La mesure de distance et la détection d'objets sont devenues essentielles dans de nombreux domaines tels que l'automobile ou la robotique, les applications médicales, les procédés industriels et agricoles, les systèmes de surveillance et de sécurité, etc. Dans le but d'améliorer les performances des dispositifs de télémétrie laser en terme de bruit et de diaphonie, une technique hétérodyne par mélange optoélectronique doit être utilisée. Par ailleurs, l'aspect système embarqué nécessite une réduction de l'encombrement et de la consommation à performances égales. L'intégration de mélangeurs optoélectroniques en technologie CMOS apporte donc une solution optimale à cette approche grâce à ses multiples avantages (intégration du circuit d'instrumentation sur la même puce, modèles bien connus, coût raisonnable, performances élevées,…). Ainsi cette thèse traitera de l'étude de mélangeurs optoélectroniques en technologie CMOS pour la télémétrie embarquée haute résolution. Le premier chapitre de ce manuscrit présente les diverses technique de mesure de distance par télémétrie laser par et justifie le choix de la télémétrie laser par déphasage ainsi que le gain en performances lié à l'hétérodynage. Le second chapitre décrit les mélangeurs électriques et optoélectroniques ainsi que les propriétés nécessaires à leur réalisation. Quelques photodétecteurs y sont présentés au vu de la possibilité de les utiliser en mélangeurs optoélectroniques et d'une intégration potentielle en technologie CMOS. Les principales contraintes liées à l'intégration en technologie CMOS de photocapteurs utilisables en mélangeurs optoélectroniques, sont exposés dans la troisième partie. Les travaux de conception et d'optimisation des structures ainsi que les phases de simulations et de test y sont détaillés. Enfin, pour valider expérimentalement les études précédentes, le dernier chapitre présente la conception d'une chaîne de mesure multivoies pour une tête de photoréception CMOS matricée pour un télémètre laser embarqué haute résolution. / Distance measurement and object detection has become essential in many fields such as automotive and robotics, medical applications, industrial processes and farming systems, surveillance and security, etc.. In order to improve the performance of laser ranging devices in terms of noise and crosstalk, an optoelectronic heterodyne technique of mixing should be used. Moreover, the aspect of embedded system requires a reduction in the size and power consumption for the same performance. The integration of optoelectronic mixers in CMOS technology will provide an optimal solution to this approach through its many advantages (integrated instrumentation circuit on the same chip, well-known models, reasonable cost, high performance, ...). Thus this thesis will focus on the study of optoelectronic mixers in CMOS technology for high resolution, embedded laser range finding systems. The first chapter of this thesis discusses the various technique of distance measurement by laser ranging and justifies the choice of phase shift technique and the gain in performance related to heterodyning. The second chapter describes the electrical and optoelectronic mixers and the properties needed to develop them. Some photodetectors are presented given the opportunity to use optoelectronic mixers and a potential integration with CMOS technology. The main constraints to the integration of CMOS photosensors used in optoelectronic mixers are set out in Part III. The work of design and optimization of structures and phases of simulations and testing are detailed. Finally, to experimentally confirm the earlier studies, the final chapter presents the design of a measuring head for a multichannel photoreceptor CMOS for a high resolution laser range finder.

The recent advancement of superconducting nano devices has allowed for making a Superconducting Nanowire Single Photon Detector (SNSPD), whose extraordinary features have strongly motivated the research community to exploit it in many practical applications. In this thesis, an experimental setup for testing the SNSPD has been established. It contains an in-house packaging that meets the requirements of RF/microwave and optoelectronic characterizations. The quantum efficiency and detection efficiency measurements have confirmed that our approach is satisfactory. The dark count performance has reached the anticipated level. The factors affecting rise and fall times of the photoresponses are addressed. Based on the successful setup, the characterizations including dc, small signal ac measurements have been undertaken. The measurements are aimed at quantitatively investigating Cooper pair density in the superconducting nanowire. The experimental method involves a two-step, small signal S-parameter measurement either in the presence or absence of optical powers. The subsequent measurements by varying the temperature and dc bias current have achieved remarkable understanding on the physical properties of SNSPD nanowires. Then, the electrically induced nonlinearity is studied via the large signal RF and Microwave measurements. The experiments are a set of one-tone and two-tone measurements, in which either the RF driving power is varied at a fixed frequency, or vice versa. Two major nonlinear microwave circuit analysis methods, i.e. time-domain transient and hybrid-domain harmonic balance analysis, are employed. The simulation result reveals the optimized conditions of reaching the desired nonlinearity. Finally, we have successfully measured the optoelectronic mixing products in an electrically pumped optoelectronic mixer, which has identical structures as that of the SNSPD. The experiments confirm that this mixer is not only sensitive to the classical light intensities, but also to that of the single photon level. Meanwhile, the quantum conversion matrices is derived to interpret the quantum optoelectronic mixing effects.

The recent advancement of superconducting nano devices has allowed for making a Superconducting Nanowire Single Photon Detector (SNSPD), whose extraordinary features have strongly motivated the research community to exploit it in many practical applications. In this thesis, an experimental setup for testing the SNSPD has been established. It contains an in-house packaging that meets the requirements of RF/microwave and optoelectronic characterizations. The quantum efficiency and detection efficiency measurements have confirmed that our approach is satisfactory. The dark count performance has reached the anticipated level. The factors affecting rise and fall times of the photoresponses are addressed. Based on the successful setup, the characterizations including dc, small signal ac measurements have been undertaken. The measurements are aimed at quantitatively investigating Cooper pair density in the superconducting nanowire. The experimental method involves a two-step, small signal S-parameter measurement either in the presence or absence of optical powers. The subsequent measurements by varying the temperature and dc bias current have achieved remarkable understanding on the physical properties of SNSPD nanowires. Then, the electrically induced nonlinearity is studied via the large signal RF and Microwave measurements. The experiments are a set of one-tone and two-tone measurements, in which either the RF driving power is varied at a fixed frequency, or vice versa. Two major nonlinear microwave circuit analysis methods, i.e. time-domain transient and hybrid-domain harmonic balance analysis, are employed. The simulation result reveals the optimized conditions of reaching the desired nonlinearity. Finally, we have successfully measured the optoelectronic mixing products in an electrically pumped optoelectronic mixer, which has identical structures as that of the SNSPD. The experiments confirm that this mixer is not only sensitive to the classical light intensities, but also to that of the single photon level. Meanwhile, the quantum conversion matrices is derived to interpret the quantum optoelectronic mixing effects.