. The novel multilayer conductor/insulator/conductor structures have been fabricated. This structure might find potential application in DNA sequential reactions because each layer might be individually addressed with voltage. When bias is applied to the conductive layer, it can be chemically functionalized, which leads to membrane pore with multiple reaction sequences when the molecule traverses the membrane reactor. In this thesis, Carbon/polymer/carbon system and copper/polymer system will be introduced. O2 RIE was used to expose the edge of carbon/polymer/carbon structure. However, the conductivity of carbon layer is not high enough for electroplating. Copper pores etched by FeCl3 solution shows good conductivity, and can be electroplated with metal nanoparticles.

This project was basically exploratory in the electrical properties of carbon nanotube (CNT) based materials. The direct current (DC) conductivity of CNT/polymer composites was computed by using equivalent circuit method and a three dimensional (3-D) numerical continuum model with the consideration of tunneling conduction. The effects of the potential barrier of polymer and the tortousity of CNTs on the conductivity were analyzed. It was found that both of percolation threshold and DC conductivity can be strongly affected by the potential barrier and the tortousity. The influence of contact resistance on DC conductivity was also computed, and the results revealed that contact resistance and tunneling resistance had significant influences on the conductivity, but did not affect the percolation threshold. The microstructure-dependent alternating current (AC) properties of CNT/polymer composites were investigated using the 3-D numerical continuum model. It was found that AC conductivity and critical frequency of CNT/polymer composites can be enhanced by increasing the curl ratio of CNTs. In the mid-range CNT mass fraction, with increasing curl ratio of CNTs, AC conductivity, interestingly, became frequency-dependent in low frequency range, which cannot be explained by reference to the percolation theory. A proper interpretation was given based on the linear circuit theory. It was also found that the critical frequency can also be affected by the size of CNT cluster. Series numerical formulas were derived by using a numerical capacitively and resistively junction model. In particular, this work introduced an equivalent resistor-capacitor (RC) circuit with simple definitions of the values of contact resistance and average mutual capacitance for CNT/polymer nanocomposites. Theoretical results were in good agreement with experimental data, and successfully predicted the effect of morphology on the AC properties of CNT/polymer composites. DC and AC conductivities of multi-walled carbon nanotube (MWCNT)/graphene oxide (GO) hybrid films were measured for selected MWCNT mass fractions of 10%, 33.3%, 50%, 66.7%, and 83.3% using four-probe method. The experimental results were fitted using scaling law, and relatively high percolation threshold was found. This high percolation threshold was understood in terms of the potential energy and intrinsic ripples and warping in the freestanding graphene sheets. The capacitance of these hybrid films were measured using the voltmeter-ammeter-wattmeter test circuit with different voltages and heat treatments. The MWCNT/GO film showed relatively high specific capacitance (0.192F/cm3 for the mass fraction of 83.3%) and power factor compared to conventional dielectric capacitors. Both of measured capacitance and power factor can be enhanced by increasing testing voltages. The capacitance of MWCNT/GO films rapidly decreased after heat treatments above 160 ℃. This decrease was caused by redox reaction in the GO sheets. The capacitive behaviour of MWCNT/GO hybrid films was also interpreted by using the equivalent circuit model. Single-walled carbon nanotube (SWCNT) and SWCNT/Poly(vinyl alcohol) (PVA) films were used to form a piezoresistive strain sensor. Both of static and dynamic strain sensing behaviours of SWCNT and SWCNT/PVA films were measured. It was found that the sensitivities of these films decreased with increasing their thicknesses. The SWCNT film with a thickness of 1900 nm and SWCNT/PVA film exhibited viscoelastic sensing behaviour, because van der Waals attraction force allowed axial slippages of the smooth surface of nanotubes. A numerical model was derived based on the dynamic strain sensing behaviour. This model could be useful for designing CNT strain sensors. Finally, thermoelectric power (TEP) of deformed SWCNT films with various thicknesses was measured. It was observed that positive TEP of SWCNT films increased with increasing stain above the critical point. The experimental results were fitted by using a numerical model in terms of a variation of Nordheim-Gorter relation and fluctuation induced tunneling (FIT) model. From the numerical model, it was found that the increase of TEP above the critical strain resulted from the positive term of the contribution from the barrier region, and the effect of barrier regions decreases with increasing the thickness of the film.

The main objective of this work is the fundamental physical study of individual isolated carbon nanostructures in order to address their intrinsic vibrational and optical properties and also to estimate and quantify the environmental effects. For these purposes, we synthesized individual single- and multi-walled carbon nanotubes by chemical vapour deposition method on dedicated substrates. The main aspect of the work involves the combined use of different experimental probes on the same individual nanostructures. We performed a complete structure analysis by electron diffraction and high-resolution electron microscopy and the measurement of the Raman spectra on these individual nanostructures. Several important environmental effects were evidenced for the first time, e.g. the effect of mechanical coupling (van-der-Waals interaction) between the layers of double-walled carbon nanotubes leading to the change in the low-frequency Raman modes and the optical resonance conditions. Moreover the behaviour of high-frequency modes of double-walled tubes was also analysed and described. As a result of this work several experimental criteria for structure diagnostics of multi-walled carbon nanotubes were proposed.

Carbon nanotubes have extraordinary mechanical, electrical, thermal andoptical properties. They are harder than diamond yet exible, have betterelectrical conductor than copper, but can also be a semiconductor or evenan insulator. These ranges of properties of course make carbon nanotubeshighly interesting for many applications. Carbon nanotubes are already usedin products as hockey sticks and tennis rackets for improving strength and exibility. Soon there are mobile phones with exible screens made fromcarbon nanotubes. Also, car- and airplane bodies will probably be mademuch lighter and stronger, if carbon nanotubes are included in the construction.However, the real game changers are; nanoelectromechanical systems(NEMS) and computer processors based on graphene and carbon nanotubes.In this work, we study Young's modulus in the axial direction of carbonnanotubes. This has been done by performing density functional theorycalculations. The unit cell has been chosen as to accommodate for tubes ofdierent radii. This allows for modelling the eect of bending of the bondsbetween the carbon atoms in the carbon nanotubes of dierent radii. Theresults show that Young's modulus decreases as the radius decreases. Ineect, the Young's modulus declines from 1 to 0.8 TPa. This eect can beunderstood because the bending diminishes the pure sp^2 character of thebonds.These results are important and useful in construction, not only when usingcarbon nanotubes but also when using graphene. Our results point towardsa Young's modulus that is a material constant and, above a certain criticalvalue, only weakly dependent on the radius of the carbon nanotube.Graphene can be seen as a carbon nanotube with innite radius.

This thesis analyzes the chemical vapour deposition (CVD) growth of vertically aligned carbon nanotube (CNT) forests in order to understand how CNT forests grow, why they stop growing, and how to control the properties of the synthesized CNTs. In situ kinetics data of the growth of CNT forests are gathered by in situ optical microscopy. The overall morphology of the forests and the characteristics of the individual CNTs in the forests are investigated using scanning electron microscopy and Raman spectroscopy. The in situ data show that forest growth and termination are activated processes (with activation energies on the order of 1 eV), suggesting a possible chemical origin. The activation energy changes at a critical temperature for ethanol CVD (approximately 870°C). These activation energies and critical temperature are also seen in the temperature dependence of several important characteristics of the CNTs, including the defect density as determined by Raman spectroscopy. This observation is seen across several CVD processes and suggests a mechanism of defect healing. The CNT diameter also depends on the growth temperature. In this thesis, a thermodynamic model is proposed. This model predicts a temperature and pressure dependence of the CNT diameter from the thermodynamics of the synthesis reaction and the effect of strain on the enthalpy of formation of CNTs. The forest morphology suggests significant interaction between the constituent CNTs. These interactions may play a role in termination. The morphology, in particular a microscale rippling feature that is capable of diffracting light, suggest a non-uniform growth rate across the forest. A gas phase diffusion model predicts a non-uniform distribution of the source gas. This gas phase diffusion is suggested as a possible explanation for the non-uniform growth rate. The gas phase diffusion is important because growth by acetylene CVD is found to be very efficient (approximately 30% of the acetylene is converted to CNTs). It is seen that multiple mechanisms are active during CNT growth. The results of this thesis provide insight into both the basic understanding of the microscopic processes involved in CVD growth and how to control the properties of the synthesized CNTs.

The limitations of the conventional Cu/low-k interconnect technology for use in future ultra-scaled integrated circuits down to 7 nm in the year 2020 are investigated from the power/performance point of view. Compact models are used to demonstrate the impacts of various interconnect process parameters, for instance, the interconnect barrier/liner bilayer thickness and aspect ratio, on the design and optimization of a multilevel interconnect network. A framework to perform a sensitivity analysis for the circuit behavior to interconnect process parameters is created for future FinFET CMOS technology nodes. Multiple predictive cell libraries down to the 7‒nm technology node are constructed to enable early investigation of the electronic chip performance using commercial electronic design automation (EDA) tools with real chip information. Findings indicated new opportunities that arise for emerging novel interconnect technologies from the materials and process perspectives. These opportunities are evaluated based on potential benefits that are quantified with rigorous circuit-level simulations and requirements for key parameters are underlined. The impacts of various emerging interconnect technologies on the performances of emerging devices are analyzed to quantify the realistic circuit- and system-level benefits that these new switches can offer.

ABSTRACT PRODUCTION OF CARBON NANOTUBES BY CHEMICAL VAPOR DEPOSITION Ayhan, Umut BariS M.S., Department of Chemical Engineering Supervisor: Prof. Dr. G&uuml / ng&ouml / r G&uuml / nd&uuml / z Co-Supervisor: Assoc. Prof. Dr. Burhanettin &Ccedil / i&ccedil / ek July 2004, 75 pages Carbon nanotubes, which is one of the most attractive research subject for scientists, was synthesized by two different methods: Chemical vapor deposition (CVD), a known method for nanotube growth, and electron beam (e-beam), a new method which was used for the first time for the catalytic growth of carbon nanotubes. In both of the methods, iron catalyst coated silica substrates were used for the carbon nanotube growth, that were prepared by the Sol-Gel technique using aqueous solution of Iron (III) nitrate and tetraethoxysilane. The catalytic substrates were then calcined at 450 &deg / C under vacuum and iron was reduced at 500&deg / C under a flow of nitrogen and hydrogen. In CVD method the decomposition of acetylene gas was achieved at 600 &deg / C and 750 &deg / C and the carbon was deposited on the iron catalysts for nanotube growth. However, in e-beam method the decomposition of acetylene was achieved by applying pulsed high voltage on the gas and the carbon deposition on the silica substrate were done. The samples from both of the methods were characterized using transmission electron microscopy (TEM) and Raman spectroscopy techniques. TEM images and Raman spectra of the samples show that carbon nanotube growth has been achieved in both of the method. In TEM characterization, all nanotubes were found to be multi-walled carbon nanotubes (MWNT) and no single-walled carbon nanotubes (SWNT) were pictured. However, the Raman spectra show that there are also SWNTs in some of the samples.