<p>In this study silicon-germanium quantum dots grown on silicon have been investigated. The aim of the work was to find quantum dots suitable for use as a thermistor material. The quantum dots were produced at KTH, Stockholm, using a RPCVD reactor that is designed for industrial production.</p><p>The techniques used to study the quantum dots were: HRSEM, AFM, HRXRD, FTPL, and Raman spectroscopy. Quantum dots have been produced in single and multilayer structures.</p><p>As a result of this work a multilayer structure with 5 layers of quantum dots was produced with a theoretical temperature coefficient of resistance of 4.1 %/K.</p>

<p>In order to produce x-ray mirrors the Thin Film Physics group at IFM grows Cr/Sc multilayers, with a typical thickness of the individual layers in the range 5-20 Å, and with as many periods as possible (a few hundred).</p><p>The quality of the multilayer interfaces is crucial for their performance as mirrors. For thick layers poly-crystalline multilayers form with an interface quality that is too poor for the use as x-ray mirrors. For thinner layers, however, amorphous layers are formed with a much better quality of the interface.</p><p>The goal of this project was to understand the formation of amorphous multilayers. Unfortunately it is impossible with the present day's theoretical tools to determine the structure of amorph interfaces. It is also impossible to calculate the interface structure for elements with large mismatch in size.</p><p>So we have to construct interface models that are both simple and based on physical arguments.</p>

Abstract Today sheet metal forming is used to make a variety of mass production because it has a high production rate. One of the biggest concerns in sheet metal forming is wear of the tool in form of galling. Galling in sheet metal forming is characterised by an increased tool surface roughness, unstable friction in the forming process and undesirable scratches on the final products. Several ways of ranking materials resistance to galling exist today but only ASM G98 is standardised. Nevertheless, some different methods developed for ranking tool materials’ tendency to galling have also been developed. The aim of this thesis is to develop and improve the Uddeholm Tooling Tribo Test rig located at Uddeholm Tooling AB. The rig, which is a variation of cylinder-on-cylinder test equipment, was improved with a new tool holder, a utilization of the real sheet material counter face and a new data acquisition system and software. The galling was detected using scratches on the sheet, metallographic analysis of the material adhered on the tool specimen, monitoring of coefficient of friction and the standard deviation of the coefficient of friction. The obtained results show difficulties with ranking of tool materials in terms of galling resistance under non-lubricated conditions. The tool steels tested were SVERKER21 and UNIMAX. AISI304-10, DC04 and DOCOL1000DP sheets were used. Additionally a low friction coating of BalinitC on SVERKER21 was also included. All specimens of the tool steels showed signs of galling on every run, only the low friction coating showed a transition in behaviour of friction coefficient corresponding to galling initiation. The standard deviation of the coefficient of friction increased at low loads. A decrease of the test loads led to stability loss of the system detected by an increase in the standard deviation of the coefficient of friction. This might happen because the Kistler platform is originally designed for larger loads. Although, the test rig does not work properly in its present state, the concept looks promising.

En studie i hur känsligheten avtar från ytan hos biosensorer med höga frekvenser presenteras. Med ny teknologi som avancerade elektroakustiska tunnfilms komponenter, så kallade FBARs, blir tidigare outforskade områden som decay längden möjliga att studera. För att undersöka hur frekvenssvaret och känsligheten påverkas av interaktioner långt ut från en sensoryta används proteinkemi. Ett protokoll har optimerats innehållande aktivering med EDC/NHS och fibrinogen för att säkerställa en jämn tjocklek och fördelning av ett adsorberat proteinlager över en yta. Dessa ytor kontrollerades först med hjälp av ellipsometri och sedan i ett QCM instrument. Alla experiment med de högfrekventa FBAR sensorerna utfördes vid Ångströmslaboratoriet i Uppsala där pågående forskning inom området finns. Resultaten bekräftar teorin om en avtagande känslighet i och med ett ökat avstånd från ytan. En experimentell genomförd och beräknad tjocklek för decay längden uppskattades som inte helt stämde överens med den teoretiskt beräknade. En ny term föreslås då frekvenssvaret hos en biosensor planar ut. Detta är en effekt som sker vid dubbla tjockleken av den teoretisk beräknade tjockleken av decay längden och har fått namnet; detection length. Efter denna längd eller gräns observeras en inverterad signal som det än så länge inte finns någon förklaring till. / A study of the sensitivity decrease of biosensors working at high frequencies is presented. With new technology such as film bulk acoustic resonators (FBAR), issues like the decay length is no longer irrelevant theory but may cause limitation in the system as well as it offers new detection possibilities. To investigate the frequency response and sensitivity, layer-on-layer construction chemistry was used. A protocol involving activation with EDC/NHS and coupling chemistry with fibrinogen was optimized to ensure accurate thickness and uniformly distribution of each layer over the surface. Surfaces were characterized using null ellipsometry and the protocol was tested in a traditional quartz crystal microbalance (QCM). Experiments with the FBAR were preformed at the Ångström laboratory in Uppsala were there is ongoing research and development in FBAR technology. The results confirmed the theory of decreasing frequency and sensitivity further out from the surface. An experimental and estimated thickness was calculated which to some extent correlates to the theoretically calculated decay length. A new terminology is suggested when the frequency levels off. It occurs approximately at twice the distance and thickness of the theoretically calculated decay length and is given the name; detection length. Beyond the detection length an inverted signal is observed which cannot yet be explained for.

In order to produce x-ray mirrors the Thin Film Physics group at IFM grows Cr/Sc multilayers, with a typical thickness of the individual layers in the range 5-20 Å, and with as many periods as possible (a few hundred). The quality of the multilayer interfaces is crucial for their performance as mirrors. For thick layers poly-crystalline multilayers form with an interface quality that is too poor for the use as x-ray mirrors. For thinner layers, however, amorphous layers are formed with a much better quality of the interface. The goal of this project was to understand the formation of amorphous multilayers. Unfortunately it is impossible with the present day's theoretical tools to determine the structure of amorph interfaces. It is also impossible to calculate the interface structure for elements with large mismatch in size. So we have to construct interface models that are both simple and based on physical arguments.

Semiconductors and related low-dimensional nanostructures are extremely important in the modern world. They have been extensively studied and applied in industry/military areas such as ultraviolet optoelectronics, light emitting diodes, quantum-dot photodetectors and lasers. The knowledge of growth dynamics of semiconductor nanostructures by metalorganic chemical vapour deposition (MOCVD) is very important then. MOCVD, which is widely applied in industry, is a kind of chemical vapour deposition method of epitaxial growth for compound semiconductors. In this method, one or several of the precursors are metalorganics which contain the required elements for the deposit materials. Theoretical studies of growth mechanism by MOCVD from a realistic reactor dimension down to atomic dimensions can give fundamental guidelines to the experiment, optimize the growth conditions and improve the quality of the semiconductor-nanostructure-based devices. Two main types of study methods are applied in the present thesis in order to understand the growth dynamics of semiconductor nanostructures at the atomic level: (1) Kinetic Monte Carlo method which was adopted to simulate film growths such as diamond, Si, GaAs and InP using the chemical vapor deposition method; (2) Computational fluid dynamics method to study the distribution of species and temperature in the reactor dimension. The strain energy is introduced by short-range valence-force-field method in order to study the growth process of the hetero epitaxy. The Monte Carlo studies show that the GaN film grows on GaN substrate in a two-dimensional step mode because there is no strain over the surface during homoepitaxial growth. However, the growth of self-assembled GaSb quantum dots (QDs) on GaAs substrate follows strain-induced Stranski-Krastanov mode. The formation of GaSb nanostructures such as nanostrips and nanorings could be determined by the geometries of the initial seeds on the surface. Furthermore, the growth rate and aspect ratio of the GaSb QD are largely determined by the strain field distribution on the growth surface. / QC 20100713

In this work, physical phenomena related to the growth and phase formation of alumina, Al2O3, are investigated by experiments and computer calculations. Alumina finds applications in a wide variety of areas, due to many beneficial properties and several existing crystalline phases. For example, the α and κ phases are widely used as wear-resistant coatings due to their hardness and thermal stability, while, e.g., the metastable γ and θ phases find applications as catalysts or catalyst supports, since their surface energies are low and, hence, they have large surface areas available for catalytic reactions. The metastable phases are involved in transition sequences, which all irreversibly end in the transformation to the stable α phase at about 1050 °C. As a consequence, the metastable aluminas, which can be grown at low temperatures, cannot be used in high temperature applications, since they are destroyed by the transformation into α. In contrast, α-alumina, which is the only thermodynamically stable phase, typically require high growth temperatures (~1000 °C), prohibiting the use of temperature sensitive substrates. Thus, there is a need for increasing the thermal stability of metastable alumina and decreasing the growth temperature of the α phase. In the experimental part of this work, hard and single-phased α-alumina thin films were grown by magnetron sputtering at temperatures down to 280 °C. This dramaticdecrease in growth temperature was achieved by two main factors. Firstly, the nucleation stage of growth was controlled by pre-depositing a chromia “template” layer, which is demonstrated to promote nucleation of α-alumina. Secondly, it is shown that energetic bombardment was needed to sustain growth of the α phase. Energy-resolved mass spectrometry measurements demonstrate that the likely source of energetic bombardment, in the present case, was oxygen ions/atoms originating from the target surface. Overall, these results demonstrate that low-temperature α-alumina growth is possible by controlling both the nucleation step of growth as well as the energetic bombardment of the growing film. In addition, the mass spectrometry studies showed that a large fraction of the deposition flux consisted of AlO molecules, which were sputtered from the target. Since the film is formed by chemical bonding between the depositing species, this observation is important for the fundamental understanding of alumina thin film growth. In the computational part of the work, the effect of additives on the phase stability of α- and θ-alumina was investigated by density functional theory calculations. A systematic study was performed of a large number of substitutional dopants in the alumina lattices. Most tested dopants tended to reverse the stability between α- and θ-alumina; so that, e.g., Modoping made the θ phase energetically favored. Thus, it is possible to stabilize the metastable phases by additives. An important reason for this is the physical size of the dopant ions with respect to the space available within the alumina lattices. For example, large ions induced θ stabilization, while ions only slightly larger than Al, e.g., Co and Cu, gave a slight increase in the relative stability of the α phase. We also studied the stability of some of these compounds with respect to pure alumina and other phases, containing the dopants, with the result that phase separations are energetically favored and will most likely occur at elevated temperatures.

The work presented in this thesis deals with experimental and theoretical studies related to the growth of crystalline alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. Many of the possibilities of alumina, and the problems associated with thin film synthesis of the material, are due to the existence of a range of different crystalline phases. Controlling the formation of the desired phase and the transformations between the polymorphs is often difficult. In the experimental part of this work, it was shown that the thermodynamically stable alpha phase, which normally is synthesized at substrate temperatures of around 1000 °C, can be grown using reactive sputtering at a substrate temperature of 500 °C by controlling the nucleation surface. This was done by predepositing a Cr2O3 nucleation layer. Moreover, it was found that an additional requirement for the formation of the α phase is that the depositions are carried out at low enough total pressure and high enough oxygen partial pressure. Based on these observations, it was concluded that energetic bombardment, plausibly originating from energetic oxygen, is necessary for the formation of α alumina (in addition to the effect of the chromia nucleation layer). Further, the effects of impurities, especially residual water, on the growth of crystalline films were investigated by varying the partial pressure of water in the ultra high vacuum (UHV) chamber. Films deposited onto chromia nucleation layers exhibited a columnar structure and consisted of crystalline α-alumina if deposited under UHV conditions. However, as water to a partial pressure of 1x10-5 Torr was introduced, the columnar growth was interrupted. Instead, a microstructure consisting of small, equiaxed grains was formed, and the gamma-alumina content was found to increase with increasing film thickness. When gamma-alumina was formed under UHV conditions, no effects of residual water on the phase formation was observed. Moreover, the H content was found to be low (&lt; 1 at. %) in all films. Consequently, this shows that effects of residual gases during sputter deposition of oxides can be considerable, also in cases where the impurity incorporation in the films is found to be low. In the modeling part of the thesis, density functional theory based computational studies of adsorption of Al, O, AlO, and O2 on different alpha-alumina (0001) surfaces have been performed. The results give possible reasons for the difficulties in growing the α phase at low temperatures through the identification of several metastable adsorption sites, and also provide insights related to the effects of hydrogen on alumina growth. / Report code: LiU-TEK-LIC-2007:1.

<p>Thermistor material can be used to fabricate un-cooled IR detectors their figure of merit is the Temperature Coefficient of Resistance (TCR). Ge dots in Si can act as a thermistor material and they have a theoretical TCR higher than for SiGe layers but they suffer from intermixing of Si into the Ge dots. Ge dots were grown on unstrained or strained Si layers and relaxed or strained SiGe layers at temperatures of 550 and 600°C by reduced pressure chemical vapor deposition (RPCVD). Both single and multilayer structures where grown and characterized. To achieve a strong signal in a thermal detector a uniform shape and size distribution of the dots is desired. In this thesis work, an endeavor has been to grow uniform Ge dots with small standard deviation of their size. Scanning electron microscopy (SEM) and Atomic force microscopy (AFM) have been used to characterize the size and shape distribution of Ge dots. Ge contents measured with Raman spectroscopy are higher at lower growth temperatures. Simulation of TCR for the most uniform sample grown at 600°C give 4.43%/K compared to 3.85%/K for samples grown at 650°C in a previous thesis work.</p><p>Strained surfaces increases dot sizes and make dots align in crosshatched pattern resulting in smaller density, this effect increases with increasing strain.</p><p>Strain from buried layers of Ge dots in a multilayer structure make dots align vertically. This alignment of Ge dots was very sensitive to the thickness of the Si barrier layer. The diameter of dots increase for each period in a multilayer structure. When dots are capped by a Si layer at the temperature of 600°C intermixing of Si into the Ge dot occurs and the dot height decrease.</p>

<p>The work presented in this thesis deals with experimental and theoretical studies related to the growth of crystalline alumina thin films. Alumina, Al₂O₃, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. Many of the possibilities of alumina, and the problems associated with thin film synthesis of the material, are due to the existence of a range of different crystalline phases. Controlling the formation of the desired phase and the transformations between the polymorphs is often difficult.</p><p>In the experimental part of this work, it was shown that the thermodynamically stable alpha phase, which normally is synthesized at substrate temperatures of around 1000 °C, can be grown using reactive sputtering at a substrate temperature of 500 °C by controlling the nucleation surface. This was done by predepositing a Cr₂O₃ nucleation layer. Moreover, it was found that an additional requirement for the formation of the <em>α</em> phase is that the depositions are carried out at low enough total pressure and high enough oxygen partial pressure. Based on these observations, it was concluded that energetic bombardment, plausibly originating from energetic oxygen, is necessary for the formation of <em>α</em> alumina (in addition to the effect of the chromia nucleation layer). Further, the effects of impurities, especially residual water, on the growth of crystalline films were investigated by varying the partial pressure of water in the ultra high vacuum (UHV) chamber. Films deposited onto chromia nucleation layers exhibited a columnar structure and consisted of crystalline <em>α</em>-alumina if deposited under UHV conditions. However, as water to a partial pressure of 1x10^-5 Torr was introduced, the columnar growth was interrupted. Instead, a microstructure consisting of small, equiaxed grains was formed, and the gamma-alumina content was found to increase with increasing film thickness. When gamma-alumina was formed under UHV conditions, no effects of residual water on the phase formation was observed. Moreover, the H content was found to be low (< 1 at. %) in all films. Consequently, this shows that effects of residual gases during sputter deposition of oxides can be considerable, also in cases where the impurity incorporation in the films is found to be low.</p><p>In the modeling part of the thesis, density functional theory based computational studies of adsorption of Al, O, AlO, and O2 on different alpha-alumina (0001) surfaces have been performed. The results give possible reasons for the difficulties in growing the <em>α</em> phase at low temperatures through the identification of several metastable adsorption sites, and also provide insights related to the effects of hydrogen on alumina growth.</p> / Report code: LiU-TEK-LIC-2007:1.