Acoustic wave sensors have proven useful in many fields as primarily mass sensitive devices capable of responding to small environmental perturbations. The focus of this dissertation is the development of a new type of surface acoustic wave device with application to material property measurement, and biological and chemical sensing. This device is a combination of three independent acoustic wave devices with these waves propagated across the same area, while retaining independence of actuation and sensor function. The development of a complete sensor system, and its use and operation are presented for several example cases of chemical and biomarker sensing, and sample manipulation. These include experimental and theoretical studies for organic vapor sensing, biological moiety sensing, acoustic streaming to remove loosely bound material, and optimization of designs for these applications.

Spectral element based numerical solvers are developed to simulate electrokinetically driven flows for micro-fluidic applications. Based on these numerical solvers, basic phenomena and devices for electrokinetic applications in micro and nano flows are systematically studied. As a first application, flow and species transport control in a grooved micro-channel using local electrokinetic forces are studied. Locally applied electric fields, zeta potential patterned grooved surfaces, and geometry are manipulated to control mixed electroosmotic/pressure driven flow in the grooved micro-channel. The controlled flow pattern enables entrapment and release of prescribed amounts of scalar species in the grooves. As another application, hydrodynamic/ electrokinetic focusing in a micro-channel is studied. External electric field, flow rate of pressure driven flow, and geometry in the micro-channel are manipulated to obtain the focusing point, which led to determination of the electrophoretic mobility and (relative) concentration of dilute mixtures. This technique can be used to identify and detect species in dilute mixtures.

The field of microfluidics has the potential to provide a number of products to better everyday life, but is still not well understood. In previous research performed in the field, microfluidics has been shown to exhibit behavior different from what would be expected through normal pipe flow theory. While some research has shown that fluid flow through microchannels does conform to the theoretical flow mechanics, and thus can be predicted and understood through use of well-known relations; other research performed has indicated that fluid flow through microchannels experiences higher or lower pressure losses than would be expected with macro scale theory. This work strives to further explore and explain this anomaly by focusing on simple straight rectangular channels of varying hydraulic diameters from 24 µm to 88 µm, in order to form a more basic understanding for fluid flow in microchannels. Water was pumped through each of these channels at a number of different flow rates, and the static pressure was measured in two locations, a set length apart. The measured pressure loss over this length for each flow rate was then recorded and analyzed to provide relations between pressure loss and hydraulic diameter. Through the data obtained in this study, microfluidic flow of Reynolds numbers greater than 40 and in channels as small as 48 µm in diameter experienced pressure losses predicted from macroscale theory. Below these values, the data was more random, but still showed some conformance to theory. A clear relationship between measured pressure loss and hydraulic diameters over the entire range of channels was also found for two different flow rates. It is hoped that the data obtained will provide a better understanding of microfluidics and pave the way for potential applications to be realized.

No description available.

The flow profiles of pressure-driven and electro-kinetic driven flows were compared for a microfluidic chip. It was found that the pressure-driven flow had a parabolic profile while the electro-kinetic flow had a plug shaped flow profile. The measured velocities were similar to those determined by the Poiseuille flow model and the Helmholtz-Smoltchowski equation. Flow uniformity is very important for control in microfluidic mixers. Parabolic flow profiles lead to inconsistent reactions while the more uniform plug shape flow allow for a more steady reaction across the channel. Previous work had been performed to measure the flow of a solution of fluorescent polystyrene beads in PDMS channels using a laser confocal microscope. This showed that particles easily stuck to the channel making it difficult to measure over time. In addition, bubble formation in the channel made measuring velocities difficult. Current work used a LabSmith Video Synchronized microscope with software to measure the flow rates at different areas of the channel. Solutions of fluorescent polystyrene beads were used to visually observe the flow within a channel under a microscope. Four different channels were used for the pressure-driven flows of varying dimensions and materials. The channel with the best measured profile was also measured under electro-kinetic flow. A LabSmith High Voltage Sequencer was used to apply a voltage across the channel for electro-kinetic measurements. This research confirmed the different flow profiles under pressure-driven and electro-kinetic driven flow. Future work can be done to determine how this effects mixing in the channels.

Il y a à l'heure actuelle un grand besoin en systèmes et composants agiles pour les dispositifs front-end RF. Dans cette thèse, deux approches innovantes sont développées pour la conception de tels dispositifs RF. Dans un premier temps, un mécanisme de reconfiguration micro-mécanique est développé. Cette approche vise à contrôler la hauteur d'un gap d'air inséré dans le substrat de composants microrubans afin d'en modifier les dimensions électriques. Les choix de conception et la fabrication d'un déphaseur à ligne micro-ruban ainsi que d'une antenne accordable en fréquence sont discutés. Une solution d'actionnement piézoélectrique basse tension (+/- 30 V) est retenue. La figure de mérite obtenue dans le cas du déphaseur atteint jusqu'à 313 °/dB ce qui dépasse l'état de l'art en matière de déphasage analogique. Dans le cas de l'antenne, le potentiel d'agilité en fréquence atteint 35 % autour d'une fréquence centrale de 55 GHz. Contrairement aux solutions classiques à base de semiconducteurs ou de RF-MEMS, ce mécanisme de reconfiguration n'impacte pas les performances de l'antenne dont l'efficacité de rayonnement est proche de 94 %. Dans un second temps, c'est un mécanisme micro-fluidique qui est étudié. L'agilité en fréquence d'antennes est créée par l'écoulement successif de liquides de permittivités différentes dans des micro-canaux intégrés au substrat. L'accord en fréquence atteint alors la très large ampleur de 51 % pour une fréquence centrale de 22 GHz. Cette étude s'accompagne de la recherche et caractérisation diélectrique de plusieurs fluides dans l'optique d'augmenter aussi bien la plage d'accord en fréquence que les performances de rayonnement des antennes / As wireless networks evolve, the frequency bands they exploit multiply. Frequency multiplexing, beamforming and tracking, networks interoperability, those mutations increase the need for agility and tunability in the RF-front end systems. In this thesis, two innovative approaches for the design of tunable RF components are studied. First, a micro-mechanical reconfiguration mechanism is developed. This approach means to control the height of an air gap within the substrate of microstrip components in order to control their electrical dimensions. Considerations for the design and fabrication of a phase-shifter and a frequency tunable patch antenna are made and a low voltage piezoelectric actuation (+/- 30 V) is chosen. The phase-shifter figure of merit reaches up to 312 °/dB which is beyond the state of the art in terms of analogic phase-shifting. Regarding the antenna, the frequency tuning potentially reaches up to 35 \% of a central frequency of 55 GHz. Unlike the classic solidstate or RF-MEMS based solutions, this reconfiguration mechanism does not impact the radiation performance of the antenna whose radiation efficiency is 94 \%. In a second approach, a micro-fluidic solution is studied. Frequency tuning capability is created in different antennas by the flow of successive liquids with different permittivities in integrated micro-channels. A large frequency tuning of 51 \% for a central frequency of 22 GHz is achieved. This study goes along with the search and characterization of several fluids with the objective of increasing both the frequency shift and the radiation performance of those antennas

No description available.

Active membranes with switchable pores that are based on hydrogels can be used to measure the cell size distribution in blood samples. The system investigated in the present research is based on a polyethylene terephthalate (PET) membrane that is surface polymerized with poly (N-isopropyl acrylamide) (PNiPAAm) to form active pores of arbitrary geometry. The PET membrane provides the functionality of a backbone for mechanical rigidity, while the soft PNiPAAm hydrogel forms the active pores. Modeling and simulation of the active hydrogel behavior proved to adequately predict the opening and closing of the pores under application of an activating stimulus, e.g. temperature. The applied model is called Temperature-Expansion-Model and uses the analogy of thermal expansion to model the volume swelling of hydrogels. The Normalized Extended Temperature-Expansion-Model can englobe arbitrary hydrogels and large geometric displacements. Studies of pore opening - performed by using commercial finite element tools - show good agreement of the experimentally measured shape change of active pores. Based on these studies, the particulate fluid flow through the switchable pores is analyzed. Through application of a membrane process, i.e. a given variation of applied pressure and switching stimulus for the hydrogel, the size profile of the blocking particles can be measured directly using the flux difference under constant pressure. This allows the measurement of the cell size distribution in blood samples, e.g. to detect circulating tumor cells or anomalies in the distribution that hint to anemia.

3-dimensional imaging often requires substantial effort since information along the optical axis is not straight forward gatherable. In many applications it is aimed for depth information along the direction of view. For example fluidic mixing processes and the environmental interaction on a microscopic scale are of particular importance for e.g. pharmaceutical applications and often demand for 3D information. This problem is often solved by stereoscopic approaches, where two cameras are used in order to gather depth information by triangulation technique. Another approach is to scan the object through the focal plane in order to get sharp images of each layer. Since the before mentioned approaches require a lot of video data to be evaluated it would be more convenient to get depth mapping within a single camera recording and without scanning. Here we present a tunable 3D depth-mapping camera technique in combination with dynamic aberration control. By using an incoherent light source, only one camera and a spatial light modulator (LCoS-SLM), it is a simply applicable and highly scalable technique. A double-helix point spread function (DH-PSF) is generated for light emerging from the bserved focal plane. Each object appears as a double-image on the camera. Within the orientation of the double-image, depth information along the optical axis is encoded. By using an additional adaptive element (deformable mirror) the technique is combined with wide-field aberration correction. Here we combine a tunable 3D depth camera with dynamic aberration control in one imaging system.

Ce travail de thèse s'inscrit dans le cadre général du développement de micro-actionneurs MEMS, à bas coût et de technologie simple, pour de futures applications dans le domaine de la microfluidique, notamment. La motivation de ce travail est d'évaluer la faisabilité d'un micro-actionneur électrostricitf à base de film mince polymère électroactif nanocomposite. Le polyuréthane, chargé en nanoparticules de carbone ou carbure de fer, encore peu étudié mais aux propriétés électrostrictives prometteuses, est choisi comme matériau à intégrer dans une filière MEMS silicium classique. Le premier chapitre dresse un état de l'art sur les actionneurs MEMS, présente les différentes familles de polymères électroactifs et définit ce qu'est l'électrostriction. Le second chapitre est consacré à l'intégration sur silicium de films minces de polyuréthane et au développement de différentes structures de tests. L'accent est mis sur la levée de plusieurs verrous technologiques. Le chapitre trois présente les méthodes de caractérisations mécaniques et électriques et les résultats obtenus sur films purs et nanocomposites. Le quatrième et dernier chapitre concerne la réalisation et la caractérisation de premiers démonstrateurs MEMS. Ces micro-actionneurs sont caractérisés de manière statique et dynamique. / This thesis is part of the general development of MEMS microactuators, low cost and simple technology for future applications in the domain of microfluidics. The motivation of this work is to evaluate the feasibility of an electrostrictive microactuator based on electroactive nanocomposite polymer thin films. Polyurethane, loaded with carbon or iron carbide nanoparticles is chosen to be integrated in a conventional silicon MEMS process. The first chapter provides a state of the art of MEMS actuators, presents the different families of electroactive polymers and defines what is electrostriction. The second chapter is devoted to the integration of polyurethane thin films on silicon and to the development of different mechanical and electrical test structures. The emphasis is on identifying and overcoming technological barriers. Chapter three presents the mechanical and electrical characterization methods and the obtained results for pure and nanocomposites films. The fourth and final chapter concerns the realization and the static and dynamic characterizations of first MEMS demonstrators.