Thesis (MScEng (Electrical and Electronic Engineering))--Stellenbosch University, 2008. / This study investigates high frequency probes through good metrology and computation software such as CST. A factor that can strongly influence the accuracy of measurements, is common mode (CM) current. Therefore, the main focus of this project was the CM current on the outside of an SMA, flanged, probe used for measuring material properties. In the course of the investigation, a clamp-on CM current probe (CP) was calibrated using a CST model and good measurements. This calibration data indicated that the CP was invasive on the measurement setup and could not deliver the accuracy required for the CM current measurement. In light of this, a second method was implemented where the material probe was placed within a cylindrical shield. A cavity was formed between the probe and the walls of the shield in which the electric fields could be simulated and measured. These field measurements allowed measurements to be conducted in both the time- (TD) and frequency-domain (FD). For the TD measurements, a sampling oscilloscope was used. As the basic principle of a sampling oscilloscope differs from its real-time counterpart, this principle, as well as the systematic errors associated with these devices, was explored. The results of the final measurements indicated that the TD results were within an acceptable range of both the FD results, measured on the VNA, and the results predicted by CST. This study shows that CST can be used to simulate complex measurement setups and deliver reliable results in cases where an accurate measurement cannot be guaranteed.

Capacitive sensors are frequently applied to curved target surfaces for precision displacement measurements. In most cases, these sensors have not been recalibrated to take the curvature of the target into consideration. This recalibration becomes more critical as the target surface becomes smaller in comparison to the sensor. Calibration data are presented for a variety of capacitance probe sizes with widely varying geometries. One target surface particularly difficult to characterize is the inner surface of small holes, less than one millimeter in diameter. Although contact probes can successfully measure the inner surface of a hole, these probes are often fragile and require additional sensors to determine when contact occurs. Probes may adhere to the wall of the hole, and only a small number of data points are collected. Direct capacitance measurement of small holes requires a completely new capacitance probe geometry and method of operation. A curved, elongated surface minimizes the gap between the sensor surface and the inner surface of the hole. Reduction in the size of the sensing area is weighed against electronics limitations. The performance of a particular probe geometry is studied using computer simulations to determine the optimal probe design. Multiple, overlapping passes are deconvolved to reveal finer features on the surface of the hole. A prototype sub-millimeter capacitance probe is machined from tungsten carbide, with four additional material layers added using ebeam deposition. Several techniques are studied to remove these layers and create a sensing area along one side of the probe. Both mechanical processes and photolithography are employed.

Our work falls within the field of high resolution spectroscopy of gas phase molecules in the far-, mid- and near-infrared ranges. Its guiding line are absorption spectral intensities, dealt with experimentally and theoretically. In particular, we developed in our laboratory the field of intensities measurements of vibration-rotation lines using Fourier transform spectrometers, with a precision of about 0.5 % and an accuracy of 2-4 % for chemically stable species. We study chemically stable (CO2, N2O, C2H6, OCS, C2H2) and unstable (HOCl, HCOOH et HNO3) compounds. We also measure infrared absorption cross section spectra for CFC replacements. Some of our measured intensities, of direct interest for the study of planetary atmospheres, are now incorporated in international spectroscopic databases. Others are used to develop global theoretical models of molecules, in relationship with intra-molecular dynamics./Nos travaux de recherches relèvent de la spectroscopie à haute résolution de molécules en phase gazeuse dans les domaines de l’infrarouge lointain, moyen et proche. Ils ont pour ligne directrice les intensités spectrales d’absorption, abordées expérimentalement et théoriquement. Nous avons en particulier développé dans notre laboratoire le domaine de la mesure d’intensités d’absorption de raies de vibration-rotation à l’aide de spectromètres à transformée de Fourier. Nous réalisons ces mesures avec une précision d’environ 0.5 % et une exactitude d'environ 2-4 % pour les espèces chimiquement stables. Nous étudions des composés chimiquement stables (CO2, N2O, C2H6, OCS, C2H2) et instables (HOCl, HCOOH et HNO3). Nous mesurons également des spectres de sections efficaces d’absorption infrarouge pour des substituts des chlorofluorocarbures (CFC). Certaines de nos mesures d’intensité, d’intérêt direct pour l’étude d’atmosphères planétaires, sont aujourd’hui incorporées dans les bases de données spectroscopiques internationales. D’autres sont utilisées pour développer des modèles théoriques globaux de molécules, en liaison avec la dynamique intramoléculaire.

The anterior refracting surface of the eye is the thin tear film that forms on the surface of the cornea. When a contact lens is on worn, the tear film covers the contact lens as it would a bare cornea, and is affected by the contact lens material properties. Tear film irregularity can cause both discomfort and vision quality degradation. Under normal conditions, the tear film is less than 10 microns thick and the thickness and topography change in the time between blinks. In order to both better understand the tear film, and to characterize how contact lenses affect tear film behavior, two interferometers were designed and built to separately measure tear film behavior in vitro and in vivo. An in vitro method of characterizing dynamic fluid layers applied to contact lenses mounted on mechanical substrates has been developed using a phase-shifting Twyman- Green interferometer. This interferometer continuously measures light reflected from the surface of the fluid layer, allowing precision analysis of the dynamic fluid layer. Movies showing this fluid layer behavior can be generated. The fluid behavior on the contact lens surface is measured, allowing quantitative analysis beyond what typical contact angle or visual inspection methods provide. The in vivo interferometer is a similar system, with additional modules included to provide capability for human testing. This tear film measurement allows analysis beyond capabilities of typical fluorescein visual inspection or videokeratometry and provides better sensitivity and resolution than shearing interferometry methods. The in vitro interferometer system has measured the formation and break up of fluid layers. Different fluid and contact lens material combinations have been used, and significant fluid layer properties have been observed in some cases. This dissertation discusses the design of this interferometer along with analysis methods used. Example measurement results of different contact lens are presented highlighting the capabilities of the instrument. This dissertation also provides the in vivo interferometer design, along with the considerations that must be taken when designing an interferometer for on-eye diagnostics. Discussions include accommodating eye movement, design of null optics for a range of ocular geometries, and laser emission limits for on-eye interferometry in general.

Dimensional measurement plays a critical role in product development and quality control. With the continuously increasing demand for tighter tolerances and more complex workpiece shapes in the industry, dimensional metrology often becomes the bottleneck of taking the quality and performance of manufacturing to the next level. As one kind of the most useful and powerful measuring instruments, coordinate measuring machines (CMMs) are widely employed in manufacturing industries. Since the accuracy and efficiency of a CMM have a vital impact on the product quality, productivity and manufacturing cost, the evaluation and improvement of CMM performance have always been important research topics since the invention of CMM. A novel Advanced Virtual Coordinate Measuring Machine (AVCMM) is proposed against such a background. The proposed AVCMM is a software package that provides an integrated virtual environment, in which user can plan inspection strategy for a given task, carry out virtual measurement, and evaluate the uncertainty associated with the measurement result, all without the need of using a physical machine. The obtained estimate of uncertainty can serve as a rapid feedback for user to optimize the inspection plan in the AVCMM before actual measurement, or as an evaluation of the result of a performed measurement. Without involving a physical CMM in the inspection planning or evaluation of uncertainty, the AVCMM can greatly reduce the time and cost needed for such processes. Furthermore, as the package offers vivid 3D visual representation of the virtual environment and supports operations similar to a physical CMM, it does not only allow the user to easily plan and optimise the inspection strategy, but also provide a cost-effective, risk-free solution for training CMM operators. A modular, multitier architecture has been adopted to develop the AVCMM system, which incorporates a number of functional components covering CMM and workpiece modelling, error simulation, inspection simulation, feature calculation, uncertainty evaluation and 3D representation. A new engine for detecting collision/contact has been developed and utilized, which is suitable for the virtual environment of simulated CMM inspections. A novel approach has been established to calculate errors required for the error simulation, where the data are obtained from FEA simulations in addition to conventional experimental method. Monte Carlo method has been adopted for uncertainty evaluation and has been implemented with multiple options available to meet different requirements. A prototype of the proposed AVCMM system has been developed in this research. Its validity, usability and performance have been verified and evaluated through a set of experiments. The principles for utilising the AVCMM in practical use have also been established and demonstrated. The results have indicated that the proposed AVCMM system has great potentials to improve the functionalities and overall performance of CMMs.

Several next generation astronomical telescopes or large optical systems utilize aspheric/freeform optics for creating a segmented optical system. Multiple mirrors can be combined to form a larger optical surface or used as a single surface to avoid obscurations. In this paper, we demonstrate a specific case of the Daniel K. Inouye Solar Telescope (DKIST). This optic is a 4.2 m in diameter off-axis primary mirror using ZERODUR thin substrate, and has been successfully completed in the Optical Engineering and Fabrication Facility (OEFF) at the University of Arizona, in 2016. As the telescope looks at the brightest object in the sky, our own Sun, the primary mirror surface quality meets extreme specifications covering a wide range of spatial frequency errors. In manufacturing the DKIST mirror, metrology systems have been studied, developed and applied to measure low-to-mid-to-high spatial frequency surface shape information in the 4.2 m super-polished optical surface. In this paper, measurements from these systems are converted to Power Spectral Density (PSD) plots and combined in the spatial frequency domain. Results cover 5 orders of magnitude in spatial frequencies and meet or exceed specifications for this large aspheric mirror. Precision manufacturing of the super-polished DKIST mirror enables a new level of solar science.

There is an increasing trend towards miniaturization of micro features as well as micro parts. In order to accurately produce these components and the miniaturized features on them, accurate measurement of the component dimensions is required. However, there are limitations in the dimensional measurement of miniature components: micro-probes and Micro coordinate machines (micro-CMMs) suitable for micro-feature measurement are expensive and fragile so it can be difficult to justify the cost for dimensional verification of batch-produced parts (in many cases miniature components are batch-produced). Therefore, a new cost-effective way for dimensional measurement of miniature components is needed. With this in mind, this thesis describes the development of a novel, three-dimensional measurement system using a rotating wire as a probe and acoustic emissions for contact sensing. This study presents a novel concept of three-dimensional measurements using a rotating wire as a probe and acoustic emission for contact sensing. Experimental results show that the probing system can measure a part with high repeatability. A controller algorithm has been developed for automated scanning within a machine tool. The performance is verified against calibration artifacts. The main contributions of this thesis are as follows: firstly, the traditional contact and non-contact micro coordinate measuring machines including sensing techniques and acoustic emission sensing are reviewed, and a clear set of knowledge gaps are identified in these fields. Secondly, a novel concept of three-dimensional measurements using a rotating wire as a probe tip and acoustic emission for contact sensing is introduced. The operation and measurements of the rotating micro probing based on acoustic emission (AE) sensing are validated experimentally. Initially, the ability of the rotating microprobe tip based on AE sensing to counteract the measured surfaces interaction rubbing is investigated. Other areas of validation are in the determination of the probing point repeatability, the straightness, and probe tip calibration. Thirdly, the acoustic emission signal and its characterizations of the probe tip touches are studied. The behavior of the rotating probe tip focusses on the threshold, touching time and as well as measured materials type that has an effect on probing accuracy. Finally, the estimated effective diameter and approximation threshold are modeled. This work is directly aimed at ensuring that the developed rotating probe tip based on AE sensing is capable of operating in an industrial metrology environment. It is concluded that the developed rotating probe tip based on AE sensing will be able to address the current needs of the micro-CMM community. On the other hand, it is possible that the rotating wire probe tip based on AE sensing can measure micro holes less than the achieved in this work, further increasing its usefulness. / Graduate / elfurjan@uvic.ca

Le polissage mécano-chimique (CMP) en raison de spécifications sévères, telles que l‘aplanissement de la surface à ± 5 nm, est devenu un enjeu crucial pour le développement des nœuds technologiques 14 nm et au-delà. Les méthodes actuelles de caractérisation de la topographie, limitées en termes de taille de surface analysée, évaluent l'efficacité des procédés sur des structures nommées boites de mesure. Ces structures mesurent 100 µm x 50 µm et sont situées entre les circuits intégrés. Elles sont donc non représentatives de la topographie de la puce et, de ce fait, des procédés de métrologie topographique de la puce sont requis. Dans un premier temps, nous montrons que la microscopie interférométrique est capable de caractériser la nano-topographie sur des distances centimétriques avec une résolution latérale micrométrique. La caractérisation par microscopie interférométrique de la nano-topographie induite par les procédés de CMP montre que les méthodes actuelles fournissent des valeurs topographiques non représentatives de la puce. Une méthodologie associée à ce nouveau type de caractérisation est proposée et discutée. Dans un deuxième temps, nous montrons que la diffusion de la lumière permet un contrôle rapide (trois minutes par plaques) et non destructif de variations nanométriques de la topographie de grilles de quelques dizaines de nanomètres de large sur toute la plaque. / Chemical Mechanical Polishing (CMP), because of narrower specifications, as surface planarization at ± 5 nm, is becoming a critical process for the development of the 14 nm technology node and beyond. Habitual topographic characterization techniques, limited in acquisition area, appraise processes efficiency through structures called test boxes. Those structures have a size equal to 100 µm by 50 µm and they are located, in the scribe lines, between the chips. Consequently, they are not representative of the die level topography and die level topographic metrology processes are required. In a first time, we show that interferometric microscopy is able to characterize nano-topography over centimetric distances with micrometric lateral resolution. Interferometric microscopy characterization of CMP processes induced nano-topography demonstrates that usual methods provide non representative die level topography values. A new characterization kind related methodology is proposed and discussed. In a second time, we show that diffused light measurement allows fast (three minutes/wafer) and non-destructive control of gate nano-topography variations for pattern widths of some tenths of nanometer.

Doctor of Philosophy / Department of Physics / Brian R. Washburn / Optical frequency combs produced by mode-locked fiber lasers are useful tools for high precision frequency metrology and molecular spectroscopy in a robust and portable format. We have specifically investigated erbium doped fiber mode-locked lasers that use single-walled carbon nanotubes as a saturable absorber. We have, for the first time, developed and phase- stabilized a carbon nanotube fiber laser (CNFL) frequency comb. The carbon nanotube saturable absorber, which was fabricated using an optically driven deposition method, permits a high repetition frequency (>150 MHz) since an optical nonlinearity of fibers is not used for mode-locking. The CNFL comb combined with a parabolic pulse erbium doped fiber amplifier (EDFA) has shown a compact, robust, and cost-effective supercontinuum source. The amplified pulse from the parabolic pulse EDFA was compressed with a hollow-core photonic bandgap fiber, which produced a wave-breaking-free pulse with an all-fiber set-up. The stabilized comb has demonstrated a fractional instability of 1.2 ×10[superscript]-11 at 1 sec averaging time, the reference-limited instability. We have performed optical frequency metrology with the CNFL comb and have measured an optical frequency, P(13) which is a molecular overtone transition of C2H2. The measured frequency has shown a good agreement with the known value within an uncertainty of 10 kHz. In order to extend the application of the CNFL comb such as multi-heterodyne dual comb spectroscopy, we have investigated the noise of the CNFL comb and particularly, the broad carrier envelope offset frequency (f[subscript]0) linewidth of the CNFL comb. The primary noise source is shown to be white amplitude noise on the oscillator pump laser combined with the sensitivity of the mode-locked laser to pump power fluctuations. The control bandwidth of f[subscipt]0 was limited by the response dynamics of the CNFL comb. The significant reduction of comb noise has been observed by implementing a phase-lead compensation to extend control bandwidth of the comb and by reducing the pump relative intensity noise simultaneously. Therefore the f[subscipt]0 linewidth has been narrower from 850 kHz to 220 kHz. The integrated phase noise for the f[subscipt]0 lock is 1.6 radians from 100 Hz to 102 kHz.

[pt] Objetivos: Propor um modelo de avaliação da qualidade de gestão, com base nos critérios de excelência utilizados no Prêmio Nacional de Qualidade (PNQ), em organizações não governamentais (ONG), ditas do Terceiro Setor, que atuam no âmbito da assistência social e que tenham abrangência municipal. Contextualização: A presente pesquisa de mestrado se desenvolve no marco de resultados de estudos do impacto das ações empreendidas por organizações não governamentais, que apontam para a ineficiência dessa ação. A pesquisa visa, suprir essa vulnerabilidade e, por conseguinte, melhorar a qualidade da intervenção social empreendida pelas ONGs no Brasil. Metodologia: (i) análise e pesquisa bibliográfica sobre os métodos de avaliação de gestão aplicáveis às organizações do Terceiro Setor; (ii) estudo do PNQ, particularmente seus critérios de excelência, os quais no âmbito da pesquisa foram subdivididos em itens para os quais são avaliados os níveis de práticas de cada aspecto de gestão; (iii) construção de proposta de métrica e metodologia para avaliação da qualidade de organizações não governamentais, incorporando critérios adaptados do PNQ e critérios desenvolvidos a partir de análise de literatura e (iv) realização de teste para validação do modelo em uma ONG. Conclusões: Fazendo uso de métricas e validando-as segundo preceitos metrológicos, o estudo contribui para a mensuração da qualidade em organizações não governamentais, colaborando assim para a melhoraria de seu desempenho através da superação dos pontos frágeis detectados nos processos de avaliação internos de sua gestão. / [en] Objective: Propose an evaluation model of management quality of nongovernmental organizations (NGO), the so-called Third Sector, in the area social work and with municipal scope, based on the criteria of excellence utilized by the National Quality Prize (NQP). Context: The development of this masters` research takes place in the framework of the results of studies on the impact of non- governmental organizations activities which point out their evasiveness and inefficiency. The research aims to fill in this vulnerability and, therefore, improve the quality of the social intervention carried out by the NGOs in Brazil. Methodology: (i) Bibliographic research and analysis of management evaluation methods applicable to Third Sector organizations; (ii) study of the NQP, particularly its excellence criteria, which in the scope of the research were subdivided in items and for each an evaluation was made of levels of practice regarding management; (iii) construction of a proposal of a metric and a methodology for quality evaluation in non-governmental organizations incorporating criteria adapted from NQP and criteria coming out of the literature analysis and (iv) test in a NGO to validate the model. Conclusions: By employing metrics and validating them in accordance with metrological precepts, the study contributes to the measurement of quality in non-governmental organizations, thus collaborating to improvements in their performance through the overcoming of those fragile points identified in the processes of internal evaluation of their management.