The purpose of this work is the development of MEMS-based resonant sensors for liquid-phase biochemical sensing applications. Specifically, the sensors developed here are aimed at embedded or point-of-sampling applications: (1) when there is not enough time to send a sample to a lab for analysis, (2) in resource-poor settings, (3) when collecting analyte and shipping it to a lab would damage the sample, or (4) for in-situ monitoring. To this end, a bulk micromachined resonant cantilever sensor and a surface micromachined sensor based on the spring-softening effect are investigated as transducer elements. The developed cantilever resonators are operated in an in-plane vibration mode to reduce fluid damping and mass loading by the surrounding fluid. The surface of the resonator is either coated with a chemically sensitive polymer film for chemical sensing or with a layer of protein or antibody for biosensor testing. Chemical tests for sensing volatile organic compounds using polymer-coated in-plane resonators in the liquid-phase give estimated limits of detection below 100 ppb. In addition, biosensor tests for the detection of anti-IgG yield estimated limits of detection around 100 ng/ml. In an attempt to further improve sensor reliability and to further lower the limits of detection, a second sensing concept has been investigated. The presented sensing scheme is capacitive with a resonator acting as an analog-to-digital converter. The resonator and the sensing capacitors are coupled via the spring softening effect. Through this mechanism a change in capacitance causes a shift in resonant frequency. Extensive device modeling has been performed and a process has been developed allowing for fabrication and on-chip packaging of these sensor structures. Initial mechanical characterization data show that the resonators do in fact vibrate.

Nanomechanical resonators (NR) are cantilevers or doubly clamped nanowires (NW) which vibrate at their resonance frequency. These nanowires with picogram-level mass and frequencies of the order of MHz can resolve added mass in the attogram (10-18 g) range, enabling detection of a few molecules of cancer biomarkers based on the shift in resonance frequency. Such biomarker detection can help in the early stage detection of cancer and also aid in monitoring the treatment procedure in a more advanced stage. Optical transduction is one of the methods to measure the resonance frequency of the cantilever. However, there is a dependence of measured resonance frequency on the polarization of light and the laser power coupled as thermal energy into the cantilever during the measurement. This thesis presents a numerical model of the nanocantilever and shows the variation in resonance frequency and amplitude due to varied amounts of energy absorption by the NW from the laser during resonance measurements. This thesis answers questions on the effects of laser heating by calculating the temperature distribution in the NW, which changes the Young’s modulus and stiffness, causing a resonance downshift. It also shows the variation of resonance amplitude, affecting signal strength in measurements, by considering the effects of structural damping. In this work, a numerical model of the nanowire was analyzed to determine the temperature rise of the NW due to laser heating. The maximum temperature was calculated to be about 500 K with 1 mW of laser power absorbed in Silicon NWs and it is shown that the nanowire tip would reach its melting point for about 2.6 mW of laser power absorbed by it. The resonance shift due to attained temperature of the NW was calculated. The frequency is predicted to decrease by 24 kHz for a 11.6 MHz resonator, when 2mW of laser power is absorbed. However, the frequency shift is mode-dependent and is larger for higher modes. The variation in vibration amplitude around the resonance peaks is calculated based on the effects of structural damping. This can be used to decide on the suspension height of the NW above the substrate, before fabrication. This calculation also provides a method to study the variation in material damping due to temperature. Finally, a semi-analytical method for calculating the frequency of a cantilever beam with varying Young’s modulus is derived to examine the validity of the results calculated above. An effective Young’s modulus value for the laser heated NW is given, which serves as a correction factor for the resonance shift. The derivation is then extended to calculate the resonance shift with an addition of a mass to the beam of varying Young’s modulus. / Graduate / 2019-12-13

abstract: Near-field thermal radiation occurs when the distance between two surfaces at different temperatures is less than the characteristic wavelength of thermal radiation. While theoretical studies predict that the near-field radiative heat transfer could exceed Planck’s blackbody limit in the far-field by orders of magnitudes depending on the materials and gap distance, experimental measurement of super-Planckian near-field radiative heat flux is extremely challenging in particular at sub-100-nm vacuum gaps and few has been demonstrated. The objective of this thesis is to develop a novel thermal metrology based on AFM bi-material cantilever and experimentally measure near-field thermal radiation. The experiment setup is completed and validated by measuring the near-field radiative heat transfer between a silica microsphere and a silica substrate and comparing with theoretical calculations. The bi-material AFM cantilever made of SiNi and Au bends with temperature changes, whose deflection is monitored by the position-sensitive diode. After careful calibration, the bi-material cantilever works as a thermal sensor, from which the near-field radiative conductance and tip temperature can be deduced when the silica substrate approaches the silica sphere attached to the cantilever by a piezo stage with a resolution of 1 nm from a few micrometers away till physical contact. The developed novel near-field thermal metrology will be used to measure the near-field radiative heat transfer between the silica microsphere and planar SiC surface as well as nanostructured SiC metasurface. This research aims to enhance the fundamental understandings of radiative heat transfer in the near-field which could lead to advances in microelectronics, optical data storage and thermal systems for energy conversion and thermal management. / Dissertation/Thesis / Masters Thesis Mechanical Engineering 2019

No description available.

The batteries used to power wireless sensor nodes have become a major roadblock for the wide deployment. Harvesting energy from mechanical vibrations using piezoelectric cantilevers provides possible means to recharge the batteries or eliminate them. Raw power harvested from ambient sources should be conditioned and regulated to a desired voltage level before its application to electronic devices. The efficiency and self-powered operation of a power conditioning and management circuit is a key design issue. In this research, we investigate the characteristics of piezoelectric cantilevers and requirements of power conditioning and management circuits. A two-stage conditioning circuit with a rectifier and a DC-DC converter is proposed to match the source impedance dynamically. Several low-power design methods are proposed to reduce power consumption of the circuit including: (i) use of a discontinuous conduction mode (DCM) flyback converter, (ii) constant on-time modulation, and (iii) control of the clock frequency of a microcontroller unit (MCU). The DCM flyback converter behaves as a lossless resistor to match the source impedance for maximum power point tracking (MPPT). The constant on-time modulation lowers the clock frequency of the MCU by more than an order of magnitude, which reduces dynamic power dissipation of the MCU. MPPT is executed by the MCU at intermittent time interval to save power. Experimental results indicate that the proposed system harvests up to 8.4 mW of power under 0.5-g base acceleration using four parallel piezoelectric cantilevers and achieves 72 percent power efficiency. Sources of power losses in the system are analyzed. The diode and the controller (specifically the MCU) are the two major sources for the power loss. In order to further improve the power efficiency, the power conditioning circuit is implemented in a monolithic IC using 0.18-μ­m CMOS process. Synchronous rectifiers instead of diodes are used to reduce the conduction loss. A mixed-signal control circuit is adopted to replace the MCU to realize the MPPT function. Simulation and experimental results verify the DCM operation of the power stage and function of the MPPT circuit. The power consumption of the mixed-signal control circuit is reduced to 16 percent of that of the MCU. / Ph. D.

Small cantilevers with ultra-high resonant frequencies (1–3 MHz) have paved the way for high-speed atomic force microscopy. However, their potential for multi-frequency atomic force microscopy is unexplored. Because small cantilevers have small spring constants but large resonant frequencies, they are well-suited for the characterisation of delicate specimens with high imaging rates. We demonstrate their imaging capabilities in a bimodal frequency modulation mode in constant excitation on semi-crystalline polypropylene. The first two flexural modes of the cantilever were simultaneously excited. The detected frequency shift of the first eigenmode was held constant for topographical feedback, whereas the second eigenmode frequency shift was used to map the local properties of the specimen. High-resolution images were acquired depicting crystalline lamellae of approximately 12 nm in width. Additionally, dynamic force curves revealed that the contrast originated from different interaction forces between the tip and the distinct polymer regions. The technique uses gentle forces during scanning and quantified the elastic moduli Eam = 300 MPa and Ecr = 600 MPa on amorphous and crystalline regions, respectively. Thus, multimode measurements with small cantilevers allow one to map material properties on the nanoscale at high resolutions and increase the force sensitivity compared with standard cantilevers. / Dieser Beitrag ist aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.

Cette thèse présente trois méthodes pour l’identification des rigidités des structures d’usage commun dans l’ingénierie civile, à partir de données dynamiques expérimentales. La première méthode est développée pour des structures composées pour portiques. La deuxième méthode proposée est appliquée à des structures constituées pour des poutres isostatiques. La troisième est une méthodologie d’estimation des rigidités en flexion (EI) et au cisaillement (GA/?) pour une structure constituée de murs dont les énergies de déformation en flexion et cisaillement peuvent être soit du même ordre de grandeur, soit l’une prépondérante par rapport à l’autre. Pour chaque méthode, des simulations numériques sont effectuées pour identifier les dommages structuraux ou les variations des rigidités, en termes de localisation et de magnitude de ces dommages. L'incidence et l'impact des erreurs et bruits sur les valeurs estimées des rigidités structurales sont analysés. Les méthodologies sont également appliquées pour localiser des dommages mécaniques ou des réductions de section sur modèles de laboratoire. A partir des concepts dynamiques de base et considérant une typologie donnée de structure, la thèse développe les concepts et formulations permettant d’identifier les rigidités résiduelles des structures considérées. Les méthodes peuvent être aisément mises en oeuvre pour déterminer les éventuels dommages (localisation et intensité) qui peuvent affecter une structure, par exemple après un séisme. Peu de mesures sont requises à cet effet : des essais de vibration libre et du matériel peu onéreux de mesures sont amplement suffisants dans le cas particulier des structures étudiées / This thesis presents three methods to estimate and locate damage in framed buildings, simply-supported beams and cantilever structures, based on experimental measurements of their fundamental vibration modes. Numerical simulations and experimental essays were performed to study the effectiveness of each method. A numerical simulation of a multi-storey framed building, a real bridge and a real chimney were carried out to study the effectiveness of the methodologies in identifying damage. The influence of measurement errors and noise in the modal data was studied in all cases. To validate the experimental effectiveness of the damage estimation methods, static and dynamics tests were performed on a framed model, a simply supported beam, and a cantilever beam in order to determine the linear behavior changes due to the increase of the level of damage. The structural identification algorithms during this thesis were based on the knowledge type of the stiffness matrix or flexibility matrix to reduce the number of modal shapes and required coordinates for the structural assessment. The methods are intended to develop tools to produce a fast response and support for future decision procedures regarding to structures widely used, by excluding experimental information, thereby allowing a cost reduction of extensive and specific testing

Ce travail expérimental et théorique porte sur l'injection tunnel de photoélectrons à partir de GaAs vers des surfaces métalliques et de spin vers des surfaces magnétiques. On y présente la première mise en évidence de la dépendance en spin du courant tunnel vers une surface magnétique. Ce travail comporte deux parties distinctes : 1ere partie : Cette partie est consacrée à l'étude de l'injection de charge et de spin de photoélectrons à partir de microleviers de GaAs (sans pointe) sous pompage optique, vers des surfaces nonmagnétiques d'or et magnétiques de cobalt. La dépendance du courant injecté vers une surface d'or en fonction de la tension appliquée sur le levier et de la distance levier/surface métallique est en accord avec les prédictions d'un modèle original. A l'aide d'une cellule de Pockels, le même montage est utilisé pour moduler la polarisation de spin des électrons tunnel et pour étudier la dépendance en spin du courant tunnel dans des couches de cobalt. Ce travail conduit à la première mise en évidence de la dépendance en spin de l'effet tunnel de photoélectrons vers une couche magnétique. Le retournement de la polarisation de spin des électrons tunnel par rapport à l'aimantation de la couche magnétique induit une variation de 6% du courant tunnel, alors que la valeur maximale observée pour une couche non magnétique est de l'ordre de 0.1%. On observe une diminution de ce signal en fonction de la tension appliquée qui est attribuée à la diminution de la vitesse de recombinaison de surface. Les résultats sont en accord quantitatif avec les prédictions théoriques. 2e partie : Cette partie regroupe deux études distinctes du transport de charge et de spin faisant appel à l'imagerie de luminescence polarisée pour caractériser les propriétés de spin. Cette technique nouvelle d'imagerie a été mise au point dans le cadre de ce travail. La première étude analyse les propriétés de spin de pointes de GaAs qui pourraient être utilisées ultérieurement pour l'imagerie du nanomagnétisme, dans le but de prédire le taux de polarisation de spin des électrons injectés. En utilisant des mesures sur des couches planaires équivalentes et en modélisant la diffusion de charge et de spin dans la pointe, on montre que l'on peut s'attendre à obtenir des polarisations de spin atteignant 40%. Par ailleurs, la microscopie de luminescence polarisée permet d'étudier le transport de charge et de spin dans des couches minces de GaAs, respectivement oxydées et passivées. On montre que la recombinaison de surface joue un rôle crucial pour la diffusion de charge et de spin, car la diminution de la vitesse de recombinaison de surface de 107 cm/s à 103 cm/s induite par la passivation fait passer les longueurs de diffusion de charge et de spin de 21 micron et 1.3 micron respectivement à 1.2 micron and 0.8 micron.

Energy efficiency is a vital key component when designing and miniaturizing self sustained microsystems. The smaller the system, the smaller is the possibility to store enough stored energy for a long and continuous operational time. To move such a system in an energy efficient way, a piezoelectrical locomotion module consisting of four resonating cantilevers has been designed, manufactured and evaluated in this work. The combination of a suitable substrate, a multilayered piezoelectric material to reduce the voltage, and a resonating drive mechanism resulted in a low power demand. A manufacturing process for multilayer cantilever actuators made of P(VDF-TrFE) with aluminum electrodes on a substrate of flexible printed circuit board (FPC), has been developed. An important step in this process was the development of an etch recipe for dry etching the multilayer actuators in an inductive plasma equipment. Formulas for the quasi static tip deflection and resonance frequency of a multilayered cantilever, have been derived. Through theses, it was found that the multilayered structures should be deposited on the polymer side of the FPC in order to maximize the tip deflection. Both a large and a miniaturized locomotion module were manufactured and connected by wires to verify that the three legged motion principal worked to move the structures forward and backward, and turn it right and left. By touching and adding load, to a fourth miniaturized cantilever, its ability to act as a contact sensor and carry object was verified. The presented locomotion module is part of a multifunctional microsystem, intended to be energy efficient and powered by a solar panel with a total volume of less than 25 mm3 and weight 65 mg. The whole system, consisting of a solar cell, an infra red communication module, an integrated circuit for control, three capacitors for power regulating, the locomotion module and an FPC connecting the different modules, was surface mounted using a state of the art industrial facility. Two fully assembled systems could be programmed both through a test connector and through optical sensors in the multifunctional solar cell. One of these was folded together to the final configuration of a robot. However, the entire system could not be tested under full autonomous operating conditions. On the other hand, using wires, the locomotion module could be operated and used to move the entire system from a peak-to-peak voltage of 3.0 V.

This thesis presents three methods to estimate and locate damage in framed buildings, simply-supported beams and cantilever structures, based on experimental measurements of their fundamental vibration modes. Numerical simulations and experimental essays were performed to study the effectiveness of each method. A numerical simulation of a multi-storey framed building, a real bridge and a real chimney were carried out to study the effectiveness of the methodologies in identifying damage. The influence of measurement errors and noise in the modal data was studied in all cases. To validate the experimental effectiveness of the damage estimation methods, static and dynamics tests were performed on a framed model, a simply supported beam, and a cantilever beam in order to determine the linear behavior changes due to the increase of the level of damage. The structural identification algorithms during this thesis were based on the knowledge type of the stiffness matrix or flexibility matrix to reduce the number of modal shapes and required coordinates for the structural assessment. The methods are intended to develop tools to produce a fast response and support for future decision procedures regarding to structures widely used, by excluding experimental information, thereby allowing a cost reduction of extensive and specific testing