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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
11

Preparation of high density particulate preforms and their consolidation by the thermal gradient-forced flow diamond CVI process

Lee, Jong-Heon 12 1900 (has links)
No description available.
12

Investigations of plasma-enhanced CVD growth of carbon nanotubes and potential applications /

Jönsson, Martin, January 2007 (has links)
Thesis (doctoral)--Göteborg University, 2007. / Original thesis t.p. with abstract (2 p.) inserted. Includes bibliographical references.
13

Growth of nitrogen doped diamond using inductively coupled thermal plasma CVD

Azem, Amir. January 1900 (has links)
Thesis (M.Eng.). / Written for the Dept. of Chemical Engineering. Title from title page of PDF (viewed 2008/07/29). Includes bibliographical references.
14

Synthesizing diamond films from low pressure chemical vapor deposition /

Freeman, Mathieu Jon. January 1990 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 1990. / Typescript. Includes bibliographical references (leaves 92-97).
15

Plasma enhanced chemical vapor deposition of thin aluminum oxide films

Miller, Larry M. January 1993 (has links)
Thesis (M.S.)--Ohio University, March, 1993. / Title from PDF t.p.
16

Feasibility of Ellipsometric sensor development for using during PECVD SIOx coated polymer product manufacturing : a thesis /

Helms, Daniel Lynn. Savage, Richard N. January 1900 (has links)
Thesis (M.S.)--California Polytechnic State University, 2009. / The letter x is subscripted in the title. Title from PDF title page; viewed on October 23, 2009. Major professor: Dr. Richard Savage. "Presented to the faculty of California Polytechnic State University, San Luis Obispo." "In partial fulfillment of the requirements for the degree [of] Master of Science in Materials Engineering." "September 2009." Includes bibliographical references (p. 115-121). Also available on microfiche.
17

Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates

Chakravarthy, Pramod January 1995 (has links)
No description available.
18

The effect of catalyst properties on the synthesis of carbon nanotubes by plasma enhanced chemical vapor deposition

Cheemalapati, Surya Venkata Sekhar 08 November 2012 (has links)
A study of the effect of catalyst properties on the synthesis of carbon nanotubes (CNTs) is done in this thesis. Three different metal alloy catalysts, Fe/Ti, Ni/Ti, Co/Ti, have been studied. Various atomic concentrations and thicknesses were cosputter deposited on clean Si wafers using AJA Orion 4 RF Magnetron sputter deposition tool at 5mtorr and 17��C, and the films were characterized using a scanning electron microscope, Energy-dispersive X-ray spectroscopy. All the alloys have been annealed at 650��C and 3 torr in an argon atmosphere at 100 SCCM, followed by ammonia gas plasma etch at different powers at 3 torr and 50 SCCM NH��� flow in a modified parallel plate RF chemical vapor deposition tool for 1 minute. The influence of plasma power, thickness of catalyst and concentration of Ti the secondary metal in the alloy composition, on the surface morphology of the catalyst are investigated by characterizing them with atomic force microscopy. The study has shown that the surface roughness is affected by Ti concentration, thickness and plasma power. The 35 W power NH��� plasma produced rougher surfaces when compared to the 75 W NH��� plasma. The result is interpreted as follows: ion bombardment leads to greater etching of the catalyst surface. Thus, plasma power must be optimized for catalyst thin film and etch time. The study has provided an in depth analysis and understanding of the various factors that influence catalyst surface morphology which can be applied into further study for optimizing parameters for synthesis of single walled CNTs. Following this, a study on catalysts for CNT synthesis was performed using Plasma enhanced chemical vapor deposition and characterized by scanning electron microscope. CNTs were synthesized on Ni, Ni-Ti, Co, Co-Ti and Fe catalyst. Ni, Ni-Ti catalyst produced forest like vertically aligned CNTs whereas Co, Co-Ti produced vertically aligned free standing CNTs. The growth was dense and uniform across the substrate. Initial growth runs on Fe, Fe-Ti alloy did not produce any CNTs until catalyst was restructured with a thicker Ti under layer after an investigation using Secondary ion mass spectrometry of suspected Fe catalyst poisoning due to reaction with Si substrate. A room temperature run was carried out on annealed and plasma etched Ni catalyst and no CNTs were produced indicating the importance of substrate temperature of CNTs. A deeper understanding of factors of influence on CNTs such as catalyst types, structure/morphology, and substrate temperature has been achieved with this study. / Graduation date: 2013
19

Dynamic feature analysis of an industrial PECVD tool with connection to operation-dependent degradation modeling

Bleakie, Alexander Q. 23 December 2010 (has links)
An analysis that is based on the monitoring of dynamic features from in-situ sensors of an industrial PECVD tool is presented. Linear Discriminant Analysis is used to determine which features are the most sensitive to various changes in the tool condition. The concept of Confidence Values (CVs) is used to quantify statistical changes of these dynamic features as the condition of the tool changed. Two data sets were collected from a PECVD tool in the facilities of a well-known equipment supplier. Dynamic features coming from the RF plasma power and matching capacitors’ sensors are shown to be sensitive to various changes in the cleaning cycles for Si-N, Si-O₂, and TEOS depositions. Quantifying the statistical distributions of the sensitive sensor features during tool condition changes is important for determining which sensor features are necessary to monitor in order to predict the tool chamber health. Results show that these RF plasma sensors could be used to track changes inside the tool chamber. / text
20

Covalent immobilisation of proteins for biomaterial and biosensing applications

Szili, Endre Jozsef, endre.szili@unisa.edu.au January 2008 (has links)
This thesis focuses on surface science and bioengineering investigations, first for the development of an improved biomaterial for orthopaedic implant applications, and second, for the development of a biosensor device for biomedical diagnostics. A key component considered in this thesis was the covalent linkage of proteins to the material’s surface for retaining the protein’s immunological and biological activities and for generating a functional interface. Part 1 of this thesis investigated surface modification procedures for improving the bioactivity of titanium substrates. Titanium is first coated with a bioactive silica film grown by plasma enhanced chemical vapour deposition (PECVD), referred to as PECVD-Si-Ti. In previous studies, the bone-implant integration process was enhanced 1.6-fold for titanium implants coated with PECVD-Si films compared to uncoated titanium implants in vivo. However, in vitro studies carried out in this thesis showed that the growth of MG63 osteoblast-like cells was 7-fold higher on uncoated titanium compared to PECVD-Si coated titanium. Therefore, to improve cell growth on the surface and, by inference, the integration of PECVD-Si-Ti implants into bone tissue, the implant’s surface was functionalised with a mitogenic factor, insulin-like growth factor-1 (IGF-1). This was accomplished by modifying the PECVD-Si-Ti surface with an alkoxysilane, 3-isocyanatopropyl triethoxysilane (IPTES), and then by covalent bioconjugation of IGF-1 through isocyanate-amino chemistry. After 72 h of in vitro cell culture in serum-free medium, the growth of MG63 cells was enhanced 1.9-fold on IPTES functionalised PECVD-Si-Ti, which was loaded with covalently immobilised IGF-1 compared to IPTES functionalised PECVD-Si-Ti without IGF-1 (isocyanate reactive groups were quenched with ethanolamine hydrochloride). The attachment and adhesion of MG63 cells were also enhanced on PECVD-Si-Ti by the covalently immobilised IGF-1 in serum-free cell culture conditions. Therefore, the bioactivity of PECVD-Si-Ti was improved by covalently linking IGF-1 to the substrate surface through isocyanate-amino chemistry. Part 2 of this thesis involved the development of a new optical interferometric biosensor. The biosensor platform was constructed from electrochemically-prepared thin films of porous silicon that acted as a sensing matrix and transducer element. By reflective interferometry using white light, an enzyme-catalysed reaction was discovered (horseradish peroxidase (HRP) mediated oxidation of 3,3’,5,5’-tetramethylbenzidine (TMB)), which led to an acceleration in the rate of porous silicon corrosion and represented the biosensor’s readout signal. We discovered that another substrate, which is also oxidised by HRP, OPD, produces an even more pronounced readout signal. The HRP-OPD system was used in an immunoassay for detecting human IgG from an Intragam solution. An important part in the design of the biosensor was the surface functionalisation approach where anti-human IgG, referred to as the capture antibody, is immobilised on the porous silicon surface. The readout signal (produced from the capture of human IgG) was enhanced 4-fold on the porous silicon biosensing platform functionalised with covalently linked anti-human IgG through isocyanate-amino chemistry compared to the porous silicon biosensing platform functionalised with adsorbed anti-human IgG. The optimised biosensor was used to detect IgG from a total human protein concentration of Intragam to a sensitivity of 100 ng/ml. In summary, isocyanate-amino bioconjugate chemistry was used to covalently link either IGF-1 to PECVD-Si-Ti for improving the biological activity of the orthopaedic implant and to covalently link IgG to porous silicon for developing a sensitive biosensor for the detection of proteins. This surface chemistry approach is very useful for biomaterial and biosensing applications.

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