No description available.

This dissertation presents a series of studies related to the characterization and optimization of consumables during Chemical Mechanical Planarization (CMP). These studies are also evaluated with the purpose of reducing the cost of ownership as well as minimizing the potential environmental impacts. It is well known that pad-wafer contact and pad surface micro-structure have significant impacts on polishing performance. The first study in this dissertation investigates the effect of pad surface contact and topography on polishing performance during copper CMP. Two different types of diamond discs (3M A2810 disc and MMC TRD disc) are used to condition the polishing pad. Pad surface contact area and topography are analyzed using laser confocal microscopy and scanning electron microscopy (SEM) to illustrate how variations in pad surface micro-texture affect the copper removal rate and the coefficient of friction (COF). Polishing results show that the 3M A2810 disc generates significantly higher COF (16%) and removal rate (39%) than the MMC TRD disc. Pad surface analysis results show that the 3M A2810 disc and MMC TRD disc generate similar pad surface height probability density function and pad surface abruptness. On the other hand, the MMC TRD disc generates large flat near contact areas that correspond to fractured and collapsed pore walls while the 3M A2810 disc generates solid contact area and clear pore structures. The fractured and collapsed pore walls generated by the MMC TRD disc partly cover the adjacent pores, making the pad surface more lubricated during wafer polishing and resulting in a significantly lower COF and removal rate. In the next study, the individual "large" pad surface contact areas are differentiated from the "small" contact areas and their role in copper CMP is investigated. Surface topography and the structure of a typical individual large contact area are examined via laser confocal microscopy and SEM. In addition, the Young's Modulus of the pad surface material is simulated. A case study is presented to illustrate the role of the individual large contact area of IC1000 K-groove pad in copper CMP. SEM analysis shows that the individual large pad surface contact areas are induced by fractured pore walls and loosely attached pad debris. Simulation results indicate that individual large contact areas correspond to very low values of the Young's modulus (about 50 MPa). Such low values indicate that the pad material is soft and the summit underlying the individual large contact is not fully supported. As a result, individual large contact area implies low contact pressure and may contribute little to removal rate. Case study results confirm that the individual large contact area has minimal contribution to removal rate and indicate that the removal rate is mainly caused by small individual contact areas. In our case, small contact areas correspond to those smaller than 9 square microns. We believe that this methodology can be also applied for other kinds of pad, although the threshold values that may define "small" and "large" individual contact areas for different pads and processes need to be further investigated. In the third study, the effect of pad surface micro-texture in interlayer dielectric CMP is also investigated. Blanket 200-mm oxide wafers are polished and the polishing pad is conditioned under two different conditioning forces (26.7 and 44.5 N). Results show that when conditioning force is increased from 26.7 to 44.5 N, oxide removal rate increases by 65% while COF increases by only 7%. Pad surface contact area and topography are measured and analyzed to illustrate their effects on the oxide removal rate. While the two conditioning forces generate similar pad surface abruptness, pad surface contact area is significantly lower (by 71%) at the conditioning force of 44.5 N. Such dramatic decrease in pad surface contact area leads to a significant increase in local contact pressure and therefore results in a significant increase in oxide removal rate. The oxide removal rate and local contact pressure exhibits a Prestonian relationship. Besides the above studies on the effect of the pad surface micro-texture during blanket wafer polishing, the fourth study investigates how pad micro-texture affects dishing and erosion during shallow trench isolation (STI) patterned wafer polishing. Two different types of diamond discs (3M A2810 disc and MMC TRD disc) are used to condition the pad during wafer polishing. Dishing and erosion analysis for the patterned wafer polishing is performed using a surface profiler. To illustrate the effect of pad surface micro-texture on dishing and erosion, pad surface abruptness and mean pad summit curvature are analyzed using laser confocal microscopy. Polishing results show that the two discs generate similar blanket wafer removal rates, while the MMC TRD disc generate significantly higher dishing and erosion than the 3M A2810 disc during patterned wafer polishing. Results of pad surface micro-texture analysis show that the MMC TRD disc generates sharper asperities with higher mean pad summit curvature than the 3M A2810 disc, resulting in higher dishing and erosion. Another contribution of this dissertation is the development of a slurry film thickness quantification technique using ultraviolet-enhanced fluorescence. The technique is developed to measure slurry film thickness at any location of interest. In the next study of this dissertation, this new technique is applied to determine how two different slurry application/injection schemes (standard pad center area application method and novel slurry injection system) along with various polishing conditions such as sliding velocity, ring pressure and slurry flow rate affect slurry availability in the bow wave region of the polisher. For the standard pad center area application method, slurry is directly applied onto the pad center area and a large amount of fresh slurry flow directly off the pad surface without flowing to the pad-retaining ring interface due to the centrifugal forces. For the novel slurry injection system, slurry is introduced through an injector that is placed adjacent (<3 cm) to the retaining ring on the pad surface. Such a close distance between the injector and retaining ring allows most of the fresh slurry to be delivered efficiently to the leading edge of the retaining ring after it is injected onto the pad surface. Results show that the novel slurry injection system generates consistently thicker bow waves (up to 104 percent) at different sliding velocities, slurry flow rates and ring pressures, therefore providing more slurry availability for the pad-retaining ring interface and potentials for slurry consumption reduction in CMP processes. First order calculations yield estimates of slurry savings associated with the novel slurry injection system ranging between 8 and 48 percent depending on specific process conditions. In the last study of this dissertation, the effect of retaining ring slot design and polishing conditions on slurry flow dynamics at the bow wave is investigated. The ultraviolet-enhanced fluorescence technique is employed to measure the slurry film thickness at the bow wave for two retaining rings with different slot designs. Multiple sliding velocities, slurry flow rates and ring pressures are investigated. Results show that the retaining ring with the sharp angle slot design (PEEK-1) generates significantly thicker (on average 48%) slurry films at the bow wave than PEEK-2 which has a rounded angle slot design. For PEEK-1, film thickness at the bow wave increases with the increasing of flow rate and ring pressure and decreases with the increasing of sliding velocity. On the other hand, film thickness at bow wave does not change significantly for the PEEK-2 ring at different polishing conditions indicating an apparent robustness of the PEEK-2 design to various operating conditions. With retaining rings having different designs, and all else being the same, a thinner bow wave is preferred since it is indicative of a ring design that allows more slurry to flow into the pad-wafer interface. Therefore, the work underscores the importance of optimizing retaining ring slot design and polishing conditions for efficient slurry utilization.

This dissertation proposes a novel approach to achieve circumferential three-dimensional (3D) profiling for dark objects by investigating specular micro-texture photometry. A small patch of a target surface in micro-texture level yields different appearance under different illumination. This photometric property can be used to reconstruct the target surface with pixel-level resolution. However, due to the nature of some material, the surface of whom has stronger specular components than diffuse components, making the usage of general microtexture photometry more difficult. On the other hand, without using micro-texture photometry, the conventional circumferential 3D approaches only utilizes the geometric property of the target surface, compared to which, the proposed is able to reconstruct the target surface with finer detail. The original contributions of this dissertation are threefold. To begin with, the specular component in the micro-texture photometry is investigated to propose the pixel-level 3D profiling. The intensities of the same pixel from different images, which are taken under different lighting conditions are different. The specular components are used to recover the surface normal of the corresponding surface patch of the target surface. Consequently, the proposed specular-photometry-based technique produces pixel-wise measurement on surface normal. Furthermore, the conventional circumferential 3D profiling approach is extended with the proposed specular-photometry-based technique. The result of 3D profiling via the conventional approach is sparse due to its nature. On the other hand, the result of 3D profiling from the integration using the surface normal obtained from the proposed specular-photometry-based technique suffers from accumulative error. A new approach is then proposed to use the result from the conventional approach as global constraint, for the purpose of reducing the accumulative error. The proposed approach is able to achieve pixel-resolution globally bounded profiling because of the dense surface normal measurement from the proposed specular-photometry-based technique and the constraints from the conventional approach. Lastly, a system is developed to apply the proposed circumferential specular-photometry-based 3D profiling approach. The developed system is not only able to acquire data and but also to provide different lighting conditions for both the specular-photometry-based technique and conventional approach using a digital single-lens reflex camera and different lighting devices. With a step motor to rotate the object for three hundred and sixty degrees, the system is able to achieve circumferential scanning / Doctor of Philosophy / This dissertation explains a novel approach to fulfill circumferential 3D profiling with high resolution for dark objects. With the proposed approach, the resolution is able to achieve micro-texture level. The high resolution measurement is achieved by investigating specular micro-texture photometry. As for dark objects, the specular components dominate the reflection. The usage of photometry is explained as follow. A small patch of a target surface yields different appearance under different illumination. For the material of the surface of dark objects, the surface reflects stronger specular components than diffuse components. The proposed approach utilizes this photometric property to recover the small patch's surface normal using its specular components. The recovered surface normal is then used to calculate the surface profile through integration. The conventional circumferential 3D profiling approach, which can only produce low-resolution measurement, is also adopted in the proposed approach to enhance its performance, as the integration method suffers from accumulative error. The result from the conventional approach serves as a global constraint to bound the final profiling result. A system is developed to apply the proposed circumferential specular-photometry-based 3D profiling approach, which is equipped with a step motor to rotate the object for three hundred and sixty degrees for the purpose of circumferential scanning. A series of numerical and experimental studies were conducted to validate the performance of the proposed approach. As it is shown in the result, the proposed approach is able to measure the tire tread with 31µm resolution.

This master thesis is focused on design and construction of laboratory shot peening machine. This machine is determined for modification of the topography of the friction surfaces specimens. Two types of specimens are used. The first specimen is sphere with diameter 20-40 mm. The second specimen is cylinder with 9.6 mm diameter. In this thesis the setting parameters of shot peening for creation of surface with the micro-texture was described. Influence of the micro-texture to the coefficient of friction was investigated under mixed lubrication and slip condition.

No description available.

Muito embora a micro e a macrotextura dos pavimentos sejam importantes para o tráfego seguro, principalmente em condição de pista molhada e com velocidades superiores a 50 km/h, nos locais de acidentes de trânsito no Brasil esses parâmetros não são avaliados quando das perícias técnicas. Assim, o objetivo principal desta tese é estabelecer critérios de avaliação de pavimentos asfálticos que possam integrar um protocolo para a perícia técnica em locais de acidentes de trânsito. Foi baseada em coleta de dados de micro e de macrotextura dos revestimentos asfálticos em três rodovias no Estado do Paraná, num total de 106 locais, e em quatro vias urbanas na cidade de Londrina-PR, num total de 148 locais, todas com velocidades permitidas iguais ou superiores a 50 km/h, especificamente em trechos onde ocorreram acidentes de trânsito, o que permitiu a determinação da aderência na interface pneu/pavimento, se os valores encontram-se dentro das faixas de aceitabilidade do DNIT, da ANTT e da ARTESP e se houve efetiva contribuição do pavimento para a ocorrência e para a severidade dos acidentes. Dos 106 acidentes rodoviários analisados, em 19 deles as alturas médias de mancha de areia, parâmetro empregado para avaliar a macrotextura, apresentaram-se com valor inferior ao mínimo recomendado (0,60 mm), enquanto que dos 148 acidentes ocorridos em vias urbanas, 22 ocorreram em trechos com alturas médias de mancha de areia também inferiores ao valor mínimo recomendado. Nesses casos também foram realizados ensaios de microtextura, com uso do pêndulo britânico, e posteriormente foram calculados os valores do Índice de Atrito Pneu-Pavimento Internacional (International Friction Index, IFI). Os resultados e as análises deste trabalho indicam que uma melhor condição de macrotextura pode reduzir entre 6% e 19% as energias cinéticas envolvidas nos acidentes em rodovias e de 3% a 11% em vias urbanas, com real possibilidade de redução tanto das avarias produzidas nos veículos quanto, principalmente, das lesões nas vítimas. Dada a importância da micro e da macrotextura, recomenda-se que o protocolo de avaliação de pavimentos para perícias técnicas em locais de acidentes de trânsito em rodovias e em vias urbanas estabeleça a realização dos ensaios de Pêndulo Britânico e de Mancha de Areia em até 24 horas após o evento e que a área a ser levantada contemple toda a extensão das marcas de frenagem dos veículos envolvidos ou, no caso de inexistência de marcas, que compreenda uma extensão de 10 a 70 metros, respectivamente para vias com velocidade máxima permitida de 40 km/h e de 120 km/h. Espera-se, complementarmente, que um protocolo com critérios simples e objetivos, como o desenvolvido neste trabalho, permita a adoção de políticas públicas preventivas, de maior alcance e periodicidade, com as avaliações não somente nos trechos onde ocorrem acidentes, mas ao longo das vias. / Although the micro and macro textures of pavements are important factors for safe driving, especially on wet tracks and with speeds above 50 km/h, such parameters are not even evaluated during technical inspections in traffic accident sites in Brazil. Thus, the main purpose of this thesis is to establish criteria for the evaluation of asphalt pavements that may become integral part of a protocol for technical inspection in traffic accident sites. This work is based on the collection of data concerning the micro and macro texture of asphalt pavements on three roads in the State of Paraná, totaling 106 locations, and on four urban streets in the city of Londrina, State of Paraná, totaling 148 locations. All such locations have a speed limit of equal to or higher than 50 km/h, especially on the sites where traffic accidents occurred, which allowed for the determination of the tire/pavement adherence, and whether the values found were in accordance with the acceptable levels established by DNIT, ANTT and ARTESP, and whether there was effective contribution on the part of the pavement for the occurrence as well as the severity of the accidents. Out of the 106 road accidents that were analyzed, it was observed that in 19 of them the average heights of the sand spot, a parameter used to evaluate the macro-texture, were lower than the minimum value recommended (0,60 mm), while out of the 148 accidents taken place in urban streets, 22 took place in areas where the average heights of the sand spot were also lower than the recommended minimum value. In the case of the accidents that occurred in places where the heights of the sand spots were lower than the minimum recommended, micro texture essays were also carried out by use of the British Pendulum Tester, and later the values of the International Friction Index (IFI) were calculated. The results and the analyzes of this work indicated that a better condition in the macro texture would reduce the kinetic energies involved in road accidents between 6% and 19%, and from 3% to 11% on urban streets, with the real possibility of minimizing both damages caused to the vehicles and especially the lesions on the victims. Given the importance of micro and macro textures, it is recommended that the protocol for the evaluation of pavements for the purpose of technical inspection in traffic accident sites both on roads and urban streets require the carrying out of the British Pendulum Tester and the Sand Spot within 24 hours of the time of the accident and that the area to be tested should include the entire extension of the braking skid marks of the vehicles involved in the accident, or, in the case of inexistence of such marks, covering 10 to 70 meters, respectively, for locations where the permitted maximum speed is 40 km/h, and for locations where the permitted maximum speed is 120 km/h. It is additionally expected that a protocol having simple yet objective criteria, such as the ones developed in this work, will allow for the adoption of preventive public policies, having greater scope and periodical applications, not only on sites where accidents take place, but also on the entirety of roads and streets.

Muito embora a micro e a macrotextura dos pavimentos sejam importantes para o tráfego seguro, principalmente em condição de pista molhada e com velocidades superiores a 50 km/h, nos locais de acidentes de trânsito no Brasil esses parâmetros não são avaliados quando das perícias técnicas. Assim, o objetivo principal desta tese é estabelecer critérios de avaliação de pavimentos asfálticos que possam integrar um protocolo para a perícia técnica em locais de acidentes de trânsito. Foi baseada em coleta de dados de micro e de macrotextura dos revestimentos asfálticos em três rodovias no Estado do Paraná, num total de 106 locais, e em quatro vias urbanas na cidade de Londrina-PR, num total de 148 locais, todas com velocidades permitidas iguais ou superiores a 50 km/h, especificamente em trechos onde ocorreram acidentes de trânsito, o que permitiu a determinação da aderência na interface pneu/pavimento, se os valores encontram-se dentro das faixas de aceitabilidade do DNIT, da ANTT e da ARTESP e se houve efetiva contribuição do pavimento para a ocorrência e para a severidade dos acidentes. Dos 106 acidentes rodoviários analisados, em 19 deles as alturas médias de mancha de areia, parâmetro empregado para avaliar a macrotextura, apresentaram-se com valor inferior ao mínimo recomendado (0,60 mm), enquanto que dos 148 acidentes ocorridos em vias urbanas, 22 ocorreram em trechos com alturas médias de mancha de areia também inferiores ao valor mínimo recomendado. Nesses casos também foram realizados ensaios de microtextura, com uso do pêndulo britânico, e posteriormente foram calculados os valores do Índice de Atrito Pneu-Pavimento Internacional (International Friction Index, IFI). Os resultados e as análises deste trabalho indicam que uma melhor condição de macrotextura pode reduzir entre 6% e 19% as energias cinéticas envolvidas nos acidentes em rodovias e de 3% a 11% em vias urbanas, com real possibilidade de redução tanto das avarias produzidas nos veículos quanto, principalmente, das lesões nas vítimas. Dada a importância da micro e da macrotextura, recomenda-se que o protocolo de avaliação de pavimentos para perícias técnicas em locais de acidentes de trânsito em rodovias e em vias urbanas estabeleça a realização dos ensaios de Pêndulo Britânico e de Mancha de Areia em até 24 horas após o evento e que a área a ser levantada contemple toda a extensão das marcas de frenagem dos veículos envolvidos ou, no caso de inexistência de marcas, que compreenda uma extensão de 10 a 70 metros, respectivamente para vias com velocidade máxima permitida de 40 km/h e de 120 km/h. Espera-se, complementarmente, que um protocolo com critérios simples e objetivos, como o desenvolvido neste trabalho, permita a adoção de políticas públicas preventivas, de maior alcance e periodicidade, com as avaliações não somente nos trechos onde ocorrem acidentes, mas ao longo das vias. / Although the micro and macro textures of pavements are important factors for safe driving, especially on wet tracks and with speeds above 50 km/h, such parameters are not even evaluated during technical inspections in traffic accident sites in Brazil. Thus, the main purpose of this thesis is to establish criteria for the evaluation of asphalt pavements that may become integral part of a protocol for technical inspection in traffic accident sites. This work is based on the collection of data concerning the micro and macro texture of asphalt pavements on three roads in the State of Paraná, totaling 106 locations, and on four urban streets in the city of Londrina, State of Paraná, totaling 148 locations. All such locations have a speed limit of equal to or higher than 50 km/h, especially on the sites where traffic accidents occurred, which allowed for the determination of the tire/pavement adherence, and whether the values found were in accordance with the acceptable levels established by DNIT, ANTT and ARTESP, and whether there was effective contribution on the part of the pavement for the occurrence as well as the severity of the accidents. Out of the 106 road accidents that were analyzed, it was observed that in 19 of them the average heights of the sand spot, a parameter used to evaluate the macro-texture, were lower than the minimum value recommended (0,60 mm), while out of the 148 accidents taken place in urban streets, 22 took place in areas where the average heights of the sand spot were also lower than the recommended minimum value. In the case of the accidents that occurred in places where the heights of the sand spots were lower than the minimum recommended, micro texture essays were also carried out by use of the British Pendulum Tester, and later the values of the International Friction Index (IFI) were calculated. The results and the analyzes of this work indicated that a better condition in the macro texture would reduce the kinetic energies involved in road accidents between 6% and 19%, and from 3% to 11% on urban streets, with the real possibility of minimizing both damages caused to the vehicles and especially the lesions on the victims. Given the importance of micro and macro textures, it is recommended that the protocol for the evaluation of pavements for the purpose of technical inspection in traffic accident sites both on roads and urban streets require the carrying out of the British Pendulum Tester and the Sand Spot within 24 hours of the time of the accident and that the area to be tested should include the entire extension of the braking skid marks of the vehicles involved in the accident, or, in the case of inexistence of such marks, covering 10 to 70 meters, respectively, for locations where the permitted maximum speed is 40 km/h, and for locations where the permitted maximum speed is 120 km/h. It is additionally expected that a protocol having simple yet objective criteria, such as the ones developed in this work, will allow for the adoption of preventive public policies, having greater scope and periodical applications, not only on sites where accidents take place, but also on the entirety of roads and streets.

Les microfils métalliques polycristallins produits par étirage à froid présentent une résistance mécanique significative en faisant des candidats idéaux pour les renforts de composites. Des études antérieures sur des fils de nickel polycristallin pur ont montré une dépendance importante par rapport à la taille de la limite d'élasticité et de la résistance à la traction, ainsi que de la ductilité.Le but de cette étude est de comprendre cet effet de la taille dans les microfils de nickel pur polycristallin par analyse de diffraction des rayons X in-situ (DRX) et simulations de la plasticité cristalline par éléments finis (CPFE). Des essais de traction monotone et cyclique in-situ sous rayonnement synchrotron ont été réalisés sur des microfils de diamètres allant de 100 à 40 μm. Les fils étirés à 100 micromètres obtenus dans le commerce présentent une architecture cœur-coquille avec une texture de fibre <111> dominante dans le cœur et une texture à double fibre hétérogène <111> et <100> dans la coquille. La réduction de la taille de l'échantillon par polissage électrolytique conduit à des fils ayant une microstructure homogène, tandis que la réduction de la taille de l'échantillon par un étirage à froid supplémentaire conduit à des fils avec une texture plus intense tout en conservant l'architecture cœur-coquille.La limite d'élasticité et la résistance à la traction des fils électropolis augmentent avec la diminution du diamètre, tandis que la ductilité diminue avec la réduction du diamètre. Dans le cas des fils étirés à froid, on observe que la limite d'élasticité et la résistance à la traction, ainsi que la ductilité, augmentent avec la diminution du diamètre. L'analyse DRX indique une plasticité successive des familles de grains sous iso-déformation. Nous avons observé que le gradient de la texture du microfil active des mécanismes de déformation qui ne sont pas observés pour les microfils à texture homogène. Pour comprendre l'influence de différents paramètres microstructuraux, notamment l'influence de la texture cristallographique, une microstructure représentative 3D a été générée et des simulations CPFE ont été réalisées. Le comportement simulé moyen des différentes familles de grains (<111>, <100>) concorde bien avec les résultats expérimentaux. La simulation CPFE indique une hétérogénéité du champ de contrainte à travers la microstructure en présence d'un gradient de texture cristallographique.Nous montrons que la micro-texture (texture simple ou double texture) et leur dispersion spatiale (homogène ou architecturée) peuvent être utilisées comme stratégie de conception pour obtenir une microstructure optimale en fonction de l’ensemble désiré de propriétés mécaniques. / Polycrystalline metallic microwires produced by cold-drawing exhibit significant mechanical strength that make them ideal candidates for reinforcement of composites. Previous studies on polycrystalline pure nickel wires have indicated a significant size dependence of their yield and tensile strength as well as their ductility. The aim of this study is to understand these size effects by in-situ X-ray diffraction (XRD) analysis and crystal plasticity finite element (CPFE) simulations. In-situ monotonous and cyclic tensile tests under synchrotron radiation were carried on microwires with diameters ranging from 100 to 40 µm. The commercially obtained 100µm as-drawn wires exhibit a core-shell architecture with <111> fiber texture dominant in core and heterogeneous dual fiber texture <111> and <100> in the shell. Reduction of specimen size by electropolishing leads to wires having a homogeneous microstructure, whereas reduction of specimen size by further cold drawing leads to wires with a sharper texture while retaining the core-shell architecture.The yield and tensile strength of the electropolished wires increase with decreasing diameter, whereas the ductility decrease with decreasing diameter. In the case of cold-drawn wires, the yield and tensile strength, and also the ductility was observed to increase with decreasing diameter. The XRD analysis indicates successive yielding of grain families under iso-strain condition. The gradient in the texture of the microwire was seen to activate deformation mechanisms which are not seen for microwires with homogeneous texture. To understand the influence of different microstructural parameters, and notably the influence of crystallographic texture, 3D representative microstructure was generated and CPFE simulations were carried out. The simulated average behavior of different grain families (<111>, <100>) agrees well with the experimental results. The CPFE simulations indicate heterogeneity in stress field across the microstructure in the presence of a gradient in crystallographic texture.We show that the microstructure engineering of micro-texture components (single- or dual-texture) and their spatial spread (homogenous or architectured) can be used as design guidelines for obtaining optimal microstructure in accordance with desired set of mechanical properties.