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Measurement of concentration gradients in photoresist films and study of the influence of these gradients on photoresist performance /Gardiner, Allen Brooke, January 1999 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 1999. / Vita. Includes bibliographical references (leaves 365-373). Available also in a digital version from Dissertation Abstracts.
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Surface monolayer initiated polymerization a novel means of fabricating sub-100nm features /McCoy, Kendra Michele. January 2004 (has links) (PDF)
Thesis (Ph. D.)--Chemical Engineering, Georgia Institute of Technology, 2004. / Clifford L. Henderson, Committee Chair ; Peter Ludovice, Committee Member ; Laren Tolbert, Committee Member ; Dennis Hess, Committee Member ; W. Brent Carter, Committee Member. Includes bibliographical references (leaves 119-128).
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Synthesis of photoresist materials for 193 nm exposure /Cho, Sungseo, January 2000 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 2000. / Vita. Includes bibliographical references (leaves 157-165). Available also in a digital version from Dissertation Abstracts.
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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materialsOsborn, Brian Philip 28 August 2008 (has links)
Not available / text
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Top surface imaging for sub-100nm lithographyJamieson, Andrew Thomas 28 August 2008 (has links)
Not available / text
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Design, synthesis, and evaluation of materials for microelectronics applicationsHeath, William Hoy 28 August 2008 (has links)
Not available / text
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Photoresist removal using low molecular weight alcohols and IPA-based solutionsGao, Karen Ging 05 1900 (has links)
No description available.
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Bimetallic thermal resists for photomask, micromachining and microfabrication /Tu, Richard Yuqiang. January 1900 (has links)
Thesis (Ph.D.) - Simon Fraser University, 2004. / Theses (School of Engineering Science) / Simon Fraser University.
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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materialsOsborn, Brian Philip, Willson, C. G. January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.
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Top surface imaging for sub-100nm lithographyJamieson, Andrew Thomas, Willson, C. G. January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.
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