京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18588号 / 工博第3949号 / 新制||工||1607(附属図書館) / 31488 / 京都大学大学院工学研究科マイクロエンジニアリング専攻 / (主査)教授 田畑 修, 教授 西脇 眞二, 准教授 土屋 智由, 教授 引原 隆士 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

This dissertation presents theoretical and experimental investigations into the dynamical behavior of Micro electromechanical systems (MEMS) resonators and their exploitation for filtering, sensing, and logic applications. The dissertation is divided into two parts: MEMS coupled structures and MEMS dynamic logic devices. First, a theoretical and experimental investigation is presented on both electrostatically and mechanically coupled resonator. Static and dynamic analysis is presented for weakly electrostatically coupled silicon microbeams and also for strongly mechanically coupled polyimide microbeams. The static analysis focuses on revealing pull-in characteristics, while the dynamic analysis focuses on the frequency response of the system and its exploitation for potential applications in filtering and amplification. Next, the phenomenon of mode localization is explored theoretically and experimentally on both electrostatically and mechanically weakly coupled resonators. Eigenvalue analysis is conducted and the dynamic response of the coupled system under different external perturbations is investigated. It is observed, that the exploitation of mode localization depends on the choice of the resonator to be under direct excitation, its stiffness to be perturbed, and which resonator is used to record the output results. These understandings will potentially help improve the performance of MEMS mode-localized sensors. Finally, three techniques to realize cascadable MEMS logic devices are presented. MEMS logic device vibrates at two steady states; a high on-resonance state (1) and a low off-resonance state (0). First, a MEMS logic device is presented capable of performing the AND/NAND logic gate and a tri-state logic gate using mixed-frequency excitation. This work is based on the concept of activation (1) and deactivation (0) of combination resonances due to the mixing of two or more input signals. Second, exploitation of subharmonic resonance under an AC only excitation to perform AND logic operation is presented. Finally, another MEMS logic device is presented working on the principal of activation (1) and deactivation (0) of second resonant mode of a clamped-clamped microbeam. This device is capable of performing OR, XOR and NOT gate. Experimental demonstration of the cascadability is shown for this case cascading OR and NOT gate to perform a logically complete NOR logic gate.

Kyoto University (京都大学) / 0048 / 新制・課程博士 / 博士(工学) / 甲第18990号 / 工博第4032号 / 新制||工||1621 / 31941 / 京都大学大学院工学研究科電気工学専攻 / (主査)教授 引原 隆士, 教授 北野 正雄, 准教授 山田 啓文 / 学位規則第4条第1項該当

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18990号 / 工博第4032号 / 新制||工||1621(附属図書館) / 31941 / 京都大学大学院工学研究科電気工学専攻 / (主査)教授 引原 隆士, 教授 北野 正雄, 准教授 山田 啓文 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

Optical traveling-wave resonator architectures have shown promise for the realization of many compact photonic functionalities in different research disciplines. Realizing these resonator structures in high-index contrast silicon enables dense and large scale integration of large arrays of functionalized resonators in a CMOS-compatible technology platform. Based on these motivations, the main focus of this Ph.D. research has been on the device physics, modeling, implementations, and applications of planar ultra-high Q silicon traveling-wave microresonators in a silicon-on-insulator (SOI) platform. Microdisk, microring, and racetrack resonators are the three general traveling-wave resonator architectures of interests that I have investigated in this thesis, with greater emphasis on microdisks. I have developed efficient tools for the accurate modeling of these resonators. The coupling to these resonators has been through a nano-waveguide side coupled to them. For this purpose, I have developed a systematic method for engineering a waveguide-resonator structure for optimum coupling. I have addressed the development of nanofabrication techniques for these resonators with efficient interaction with a nano-waveguide and fully compatible with active electronic integration. The outcome of the theoretical design, fabrication, and characterization of these resonators is a world-record ultra-high Q (3×10[superscript 6]) with optimum waveguide-resonator interaction. I have investigated the scaling of these resonators toward the ultimate miniaturization and its impact on different physical properties of the resonators. As a result of these investigations, I have demonstrated miniaturized Si microdisk resonators with radii of ~ 1.5 micron and Q > 10⁵ with single-mode operation over the entire large free-spectral range. This is the highest Q (~ one order more than that in previously reported data) that has been obtained for a Si microdisk resonator with this size on a SiO₂ substrate. I have employed these resonators for more advanced functionalities such as large-scale integration of resonators for spectroscopic and filtering applications, as well as the design of flat-band coupled-resonator filter structures. By proposing a systematic method of design, I have shown ultra-compact coupled-resonator filters with bandwidths ranging from 0.4 to 1 nm. I have theoretically and experimentally investigated the performance of ultra-high Q resonators at high powers and in the presence of nonlinearities. At high powers, the presence of two-photon absorption, free-carrier generation, and thermo-optic properties of silicon results in a rich dynamic in the response of the resonator. In both theory and experiment, I have predicted and demonstrated self-sustained GHz oscillation on the amplitude of an ultra-high Q resonator pumped with a continuous-wave laser.

This thesis deals with the development and investigation of composite-cavity (CC) organic microresonators comprising a vertical cavity (VC) and a distributed feedback structure (DFB). Prepared as separate devices, these two resonators are extensively investigated and characterized by their far-field radiation patterns, emission spectra, and dispersion characteristics. Although the vertical and lateral systems are based on entirely different concepts leading to distinct symmetries, confinement mechanisms, and processes of optical feedback, devices produced with the same set of materials show comparable lasing thresholds. The different angular dispersions of cavity and waveguide (WG) resonances are employed in a laterally structured vertical-cavity surface-emitting laser (VCSEL), where a periodic grating serves as a diffractive coupler between these two regimes. A coherent interaction of the vertical and horizontal system is observed as pronounced anticrossings of parabolic and linear dispersion curves in the far-field spectra. As a result from this coherent coupling, the hybridized WG-VCSEL modes show stimulated emission in far-field regions, where the individual photonic structures would not reach the lasing threshold in a decoupled scenario. Efficient optical feedback in surface-normal and in-plane direction is achieved by combining a VC and a second-order DFB structure in a continuous tunable CC microresonator. The optical coupling is due to a first-order light diffraction on a second-order Bragg grating and, in the degenerate case, can be as efficient as the coupling observed in more classical cascade coupled cavities. When the system is non-degenerate, the diffraction efficiency is suppressed because of sub-coherence-length dimensions of the composite-cavity and both resonators tend to operate as independent structures, without experiencing substantial losses due to diffraction on the distributed-feedback grating. Dispersion characteristics of multiple resonances are recorded and related to calculated modes, their field profiles, and coupling efficiencies. In combination with the analysis of input-output measurements, the lasing characteristics of vertical and lateral resonances are controlled by adjusting specific design parameters of the system. For identical resonance energies, the distinct resonators show coherent interaction in the cross-coupled configuration, if the quality of the resonances and the cross-coupling efficiency meet the condition of strong photon-photon interaction. This resonant coupling has a fundamental impact on dispersion and lasing characteristics of the system. / Die vorliegende Arbeit beschäftigt sich mit der Entwicklung und Untersuchung von organischen Mikroresonatoren, die eine Kompositkavität aus einem Oberflächenemitter und einem Resonator mit verteilter Rückkopplung (DFB) beinhalten. Diese beiden Resonatortypen werden zunächst als separate Strukturen hergestellt, untersucht und über deren Intensitätsverteilungen im Fernfeld, Emissionsspektren und Dispersionseigenschaften charakterisiert. Die vertikalen und lateralen Strukturen basieren auf unterschiedlichen Konzepten, die zu völlig verschiedenartigen Symmetrien, Mechanismen des elektromagnetischen Einschlusses und Arten der optischen Rückkopplung führen. Nichtsdestotrotz weisen diese Resonatoren, die mit dem gleichen Materialsatz hergestellt wurden, ähnliche Laserschwellen auf. Die unterschiedliche winkelabhängige Dispersion von Vertikal- und Wellenleitermoden werden in einem lateral strukturierten Oberflächenemitter (VCSEL) ausgenutzt. In dieser Struktur dient eine periodisches Gitter als Kopplungselement zwischen diesen beiden Bereichen. Eine kohärente Wechselwirkung zwischen vertikalem und horizontalem System zeigt sich durch das Auftreten von ausgeprägten Antikreuzungspunkten parabolischer und gerader Dispersionskurven in den winkelaufgelösten Emissionsspektren. Die Folge dieser kohärenten Kopplung ist das Entstehen von Lasermoden in Bereichen des Fernfelds, wo die einzelnen Resonatoren im entkoppelten Zustand die Laserschwelle nicht erreichen würden. Eine wirksame optische Rückkopplung sowohl in Richtung der Oberflächennormalen als auch in lateraler Richtung wird durch die Kombination einer VCSEL und einer DFB-Struktur zweiter Ordnung in einem kontinuierlich durchstimmbaren Kompositresonator erreicht. Die optische Kopplung wird durch Beugung erster Ordnung am Bragg-Gitter zweiter Ordnung realisiert. Im entarteten Fall werden Kopplungseffizienzen beobachtet, die vergleichbar mit denen klassisch kaskadengekoppelter Mikrokavitäten sind. Für verschiedene Energieeigenwerte der zwei Resonatorkomponenten führt die im Vergleich zur Kohärenzlänge geringe Ausdehnung der Kompositkavität zu einer nahezu unabhängigen Tätigkeit der beiden Resonatoren mit nur geringen Verlusten durch Beugung an der periodischen Struktur. Die Dispersionseigenschaften von mehreren Resonanzen werden gemessen und berechneten Moden, deren Feldverteilungen und Kopplungseffizienzen zugeordnet. In Verbindung mit der Analyse der Intensitäten der Lasermoden in Abhängigkeit der Pumpleistung werden die Laserschwellen durch die Anpassung spezifischer Designparameter kontrolliert. Für identische Resonanzenergien weisen die unterschiedlichen Resonatoren eine kohärente Wechselwirkung auf, falls die Qualität der Moden und die Beugungseffizienz die Bedingung für starke Photon-Photon-Kopplung erfüllen. Diese resonante Kopplung zeigt einen fundamentalen Einfluss auf die Dispersions- und Lasereigenschaften im Kompositsystem.

The thesis deals with the microstrip filter design using defected ground structure (DGS). The difference between standard asymmetric microstrip technique and DGS is in using the structures etched in the microwave substrate ground plane. The DGS resonant characteristics are then used in filter design. The thesis consists of three factual parts. The first one (chapter 4) introduces the use of the DGS resonators in the lowpass filter design. It involves experimental analysis of one type of the lowpass filter. The second part (chapter 5) deals with a novel microstrip lowpass filter design method using DGS. The proposed method is verified by simulations and several samples are realized and measured. Finally, the third part (chapters 7 and 8) deals with the bandpass filter design using specific defected ground structure as a resonator. The resonators are used in a coupled resonator structure. Filters of various orders and resonator configurations are designed and simulated. A combination of the DGS resonators and half-wavelength microstrip resonators is introduced as well. Selected samples are realized and measurement results are compared with simulations.