The atomic layer deposition (ALD) growth of titania thin films was studied for the infiltration of silica photonic crystals. Titania thin films were grown in a custom-built ALD reactor by the alternating pulsing and purging of TiCl4 and water vapor. The conformal nature of ALD growth makes it an ideal candidate for the infiltration of the complex opal structure. Titania is a high refractive index material, which makes it a popular material for use in photonic crystal (PC) applications. Photonic crystals are periodic dielectric structures that forbid the propagation of light in a certain wavelength range. This forbidden range is known as the photonic band gap (PBG). A refractive index contrast of at least 2.8 is required for a complete PBG in an inverted opal structure. Therefore, the rutile structure of titania is more desirable for use in PCs due to its higher index of refraction than the anatase or brookite structure. The growth mechanisms and film properties of the TiO2 thin films were studied. Investigation of the growth mechanisms revealed saturated growth rate conditions for multiple temperature regions. Film characterization techniques included XRD, SEM/EDS, XPS, AFM, reflectivity, and index of refraction measurements. Post growth heat treatment was performed to study the conversion from the as-deposited crystal structure to the rutile structure. After optimization of the deposition process, the infiltration of silica opals for PC applications was attempted. The filling fraction was optimized by increasing the pulse and purge lengths at a deposition temperature of 100oC. Although the silica opals were successfully infiltrated using ALD of TiO2, the long range order of the PC was destroyed after the heat treatment step required to achieve the high index rutile structure.

Photonic band gap materials, commonly referred to as photonic crystals (PCs), have been a topic of great interest for almost two decades due to their promise of unprecedented control over the propagation and generation of light. We report investigations of the optical properties of a new PC structure based upon a triangular lattice in which adjacent [i, j] rows of holes possess different properties, creating a superlattice (SL) periodicity. Symmetry arguments predicted and quot;band folding and quot; and band splitting behaviors, both of which are direct consequences of the new basis that converts the Brillouin zone from hexagonal (six-fold) to rectangular (two-fold). Plane wave expansion and finite-difference time-domain (FDTD) numerical calculations were used to explore the effects of the new structure on the photonic dispersion relationship of the SL PC. Electron beam lithography and inductively coupled plasma dry etching were used to fabricate 1 mm2 PC areas (lattice constant, a =358 nm and 480 nm) with hole radius ratios ranging from 1.0 (triangular) to 0.585 (r2/r1 = 73.26 nm/125.26 nm) on Silicon-on-insulator wafers. The effects of modifying structural parameters (such as hole size, lattice constant, and SL strength) were measured using the coupled resonant band technique, confirming the SL symmetry arguments and corroborating the band structure calculations. Analysis of the dispersion contours of the static SL (SSL) PC predicted both giant refraction (change in beam propagation angle of 110 for an 8 change in incident angle) and superprism behavior (change in beam propagation angle of 108 for a 12% change in normalized frequency) in these structures. Dynamic control of these refraction effects was also investigated by incorporating electro-optic and nonlinear materials into the SSL PC structure. Wave vector analyses on these structures predicted a change in beam propagation angle and gt;96 when the refractive index inside of the holes of the structure changed from n=1.5 to 1.7. Through this investigation, the first successful measurement of the band folding effect in multidimensional PCs as well as the first explicit measurement of the dielectric band of a 2D PC were reported. In addition, the SL PCs impact on new opto-electronic devices was explored.

In the late eighties, a new class of materials, known as photonic crystals (PCs), emerged enabling the propagation and generation of light to be potentially manipulated with unprecedented control. PCs consist of a periodic modulation of dielectric constant in one, two, or three dimensions, which can result in the formation of directional or omni-directional photonic band gaps (PBGs), spectral regions where light propagation is forbidden, and more remarkably, novel dispersion characteristics. Since PC properties scale with the dimension of the wavelength of interest, significant technological constraints must be fully addressed to manufacture 3D PBG materials for optical or infrared applications such as displays, lightning, and communications. PCs enable the unraveling of unique optical phenomena such as PBGs, spontaneous emission rate manipulation, sub-wavelength focusing, and superprism effects. This research focuses on the feasibility to achieve omni-directional PBGs in synthetic opal-based 3D PCs through precise nanoscale control to the original dielectric architecture. In particular, the optical response to the conformal deposition of dielectric layers using atomic layer deposition (ALD) within the porous template is strongly emphasized. Geometrical models were developed to faithfully model the manipulation of the synthetic opal architecture by ALD and then used in electromagnetic algorithms to predict the resulting optical properties. From these results, this research presents and investigates a scheme used to greatly enhance and adjust the PBG width and position, as well as simultaneously reducing the dielectric contrast threshold at which the PBG forms. This Thesis demonstrates that the unique opal architectures offered by ALD not only supports the formation of larger PBGs with high index materials; but also enables the use of optically transparent materials with reduced refractive index. Additionally, slight alteration of these structures facilitates the incorporation of non-linear (NL) electro-optical (EO) material for dynamic tuning capabilities and potentially offers a pathway for fabricating multi-functional photonic devices. Finally, low-temperature ALD was investigated as a means to manipulate band gaps and dispersion effects in 2D PC silicon slab waveguides and 3D organic biologically-derived templates. The results indicate the unique ability of ALD to achieve composite structures with desirable (large PBGs) or novel (slow light) optical properties.

A rigorous power coupling model for three-core optical waveguides is proposed based on a full-wave vector boundary element method (VBEM). In addition to the influence of the state of the polarization (SOP) of the input light on the coupling behavior of the three-core optical waveguides can be simulated, the polarization dependent loss (PDL) of the three-core optical waveguides can also be investigated by combining the Mueller matrix method into the power coupling model. In this dissertation, the power coupling model is applied to investigate two kinds of power splitters. The first power splitters are constructed of step-index single mode fibers called triangular 3 3 fused tapered couplers. The influence of the SOP of the input light on the coupling behavior of the triangular 3 3 fused tapered couplers and the effect of fabricating parameters of the coupler, fusion degree, and heated length on the PDL of the coupler are investigated in this dissertation. The second kind of power splitters are constructed of photonic crystal fibers (PCFs). And, several fundamental coupling properties of three-core photonic crystal fibers (PCFs) with equilateral triangular cores are investigated numerically included coupling length, bandwidth, and polarization dependent loss (PDL). It is found the three-core PCFs are good candidate to be realized as an ultra-compact power splitter. And, for three-core PCFs that chose a proper coupling point can raise the yield and performance stability of the power splitter. In addition to the coupling behavior of the power splitters, two-dimensional photonic crystals (PCs) are also studied in this dissertation based on finite-difference time-domain (FDTD) method. The phase interference phenomenon due to the multiple plane-wave signals as initial conditions of the FDTD method for computing band structure of two-dimensional PCs is studied in this dissertation. It is found some normal modes supposed to exist could be lost if the phase interference is nearly out of phase at eigenfrequency. To overcome this problem, we proposed a new solving procedure based on FDTD algorithm which can avoid mode loss phenomenon and obtain complete normal modes over interested frequency range.

Because of the fast growing in communications, the quality of signal transmission in optical fiber becomes very important. Concurrently, photonic crystal fiber (PCF) consisting of a central defect region surrounded by multiple air holes is attracting much attention in recent years because of its unique properties, such as full photonic bandgaps, wideband, dispersion, endlessly single mode and birefringence, etc. This thesis is mainly focused on the development of the photonic band structures and propagation properties of PCF. And we propose a novel ideal about 3-D PCF, which can be fabricated using the laser heated pedestal growth (LHPG) method. In the thesis, we study the optical properties of 2-D and 3-D PCFs made by Pyrex using the software RSoft. From the result of simulation, the 2-D out-of-plane bandgaps for a hexagonal close packed structure appear between the air filling fraction range from 0.30 to 0.88 for the incident light of wavelength range from 0.7 to 1

The communication system using Wavelength-division multiplexing (WDM) allows for better utilization of the spectral bandwidth. Photonic crystals (PhCs) exhibit photonic bandgap (PBG) due to the periodic variation of the dielectric constant and photons with a range of frequencies within the PBG cannot travel through the crystal. By introducing defects into PhCs, it is possible to control the light propagation along certain paths. In this thesis, the characteristics of coupled cavity waveguides (CCWs) and drop filter are discussed. Then we propose a multi-channel WDM system based on CCWs. It can be applied in FTTH to filter the wavelengths of 1310, 1490 and 1550 nm in different CCWs and also can make the bandwidth of output wavelength become narrow to filter more wavelengths. In addition, by modulating the size of the resonator on the PhCs, it can drop the particular wavelength into the waveguide. Finally, we proposed a multi-channel drop filter with FHWM 0.8 nm. This device design is leading the way to achieve CWDM specification with 100% drop efficiency, high quality factor and almost no crosstalk. The operations of such an ultra-compact demultiplexer and drop filter based on PhCs are suitable to be used in WDM optical communication systems.

A variety of techniques are available to enable the fabrication of photonic crystal structures. Multi-beam-interference lithography (MBIL) is a relatively new technique which offers many advantages over more traditional means of fabrication. Unlike the more common fabrication methods such as optical and electron-beam lithography, MBIL is a method that can produce both two- and three-dimensional large-area photonic crystal structures for use in the infrared and visible light regimes. While multi-beam-interference lithography represents a promising methodology for the fabrication of PC structures, there has been an incomplete understanding of MBIL itself. The research in this thesis focuses on providing a more complete, systematic description of MBIL in order to demonstrate its full capabilities. Analysis of both three- and four-beam interference is investigated and described in terms of contrast and crystallography. The concept of a condition for primitive-lattice-vector-direction equal contrasts} is introduced in this thesis. These conditions are developed as nonlinear constraints when optimizing absolute contrast for producing lithographically useful interference patterns (meaning high contrast and localized intensity extrema). By understanding the richness of possibilities within MBIL, a number of useful interference patterns are found that can be created in a straightforward manner. These patterns can be both lithographically useful and structurally useful (providing interference contours that can define wide-bandgap photonic crystals). Included within this investigation are theoretical calculations of band structures for photonic crystals that are fabricatable through MBIL. The resulting calculations show that not only do most MBIL-defined structures exhibit similar performance characteristics compared to conventionally designed photonic crystal structures, but in some cases MBIL-defined structures show a significant increase in bandgap size. Using the results from this analysis, a number of hexagonal photonic crystals are fabricated using a variety of process conditions. It is shown that both rod- and hole-type photonic crystal structures can be fabricated using processes based on both positive and negative photoresist. The "light-field" and "dark-field" interference patterns used to define the hexagonal photonic crystal structures are quickly interchanged by the proper adjustment of each beam's intensity and polarization. The resulting structures, including a large area (~1 cm², 1 x 10⁹ lattice points) photonic crystal are imaged using a scanning electron microscope. Multi-beam-interference lithography provides an enabling initial step for the wafer-scale, cost-effective integration of the impressive PC-based devices into manufacturable DIPCS. While multi-beam-interference lithography represents a promising methodology for the fabrication of PC structures, it lacks in the ability to produce PC-based integrated photonic circuits. Future research will target the lack of a large-scale, cost-effective fabrication methodology for photonic crystal devices. By utilizing diffractive elements, a photo-mask will be able to combine both MBIL and conventional lithography techniques into a single fabrication technology while taking advantage of the inherent positive attributes of both.

The refraction properties of photonic crystal lattices offers methods to control the beam steering of light through use of non-linear dispersion contours. In this thesis new photonic crystal structures, such as the square and triangular superlattices, that provide novel refractive properties are analyzed. The property difference between rows in these structures is the hole radius Δr. The difference in hole sizes leads to observation of the superlattice effect, that is, a change in the refractive index Δn between opposite rows of holes. The index difference becomes a function of the size of the smaller r2 hole area or volume due to the addition of the higher index background material compared to the larger r1 holes. The difference in hole radii Δr = r1 - r2 is referred to as the static superlattice strength and is designated by the ratio of r2/r1. The superlattice strength increases as the ratio of r2/r1 decreases. The hole size modulation creates modified dispersion contours that can be used to fabricate advanced beam steering devices through the introduction of electro-optical materials and a controlled bias. A discussion of these superlattice structures and their optical properties will be covered, followed by both static and dynamic tunable device constructions utilizing these designs. Also, static tuning of the devices through the use of atomic layer deposition, as well as active tuning methods utilizing liquid crystal (LC) infiltration, sealed LC cells, and the addition of electro-optic material will be discussed. Also in this thesis we present designs to implement a simpler demonstration of cloaking, the carpet cloak, in which a curved reflective surface is compressed into a flat reflective surface, effectively shielding objects behind the curve from view with respect to the incoming radiation source. This approach eliminates the need for metallic resonant elements. These structures can now be fabricated using only high index dielectric materials by the use of electron beam lithography and standard cleanroom technologies. The design method, simulation analysis, device fabrication, and near field optical microscopy (NSOM) characterization results are presented for devices designed to operate in the 1400-1600nm wavelength range. Improvements to device performance by the deposition/infiltration of linear, and potentially non-linear optical materials, were investigated.

Photonic crystals have allowed unprecedented control of light and have allowed bringing new functionalities on chip. Photonic crystal waveguides (PCWs), which are linear defects in a photonic crystal, have unique features that distinguish these waveguides from other waveguides. The unique features include very large dispersion, existence of slow light, and the possibility of tailoring the dispersion properties for guiding light. In my research, I have overcome some of the challenges in using slow light in PCWs. In this work, I have demonstrated (i) high efficiency coupling of light into slow group velocity modes of a PCW, (ii) large bandwidth high transmission and low dispersion bends in PCWs, (iii) accurate modeling of pulse propagation in PCWs, (iv) high efficiency absorbing boundary conditions for dispersive slow group velocity modes of PCWs. To demonstrate the utility of slow light in designing high efficiency devices, I have demonstrated refractive index sensors using slow light in PCWs. In the end, a few high efficiency devices based on slow light in PCWs are mentioned. The remaining issues in the widespread use of PCW are also discussed in the last chapter.

Photonic crystals are periodic structures that offers the possibility to control the propagation of light. The revised plane wave method has been implemented in order to compute band structures for photonic crystals. The main advantage of the revised plane wave method is that it can handle lossless dispersive materials. This can not be done with a conventional plane wave method. The computational challenge is comparable to the conventional plane wave method. Band structures have been calculated for a square lattice of cylinders with different parameters. Both dispersive and non-dispersive materials have been studied as well as the influence of a surface roughness. A small surface roughness does not affect the band structure, whereas larger inhomogeneities affect the higher bands by lowering their frequencies.