Scanning probe microscopy (SPM) tip-based nanofabrication (TBN) is a technique that directly creates a variety of nanostructures on a substrate using the nanoscale probe tips. SPM TBN possesses superior resolution and flexibility: nanostructures with feature size under 5 nm have been achieved via SPM TBN, which is beyond what the state-of-the art optical-based lithography technique can provide. However, the inherent serial nature of SPM TBN makes it a low throughput process. Multi-probe SPM systems have therefore been developed to increase the nanofabrication efficiency. Atomic force microscopy (AFM) and scanning tunneling microscopy (STM) are two most commonly used SPM TBN techniques. Most of prior work has focused on contact-mode AFM-based TBN. This work, using CMOS MEMS technology as the design and fabrication platform, develops an active conductive probe array that aims to perform parallel surface imaging and nanofabrication in non-contact STM mode. The CMOS-MEMS process provides a monolithic integration of MEMS devices with CMOS electronics that can facilitate future automation and parallel probe operation. The CMOS-MEMS probe adopts a micro-cantilever structure and applies bimorph electrothermal actuation to control the vertical displacement of the probe tips. The cantilever is designed to be stiff, with a spring constant of 36 N/m that is larger than the force gradient of the cantilever tip-sample interaction forces in the working distance regime of STM in order to avoid the tip-to-sample “snap-in” and ensure the stability of the STM feedback system. A modified Spindt tip process, compatible with post-CMOS MEMS processing, is developed to batch fabricate Ni/Pt composite tips on CMOS-MEMS probe arrays that are used as STM end-effectors. The integrated Ni/Pt tips on the MEMS probes have a tip radius down to 50 vii nm. The Spindt tip demonstrates the capability of both imaging and nanowire fabrication in STM mode. A hierarchical dual-servo STM system is constructed for the parallel STM imaging using two CMOS-MEMS probes. The system consists of a piezoelectric actuator-driven servo and an electrothermal actuator-driven servo to control the vertical displacement of two probe tips and maintain a constant current between the tips and the sample. Both servos use a proportionalintegral controller. The dual-servo STM system is capable of parallel STM image acquisition using CMOS MEMS probe arrays. An on-chip electrothermal proximity sensor pair and probes with embedded microgoniometers are designed to assist the alignment between the CMOS-MEMS probe array and the examined sample surface. The electrothermal proximity sensor pair is used to measure the separation and the non-parallelism between the probe chip and the sample. The electrothermal proximity sensor has a positioning accuracy of around 1 μm. An electrothermal microgoniometer platform is developed to hold a one-dimensional array of active CMOS-MEMS probes and serves to provide the in situ fine adjustment of relative height among these probes. The micro-goniometer has a maximum tilt of 1.2°, which is sufficient to compensate the probe chip-sample misalignment and the possible height difference among array probes introduced by process variations.

La complexité des microsystèmes, leur multidisciplinarité, l’hétérogénéité des matériaux utilisés et les interfaces avec l’environnement extérieur rendent difficiles l’évaluation et la maîtrise de leur fiabilité indispensables pour l’exploitation des nombreuses possibilités innovantes qu’ils offrent.L’approche que nous avons proposée dans ce travail, afin de prédire la fiabilité des microsystèmes, se fonde sur l’usage intensif de la modélisation et de la simulation, dans les conditions d’usage du microsystème (profil de mission), en associant donc l’évaluation de la fiabilité à la démarche de conception : avant d’entreprendre une modélisation fonctionnelle de type VHDL-AMS, les objectifs de fiabilité sont exprimés explicitement dans le cahier des charges du microsystème, au même titre que les objectifs plus habituels de performances.Afin de supporter nos travaux, nous avons appliqué cette démarche de prédiction de la fiabilité sur deux types de microsystèmes :- des micro-actionneurs électrothermiques. - des commutateurs RF capacitifs à actionnement électrostatique / The complexity of microsystems, their multidisciplinarity, the heterogeneity of materials and interfaces with the external environment makes difficult the assessment and control of reliability, which is indispensable for the exploitation of the several innovative opportunities that they offer. The approach we proposed, in this work, to predict the reliability of microsystems is based on the intensive use of modelling and simulation, in the use and environmental conditions of micro-system (mission profile), thus by combining the reliability evaluation in the design process: before undertaking any type of functional modelling VHDL-AMS, reliability objectives are expressed explicitly in the specification of the micro-system, as well as the most common performance goals.To support our work, we applied this approach for predicting the reliability for two types of microsystems:- Electro-thermal micro-actuators.- Capacitive RF MEMS switches

Experimental vibration analysis of mechanical structures is a well established field.Plenty of literature exists on macro scale structures in the fields of civil, mechanical and aerospace engineering, but the study of vibrations of micro scale structures such as MEMS, liquid droplets, and biological cells is relatively new. For such structures, the amplitudes of vibration are typically in nanometeror sub-nanometer range and the frequencies are in KHz to MHz range depending upon the dimensions of the structure. In our study, we use a scanningLaser Doppler Vibrometer (LDV) to measure the vibrations of micro-scale objects such as MEMS structures, micro droplets and cells. The vibrometercan capture frequency response up to 24 MHz withpicometer displacement resolution. First, we present the study of dynamics of a 2-D micromechanical structure—a MEMSelectrothermal actuator. The structure is realized using SOI MUMPs process from MEMSCAP. The fabricated device is tested for its dynamic performance characteristics using the LDV. In our experiments, we could capture up to 50 out-of-plane modes of vibration—an unprecedented capture—with a single excitation. Subsequent FEM based numerical simulations confirmed that the captured modes were indeed what the experiments indicated, and the measured frequencies werefound to be within 5% of theoretically predicted. Next, we study the dynamics of a 3-D micro droplet and show how the substrate adhesion modulates the natural frequency of the droplet. Adhesion properties of droplets are decided by the degree of wettability that is generally measured by the contact angle between the substrate and the droplet. In this work, we were able to capture 14 modes of vibration of a mercury droplet on different substrates and measure the correspondingfrequencies experimentally. We verify these frequencies with analytical calculations and find that all the measured frequencies are within 6% of theoretically predicted values. We also show that considering any two pairs of natural frequencies, we can calculate the surface tension and the contact angle, thus providing a new method for measuring adhesion of a droplet on an unknown surface. Lastly, we present a study of vibrations of biological cells.Our first study is that of single muscle fibers taken from drosophila.Muscle fibers with different pathological conditions were held in two structural configurations—asa fixed-fixed beam and a cantilever beam—and their vibration signatures analysed.We found that there was significant reduction in natural frequency of diseased fibers. Among the diseased fibers, we could confidently classify the myopathies into nemaline and cardiac types based on the natural frequency of single fibers. We have noticed that the elastic modulus of the muscle which decides the natural frequency is dictated by the myosin expression levels. Our last example isa study of the vibration signatures of cancer cells. Here we measure the natural frequencies of normal and certain cancerous cells, and show that we can distinguish the two based on their natural frequencies. We find that the natural frequency of cancerous cells is approximately half of that of normal cells. Within the cancerous cells, we are able to distinguished epithelial cancer cells and mesenchymal cancer cells based on their natural frequency values. For Epithelial cells,we activate the signaling pathways to induce EMT and notice the reduction in the natural frequency. This mechanical assay based on vibration response corroborates results from the biochemical assays such as Western blots and PCR, thus opening a new technique of mechano-diagnostics.

Un nombre de sujets concernant la microrobotique numérique ont été abordés dans le cadre de cette the` se. Une nouvelle génération du microrobot numérique ”DiMiBot” a e´ te´ proposé ce qui rend le DiMiBot plus précis, plus contrôlable et plus petit. La nouvelle structure est formée de deux modules multistables seulement, ce qui ajoute des fonctionnalités´ s importantes comme l’augmentation du nombre de positions avec une taille plus réduite et la capacité´ de réaliser des trajectoires complexes dans l’espace de travail. Le principe du nouveau module multistable combine les avantages des microactionneurs pas à pas en termes du principe et du concept numérique en termes de la répétabilité et la robustesse en boucle ouverte. Un mécanisme de positionnement précis, capable de compenser les incertitudes de fabrication a e´ te´ développé et utilise´ pour assurer un positionnement précis. En parallèle, des modèles analytiques ont e´ te´ développés pour les principaux composants dans le DiMiBot: poutres flambées préformées et actionneurs e´ électrothermiques en U. Des méthodes de conception ont été développées par la suite qui permettent de choisir les dimensions optimales garantissant les performances requises en respectant les spécifications et limites de design. Des prototypes de modules multistables, fabrique´ s dans la salle Blanche MIMENTO, ont montré´ un bon Fonctionnement dans les expériences. / A number of topics concerning digital microrobotics were addressed in this thesis. A new generation of the digital microrobot ”DiMiBot” was proposed with several advantages making the DiMiBot more accurate, more controllable and smaller. The new structure consists of only two multistable modules which adds some important features such as increasing the number of positions with smaller size and the ability to realize complex trajectories in the workspace. The principle of the new multistable module combines the advantages of the stepping microactuators in terms of the principle and of the digital concept in terms of the repeatability and robustness without feedback. The accuracy is ensured with an accurate positioning mechanism that compensate the fabrication tolerances. In parallel, analytical models was developed for the main components in the DiMiBot: preshaped curved beams and U-shaped electrothermal actuators. Subsequently, design methods were developed that allow choosing the optimal dimensions that ensure the desired outputs and respecting the design specifications and limitations. Multistable module prototypes, fabricated in the clean room MIMENTO, showed a proper functioning in the experiments.