Spelling suggestions: "subject:"microlithography"" "subject:"microlitvhography""
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Lithography : friendly routing via forbidden pitch avoidance /Shi, Shichang. January 2004 (has links)
Thesis (Ph. D.)--University of Hong Kong, 2005.
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Defining cellular microenvironments using multiphoton lithographyKaehr, Bryan James, January 1900 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2007. / Vita. Includes bibliographical references.
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Fast and Scalable Fabrication of Microscopic Optical Surfaces and its Application for Optical Interconnect DevicesSummitt, Christopher Ryan, Summitt, Christopher Ryan January 2017 (has links)
The use of optical interconnects is a promising solution to the increasing demand for high speed mass data transmission used in integrated circuits as well as device to device data transfer applications. For the purpose, low cost polymer waveguides are a popular choice for routing signal between devices due to their compatibility with printed circuit boards. In optical interconnect, coupling from an external light source to such waveguides is a critical step, thus a variety of couplers have been investigated such as grating based couplers [1,2], evanescent couplers [3], and embedded mirrors [4–6].
These couplers are inherently micro-optical components which require fast and scalable fabrication for mass production with optical quality surfaces/structures. Low NA laser direct writing has been used for fast fabrication of structures such as gratings and Fresnel lenses using a linear laser direct writing scheme, though the length scale of such structures are an order of magnitude larger than the spot size of the focused laser of the tool. Nonlinear writing techniques such as with 2-photon absorption offer increased write resolution which makes it possible to fabricate sub-wavelength structures as well as having a flexibility in feature shape. However it does not allow a high speed fabrication and in general are not scalable due to limitations of speed and area induced by the tool’s high NA optics.
To overcome such limitations primarily imposed by NA, we propose a new micro-optic fabrication process which extends the capabilities of 1D, low NA, and thus fast and scalable, laser direct writing to fabricate a structure having a length scale close to the tool's spot size, for example, a mirror based and 45 degree optical coupler with optical surface quality.
The newly developed process allows a high speed fabrication with a write speed of 2600 mm²/min by incorporating a mask based lithography method providing a blank structure which is critical to creating a 45 degree slope to form the coupler surface. In this method, instead of using an entire exposure in a pixelated manner, only a portion of the Gaussian profile is used, allowing a reduced surface roughness and better control of the surface shape than previously possible with this low NA beam. The surface figure of the mirror is well controlled below 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45±1 degrees.
The coupling efficiency is evaluated using a set of polymer waveguides fabricated on the same substrate as the complete proof of concept device. Device insertion loss was measured using a custom built optical test station and a detailed loss analysis was completed to characterize the optical coupling efficiency of the mirror. Surface roughness and angle were also experimentally confirmed. This process opens up a pathway towards large volume fabrication of free-form and high aspect ratio optical components which have not yet pursued, along with well-defined optical structures on a single substrate.
In this dissertation, in Chapter 1, we provide an overview of optical surface fabrication in conjunction with current state of the art on fabrication of free form surfaces in macro and microscopic length scale. The need for optical interconnects is introduced and fabrication methods of micro-optical couplers are reviewed in Chapter 2. In Chapter 3, the complete fabrication process of a mirror based coupler is presented including a custom alignment procedure. In Chapter 4, we provide the integration procedure of the optical couplers with waveguides. In Chapter 5, the alignment of two-lithographic methods is discussed. In Chapter 6, we provide the fabrication procedure used for the waveguides. In Chapter 7, the experimental evaluation and testing of the optical coupler is described. We present a custom test station used for angle verification and optical coupler efficiency measurement. In Chapter 8, a detailed loss analysis of the device is presented including suggestions for future reductions in loss. Conclusions and future work considerations are addressed in Chapter 9.
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Laser induced desorption time of flight mass spectrometer analysis of adsorbed surface contaminants on vacuum ultraviolet lithography optic materialsSurpaneni, Yamini. Allen, Susan D. January 2003 (has links)
Thesis (M.S.)--Florida State University, 2003. / Advisor: Dr. Susan Davis Allen, Florida State University, College of Engineering, Dept. of Electrical and Computer Engineering. Title and description from dissertation home page (viewed Apr. 12, 2004). Includes bibliographical references.
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Micro-fabrication of a Mach-Zehnder interferometer combining laser direct writing and fountain pen micropatterning for chemical/biological sensing applicationsKallur, Ajay. Wang, Shuping, January 2009 (has links)
Thesis (M.S.)--University of North Texas, May, 2009. / Title from title page display. Includes bibliographical references.
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Defining cellular microenvironments using multiphoton lithographyKaehr, Bryan James, 1975- 28 August 2008 (has links)
To understand the chemistry of life processes in detail is largely a challenge of resolving them in their native, cellular environment. Cell culture, first developed a century ago, has proven to be an essential tool for reductionist studies of cellular biochemistry and development. However, for the technology of cell culture to move forward and address increasingly complex problems, in vitro environments must be refined to better reflect the cellular environment in vivo. This dissertation work has focused on the development of methods to define cellular microenvironments using the high resolution, 3D capabilities of multiphoton lithography. Here, site-specific photochemistry using multiphoton excitation is applied to the photocrosslinking of proteins, providing the means to organize bioactive species into well-defined 3D microenvironments. Further, conditions have been identified that enable microfabrication to be performed in the presence of cells -- allowing cell outgrowth and motility to be directed in real time. In addition to the intrinsic chemical functionality of microfabricated protein structures, 3D protein matrices are shown to respond mechanically to changes in the chemical environment, enabling new avenues for micro-scale actuation to be explored. Complex 2D and 3D protein photocrosslinking is further facilitated by integrating transparency and automated reflectance photomasks into the fabrication system. These advances could be transformative in efforts to fabricate precise cellular scaffolding that replicates the morphological (and potentially biochemical) features of in vivo tissue microenvironments. Finally, these methods are applied to the study of microorganism behavior with single-cell resolution. Microarchitectures are designed that allow the position and motion of motile bacterial to generate directional microfluidic flow -- providing a foundation to develop micro-scale devices powered by cells. / text
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Nanoimprint lithography based fabrication of size and shape-specific, enzymatically-triggered nanoparticles for drug delivery applicationsGlangchai, Luz Cristal Sanchez, 1977- 29 August 2008 (has links)
Our ability to precisely manipulate size, shape, and composition of nanoscale carriers is essential for controlling their in-vivo transport, biodistribution, and drug release mechanism. Shape-specific, "smart" nanoparticles that deliver drugs or imaging agents to target tissues primarily in response to disease-specific or physiological signals could significantly improve therapeutic care of complex diseases. Current methods in nanoparticle synthesis do not allow such simultaneous control over particle size, shape, and environmentally-triggered drug release, especially at the sub-100 nm range. In this dissertation, we discuss the development of high-throughput nanofabrication techniques using synthetic and biological macromers (peptides) to produce highly monodisperse nanoparticles, as well as enzymatically-triggered nanoparticles, of precise sizes and shapes. We evaluated thermal nanoimprint lithography (ThNIL) and step and flash imprint lithography (SFIL) as two possible fabrication techniques. We successfully employed ThNIL and SFIL for fabricating nanoparticles and have extensively characterized the SFIL fabrication process, as well as the properties of the imprinted biopolymers. Particles as small as 50 nm were fabricated on silicon wafers and harvested directly into aqueous buffer using a biocompatible, one-step release technique. These methods provide a novel way to fabricate biocompatible nanoparticles with precise size and geometry. Furthermore, we developed an enzyme-degradable material system and demonstrated successful encapsulation and enzyme-triggered release of antibodies and nucleic acids from these imprinted nanoparticles; thus providing a potential means for disease-controlled delivery of biomolecules. Finally, we evaluated the bioactivity of the encapsulated therapeutics in-vitro. The development of the SFIL method for fabrication of biocompatible nanocarriers has great potential in the drug delivery field for its ability to create monodisperse particles of pre-designed geometry and size, and to incorporate stimulus-responsive release mechanisms. This research provides the potential to broaden the study of how particle size and shape affect the biodistribution of drugs within the body. / text
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I. Hadamard Transform Capillary Electrophoresis for the Analysis of Biologically Active Species II. Characterization and Application of Two-Photon Activatable Proton and Radical GeneratorsBraun, Kevin L January 2005 (has links)
PART I. A modified Hadamard transform has been developed and applied to the analysis of biologically active species using capillary electrophoresis. Hadamard transformations, a matrix based multiplexing technique, when coupled with a capillary electrophoresis instrument capable of rapid sample injection, provides a means to semi-continuously inject samples. The multiple injections separate, interpenetrate, and are detected as the summation of the multiple injections. Deconvolution of the multiplexed signal by multiplication with the inverse of the injection matrix yields a single injection electropherogram that exhibits improved S/N. In modified Hadamard transform capillary electrophoresis (mHTCE), an injection sequence of half the length as conventional HTCE (cHTCE) is utilized. Modifying the manner in which the raw data is manipulated before deconvolution facilitates the reduced injection sequence. When coupled with software, mHTCE can reduce the collection time for a Hadamard sequence by up to 48%. The substantial time reduction afforded by mHTCE is utilized to demonstrate the first time-resolved application of Hadamard transformations for the analysis of neurotransmitters. Additionally, mHTCE has been demonstrated as a means to improve the sensitivity for analysis of amino acids and proteins including gamma-aminobutyric acid, dopamine, and enhanced green fluorescent protein (EGFP) with picomolar detection limits.Part II. Two-photon excitation provides a means to activate chemical and physical processes with high spatial resolution and improved depth penetration compared to one-photon excitation. When combined with three-dimensional lithographic microfabrication (3DLM), these advantages provide a means to fabricate complex structures through radical and cationic two-photon induced polymerization (TPIP). A strategy for realizing high-fidelity microstructures is reported that considers the inherent structural limitations of acrylate monomers. Utilizing this strategy, a series of high-fidelity microstructures is reported for application in microfluidic devices, microelectromechanical systems (MEMS), and microoptical devices such as photonic bandgap (PBG) crystals. Improved periodicity is reported here for f.c.c. PBG crystals compared to earlier examples through addition of micromechanical supports that provide increased strength to the high-aspect ratio crystals. To extend TPIP to cationic polymerization, a series of two-photon activatable photoacid generators has been developed. The new PAGs exhibit one to two orders of magnitude lower polymerization threshold intensities than conventional ultraviolet-sensitive initiators.
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Simulation and design of planarizing materials and interfacial adhesion studies for step and flash imprint lithographyLin, Michael Wayne, January 1900 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2008. / Vita. Includes bibliographical references.
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Materials and methods for nanolithography using scanning thermal cantilever probesHua, Yueming. January 2008 (has links)
Thesis (Ph. D.)--Chemical and Biomolecular Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Henderson, Clifford; Committee Member: Hess, Dennis; Committee Member: King, William; Committee Member: Lu, Hang; Committee Member: Tolbert, Laren.
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