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This dissertation presents the development of electrically-powered, lamination-based microactuators for the realization of large arrays of high impulse and short duration micro-jets with potential applications in the field of micro-electro-mechanical systems (MEMS). Microactuators offer unique control opportunities by converting the input electrical or chemical energy stored in a propellant into useful mechanical energy. This small and precise control obtained can potentially be applied towards aerodynamic control and transdermal drug delivery applications. This thesis discusses the development of both chemical and physical microactuators and characterizes their performance with focus towards the feasibility of using them for a specific application. The development of electrically powered microactuators starts by fabricating an array of radially firing microactuators using lamination-based micro fabrication techniques that potentially enable batch fabrication at low cost. The microactuators developed in this thesis consist of three main parts: a micro chamber in which the propellant is stored; two electrode structures through which electrical energy is supplied to the propellant; and a micro nozzle through which the propellant or released gases from the propellant are expanded as a jet. The fabricated actuators are then integrated with MEMS-process-compatible propellants and optimized to produce rapid ignition of the propellant and generate a fluidic jet. This rapid ignition is achieved either by making the propellant itself conductive, thus, passing an electric current directly through the propellant; or by discharging an arc across the propellant by placing it between two closely spaced electrodes. The first concept is demonstrated with chemical microactuators for the application of projectile maneuvering and the second concept is demonstrated with physical microactuators for transdermal drug delivery application. For both the actuators, the propellant integrated microactuators are characterized for performance in terms of impulse delivered, thrust generated and duration of the jet. The experimentally achieved results are validated by comparing with results from theoretical modeling. Finally, the feasibility of using chemical microactuators for maneuvering the path of a 25 mm projectile spinning at 500 Hz is discussed and the feasibility of applying the physical microactuators for increasing skin's permeability to drug analog molecules is studied.

This thesis deals with optical design of f-theta lens for purposes of precision micromachining using a laser beam. Optical design consists of creating a nominal design according to specifications given by Meopta – optika s.r.o company and a tolerance analysis, which describes manufacturability of given design. Specifications given are most importantly diffraction limited image quality, correction of distortion throughout the field and telecentricity of systém in image space. F-theta lens in this thesis was created using an optical design software called Zemax.

Femtosecond laser has been an essential tool for nonlinear optics and materials processing at micrometer scale, in which chalcogenide and heavy metal oxide glasses have received special attention not only for their high third-order optical nonlinearities but also due to their transparency up to the infrared regions. Although metallic nanoparticles are expected to improve the optical properties of glasses, there are no enough experimental researches about their influence on the nonlinear refractive index (n2) and nonlinear absorption coefficient (&#946), moreover at femtosecond regime. Based on the scientific and technological interests on highly nonlinear glasses, the goal of this thesis was to apply femtosecond laser pulses in two main domains: (i) at the basis of fundamental science, to study the effect of metallic nanoparticles in the third-order nonlinear optical properties of glasses; and (ii) at the field of applied science, aiming the development of photonic devices, performed by the fabrication of 3D optical waveguides containing metallic nanoparticles. This aim was achieved through the techniques of z-scan and femtosecond laser micromachining, which provided the nonlinear optical characterization and waveguides development, respectively. First, we analyzed the third-order nonlinear optical properties of the GeO2-Bi2O3 glass containing gold nanoparticles, which promoted saturation of the absorption in the region of the surface plasmon resonance band. On the other hand, these gold nanoparticles did not affect the n2 that kept constant in the wavelength range of 480 - 1500 nm. The same features were investigated for a Pb2P2O7-WO3 matrix doped with copper nanoparticles. In contrast to the gold doped ones, these samples showed a slight enhancement of the nonlinear refractive index when the energy of the excitation approaches the surface plasmon band. We also found out that the Pb2P2O7-WO3 matrix is a good host to grow silver nanoparticles by fs-laser micromachining. Similarly, copper nanoparticles were produced in a borosilicate glass using single-step laser processing. The explanation for metallic nanoparticle formation is addressed in this thesis, as well as, its application in waveguides. Thus, we demonstrated the functionality of optical waveguides containing Cu0 or Ag0 nanoparticles. Still based on the technological interests on glasses doped with nanoparticles, we showed a single-step synthesis of silver sulfide nanoparticles in chalcogenide glass, which was carried in partnership with researches at Princeton University. The materials investigated in this PhD work are of great importance for photonics, in which the synthesis of nanoparticles, fabrication of waveguides and nonlinear optical characterization have been performed. / O laser de femtossegundos tem sido uma ferramenta essencial tanto para a óptica não-linear quanto para o processamento de materiais na escala micrométrica, na qual os vidros calcogenetos e óxidos de metais pesados têm recebido atenção especial, não apenas pelas suas elevadas não-linearidades ópticas de terceira ordem, mas também devido à sua transparência até o infravermelho. Embora seja esperado que nanopartículas metálicas melhorem as propriedades ópticas dos vidros, não existe investigações experimentais suficientes sobre a sua influência no índice de refração não linear (n2) e no coeficiente de absorção linear (&#946), sobretudo no regime de femtossegundos. Com base nos interesses científicos e tecnológicos de vidros altamente não-lineares, o objetivo deste trabalho foi aplicar pulsos laser de femtossegundos em dois domínios principais: (i) na campo da ciência fundamental, para estudar o efeito de nanopartículas metálicas nas propriedades ópticas não lineares de terceira ordem destes materiais; e (ii) no domínio da ciência aplicada, visando o desenvolvimento de dispositivos fotônicos, realizado pelo fabricação de guias de onda tridimensionais contendo nanopartículas metálicas. Este objetivo foi alcançado através das técnicas de varredura-z e microfabricação com laser de femtossegundos, que proporcionaram a caracterização óptica não-linear e o desenvolvimento de guias de onda, respectivamente. Primeiramente, foram investigadas as propriedades ópticas não-lineares de terceira ordem do vidro GeO2-Bi2O3 contendo nanopartículas de ouro, as quais promoveram saturação da absorção na região da banda de ressonância de plásmon. Por outro lado, essas nanopartículas não afetaram o n2, que se manteve constante no intervalo de comprimento de onda 480 - 1500 nm. As mesmas características foram investigadas para uma matriz Pb2P2O7-WO3 dopada com nanopartículas de cobre. Em contraste com os vidros dopados com ouro, estas amostras apresentaram um ligeiro aumento do índice de refração não linear quando a energia de excitação está próxima da banda de ressonância de plásmon. Observou-se ainda que a matriz Pb2P2O7-WO3 é ideal para a obtenção de nanopartículas de prata através da microfabricação com laser de femtossegundos. Similarmente, nanopartículas de cobre foram produzidas em vidro de borosilicato usando somente uma varredura a laser. A explicação para a formação de nanopartículas metálicas é abordada nesta tese, bem como sua aplicação em guias de onda. Deste modo, demonstrou-se a funcionalidade de guias de onda ópticos compostos por nanopartículas de Cu0 e Ag0. Ainda com base nos interesses tecnológicos em vidros dopados com nanopartículas, demonstrou-se uma síntese de nanopartículas de sulfeto de prata em vidro calcogeneto usando o processamento de única etapa, realizada em parceria com pesquisadores da Universidade de Princeton. Os materiais investigados neste trabalho de doutorado são de grande importância para aplicações em fotônica, em que a síntese de nanopartículas, a fabricação de guias de onda e a caracterização óptica não-linear foram realizadas.

Darbe pristatomi eksperimentiniai bei teoriniai rezultatai, susiję su skaidriųjų terpių lūžio rodiklio pokyčio indukavimu. Parodoma, kad lydytą kvarcą veikiant Yb:KGV lazerine sistema generuojamais impulsais, jame galima sukurti modifikuoto lūžio rodiklio sritis. Šios sritys pasižymi dvejopu šviesos lūžimu, atsirandančiu dėl medžiagos tūryje besiformuojančių nanogardelių, o modifikuotų sričių vienalytiškumas priklauso nuo akumuliacinių efektų. Pakitusio lūžio rodiklio sritis taip pat galima formuoti ir ličio niobato kristale. Priklausomai nuo spinduliuotės parametrų, šiame kristale galima įrašyti stabilius modifikuoto lūžio rodiklio darinius, o taip pat ir nestabilias modifikacijas, atsirandančias dėl fotorefrakcinio reiškinio. Pastarąjį efektą galima panaudoti daugkartiniam informacijos įrašymui. Pademonstruoti efektyvūs fotoniniai elementai, tūrinės Brego gardelės, įrašytos tiek lydyto kvarco, tiek ličio niobato kristalo tūryje. Pateikiama metodika, skirta lazerio indukuoto lūžio rodiklio pokyčiui nustatyti matuojant Brego gardelių difrakcinius efektyvumus. Taip pat tyrinėjama kaip modifikuoti dariniai lemia superkontinuumo ir šviesos gijos formavimosi reiškinius lydytame kvarce. / The study on refractive index modification of transparent materials with ultrashort laser pulses is presented in this dissertation. Based on experimental data it was demonstrated, that using ultrashort pulses, generated with Yb:KGW laser system, it is possible to produce modified refractive index zones in the fused silica glass, that possess birefringence. This effect is caused by nanogratings that form in the bulk of the material. Homogeneity of the modified zones is determined by the accumulation effects, mainly the number of pulses that affect each area. Refractive index variations can be created also in crystalline material such as lithium niobate. Depending on the writing pulse parameters different types of modifications can be created: permanent modification that is caused by crystal amorphization and non-stable modifications that originate from the photorefractive properties of the crystal. Latter modifications can be used for three-dimensional, rewritable data recording. Highly efficient photonic elements, such as volume Bragg gratings, recorded in fused silica and lithium niobate crystal are demonstrated. The technique allowing the evaluation of refractive index change applying Bragg gratings is described. Also modification influence on nonlinear processes that appear in fused silica such as filament formation and supercontinuum generation is experimentally investigated.

Femtosecond laser has been an essential tool for nonlinear optics and materials processing at micrometer scale, in which chalcogenide and heavy metal oxide glasses have received special attention not only for their high third-order optical nonlinearities but also due to their transparency up to the infrared regions. Although metallic nanoparticles are expected to improve the optical properties of glasses, there are no enough experimental researches about their influence on the nonlinear refractive index (n2) and nonlinear absorption coefficient (&#946), moreover at femtosecond regime. Based on the scientific and technological interests on highly nonlinear glasses, the goal of this thesis was to apply femtosecond laser pulses in two main domains: (i) at the basis of fundamental science, to study the effect of metallic nanoparticles in the third-order nonlinear optical properties of glasses; and (ii) at the field of applied science, aiming the development of photonic devices, performed by the fabrication of 3D optical waveguides containing metallic nanoparticles. This aim was achieved through the techniques of z-scan and femtosecond laser micromachining, which provided the nonlinear optical characterization and waveguides development, respectively. First, we analyzed the third-order nonlinear optical properties of the GeO2-Bi2O3 glass containing gold nanoparticles, which promoted saturation of the absorption in the region of the surface plasmon resonance band. On the other hand, these gold nanoparticles did not affect the n2 that kept constant in the wavelength range of 480 - 1500 nm. The same features were investigated for a Pb2P2O7-WO3 matrix doped with copper nanoparticles. In contrast to the gold doped ones, these samples showed a slight enhancement of the nonlinear refractive index when the energy of the excitation approaches the surface plasmon band. We also found out that the Pb2P2O7-WO3 matrix is a good host to grow silver nanoparticles by fs-laser micromachining. Similarly, copper nanoparticles were produced in a borosilicate glass using single-step laser processing. The explanation for metallic nanoparticle formation is addressed in this thesis, as well as, its application in waveguides. Thus, we demonstrated the functionality of optical waveguides containing Cu0 or Ag0 nanoparticles. Still based on the technological interests on glasses doped with nanoparticles, we showed a single-step synthesis of silver sulfide nanoparticles in chalcogenide glass, which was carried in partnership with researches at Princeton University. The materials investigated in this PhD work are of great importance for photonics, in which the synthesis of nanoparticles, fabrication of waveguides and nonlinear optical characterization have been performed. / O laser de femtossegundos tem sido uma ferramenta essencial tanto para a óptica não-linear quanto para o processamento de materiais na escala micrométrica, na qual os vidros calcogenetos e óxidos de metais pesados têm recebido atenção especial, não apenas pelas suas elevadas não-linearidades ópticas de terceira ordem, mas também devido à sua transparência até o infravermelho. Embora seja esperado que nanopartículas metálicas melhorem as propriedades ópticas dos vidros, não existe investigações experimentais suficientes sobre a sua influência no índice de refração não linear (n2) e no coeficiente de absorção linear (&#946), sobretudo no regime de femtossegundos. Com base nos interesses científicos e tecnológicos de vidros altamente não-lineares, o objetivo deste trabalho foi aplicar pulsos laser de femtossegundos em dois domínios principais: (i) na campo da ciência fundamental, para estudar o efeito de nanopartículas metálicas nas propriedades ópticas não lineares de terceira ordem destes materiais; e (ii) no domínio da ciência aplicada, visando o desenvolvimento de dispositivos fotônicos, realizado pelo fabricação de guias de onda tridimensionais contendo nanopartículas metálicas. Este objetivo foi alcançado através das técnicas de varredura-z e microfabricação com laser de femtossegundos, que proporcionaram a caracterização óptica não-linear e o desenvolvimento de guias de onda, respectivamente. Primeiramente, foram investigadas as propriedades ópticas não-lineares de terceira ordem do vidro GeO2-Bi2O3 contendo nanopartículas de ouro, as quais promoveram saturação da absorção na região da banda de ressonância de plásmon. Por outro lado, essas nanopartículas não afetaram o n2, que se manteve constante no intervalo de comprimento de onda 480 - 1500 nm. As mesmas características foram investigadas para uma matriz Pb2P2O7-WO3 dopada com nanopartículas de cobre. Em contraste com os vidros dopados com ouro, estas amostras apresentaram um ligeiro aumento do índice de refração não linear quando a energia de excitação está próxima da banda de ressonância de plásmon. Observou-se ainda que a matriz Pb2P2O7-WO3 é ideal para a obtenção de nanopartículas de prata através da microfabricação com laser de femtossegundos. Similarmente, nanopartículas de cobre foram produzidas em vidro de borosilicato usando somente uma varredura a laser. A explicação para a formação de nanopartículas metálicas é abordada nesta tese, bem como sua aplicação em guias de onda. Deste modo, demonstrou-se a funcionalidade de guias de onda ópticos compostos por nanopartículas de Cu0 e Ag0. Ainda com base nos interesses tecnológicos em vidros dopados com nanopartículas, demonstrou-se uma síntese de nanopartículas de sulfeto de prata em vidro calcogeneto usando o processamento de única etapa, realizada em parceria com pesquisadores da Universidade de Princeton. Os materiais investigados neste trabalho de doutorado são de grande importância para aplicações em fotônica, em que a síntese de nanopartículas, a fabricação de guias de onda e a caracterização óptica não-linear foram realizadas.

This thesis reports the effects of ultrashort laser pulse irradiation of various materials. The morphology after irradiation was examined using several microscopy techniques. Emphasis was placed on the identification of crystallographic changes and the analysis of laser-induced periodic surface structures. Grooves were machined in silicon by translating the target under the focused laser beam. The resulting depths were measured as a function of pulse energy, translation speed, and number of consecutive passes, for 800 and 400nm wavelength irradiation. The wall morphology and a corrugation along the bottom of the grooves were characterized. Various polarization configurations relative to the translation direction were compared. Such characterizations are relevant for the practical application of femtosecond laser micromachining. Silicon and gallium phosphide exhibited periodic structures after irradiation using photon energies less than the bandgap energy, with periods as small as ~20% of the irradiation wavelength. The significantly sub-wavelength periodic structures had a shallow profile on silicon, appearing as fine lines or grids of protrusions and depressions. On gallium phosphide, the surface evolved into planar-like structures with a large aspect ratio, possessing crystalline centers coated with amorphous material. These investigations, along with additional experiments, would help identify the precise physical origins of the short-period structures. On silicon and germanium, the target crystal orientation was shown to affect the formation of certain morphological features. For multiple-pulse irradiation, the (100) and (111) surface orientations exhibited significantly different tendencies for large conical structure formation. A thin layer of defected material coated the conical structures, with some defects present within the periodic structures. The different crystalline orientations did not affect periodic structuring. Cross-sectional transmission electron microscopy of silicon after irradiation by single pulses revealed amorphous material and dislocations in the bulk for sufficiently high pulse fluences. On a sample consisting of a metal layer on thermally-grown oxide on silicon, a range of pulse fluences was found which removed the metal layer without observed thinning of the oxide layer. Within this fluence range, above a particular fluence substantial defects were formed in the underlying silicon. Although ultrashort pulse irradiation of materials is frequently considered to be 'damage-free', attention should be paid to sub-surface modifications not evident from surface imaging. For the drilling of holes in copper foils, the pulse duration did not strongly affect the final morphology for durations under several picoseconds. A photodiode below the foil during drilling recorded transmitted light, indicating the number of pulses required for penetration under a variety of conditions, and characterizing hole evolution during drilling. Periodic surface structuring on the walls of holes depended on the irradiation atmosphere, pulse duration, and laser polarization. These measurements provide insight into the physical processes of material modification, and for the selection of irradiation parameters in practical applications. / Thesis / Doctor of Philosophy (PhD)

"Laser micromachining is essential in today’s advanced manufacturing, of e.g., printed circuit boards and electronic components, especially laser microdrilling. Continued demands for miniaturization, in particular of high-performance MEMS components, have generated a need for smaller holes and microvias as well as smaller and more controllable spot-welds than ever before. All these neeeds require smaller taper of the microholes and more stable and controlled laser micromachining process than currently available. Therefore considerable attention must be focused on the laser process parameters that control critical specifications such as accuracy of the hole size as well as its shape and taper angle, all of which highly influence quality of the laser micromachining processes. Determination of process parameters in laser micromachining, however, is expensive because it is done mostly by trial and error. This Dissertation attempts to reduce the experimental time and cost associated with establishing the process parameters in laser micromachining by employing analytical, computational, and experimental solutions (ACES) methodology."

This thesis discusses the investigation and utilization of a new promising thin-film material, liquid crystal polymer (LCP), for microwave and millimeter-wave (mm-wave [>30 GHz]) components and packages. The contribution of this research is in the determination of LCP's electrical and mechanical properties as they pertain to use in radio frequency (RF) systems up to mm-wave frequencies, and in evaluating LCP as a low-cost substrate and packaging material alternative to the hermetic materials traditionally desired for microwave circuits at frequencies above a few gigahertz (GHz). A study of LCP's mm-wave material properties was performed. Resonant circuit structures were designed to find the dielectric constant and loss tangent from 2-110 GHz under both ambient and elevated temperature conditions. Several unique processes were developed for the realization of novel multilayer LCP-based RF circuits. These processes include thermocompression bonding with tight temperature control (within a few degrees Celsius), precise multilayer alignment and patterning, and LCP laser processing with three different types of lasers. A proof-of-concept design that resulted from this research was a dual-frequency dual-polarization antenna array operating at 14 and 35 GHz. Device characterization such as mechanical flexibility testing of antennas and seal testing of packages were also performed. A low-loss interconnect was developed for laser-machined system-level thin-film LCP packages. These packages were designed for and measured with both RF micro-electromechanical (MEM) switches and monolithic microwave integrated circuits (MMICs). These research findings have shown LCP to be a material with uniquely attractive properties/capabilities for vertically integrated, compact multilayer LCP circuits and modules.

This dissertation presents an investigation of micromachined three-dimensional microelectrode arrays (3-D MEAs) targeted toward in-vitro and in-vivo biomedical applications. Current 3-D MEAs are predominantly silicon-based, fabricated in a planar fashion, and are assembled to achieve a true 3-D form: a technique that cannot be extended to micro-manufacturing. The integrated 3-D MEAs developed in this work are polymer-based and thus offer potential for large-scale, high volume manufacturing. Two different techniques are developed for microfabrication of these MEAs - laser micromachining of a conformally deposited polymer on a non-planar surface to create 3-D molds for metal electrodeposition; and metal transfer micromolding, where functional metal layers are transferred from one polymer to another during the process of micromolding thus eliminating the need for complex and non-repeatable 3-D lithography processes. In-vitro and in-vivo 3-D MEAs are microfabricated using these techniques and are packaged utilizing Printed Circuit Boards (PCB) or other low-cost manufacturing techniques. To demonstrate in-vitro applications, growth of 3-D co-cultures of neurons/astrocytes and tissue-slice electrophysiology with brain tissue of rat pups were implemented. To demonstrate in-vivo application, measurements of nerve conduction were implemented. Microelectrode impedance models, noise models and various process models were evaluated. The results confirmed biocompatibility of the polymers involved, acceptable impedance range and noise of the microelectrodes, and potential to improve upon an archaic clinical diagnostic application utilizing these 3-D MEAs.