The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and Optical waveguide Ring Resonator with simple fabrication process. A 1.49£gm symmetric quantum well InGaAlAs epitaxial wafer is used to fabricate the devices. In the asymmetric Mach-Zehnder Interferometer design, we design asymmetric straight waveguides with difference of optical path, and asymmetric bend waveguides with difference of curvature radius. By this design, we can observe the interference variation of output light by difference of optical path. Using these properties, it will get the index change caused by electric field and the loss of bend waveguide. In optical waveguide ring resonator design, we improve the problem of the length of original K=0.15 Multi-Mode Interference (MMI) by stepped-width waveguide. And we obtain different transmission spectrum by adjusting the splitting ratio of MMI couplers (K=0.85, 0.5, and 0.15) and cascading doudle rings. We apply K0=0.5, K1=0.15 and K2=0.5 MMIs to design and fabricate optical filters with square transmission spectrum. In fabrication process, we get smooth sidewall and highly perpendicularity waveguide by multi-step wet etch method. In order to reduce waveguide loss, we make deep etching for the outside of curve waveguide and MMI. Finally, we use polyimide to smooth out the sides of the ridge waveguides and evaporate metal pad over the polyimide.

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Connaitre précisément la structure interne des corps célestes est indispensable pour, à la fois, comprendre la physique qui régit leur existence et le processus qui leur a donné naissance. La sismologie, d’abord appliquée à la Terre puis au soleil, s’est révélée être un outil très efficace pour sonder leurs intérieurs. Dans les années 70 (Vorontsov et al 1976), des premiers travaux théoriques ont étudié la possibilité d’une sismologie des planètes géantes gazeuses. Les premières tentatives de mesures d’oscillations ont eu lieu à la fin des années 80. La détection des modes d’oscillations de Jupiter s’est avérée une entreprise très délicate en raison de sa rotation rapide. Pour augmenter les chances de détection, un instrument spécifique a été construit au début des années 2000 à l’OCA. Cet instrument, appelé SYMPA, est un spectromètre imageur de type Mach-Zehnder capable de produire une carte de vitesse radiale de Jupiter. Une détection de modes d’oscillations sur Jupiter par cet instrument a été publiée par Gaulme et al en 2011. Une version améliorée de l’instrument (appelé DSI) a été proposée pour la mission spatiale JUICE à destination de Jupiter, et un nouveau prototype a été construit dans ce but. Par la suite, le projet s’est réorienté vers un programme d’observation depuis le sol sous la forme d’un réseau de trois télescopes répartis en longitude (USA, France, Japon) et financé par l’ANR à partir de 2015 (ANR JOVIAL). L’intérêt de la mise en réseau est d’assurer la continuité des données (météo mise à part). L’instrument étant capable de produire des cartes de vitesse radiales, le projet permet également l’étude de la dynamique atmosphérique des planètes géantes. Ce travail de thèse s’inscrit dans le contexte de préparation de JOVIAL, avec pour objectif de caractériser l’instrument en laboratoire et d’identifier les problèmes liés aux conditions réelles d’observation. Les mesures en laboratoires ont montré des performances conformes aux attentes, avec un bruit de mesure propre à l’instrument inférieur au bruit de photon attendu sur Jupiter. Les premières mesures sur le ciel avec un télescope ont mis en évidence une sensibilité de l’instrument au degré de polarisation de la lumière ainsi qu’une dérive de la vitesse mesurée liée aux instabilités de position de la pupille pendant les observations. Le design de l’instrument et de son interface avec le télescope a été revu pour résoudre ces problèmes. Plusieurs campagnes d’observations de Jupiter ont été réalisées, permettant de mettre sur pied une chaine complète de traitement des données, dont la validité a été vérifiée par des simulations réalistes. Les observations de Jupiter ont donné des résultats scientifiques particulièrement intéressants. L’analyse des données de deux campagnes de 2015 et 2016 a fourni des séquences temporelles de cartes de vitesses radiales de Jupiter. Une première étude a consisté à chercher dans ces cartes la signature des vents zonaux et de les comparer aux mesures réalisées par suivi des nuages sur des images résolues (cloud-tracking). Une telle mesure n’avait jamais été faite par effet Doppler. Le résultat, bien qu’affecté par des biais de mesures identifiés, montre des profils de vents stables d’une année sur l’autre et en cohérence avec les valeurs issues du cloud-tracking, sauf au niveau de la partie nord de la bande équatoriale de Jupiter. La mesure Doppler suggère en effet une vitesse de vent bien inférieure à la vitesse apparente dans cette zone, ce qui a potentiellement des implications sur les modèles de dynamique atmosphérique. Ces résultats sont très importants pour mieux comprendre les mesures de la sonde Juno, actuellement en orbite autour de Jupiter. L’analyse fréquentielle des données temporelles a été abordée en fin de thèse. Les analyses préliminaires ne semblent pas pour l’instant reproduire la détection de SYMPA. Une analyse plus poussée est nécessaire avant de conclure à une absence du signal. / To know precisely the internal structure of the celestial bodies is essential to both to understand the physics which governs their existence, and the process which gave them birth. First applied to the Earth and then to the sun, seismology has proven to be a very effective tool to sound their interiors. It has become natural and legitimate to question the possibility of seismology of gaseous giant planets. The first theoretical work was carried out in the 1970s (Vorontsov et al. 1976), and the first attempts to measure oscillations at the end of the 1980s. The detection of Jupiter's oscillating modes turned out to be very difficult (reduced flux, small apparent diameter, fast rotation ...). To increase the chances of detection, a specific instrument was built in the early 2000s at the OCA. This instrument, called SYMPA, is a Mach-Zehnder-type imaging spectrometer enable to produce radial velocity maps of Jupiter. A first detection of acoustic modes on Jupiter with this instrument was published by Gaulme et al in 2011. An improved version of the instrument (called DSI), based on the same principle, was built in the wake, with the primary objective of boarding a spacecraft to Jupiter. The project was finally reoriented towards an observation program from the ground in the form of a network of three telescopes equidistant in longitude (USA, France, Japan) and supported by the ANR fund starting in 2015 (ANR JOVIAL). The interest of the network is to ensure the continuity of data (weather apart). The instrument being able to produce radial velocity maps, the project also aims to study the atmospheric dynamics of giant planets. This thesis work is part of a preparation for JOVIAL, with the aim of characterizing the instrument and identifying the problems related to real observations conditions. Laboratory measurements showed expected performances with an instrumental noise level (related to thermal fluctuations) lower than expected photon noise on Jupiter. The first measurements on the sky with a telescope showed a sensitivity of the instrument to the degree of polarization of the light as well as drifts of the velocity measurements due the motions of the pupil position. Some adjustments of the design of the instrument and its interface with the telescope were necessary to solve these issues. Several Jupiter observation campaigns were carried out during the thesis, allowing the development of full data processing software. The complete procedure was tested against simulated data and validated. Two observations runs in 2015 and 2016 were analyzed to produce time sequences of radial velocity maps of Jupiter, providing very interesting scientific results. First, the maps were analyzed to look for the signature of the zonal winds and to compare them with the measurements made by cloud-tracking. Such measurements by Doppler effect were never made before. The result, albeit affected by measurement biases, showed stable year-to-year wind patterns and coherent results with cloud-tracking measurements, except at the northern part of the Jovian’s equatorial band. The Doppler measurement indeed suggests a wind speed well below the apparent speed in this area, which potentially has implications for the theory of atmospheric dynamics and will be helpful to interpret the Juno (a spacecraft presently orbiting Jupiter) measurements. Frequency analysis of temporal data was undertaken at the end of the thesis. The preliminary results do not seem for the moment to reproduce the SYMPA detection. Further analysis is necessary before concluding if the signal is absent or attenuated.

Neste trabalho é realizado o estudo das etapas de fabricação de um dispositivo eletro-termo-óptico. O dispositivo baseia-se em um interferômetro Mach-Zehnder (IMZ) onde um micro-resistor é colocado em um dos braços do IMZ. Este interferômetro foi construído usando guias de onda ARROW (Anti-Resonant Reflecting Optical Waveguide) onde filmes de oxinitreto de silício e carbeto de silício amorfo hidrogenado foram utilizados como materiais constituintes. Estes materiais foram depositados pela técnica de PECVD (Plasma Enhanced Chemical Vapor Deposition) a baixas temperaturas (~300°C) usando silano (SiH4), nitrogênio (N2), hidrogênio (H2), oxido nitroso (N2O) e metano (CH4) como gases precursores. Para isolar termicamente a região de aquecimento do dispositivo, parte do braço sensor do IMZ foi suspenso através da corrosão superficial do substrato de silício em solução de hidróxido de potássio (KOH). Basicamente o dispositivo termo-eletroóptico utiliza para seu funcionamento o efeito termo-óptico dos materiais constituintes. Neste caso, com a aplicação de uma corrente elétrica no micro-resistor localizado em uma pequena região de um dos braços do IMZ é produzido uma variação na temperatura e no índice de refração dos filmes próximos ao microresistor. Com isto, o aparecimento de uma diferença de fase entre as ondas propagantes dos dois braços do IMZ é ocasionado e, como conseqüência, uma interferência eletromagnética dependente da diferença de fase das ondas propagantes causada pela variação de temperatura é originado. Dessa maneira, é possível fabricar um dispositivo termo-eletro-óptico onde uma variação da corrente aplicada no micro-resistor produz uma alteração da potência óptica na saída do interferômetro. / In this work, a study of the steps to fabricate an electro-thermo-optical device is realized. This device is based in a Mach-Zehnder interferometer (IMZ) where a micro-resistor is placed in one of the IMZ arms. The Mach-Zehnder interferometer was fabricated using Anti-Resonant Reflecting Optical Waveguide (ARROW) where oxinytride and amorphous hydrogenated silicon carbide films were used as constituent materials. These materials were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) technique at low temperatures (~300°C) using silane (SiH4), nitrogen (N2), hydrogen (H2), nitrous oxide (N2O) and methane (CH4) as precursor gases. In order to isolate thermally the heating region of the structure, part of the IMZ sensor arm was suspended by the surface etching of the silicon substrate in KOH solution. Basically, the electro-thermo-optical device is based in the Thermo- Optic Effect of the constituent materials. In this case, with the application of an electrical current in the micro-resistor located in a small region of the sensor arm of the IMZ, a change in the temperature and in the refractive index of the films close to the micro-resistor is produced. So, a phase difference between the electromagnetic waves that travel by the two arms of the IMZ is produced and, as consequence, an electromagnetic interference dependent of the temperature variation is originated. In this way, it is possible fabricate an electro-thermo-optical device where the optical power output depends of the electrical current applied to a micro-resistor.

Neste trabalho é realizado o estudo das etapas de fabricação de um dispositivo eletro-termo-óptico. O dispositivo baseia-se em um interferômetro Mach-Zehnder (IMZ) onde um micro-resistor é colocado em um dos braços do IMZ. Este interferômetro foi construído usando guias de onda ARROW (Anti-Resonant Reflecting Optical Waveguide) onde filmes de oxinitreto de silício e carbeto de silício amorfo hidrogenado foram utilizados como materiais constituintes. Estes materiais foram depositados pela técnica de PECVD (Plasma Enhanced Chemical Vapor Deposition) a baixas temperaturas (~300°C) usando silano (SiH4), nitrogênio (N2), hidrogênio (H2), oxido nitroso (N2O) e metano (CH4) como gases precursores. Para isolar termicamente a região de aquecimento do dispositivo, parte do braço sensor do IMZ foi suspenso através da corrosão superficial do substrato de silício em solução de hidróxido de potássio (KOH). Basicamente o dispositivo termo-eletroóptico utiliza para seu funcionamento o efeito termo-óptico dos materiais constituintes. Neste caso, com a aplicação de uma corrente elétrica no micro-resistor localizado em uma pequena região de um dos braços do IMZ é produzido uma variação na temperatura e no índice de refração dos filmes próximos ao microresistor. Com isto, o aparecimento de uma diferença de fase entre as ondas propagantes dos dois braços do IMZ é ocasionado e, como conseqüência, uma interferência eletromagnética dependente da diferença de fase das ondas propagantes causada pela variação de temperatura é originado. Dessa maneira, é possível fabricar um dispositivo termo-eletro-óptico onde uma variação da corrente aplicada no micro-resistor produz uma alteração da potência óptica na saída do interferômetro. / In this work, a study of the steps to fabricate an electro-thermo-optical device is realized. This device is based in a Mach-Zehnder interferometer (IMZ) where a micro-resistor is placed in one of the IMZ arms. The Mach-Zehnder interferometer was fabricated using Anti-Resonant Reflecting Optical Waveguide (ARROW) where oxinytride and amorphous hydrogenated silicon carbide films were used as constituent materials. These materials were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) technique at low temperatures (~300°C) using silane (SiH4), nitrogen (N2), hydrogen (H2), nitrous oxide (N2O) and methane (CH4) as precursor gases. In order to isolate thermally the heating region of the structure, part of the IMZ sensor arm was suspended by the surface etching of the silicon substrate in KOH solution. Basically, the electro-thermo-optical device is based in the Thermo- Optic Effect of the constituent materials. In this case, with the application of an electrical current in the micro-resistor located in a small region of the sensor arm of the IMZ, a change in the temperature and in the refractive index of the films close to the micro-resistor is produced. So, a phase difference between the electromagnetic waves that travel by the two arms of the IMZ is produced and, as consequence, an electromagnetic interference dependent of the temperature variation is originated. In this way, it is possible fabricate an electro-thermo-optical device where the optical power output depends of the electrical current applied to a micro-resistor.

Este trabalho apresenta um estudo analítico da aplicação do Interferômetro de Gires-Tournois (GTI, Gires-Tournois Interferometer) em linearização de moduladores eletroópticos de intensidade. Os dispositivos abordados consistem, basicamente, em Moduladores Interferométricos do tipo Mach-Zehnder (Mach-Zehnder Modulator, MZM) ou equivalentes, em cujas estruturas foram adicionadas os GTI, como técnica de linearização de sua característica de transmissão. Os moduladores assim obtidos apresentam configurações tais que utilizam estruturas de microondas a parâmetros concentrados, sendo os conceitos apresentados através do ponto de vista de óptica volumétrica. Serão abordados inicialmente os fundamentos de modulação eletroóptica, com ênfase no efeito eletroóptico, conhecimentos esses necessários ao entendimento do processo de modulação eletroóptica. Os moduladores de fase de parâmetros concentrados e parâmetros distribuídos são apresentados. Aborda-se também o modulador eletroóptico tipo Mach-Zehnder, convencionalmente empregado na maioria dos enlaces ópticos atuais e que servirá de referência na avaliação dos modulares com características de baixa distorção. Abordam-se as cavidades GTI em sua estrutura original, derivada do interferômetro de Fabry-Perot, para em seguida analisar seu emprego como modulador eletroóptico de fase, na situação em que a cavidade óptica é preenchida com material eletroopticamente ativo. O modulador linearizado de intensidade, empregando apenas uma célula GTI em versão birrefringente, é apresentada e analisada. Por fim, quantiza-se a distorção desta última configuração, através da determinação de sua faixa dinâmica livre de distorção, SFDR (Spur-Free Dynamic Range) e compara-se com o caso convencional empregando o MZM. Finalmente, são apresentadas as conclusões obtidas ao longo desta tese, bem como algumas sugestões de continuidade dos trabalhos nesta linha de pesquisa.

The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and optical waveguide ring resonator with simple fabrication process. 1.41£gm and 1.49£gm symmetric quantum well InGaAlAs epitaxial wafer is used to fabricate the devices. In the asymmetric Mach-Zehnder Interferometer , we design asymmetric straight waveguides with difference optical path differences £GL=480£gm, 970£gm, and 1900£gm. And asymmetric bend waveguides with curvature radius differences £GR=260£gm, 200£gm, 160£gm, and 100£gm. By this design, we can observe the interference variation of output light. In optical waveguide ring resonator design, we reduce the length of original K=0.15 Multi-Mode Interference (MMI) by stepped-width waveguide. By three-stepped width waveguide MMI design, it can be reduced 33.2% length. We obtain different transmission spectrum by adjusting the splitting ratio of MMI couplers (K=0.85, 0.5, and 0.15) and cascading doudle rings. We use a series of two ring resonators by MMI (K0=0.5,K1=0.15,K2=0.5) to get the FSR=50GHz. In fabrication process, we combined dry etching method with RIE-ICP and wet etching to get smooth sidewall and highly vertical waveguide. In measure , we get the FSR= 41.25 GHZ in throughput port in double ring filters . No signal in drop port was obserred due to material absorption, bending loss, and waveguide loss.

In this study, we focus on the electric optical characteristic of guest/host polymer system. The charge transfer chromophore Wu182 which contain fluorine atom in it was mixed with polymer PMMA and solved in chloroform, while DR1/PMMA served as reference sample. The wu182/PMMA and DR1/PMMA thin films were produced by spin coating. The thin film was poled at the temperature above glass transition temperature until the second harmonic generation signal was present. The poled thin film was placed in one arm of Mach-Zehnder interferometer. Voltage modulation applied to the polymer films can cause phase changes in the interferometer from that we estimate the electro-optic coefficient. From our experiments, we found that modulating frequency had significant influence on the electro-optic effect. The result shows that Wu182 possess large nonlinear optical coefficient. The valid electro-optic coefficient r13 was obtained to be 2.620 pm/V when the frequency was above 6 kHz.

The interferometeric optical fiber sensor has high sensitivity for sound signal. This characteristic is used to design hydrophones. The sound pressure causes the optical fiber to change its shape. So as to induce phase difference between sensing and reference arms. Using the demodulation system, we can get the signal we want. In this thesis, we plan to analyze three different kinds of optic configurations, such as Michelson, compensating Mach-Zehnder, hybrid configuration of Mach-Zehnder and Sagnac interferometers. The mathematical methods are used to compare their characters. We also use software to simulate the relation among sensitivity, delay fiber and frequency character of the Sagnac interferometer. In our experiment, we use PGC modulation technology and compare the results with a standard hydrophone B&K 8103 for calibration. We also measure the dynamic range of proposed three interferometers. The measurement result of this paper is as following: Michelson and compensating type Mach-Zehnder interferometer dynamic range were about 24.90 dB and 13.98 dB, the acoustic signal sensitivity was -201.67 dB re V/1uPa and -205.97 dB re V/Pa, respectively. The dynamic range of the hybrid of Mach-Zehnder and Sagnac type interferometer was 33.67 dB and acoustic signal sensitivity was -212.47 dB re V/1uPa.

The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and Optical waveguide Ring Resonator with simple fabrication process. A 1.49