Among the MEMS field, the design and simulation of piezoelectric micro-actuators are difficult as compared to thermal micro-actuators and electrostatic micro-actuators. The main reason of the piezo-electric material coupling effect is difficult to calculate. However the piezo-electric material has several advantages and characteristics for designing micro-actuators. Moreover, the design is usually done by the experimental or try-and-error method which is not so effective. It should be noted that there is not a simple method already developed for the design and simulation of the piezo-electric micro-actuators. In this research we proposed to use the software of ANSYS for the simulation of piezo-electric micro-pump. Simulation of force output of piezo-micro-pump can use ANSYS software to establish the simulation system of piezo-micro-pump. The micro-pump will have different resonance frequency, back-pressure and fluid due to piezo-electric characteristic. In this study, the author used a square, rectangle and circle geometric shape to simulate the result, each geometric shape has four different kinds of size. As a result, there are twelve groups of different simulation results. We are able to using the chart to present and explain the relation between resonance frequency and displacement.

Les dispositifs de stimulation tactile sont des systèmes destinés à fournir un retour sensoriel à leurs utilisateurs. Ils enrichissent les interfaces homme-machine dans les applications de réalité virtuelle ou augmentée. Ce mémoire traite de l’apport des microsystèmes électromécaniques (MEMS) actionnés magnétiquement à la réalisation d’interfaces de stimulation tactile facilement intégrables.Un état de l’art des solutions d’actionnement mises en œuvre dans les dispositifs existants est proposé, ainsi qu'une définition des besoins pour les applications visées. Les solutions retenues sont basées sur l’actionnement magnétostatique.Les premiers prototypes d’interfaces de stimulation tactile se présentent sous la forme d'un réseau de 4x4 actionneurs élastomériques hybrides avec un pas de 2 mm, combinant microfabrication et techniques de fabrication conventionnelles. La conception et l’élaboration de ces micro-actionneurs est présentée en détail. L'actionnement impulsionnel permet d'atteindre des amplitudes de vibration importantes (jusqu'à 200 µm) et des forces élevées (32mN par actionneur). Des tests sensoriels confirment enfin leur efficacité. Des micro-bobines ont aussi été développées afin de répondre aux besoins des micro-actionneurs magnétiques, ainsi qu'au cahier des charges des interfaces de stimulation tactile. Diverses configurations de micro-bobines adaptées à l'actionnement de puissance sont proposées et réalisées par électrodéposition. Des micro-actionneurs basés sur ces bobines intégrées ont alors été réalisés, puis caractérisés. L'utilité des bobines pour les micro-actionneurs de puissance est alors discutée face aux solutions d’actionnement hybride / Tactile display devices are systems bound to provide a tactile feedback to their users. They improve human-machine interfaces in the fields of virtual or augmented reality. This report deals with the contribution of magnetically actuated micro-electro-mechanical systems (MEMS) to the elaboration of easily integrable tactile display devices.A state of the art of actuation techniques used in existing devices is proposed, along with a requirements analysis for tactile applications. Magnetostatic actuation was considered for these needs.First tactile display device prototypes are designed as a network of 4x4 hybrid elastomeric micro-actuators with a 2 mm pitch, and combined microfabrication and conventional fabrication techniques.The conception and elaboration of these micro-actuators is detailed. High vibration amplitudes can be reached using pulse actuation (up to 200 µm), with instantaneous forces of 32 mN per actuator. Sensitive tests were also achieved in order to confirm their efficiency.Micro-coils were also developed in order to fulfill the magnetic micro-actuators needs, and meet the requirements for tactile display devices. Various micro-coil configurations suitable for power actuation are proposed and elaborated by electrodeposition. Micro-actuators based on elastomeric membranes were fabricated and characterized. The contribution of these micro-coils for micro-actuation is discussed face with hybrid approaches

L’utilisation de systèmes robotiques pour la navigation dans des zones confinées pose des défis intéressants sur les thèmes de conception, de modélisation et de commande, particulièrement complexes pour les applications médicales. Dans ce contexte, nous introduisons un nouveau concept de robots continus, fortement prometteurs pour des applications biomédicales, dont la forme complexe, la dextérité et la capacité de miniaturisation constituent des avantages majeurs pour la navigation intra corporelle. Parmi cette classe, les robots à tubes concentriques (RTC), qui constituent notre point de départ, sont améliorés grâce à un actionnement embarqué innovant. Nos travaux s’articulent autour de deux thématiques aux frontières de l’état de l’art. D’une part, nous avons proposé une modélisation générique et conduit une analyse cinématique approfondie de robots continus basés sur l’architecture des RTC standards et ceux avec changement de courbure de leurs tubes dans deux variantes : courbures unidirectionnelle et bidirectionnelle. D’autre part, leur commande cartésienne en pose complète est introduite avec une validation expérimentale sur un prototype développé de RTC standard, ainsi que les simulations numériques d’une loi de commande comprenant la gestion de la redondance des RTC à changement de courbure. D’autre part, nous avons effectué la synthèse, la caractérisation et la mise en œuvre de micro-actionneurs souples basés sur les polymères électro-actifs (PEA), intégrés pour la première fois dans un robot continu.Ainsi, l’asservissement visuel d’un prototype de robot télescopique souple est proposé avec des précisions atteignant 0.21 mm sur différentes trajectoires. / Major challenges need to be risen in order to perform navigation in confined spaces with robotic systems in terms of design, modeling, and control, particularly for biomedical applications. Indeed,the complex shape, dexterity, and miniaturization ability of continuum robots can help solving intracorporeal navigation problems. Within this class, we introduce a novel concept in order to augment the concentric tube robots (CTR) with embedded actuation. Our works hinge on two majorcutting-edge thematics. On the one hand, we address modeling and kinematics analysis of standard CTR as well as variable curvature CTR with their two varieties : single and double bending directions.Furthermore, we perform the experimental validation of Cartesian control of a CTR prototype, anda task hierarchy based control law for redundancy resolution of CTR with variable curvatures. Onthe other hand, we develop the synthesis, the characterization, and the integration of soft microactuatorsbased on electro-active polymers (EAP) for the first time in a continuum robot. Thus, thevisual servoing of a telescopic soft robot is performed with precisions down to 0.21 mm following different trajectories.

Man’s desire to replicate/mimic the nature’s creation provided an impetus and inspiration to the rapid advancements and progress made in the sensors and actuators technology. A normal human being has five basic sensory organs, which helps and guides him in performing the routine tasks. This underlines the importance of basic sensory organs in a human life. In a similar fashion, sensors and actuators are of paramount importance for most of the science and engineering applications. The aim of the present thesis work is to explore the application of piezoelectric ZnO thin films deposited on a flexible substrate for the development of sensors and actuators. Detailed study was performed on the suitability of three different flexible substrates namely Phynox, Kapton and Mylar. However, Phynox alloy substrate was found to be a suitable substrate material for the above mentioned applications. Sputtering technique was chosen for the deposition of ZnO thin films on to Phynox substrate. The necessary process parameters were optimized to achieve good quality piezoelectric thin films. In the present work, sensors have been developed by utilizing the direct piezoelectric effect of ZnO thin films deposited on Phynox alloy substrate. These includes a flow sensor for gas flow rate measurement, impact sensor for non-destructive material discrimination study and a Thin Film Sensor Array (TFSA) for monitoring the impact events. On the other hand, using the converse piezoelectric effect of ZnO thin films, actuators have also been developed. These include a thin film micro actuator and a Thin Film Micro Vibrator (TFMV) for vibration testing of micro devices. The thesis is divided into following seven chapters. Chapter 1: This chapter gives a general introduction about sensors and actuators, piezoelectric thin films, flexible substrates, thin film deposition processes and characterization techniques. A brief literature survey of different applications of piezoelectric thin films deposited on various flexible substrates in device development is presented. Chapter 2: A novel flexible metal alloy (Phynox) and its properties along with its applications are discussed in this chapter. ZnO thin films were deposited on Phynox substrate by Rf reactive magnetron sputtering technique. The sputtering process parameters such as: Ar:O2 gas ratio, substrate temperature and RF power were optimized for the deposition of good quality piezoelectric ZnO thin films. The deposited ZnO thin films were characterized using XRD, SEM, AFM and d31 coefficient measurement techniques. Chapter 3: It reports on the comparative study of properties of piezoelectric ZnO thin films deposited on three different types of flexible substrates. The substrate materials employed were a metal alloy (Phynox), polyimide (Kapton), and polyester (Mylar). Piezoelectric ZnO thin films deposited on these flexible substrates were characterized by XRD, SEM, AFM and d31 coefficient measurement techniques. A vibration sensing test was also performed for the confirmation of good piezoelectric property. Compared to the polymer flexible substrates, the metal alloy flexible substrate (Phynox) was found to be more suitable for integrating ZnO thin film for sensing applications. Chapter 4: The development of a novel gas flow sensor for the flow rate measurement in the range of L min-1 is presented in this chapter. The sensing element is a Phynox alloy cantilever integrated with piezoelectric ZnO thin film. A detailed theoretical analysis of the experimental set–up showing the relationship between output voltage generated and force at a particular flow rate has been discussed. The flow sensor is calibrated using an in-house developed testing set-up. Chapter 5: This chapter is divided into two sections. Section 5.1 reports on the development of a novel packaged piezoelectric thin film impact sensor and its application in non-destructive material discrimination studies. Different materials (Iron, Glass, Wood and Plastic) were successfully discriminated by using the developed impact sensor. The output response of impact sensor showed good linearity and repeatability. The impact sensor is sensitive, reliable and cost-effective. Section 5.2 reports on the development of a Thin Film Senor Array (TFSA) for monitoring the location and magnitude of the impact force. The fabricated TFSA consists of evenly distributed ZnO thin film sensor array. Chapter 6: It consists of two sections. Section 6.1 reports on the fabrication of micro actuator using piezoelectric ZnO thin film integrated with flexible Phynox substrate. A suitable concave Perspex mounting was designed for the actuator element. The actuator element was excited at different frequencies for the supply voltages of 2V, 5V and 8V. The developed micro actuator has the potential to be used as a micro pump for pumping nano liters to micro liters of fluids. Section 6.2 reports the design and development of a portable ready to use Thin Film Micro Vibrator (TFMV). The TFMV is capable of providing the vibration amplitude in the range of nanometer to micrometer. A thin silicon diaphragm was used as a test specimen for its vibration testing studies using the developed TFMV. The TFMV is light-weight and have internal battery, hence no external power supply is required for its functioning. Chapter 7: The first section summarizes the salient features of the work presented in this thesis. In the second section the scope for carrying out the further work is given.