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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
111

Creation of a Finite Element Model andSystem Analysis for the Low and HighFrequency Cryogenic Telescopes of theSpace Mission LiteBIRD

Rittatore Texeira, Matias January 2022 (has links)
The Lite (Light) satellite for the study of B-mode polarization and Inflation from cosmic background Radiation Detection (LiteBIRD) is a Japan Aerospace Exploration Agency (JAXA)-led Strategic Large-Class mission designed to search for the existence of the primordial gravitational waves produced during the inflationary phase of the early Universe, through the measurement of their imprint onto the polarization of the Cosmic Microwave Background (CMB). It is an international collaboration, with European Union (EU) operations being coordinated by France. A short study on the merits of 2-dimensional versus 3-dimensional elements in the Finite Element Model (FEM) meshing of basic plates and beams was performed as well as the analysis of two different methods of representing threaded connections in FEM models. Both these activities were in service of the creation of a FEM model of the structure of the contribution of the EU to LiteBIRD: the Medium-High-Frequency Telescope (MHFT). All analysis was done using the Siemens NX software and the Simcenter Nastran solver. This model has passed preliminary quality checks and will be used for future structural analysis intended to verify the integrity of the design, its compliance with JAXA requirements, and to perform screw dimensioning. The results of those analyses will inform possible future design changes or will support the current design. Logistical work on the project was also performed, consisting of the groundwork to initiate an Assembly, Integration and Testing (AIT) plan and an Assembly, Integration and Verification (AIV) plan. This primarily involved the creation of a Model Definition Document, which contained clear and complete descriptions of the different MHFT models to be used throughout project development. The document defines the purpose and components of the models, the dependencies between models, as well as the necessary tests to be performed on each as part of the AIT and AIV process. A list of the structure interfaces was also created, which will contribute to the development of an interface control document.
112

Konnektortjocklekens inverkan på hållfastheten i en treleds-implantatbrounderkonstruktion av PEEK med hjälp av finita elementmetodenFinita elementmetoden för hållfasthetsanalys av treleds-implantatbrounderkonstruktioner av PEEK med varierande konnektordimensioneringKonnektordimensionens betydelse för hållfastheten i treleds-implantatbrounderkonstruktioner av PEEK; En finita elementanalys

Lundkvist, Helena, Roos, Gustav January 2016 (has links)
SammanfattningSyfteSyftet med föreliggande studie är varär att med en finita elementanalys (FEA) undersöka hållfastheten i implantatförankrade treleds-brounderkonstruktioner av materialet PEEK beroende på konnektordimension och belastningsvinkel med hjälp av finita elementmetoden (FEM) genom att analysera spänningskoncentration, displacering och töjning. i implantatförankrade treleds-brounderkonstruktioner i materialet PEEK beroende på konnektortjocklek och belastningsvinkel med hjälp av finita elementmetoden (FEM). Material och MetodTre Ddigitala implantatförankrade brokonstruktioner 44-46 i PEEK respektive zirkconia med konnektordimensionerna konnektorarean 12 mm2, 14 mm2 och 16 mm2 f framställdes i ett CAD-program. Grupperna med konnektordimensionen 16 mm2 utgjorde intern (P-16) respektive extern (Z-16) kontrollgrupp. Därefter Dessa belastades dessa med hjälp av med en programvara för FEM FEA på ponticen med kraften 500 N i vinklarna axiell (0°) och vinklad ( 30°) riktning. Värdena för spänningskoncentration, displacering och töjning visualiserades och analyserades.ResultatResultaten visade att högst spänningsvärden uppstod i PEEK-konstruktionen med konnektorarean 12 mm2 under en vinklad belastning, samt att lägst spänningsvärden uppstod i PEEK-konstruktionen med konnektorarean 14 mm2 under axiell belastning. Endast i kontrollgrupperna, PEEK respektive zirkonia 16 mm2P-16 respektive Z-16 uppstod den maximala spänningskoncentrationen ocklusalt istället för vid konnektorn, även om höga spänningsvärden fortfarande kunde utläsas cervikalt på konnektorn. Högre displacerings- och töjningsvärden kunde iakttas i samtliga PEEK-grupper jämfört med zirkonia-grupperna, oavsett konnektortjocklek konnektordimension och belastningsvinkel.SlutsatsInom ramen för följande föreliggande studiesrs begränsningar kan följande slutsatser dras:•En underdimensionerad konnektor har en negativ inverkan på hållfastheten i implantatförankrade treleds-brounderkonstruktioner av PEEK då de maximala spänningskoncentrationernas lokalisering förflyttas till mer kritiska områden i konnektorområdet. •En vinklad belastning ökar spänningarna, displaceringen och töjningen i implantatförankrade brounderkonstruktioner oavsett material eller konnektortjocklekkonnektordimension. •Spänningsvärden och spänningsfördelning är likartade i implantatförankrade treleds-underkonstruktioner av PEEK och zirkonia, men är mer kritiska för PEEK.•Displacerings- och töjningsvärden är högre i PEEK- än i zirkonia-implantatförankrade treleds-underkonstruktioner. / AbstractPurposeThe aim of the study was is to examine the strength ofin three-unit implant-supported frameworks made of PEEK, depending on connector dimension and loading direction utilizing via a finite element analysis-method (FEAM) by analyzing the stress concentration, displacement and strain. in three-unit implant-supported frameworks made of PEEK, depending on connector dimension and loading direction utilizing a finite element-method (FEM).Material and methodImplant-supported frameworks, 44-46, of PEEK and zirconia with connector dimensions area 12 mm2, 14 mm2 and 16 mm2 was produced by CAD. Via FEAM-software the pontic was loaded with 500 N angled at 0° and 30°. Values for stress, displacement and strain were analyzed.ResultsMaximum stress values ​​occurred in PEEK with the connector area 12 mm2 under angled loading and minimum stress​​ in PEEK with 14 mm2 under axial loading. In the control groups, P/Z 16 mm2, maximum stress arose occlusally, but high stress remained in the cervical connector area. Higher displacement and strain values for displacement and strain waswere observed in all PEEK-groups compared to zirconia, regardless of connector dimension and load angulation of the load.ConclusionWithin the limitations of this the study, the following conclusions were made:•An under-dimensioned connector have a negative impact on the strength of three-unit implant-supported frameworks made of PEEK since the location of the maximum stress appears in more critical areas – the connector areas.•Inclined loading increases stress, displacement and strain in three-unit implant-supported frameworks regardless of material or connector dimension.•Stress values and stress distribution are similar in three-unit implant-supported frameworks made from of PEEK as well as zirconia, but affects PEEK more critically.•Higher displacement and strain values were observed in three-unit implant-supported frameworks of PEEK compared to zirconia.
113

Investigation of the effect of tool geometry on the machining process

Deng, Baoqin January 2019 (has links)
Cutting tool geometries play important roles in tool performance, such as tool life, surface integrity, and cutting force. The most common commercial tools edge geometries are honed, chamfered and hone-chamfered. This study investigates new ways to develop tool geometry. An uncoated carbide tool is used in the orthogonal cutting of AISI 4140. By observing the tool geometry changes in the machining process with white light interferometry, a new tool wear geometry model has been proposed. A non-destructive tool wear measurement is discussed as well. In addition, this study presents the machining result comparison between the new and conventional geometries as well as the failure analysis from both experimental and FEA perspectives. / Thesis / Master of Applied Science (MASc)
114

Structural Design of a 6-DoF Hip Exoskeleton using Linear Series Elastic Actuators

Li, Xiao 28 August 2017 (has links)
A novel hip exoskeleton with six degrees of freedom (DoF) was developed, and multiple prototypes of this product were created in this thesis. The device was an upper level of the 12-DoF lower-body exoskeleton project, which was known as the Orthotic Lower-body Locomotion Exoskeleton (OLL-E). The hip exoskeleton had three motions per leg, which were roll, yaw, and pitch. Currently, the sufferers of hemiplegia and paraplegia can be addressed by using a wheelchair or operating an exoskeleton with aids for balancing. The motivation of the exoskeleton project was to allow paraplegic patients to walk without using aids such as a walker or crutches. In mechanical design, the hip exoskeleton was developed to mimic the behavior of a healthy person closely. The hip exoskeleton will be fully powered by a custom linear actuator for each joint. To date, there are no exoskeleton products that are designed to have all of the hip joints powered. Thus, packaging of actuators was also involved in the mechanical design of the hip exoskeleton. As a result, the output torque and speed for the roll joint and yaw joint were calculated. Each hip joint was structurally designed with properly selected bearings, encoder, and hard stops. Their range of motions met desired requirements. In addition, a backpack assembly was designed for mounting the hardware, such as cooling pumps, radiators, and batteries. In the verification part, finite element analysis (FEA) was conducted to show the robustness of the structural design. For fit testing, three wearable prototypes were produced to verify design choices. As a result, the weight of the current hip exoskeleton was measured as 32.1 kg. / Master of Science
115

High-Frequency Irreversible Electroporation (H-FIRE) optimization for the treatment of highly invasive cells beyond the tumor margin

Latouche, Eduardo L. 19 June 2016 (has links)
Irreversible electroporation (IRE) is a non-thermal ablation technique that allows for eradication of unresectable tumors in a minimally invasive procedure. While IRE will preferentially kill larger cells over smaller ones, it does not discriminate between cells with larger and small nuclei. Given that one of the hallmarks of cancer cell morphology is larger, more abundant nuclei, our team set out to explore the possibility of preferentially targeting this physical and geometrical characteristic. / Master of Science
116

Structural Design and Analysis of a Kinematic Mechanism for a Morphing Hyper-Elliptic Cambered Span (HECS) Wing

Wiggins, Leonard D. III 13 January 2004 (has links)
The HECS wing was developed by NASA Langley Research Center and has a nonplanar, hyper-elliptically swept leading and trailing edge as well as spanwise camber. For this wing, the leading and trailing edges are swept back according to a hyper-elliptical equation. The span of the wing is also defined with hyper-elliptical anhedral giving it nonplanar spanwise camber. A single-degree-of-freedom mechanism is developed to provide a means for the wing to continuously change shape from its nonplanar to planar configuration. The mechanism uses a repeating quaternary-binary link configuration to translate motion from one segment to the next. A synthesis of the mechanism is performed, such that with one input to the first segment of the chain, the other wing segments move into their desired positions. Linear aerodynamic theory is applied to the HECS wing configuration at certain morphed positions in order to predict the aerodynamic loads. This work performs a linear static analysis of the mechanism at different morphed positions. A finite element representation of the mechanism as a structure is developed. Using the predicted aerodynamic loads, a structural analysis is performed. The analysis investigates different materials and cross sections of the members to determine a need for redesign due to failure from buckling and bending stress. From the analysis of the mechanism, a design is finalized which lightens the structure as well as increases the strength. These results are beneficial for the next phase of model development of the mechanism. / Master of Science
117

Optimization of Geometric Parameters for a Deployable Space Structure

Tulloss Jr., Robert Stuart 30 August 2021 (has links)
Deployable structures are used for many different spacecraft applications like solar arrays, antennas, and booms. They allow spacecraft with large structural components to comply with the volume restrictions of launch platforms. This research optimizes the shape and size of these structural components with both the stowed and deployed configurations in mind. HEEDS, a commercial optimization software, and ABAQUS, a commercial finite element analysis software, are used to evaluate and alter the structure using a single simulation. This makes the design process more efficient than running many different simulations individually. The optimization objectives, design variables, and constraints are chosen to fit the mission requirements of the structure. The structure analyzed in this research is a composite tube with a compressible cross-section wrapped around a cylinder. The change in cross-section reduces the bending stiffness of the tube and allows it to be wrapped without damaging the material. The dimensions controlling cross-section shape and the thickness of the composite layers are the design variables for the optimization. The maximum strain energy stored in the wrapped tube, the minimum volume of the structure, and the minimum weight of the tube are the objectives for the optimization. The strain energy is maximized to get the stiffest possible structure and satisfy the minimum natural frequency constraint. The weight and volume of the tube are minimized because reducing weight and volume is important for any spacecraft structure. Constraints are placed on the design variables and objectives and the Hashin damage criteria are used to ensure wrapping does not cause material failure. Three optimization runs from different initial designs are completed using SHERPA and genetic algorithm optimization methods. The results are compared to determine which optimization method performs best and how the different starting points affect the final results. After the optimized design is found, the full wrapping and deployment simulation is completed to analyze the behavior of the optimized design. / Master of Science / Spacecraft are launched into space using launch vehicles. There is limited room inside the launch vehicle for the spacecraft, but the spacecraft often needs large components like solar panels, antennas, and booms to complete the mission. These components must be designed in a way that allows them to be stowed in a smaller space. This can be accomplished by designing a system that can change the configuration of the component once the spacecraft is in orbit. This is referred to as a deployable structure, and the objective of this research is to create an optimization method for designing this type of structure. This is challenging because both the stowed and deployed configurations must be considered during the optimization. HEEDS, a commercial optimization software, and ABAQUS, a commercial structural analysis software, are used to evaluate and optimize the structure in a single simulation. The optimization objectives, design variables, and constraints are chosen to fit the mission requirements of the structure. The structure examined in this research is a composite tube with a compressible cross-section wrapped around a cylinder. As the tube is wrapped, it flattens, reducing the bending stiffness so the tube can be wrapped without damaging the material. The variables controlling cross-section shape and the thickness of the composite material layers will be altered during the optimization. The maximum strain energy stored in the wrapped tube, the volume of the tube, and the minimum weight of the tube are the objectives for the optimization. The strain energy is maximized to get the stiffest possible tube when it is unwrapped to ensure there is enough stored energy to facilitate the full deployment and to satisfy the minimum natural frequency constraint. The weight and volume of the tube are minimized because reducing weight and volume is important for any spacecraft structure. Constraints are placed on the design variables and objectives and the Hashin damage criteria are used to ensure wrapping does not cause material failure. The Hashin damage criteria use the strength of the material and the stresses on the material to determine if it is likely to fail. Three optimization runs with different starting points are completed for both the SHERPA and genetic algorithm optimization methods. The results are compared to determine which optimization method performs best and how the different starting points affect the final results. After the optimized design is found, the full wrapping and deployment simulation is completed to analyze the behavior of the optimized design.
118

Das FEA-Assistenzsystem – Analyseteil FEdelM

Spruegel, Tobias C., Wartzack, Sandro 10 December 2016 (has links) (PDF)
Die simulative Absicherung von Produkten in den frühen Phasen der Produktentwicklung wird immer wichtiger, um den Anforderungen nach steigender Effizienz gerecht zu werden. Da das Angebot an erfahrenen Berechnungsingenieuren mit langjähriger Berufserfahrung begrenzt ist gilt es weniger erfahrene Simulationsanwender bei der Durchführung von aussagekräftigen Finite-Elemente-Simulationen zu unterstützen. Die Autoren stellen im Rahmen des Beitrags das Konzept des Analyseteils FEdelM eines FEA-Assistenzsystems vor, welches strukturmechanische Finite-Elemente (FE) Simulationen auf Plausibilität überprüft und auftretende Fehler möglichst automatisiert zu erkennt und behebt. Hierbei werden die einzelnen Module und deren Verknüpfungen untereinander und zu anderen Anwendungen vorgestellt.
119

Utmattningsanalys av tryckkärl i enlighet med SS-EN 13445-3 / Fatigue analysis of pressure vessel in accordance with SS-EN 13445-3

Vareskic, Srdjan January 2015 (has links)
Detta examensarbete har utförts i samarbete med Fagerström Industrikonsult AB i Helsingborg. Fagerström Industrikonsult AB är ett ingenjörsföretag som har specialiserat sig på mekaniska och mekatroniska produkter inom flera branchområden. Ett av företagets tidigare projekt, som bland annat bygger på tryckbärande kärl och som kommer återanvändas för ett nytt projekt, är i behov av en uppdaterad analys mot utmattningsbrott.För att en tryckbärande utrustning skall kunna säljas och användas inom Europa, måste tillverkarna följa det Europeiska direktivet 97/23/EG, även kallat PED-direktiv. Detta direktiv sätter regler för konstruktion, tillverkning, märkning och kontroll. I Sverige finns denna beskrivning i Arbetsmiljöverkets författnings-samling (AFS 1999:4 2011). För att uppfylla alla de konstruktionsmässiga och tillverkningsmässiga krav på tryckkärlet som ställs i PED direktivet, så måste harmoniserade standarder användas. I detta arbete används tryckkärlsstandarden (SS-EN 13445-3: 2014) som sätter regler för design och verifiering av tryckbärande anordningar.Ett av projekten som finansierats av den Europeiska kommissionen, visade att 25% av alla tryckbärande anordningars haverier beror på utmattning. Tryckkärl är den typ av tryckbärande anordning, som är mest utsatt för skador orsakade av utmattning. Utmattningsbrott har varit känt sedan början på 1800-talet och man har länge studerat detta fenomen. Man har efter lång tids arbete hittat metodik för att ta fram analytiska modeller och prediktionstekniker samt säkra och noggranna livslängdsberäkningar för stålkonstruktioner. Fagerström Industrikonsult AB söker idag en metod för att utföra utmattningsanalys på tryckkärl i enlighet med tryckkärlsstandarden där linjärstatisk analys utförs med finita elementmetoden. Företaget eftersträvar också mer kunskap inom ämnet för att ge konstruktörerna bättre kännedom om utmattningsproblematiken samt ge möjlighet att redan i konstruktionsstadiet kunna sätta rimliga krav på tillverkning ur mekaniskt utmattningsperspektiv. / This master thesis has been carried out in collaboration with Fagerström Industrikonsult AB in Helsingborg. Fagerström Industrikonsult AB is an engineering company, specialized in mechanical and mechatronic products across a wide range of industry segments. One of the company's previous project, which is among other sub-products based on pressurized vessels, and that will be reused for a new project, needs an updated analysis against fatigue failure.In order to sell or use a pressurized equipment in Europe, the manufacturers must comply with the European Directive 97/23/EC, also called PED-directive. This directive sets the rules for design, production, marking and inspections. In Sweden, this directive is described in “Arbetsmiljöverkets Författningssamling” (AFS 1999:4 2011). In order to meet all the design and manufacturing requirements for pressure vessels that are required by the PED Directive, it is required to use harmonized standards. In this thesis, pressure vessel standard (SS-EN 13445-3: 2014) is used, which sets the rules for design and verification of pressure vessel.One of the projects funded by the European Commission, showed that 25 % of all pressure equipment failure are caused by fatigue. Pressure vessel is one type of these pressure equipment, which is most vulnerable to damage caused by fatigue. Fatigue failure has been known since the beginning of 19th century and this phenomenon has been studied for a long time. Under this extensive period of time, methods have been succefully developed for analytical models and prediction techniques as well as safe and accurate life calculations for steel structures. Fagerström Industrikonsult AB is today seeking a method to perform fatigue analysis of pressure vessels in accordance with European pressure vessel standard, where the linear static analysis is performed using the finite element method. The company is also pursuing more knowledge of the subject so its designers have more understanding of fatigue phenomena in order to be able to set reasonable requirements during design stage for production and in order to prevent this phenomena.
120

Contraintes thermiques dans les dépôts de couches minces pour les optiques rayons-X sous forte charge thermique / Thermal stress issues in thin film coatings of X-ray optics under high heat load

Cheng, Xianchao 25 September 2014 (has links)
Les optiques multicouches pour rayons-X sont généralement constituées de centaines de périodes de couches alternées. L'épaisseur d'une période est de quelques nanomètres. Une multicouche est souvent déposée sur un substrat de silicium avec une taille typique de 60 × 60 × (60~300) mm3. Le rapport de dimensions (~107) entre la taille de l'optique et de l'épaisseur de l'empilement est très élevé et il peut conduire à un très grand nombre d'éléments (~1016). Certains éléments spéciaux avec fonctions de couche sont disponibles dans ANSYS (de 2011), ce qui signifie que les propriétés de chaque couche peuvent être définies. Par l'utilisation des éléments nommés « layer-functioned », le modèle d'analyse thermique-structurelle a été mise en œuvre pour les optiques multicouches. Le nombre d'éléments est réduit par un facteur supérieur à 30 et le nombre effectif de sous-couches gérables par les ordinateurs actuels augmente beaucoup. Basé sur la modèle d'éléments finis de l'optique multicouche, la distribution tridimensionnelle non-uniforme de température peut être simulée avec des paramètres variables de charge thermique, de conditions de refroidissement, de propriétés des matériaux, de géométries du substrat et des films de revêtement. Les contraintes et déformations thermiques peuvent être résolues quantitativement.Des miroirs à réflexion totale et des monochromateurs multicouches refroidis à l'eau et à l'azote liquide ont été étudiés avec des paramètres typiques de charge thermique, de refroidissement et de géométrie. Les effets de refroidissement de l'optique et de la charge thermique du faisceau de rayons-X ont été décrits. Il est montré que les influences de la température sur le revêtement et la déformation sont négligeables. La contrainte dans le substrat n'est que légèrement augmentée (<0.1%). Cependant, des fortes contraintes sont induites dans les couches en raison de la différence de CTE, ce qui peut être critique pour la survie de l'optique. Pour la condition de refroidissement à l'eau, la couche est sous contrainte de compression de plusieurs dizaines de MPa, ce qui est normalement inférieur à la résistance du matériau de la couche. Pour la condition de refroidissement à l'azote liquide, cependant, une grosse contrainte de traction de plusieurs centaines de MPa apparait dans la couche lorsque l'optique est refroidie jusqu'à la température de l'azote liquide (80 K). Cette contrainte de traction peut dépasser la résistance à la traction (UTS) pour certains types de matériaux de couche. La contrainte thermique dans l'optique multicouche dépend de la différence de CTE entre le matériau de la couche et le matériau du substrat, mais elle est indépendante de la différence des CTE entre les différentes sous-couches. En principe, pour minimiser la contrainte thermique, le matériau de revêtement doit avoir un CTE proche de celle du substrat, un module de Young et un coefficient de Poisson plus petits. En outre, une grande résistance du matériau de la couche est bénéfique pour sa capacité à résister à la contrainte thermique.Pour obtenir des informations appropriées sur le comportement des multicouches sous l'influence de la charge thermique, des propriétés telles que le module de Young, le ratio entre CTE et module de Poisson des multicouches sont déterminés indirectement en mesurant la variation de la courbure due au changement de température. Des couches simples de B4C, Pd et Cr et des multicouches [Pd/B4C] d'épaisseurs de l'ordre du nanomètre sont préparées et mesurées. Les résultats expérimentaux montrent que tous les matériaux étudiés présentent un CTE et/ou un module de Young inférieur par rapport aux données dans la littérature. Cela est particulièrement vrai pour les couches minces de B4C. Par conséquent, la contrainte thermique réelle et la contrainte dans les couches de revêtement d'un miroir ou de multicouches optiques sont sensiblement plus petites que les résultats calculés avec les propriétés des matériaux massifs. / Multilayer optics for X-rays typically consists of hundreds of periods of alternating sub-layers coated on a silicon substrate. The thickness of one period of sub-layers is a few nanometers. The silicon substrate is typically a block of 60 mm large, 60 mm wide and 60 to 300 mm long. The high aspect ratio (~107) between the size of the optics and the thickness of the multilayer can lead to a very large number of elements (~1016) for the numerical simulation (by FEA). Some special layer-functioned elements have been developed recently (in 2011) in ANSYS, which means the properties of each layer can be explicitly defined. In this work, the thermal-structural analysis model has been implemented for multilayer optics by use of these layer-functioned elements. The number of meshed elements is considerably reduced by a factor of more than 30 and the number of sub-layers feasible for the present computers is increased significantly. Based on the finite element model of multilayer optics, the non-uniform three-dimensional temperature distribution can be simulated with variable heat load parameters, cooling conditions, material properties and geometries of the substrate and the coating films. The thermal stress and deformation can be solved quantitatively.Single layer coated mirrors and multilayer monochromators cooled by water or liquid-nitrogen are studied with typical parameters of heat-load, cooling, and geometry. The effects of cooling-down of the optics and the X-ray beam heat-load are described. It is shown that the influences from the coating on temperature and deformation are negligible. The stress in the substrate is only slightly increased (<0.1%). However, large layer stresses are induced due to the different thermal expansion coefficients (CTE) between the layer and substrate materials, which are the critical issues for the survival of the optics. For the water cooling condition, the layer is under compressive stress of tens of MPa which is normally less than the strength of the layer material. For the liquid-nitrogen cooling condition, however, large tensile stress of several hundreds of MPa is formed in the layer as the optics is cooled more than 200 K down to the liquid-nitrogen temperature (80K). This tensile stress can exceed the ultimate tensile strength (UTS) for some kinds of layer materials. The thermal stress in multilayer optics depends on the difference in CTE between the layer material and the substrate material, but it is independent on the CTE difference between different sub-layers. In principle, to minimize the thermal stress, the coating material should have a CTE closer to that of the substrate, smaller Young's modulus and Poisson's ratio. Moreover, a higher strength of the layer material is beneficial for its ability to withstand the thermal stress.To acquire appropriate information about the behaviour of thin multilayer films under the influence of thermal loading, material properties such as Young's modulus, Poisson's ratio and CTE, of thin multilayer films are determined indirectly by measuring the curvature change due to uniform temperature change. B4C, Pd and Cr single layers and [Pd/B4C] multilayers of thicknesses in the nanometer range are prepared and measured. The experimental results show that all of the studied materials exhibit lower CTE and/or Young's modulus than expected from bulk data in the literature. This is particularly true for the thin B4C films. Therefore, the real thermal stress and strain in the coating layers of a mirror or multilayer optics are significantly smaller than the calculated results with bulk material properties.results with bulk material properties.

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