A method is suggested for simulation of transient sample vapor composition and release rate during vaporization of analytes in electrothermal (ET) atomizers for AAS. The approach is based on the Langmuir theory of evaporation of metals in the presence of a gas at atmospheric pressure, which advocates formation of mass equilibrium in the boundary layer next to the evaporation surface. It is suggested in this work that in ET atomizers the release of atoms and molecules from the boundary layer next to the dry residue of the analyte is accompanied by spreading of the layer around the sample droplets or crystals. Thus, eventually, the vapor source forms an effective area associated with a monolayer of the analyte. In particular, for the case of a metal oxide analyte as discussed in the work, the boundary layer contains the species present in thermodynamic equilibrium with oxide, which are metal atoms and dimers, oxide molecules and oxygen. Because of an excess of Ar, the probability of mass and energy exchange between the evolved gaseous species is low, this substantiates independent mass transport of each type of species from the boundary layer and through absorption volume. Diffusion, capture by Ar flow and gas thermal expansion is considered to control vapor transport and release rate. Each specific flow is affected by secondary processes occurring in collisions of the evolved molecules and atoms with the walls of graphite tube. Diffusion of oxygen containing species out of the boundary layer is facilitated by annihilation of oxygen and reduction of oxide on the graphite surface, while interaction of metal vapor with graphite slows down transport of atomic vapor out of the atomizer. These assumptions are used as the basis for the presentation of the problem as a system of first order differential equations describing mass and temperature balance in the atomizer. Numerical solution of the system of equations provides the simulation of temporal composition of the sample constituents in condensed and gas phase in the atomizer according to chemical properties of the analyte and experimental conditions. The suggested approach avoids the description of atomization processes via kinetic parameters such as activation energy, frequency factor, surface coverage or reaction order.

Graphite filter atomizers (GFA) for electrothermal atomic absorption spectrometry (ETAAS) show substantial advantages over commonly employed electrothermal vaporizers and atomizers, tube and platform furnaces, for direct determination of high and medium volatility elements in matrices associated with strong spectral and chemical interferences. Two factors provide lower limits of detection and shorter determination cycles with the GFA: the vaporization area in the GFA is separated from the absorption volume by a porous graphite partition; the sample is distributed over a large surface of a collector in the vaporization area. These factors convert the GFA into an efficient chemical reactor. The research concerning the GFA concept, technique and analytical methodology, carried out mainly in the author's laboratory in Russia and South Africa, is reviewed. Examples of analytical applications of the GFA in AAS for analysis of organic liquids and slurries, bio-samples and food products are given. Future prospects for the GFA are discussed in connection with analyses by fast multi-element AAS.

Electrothermal (ET) Plasma Technology has been used for many decades in a wide variety of scientific and industrial applications. Due to its numerous applications and configurations, ET plasma sources can be used in everything from small scale space propulsion thrusters to large scale material deposition systems for use in a manufacturing setting. The sheer number of different types of ET sources means that there is always additional scientific research and characterization studies that can be done to either explore new concepts or improve existing designs. The focus of this work is to explore a novel electrothermal energetic plasma source (ETEPS) that uses energetic gas as the working fluid in order to harness the combustion and ionization energy of the subsequently formed energetic plasma. The goal of the work is to use computer code and engineering methods in order to successfully characterize the capabilities of the ETEPS concept and to then design a prototype which will be used for further study. This thesis details the background of ET plasma physics, the ETEPS concept physics, and the computational and design work done in order to demonstrate the feasibility of using the ETEPS source in two roles: space thrusters and electrothermal plasma guns. / Master of Science

abstract: A model of self-heating is incorporated into a Cellular Monte Carlo (CMC) particle-based device simulator through the solution of an energy balance equation (EBE) for phonons. The EBE self-consistently couples charge and heat transport in the simulation through a novel approach to computing the heat generation rate in the device under study. First, the moments of the Boltzmann Transport equation (BTE) are discussed, and subsequently the EBE of for phonons is derived. Subsequently, several tests are performed to verify the applicability and accuracy of a nonlinear iterative method for the solution of the EBE in the presence of convective boundary conditions, as compared to a finite element analysis solver as well as using the Kirchhoff transformation. The coupled electrothermal characterization of a GaN/AlGaN high electron mobility transistor (HEMT) is then performed, and the effects of non-ideal interfaces and boundary conditions are studied. The proposed thermal model is then applied to a novel $\Pi$-gate architecture which has been suggested to reduce hot electron generation in the device, compared to the conventional T-gate. Additionally, small signal ac simulations are performed for the determination of cutoff frequencies using the thermal model as well. Finally, further extensions of the CMC algorithm used in this work are discussed, including 1) higher-order moments of the phonon BTE, 2) coupling to phonon Monte Carlo simulations, and 3) application to other large-bandgap, and therefore high-power, materials such as diamond. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2020

A two-dimensional, time-dependent model and code have been developed to model electrothermal (ET) plasma discharges. ET plasma discharges are capillary discharges that draw tens of kA of electric current. The current heats the plasma, and the plasma radiates energy to the capillary walls. The capillary walls ablate by melting and vaporizing and by sublimation. The newly developed model and code is called the Three-fluid, 2D Electrothermal Plasma Flow Simulator (THOR). THOR simulates the electron, ion, and neutral species as separate fluids coupled through interaction terms. The two-dimensional modeling capabilities made available in this new code represent a tool for the exploration and analysis of the physics involved in ET plasma discharges that has never before been available. Previous simulation models of ET plasma discharges have relied primarily on a 1D description of the plasma. These models have often had to include a tunable correction factor to account for the vapor shield layer - a layer of cold ablated vapor separating the plasma core from the ablating surface and limiting the radiation heat flux to the capillary wall. Some studies have incorporated a 2D description of the plasma boundary layer and shown that the effects of a vapor shield layer can be modeled using this 2D description. However, these 2D modeling abilities have not been extended to the simulation of pulsed ET plasma discharges. The development of a fully-2D and time-dependent simulation model of an entire ET plasma source has enabled the investigation of the 2D development of the vapor shield layer and direct comparison with experiments. In addition, this model has provided novel insight into the inherently 2D nature of the internal flow characteristics involved within the plasma channel in an ET plasma discharge. The model is also able to capture the effects of inter-species interactions. This work focuses on the development of the THOR model. The model has been implemented using C++ and takes advantage of modern supercomputing resources. The THOR model couples the 2D hydrodynamics and the interactions of the plasma species through joule heating, ionization, recombination, and elastic collisions. The analysis of simulation results focuses on emergent internal flow characteristics, direct simulation of the vapor shield layer, and the investigation of source geometry effects on simulated plasma parameters. The effect of elastic collisions between electrons and heavy species are shown to affect internal flow characteristics and cause the development of back-flow inside the ET plasma source. The development of the vapor shield layer has been captured using the diffusion approximation for radiation heat transfer within the ET plasma source with simulated results matching experimental measurements. The relationship between source radius and peak current density inside ET plasma discharges has also been explored, and the transition away from the ablation-controlled operation of ET plasma discharges has been observed. / Ph. D.

AC electrothermal flow (ACEF) is the fluid motion created as a result of Joule heating induced temperature gradients. ACEF is capable of performing major microfluidic operations, such as pumping, mixing, concentration, separation and assay enhancement, and is effective in biological samples with a wide range of electrical conductivity. Here, we report long-range fluid motion induced by ACEF, which creates centimeter-scale vortices. The long-range fluid motion displays a strong voltage dependence and is suppressed in microchannels with a characteristic length below similar to 300 mu m. An extended computational model of ACEF, which considers the effects of the density gradient and temperature-dependent parameters, is developed and compared experimentally by particle image velocimetry. The model captures the essence of ACEF in a wide range of channel dimensions and operating conditions. The combined experimental and computational study reveals the essential roles of buoyancy, temperature rise, and associated changes in material properties in the formation of the long-range fluid motion. Our results provide critical information for the design and modeling of ACEF based microfluidic systems toward various bioanalytical applications. (C) 2016 Elsevier Ltd. All rights reserved.

The objective of this thesis is to present a theoretical and experimental investigation of the dynamics of micro and nano-electromechanical systems electrothermally tuned and electrostatically actuated, and explore their potential for practical applications. The first part of the dissertation presents the tuning of the frequency of clamped-clamped micro and nano-resonators, straight and curved. These resonators are electrothermally or electrostatically tuned. The effect of geometric parameters on the frequency variation is investigated experimentally and theoretically using a reduced order model based on the Euler-Bernoulli beam theory. High tunability is demonstrated for micro and nano beams, straight and initially curved. The second part discusses the dynamical behavior of a curved (arch) beam electrothermally tuned and electrostatically actuated. We show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. We study experimentally and analytic ally, using the Galerkin procedure, the dynamic behavior of the arch beam. Next, upon changing the electrothermal voltage, the second symmetric natural frequency of the arch is adjusted to near twice, three times, and four times the fundamental natural frequency. This gives rise to a potential two-to-one, three-to-one, and four-to-one autoparametric resonances between the two modes. These resonances are demonstrated experimentally and theoretically. The third part of the dissertation is concerned with the incorporation of the electrothermally tuned and electrostatically actuated microresonators into potential applications: filtering and sensing. First, we experimentally prove an exploitation of the nonlinear softening, hardening, and veering phenomena of an arch beam, to demonstrate a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage. Second, a pressure sensor based on the convective cooling of the air surrounding an electrothermally heated resonant bridge is demonstrated experimentally. The concept is demonstrated using both straight and arch microbeam resonators driven and sensed electrostatically. The change in the surrounding pressure is shown to be accurately tracked by monitoring the change in the resonance frequency of the structure.

AC Electrokinetics (ACEK) has attracted much research interest for microfluidic manipulation for the last few years. It shows great potential for functions such as micropumping, mixing and concentrating particles. Most of current ACEK research focuses on AC electroosmosis (ACEO), which is limited to solutions with conductivity less than 0.02 S/m, excluding most biofluidic applications. To solve for this problem, this dissertation seeks to apply AC electrothermal (ACET) effect to manipulate conductive fluids and particles within, and it is among the first demonstration of ACET devices, a particle trap and an ACET micropump. The experiments used fluids at a conductivity of 0.224 S/m that is common in bio-applications. Pumping and trapping were demonstrated at low voltages, reaching ~100 um/s for no more than 8 Vrms at 200 kHz. The flow velocity was measured to follow a quadratic relationship with applied voltage which is in accordance with theory. This research also studies ACET effect on low ionic strength microfluidics, since Joule heating is ubiquitous in electrokinetic devices. One contribution is that our study suggested ACET as one possible reason of flow reversal, which has intrigued the researchers in ACEK field. Electrically, a microfluidic cell can be viewed as an impedance network of capacitances and resistors. Heat dissipation in those elements varies with AC frequency and fluid properties, so changes the relative importance of heat generation at the electrode/electrolyte interface and in the resistive fluid bulk, which could change the temperature gradient in the device, hence changing the flow direction. Another contribution of this dissertation is the reaction enhanced ACET micropumping. A dramatic improvement in flow rate over conventional ac micropumps is achieved by introducing a thin fluid layer of high ionic density near the electrodes. Such an ionic layer is produced by superimposing a DC offset on AC signal that induces Faradaic reaction. The velocity improvement, in some cases, is over an order of magnitude, reaching a linear velocity of up to 2.5 mm/s with only 5.4Vrms. This discovery presents an exciting opportunity of utilizing ACET effect in microfluidic applications.

Understanding the magnitude of the temperature in AlGaN/GaN heterostructure fi eld e ffect transistors(HFETs) is a critical aspect of understanding their reliability and providing proper thermal management. At present, most models used to determine the temperature rise in these devices are based on continuum based heat conduction. However, in such devices, the heat generation region can be on the order of or smaller than the phonon mean free path of the heat carriers, and thus, such models may under predict the temperature. The aim of this work is towards building a multiscale thermal model that will allow for the prediction of heat transport from ballistic-diffusive phonon transport near the heat generation region and diffusive transport outside of this zone. First, a study was performed to determine the appropriate numerical solution to the phonon Boltzmann transport equation followed by its integration into a multiscale thermal scheme. The model, which utilizes a Discrete Ordinates Solver, was developed for both gray and non-gray phonon transport. The scheme was applied to the solution of speci fic test problems and then finally to the electrothermal modeling of AlGaN/GaN HFETs under various electrical bias conditions.

Scanning probe microscopy (SPM) tip-based nanofabrication (TBN) is a technique that directly creates a variety of nanostructures on a substrate using the nanoscale probe tips. SPM TBN possesses superior resolution and flexibility: nanostructures with feature size under 5 nm have been achieved via SPM TBN, which is beyond what the state-of-the art optical-based lithography technique can provide. However, the inherent serial nature of SPM TBN makes it a low throughput process. Multi-probe SPM systems have therefore been developed to increase the nanofabrication efficiency. Atomic force microscopy (AFM) and scanning tunneling microscopy (STM) are two most commonly used SPM TBN techniques. Most of prior work has focused on contact-mode AFM-based TBN. This work, using CMOS MEMS technology as the design and fabrication platform, develops an active conductive probe array that aims to perform parallel surface imaging and nanofabrication in non-contact STM mode. The CMOS-MEMS process provides a monolithic integration of MEMS devices with CMOS electronics that can facilitate future automation and parallel probe operation. The CMOS-MEMS probe adopts a micro-cantilever structure and applies bimorph electrothermal actuation to control the vertical displacement of the probe tips. The cantilever is designed to be stiff, with a spring constant of 36 N/m that is larger than the force gradient of the cantilever tip-sample interaction forces in the working distance regime of STM in order to avoid the tip-to-sample “snap-in” and ensure the stability of the STM feedback system. A modified Spindt tip process, compatible with post-CMOS MEMS processing, is developed to batch fabricate Ni/Pt composite tips on CMOS-MEMS probe arrays that are used as STM end-effectors. The integrated Ni/Pt tips on the MEMS probes have a tip radius down to 50 vii nm. The Spindt tip demonstrates the capability of both imaging and nanowire fabrication in STM mode. A hierarchical dual-servo STM system is constructed for the parallel STM imaging using two CMOS-MEMS probes. The system consists of a piezoelectric actuator-driven servo and an electrothermal actuator-driven servo to control the vertical displacement of two probe tips and maintain a constant current between the tips and the sample. Both servos use a proportionalintegral controller. The dual-servo STM system is capable of parallel STM image acquisition using CMOS MEMS probe arrays. An on-chip electrothermal proximity sensor pair and probes with embedded microgoniometers are designed to assist the alignment between the CMOS-MEMS probe array and the examined sample surface. The electrothermal proximity sensor pair is used to measure the separation and the non-parallelism between the probe chip and the sample. The electrothermal proximity sensor has a positioning accuracy of around 1 μm. An electrothermal microgoniometer platform is developed to hold a one-dimensional array of active CMOS-MEMS probes and serves to provide the in situ fine adjustment of relative height among these probes. The micro-goniometer has a maximum tilt of 1.2°, which is sufficient to compensate the probe chip-sample misalignment and the possible height difference among array probes introduced by process variations.