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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
71

Development of techniques to quantify chemical and mechanical modifications of polymer surfaces application to chemical mechanical polishing /

Diao, Jie. January 2004 (has links)
Thesis (Ph. D.)--Chemical Engineering, Georgia Institute of Technology, 2006. / Samuels, Robert J., Committee Member ; Henderson, Clifford L., Committee Member ; Danyluk, Steven, Committee Member ; Hess, Dennis W., Committee Chair ; Bottomley, Lawrence A., Committee Member ; Morris, Jeffrey F., Committee Co-Chair. Vita. Includes bibliographical references.
72

Efeito da refrigeração do ar comprimido utilizado em MQL (mínima quantidade de lubrificante) aplicado ao processo de retificação /

Andrade, Ricardo Bega de. January 2017 (has links)
Orientador: Eduardo Carlos Bianchi / Co-orientador: Vicente Luiz Scalon / Resumo: O processo de retificação é um processo de usinagem por abrasão que visa principalmente obtenção de superfícies com baixa rugosidade e tolerância dimensional estreita. Essa combinação é possível por causa das múltiplas arestas de corte sem geometria definida que removem material da peça em pequenas penetrações de trabalho. Contudo é um processo que apresenta problemas para a peça, devido à elevada geração de calor. Este calor pode causar alterações metalúrgicas, dentre outras. Por esta razão é necessário utilizar fluido de corte para refrigerar a zona de retificação. Ao mesmo tempo é preciso buscar uma produção mais sustentável em relação à técnica de lubri-refrigeração convencional. Esta técnica vem sendo substituída por outras que visam redução de custo e redução e/ou eliminação do impacto ambiental, sem prejuízos para qualidade da peça. Uma técnica de lubri-refrigeração que vem substituindo a técnica convencional competitivamente é a técnica de Mínima Quantidade de Lubrificação (MQL), que é bem difundida em processos de usinagem com geometria de corte definida (por exemplo, torneamento, fresamento e furação) e com resultados promissores também em processos de retificação. Entretanto, pelo fato da técnica MQL ser menos estudada no processo de retificação, seu desempenho ainda apresenta algumas restrições devido à sua baixa eficiência de refrigeração, que pode ocasionar danos térmicos à peça. Neste sentido, a realização deste trabalho consistiu em substituir o ar à temperatu... (Resumo completo, clicar acesso eletrônico abaixo) / Abstract: The grinding process is an abrasion machining process that is mainly aimed at obtaining surfaces with low roughness and narrow dimensional tolerance. This combination is possible because of the multiple cutting edges without defined geometry that remove material from the workpiece at small work penetrations. However, it is a process that presents problems for the workpiece, due to the high generation of heat. This heat can cause metallurgical changes, among others. For this reason it is necessary to use cutting fluid to cool the grinding zone. At the same time it is necessary to seek a more sustainable production compared to the conventional lubri-cooling technique. This technique has been replaced by others that aim at cost reduction and reduction and/or elimination of environmental impact, without any damage to the quality of the part. A lubri-cooling technique that is replacing the conventional technique, competitively, is the Minimum Quantity of Lubricant (MQL) technique, which is well diffused in machining processes with defined cutting geometry (for example, turning, milling and drilling) and with promising results also in grinding processes. However, due the MQL technique is less studied in the grinding process, its performance still presents some restrictions due to its low cooling efficiency, which can cause thermal damage to the part. In this sense, the accomplishment of this work consisted in replacing the air at the ambient temperature of the MQL by air at a lower... (Complete abstract click electronic access below) / Mestre
73

Influência da friabilidade dos grãos abrasivos de rebolos de CBN na retificação cilíndrica externa de mergulho do aço AISI 4340 /

Canarim, Rubens Chinali. January 2018 (has links)
Orientador: Eduardo Carlos Bianchi / Banca: Luiz Eduardo de Angelo Sanchez / Banca: Gilberto de Magalhães Bento Gonçalves / Banca: Carlos Eiji Hirata Ventura / Banca: Alessandro Roger Rodrigues / Resumo: A presente tese estudou a influência da friabilidade de dois rebolos de CBN (alta friabilidade - HF e baixa friabilidade - LF) na retificação cilíndrica externa de mergulho do aço AISI 4340, temperado e revenido, para vários avanços. Os resultados obtidos demonstraram que, comparativamente, o rebolo de baixa friabilidade (CBN LF) fornece melhor acabamento para a peça em termos de rugosidade e desvios de circularidade, com menor desgaste de rebolo, em todos os avanços. Por outro lado, o consumo de potência e seus sinais de emissão acústica foram sempre mais elevados. Para a tensão residual, a baixa friabilidade auxilia na geração de tensões compressivas na peça. Todavia, mesmo com a alta friabilidade, para condições mais agressivas de corte também é possível obter tensões compressivas elevadas. Nenhuma das condições de usinagem alterou a microestrutura das peças retificadas, com base nos resultados de microdureza Vickers. A elevada friabilidade, de um modo geral, pode promover fratura excessiva dos grãos, que acabam por aumentar o riscamento e deteriorar a qualidade superficial das peças, além de desgastar mais o rebolo, em virtude do predomínio da macrofratura sobre a microfratura. Ao mesmo tempo, contudo, reduz as forças de corte e o consumo de potência. Deve-se levar em conta todos os fatores à disposição para efetuar a melhor escolha de rebolo e sua friabilidade para determinada aplicação. / Abstract: The present thesis aimed to study the influence of friability of two CBN wheels (high friability - HF and low friability - LF) on the external plunge cylindrical grinding of the AISI 4340 steel, quenched and tempered, for different feed rates. The results showed that CBN LF provided better workpiece finishing in terms of surface roughness and roundness deviations, with lower wheel wear, in all feed rates. However, power consumption and acoustic emission signals were always higher than for CBN HF. For residual stresses, low friability contributes to the generation of compressive stresses on the workpiece. For high feed conditions, even CBN HF can provide high compressive stresses. None of the grinding conditions caused alterations on the workpiece microstructure, based on the results for Vickers microhardness. High friability can promote excessive grain fracture, which can increase scratching and deteriorate the surface quality, causing higher wheel wear as well (since macrofracture predominates over microfracture). On the other side, it can reduce cutting forces and power consumption. All factors at disposal must be taken into account in order to conduct the optimal selection of grinding wheel- as well as its adequate friability - for each specific application. / Doutor
74

Um sistema com um bloco de teflon e um bastão abrasivo para a limpeza da superfície de corte de rebolos

Silva, Tiago da [UNESP] January 2013 (has links) (PDF)
Made available in DSpace on 2014-06-11T19:28:21Z (GMT). No. of bitstreams: 0 Previous issue date: 2013Bitstream added on 2014-06-13T20:18:00Z : No. of bitstreams: 1 silva_t_me_bauru.pdf: 5556945 bytes, checksum: bfc0f29139dcb742000855aef9d22106 (MD5) / Uma técnica utilizada para substituir o método de lubri-refrigeração convencional é a mínima quantidade de lubrificante (MQL). Este método utiliza de uma mistura de óleo e ar à elevada pressão, reduzindo a quantidade de fluído de corte necessário para a usinagem. Entretanto, em diversos estudos feitos na área de retificação com MQL, nota-se que há a necessidade de aperfeiçoamento dessa técnica com relação à limpeza da zona de corte do rebolo. Devido à dificuldade do baixo fluxo de fluído, em remover os resíduos superficiais acumulados, cavados aderem à superfície da ferramenta abrasiva, preenchendo os poros do rebolo e prejudicando o processo. Sendo assim este trabalho busca promover uma técnica de limpeza para o rebolo do tipo CBN, na retificação cilíndrica de aço ABNT4340 temperado e revenido, com a utilização de MQL. Através de um dispositivo, foi colocado em contato na superfície periférica do rebolo, bastões retangulares compostos dos materiais: Teflon, Óxido de alumínio e Carbeto de silício. As variáveis de saída do processo analisadas foram o comportamento da força tangencial de corte, rugosidade, emissão acústica, relação G (volume de material removido/volume do rebolo desgastado), fotos em microscópio eletrônico de varredura, microdureza e circularidade. O método MQL com o dispositivo, foi comparado com as seguintes condições de lubri-refrigeração: Convencional; MQL sem limpeza com local de ar. Com base nos resultados obtidos, o método de limpeza utilizando o dispositivo juntamente com o bastão de carbeto de silicone, comprovou em algumas condições a obtenção de melhores resultados e ausência de danos térmicos, se comparado aos outros métodos / A technique used to replace the method of conventional lubrification and cooling is the minimum quantity lubricant (MQL). This method uses a mixture of oil and air to the high pressure, reducing the amount of fluid required for machining. However, in various studies in the field of grinding with MQL, it is noted that there is a need for improvement of this techique with respect to cleaning the cutting zone of the wheel. Due to the difficulty of low fluid flow, to remove the accumulated surface residue, chips adhere to the surface of the abrasive tool, filling the pores of the wheel and impairing the process. Thus, this work seeks to promote a clening technique for the type CBN wheel, the grinding cylindrical AISI 4340 steel hardened and tempered, with the use of MQL. Through a device was placed in contact on the peripheral surface of the grinding wheel, rectangular rods compounds materials: Teflon, aluminum oxide and silicon carbide. The output variables of the process were analyzed the behavior of the tangential cutting force, surface roughness, acoustic emission, G ratio (volume of material removed/volume of wheel worn), in photos scanning electron microscope, hardness and roundness. The method MQL with the device was compared with the followin conditions of lubrication and cooling: Conventional; MQL without cleaning; MQL and cleaning air nozzle. Based on the results obtained, the cleaning method using the device with the bat silicon carbide, proved in some conditions to obtain better results and no thermal damage, compared to other methods
75

On the modelling of thermal deformation of a workpiece in surface grinding.

Hucke, Leopold Manfred. January 1973 (has links)
No description available.
76

Chemical-mechanical wear mechanism in polyurethane polishing pad materials

Li, Irene 01 October 2000 (has links)
No description available.
77

Chemical and mechanical analysis on CMP polyurethane pads

Lu, Huijun 01 October 2001 (has links)
No description available.
78

Characterization of chemical structure, morphology, and mechanical response of polyurethane surface domains as a result of exposure to common chemical mechanical planarization (CMP) environments

Ramsdell, Jeffrey E. 01 October 2002 (has links)
No description available.
79

Measurement and modeling of fluid pressures in chemical mechanical polishing

Ng, Sum Huan 03 March 2005 (has links)
A theory of the sub-ambient fluid pressure phenomenon observed during the wet sliding of a disk on a polymeric pad is presented. Two-dimensional fluid pressure mapping using membrane pressure sensors reveals a large, asymmetrical sub-ambient pressure region occupying about 70 percent of the disk-pad contact area. At the same time, a small positive pressure region exists near the trailing edge of the disk. This phenomenon is believed to be present during chemical mechanical polishing (CMP) and can contribute to the contact pressure, affecting the material removal rate and removal uniformity. Depending on the load and pad speed, the real contact pressure can be more than 2 times the nominal contact pressure due to the applied load. Tilt measurements of the disk carried out by a capacitive sensing technique indicate that the disk is tilted towards the leading edge and pad center when the pad is rotating. In addition, wafer bow is found to be less than 2 m and wafer tilt with respect to the wafer carrier is 5 to 7 m in the CMP configuration. A two-dimensional mixed-lubrication model based on the Reynolds equation is developed and solved using a finite differencing scheme. The pad is modeled as two layers: a top asperity layer described by the Greenwood and Williamson equation, and the bulk pad as linearly elastic. The orientation of the disk is determined by balancing the fluid and solid forces acting on it and solving using a modified Newtons method. It is found that the tilt of the disk and the pad topography play important roles in the distribution of fluid pressure through affecting the film thickness distribution. For a pad with severe topography, minimum and maximum fluid pressures of -90 kPa and +51 kPa respectively are detected. The model is able to recreate the experimental pressure maps. A material removal rate model based on mechanical abrasion and statistics has also been developed. Comparisons of model predictions and silicon oxide polishing results show agreement.
80

Innovative design of high efficient polishing system for axial symmetric free surface: A newly line polishing method with adjustable pressure distribution

Hong, Chang-sheng 08 August 2008 (has links)
This study aims to develop a precision polishing system with high machining rate efficiency. The system is mainly composed of a loading mechanism, a work piece and a polishing pad with belt-shape. The loading mechanism is to generate a specific pressure distribution between the pad and the work surface.¡@Such a pressure distribution is to render the machining rate distribution, along the contact zone between pad and work surface, capable of compensating the work surface error.¡@With the capability of accurately removing the work surface error left by the previous machining method, this polishing system can improve the form precision of work and become an effective high precision machining tool. In this thesis, the relation between the applied loadings and the pressure distribution were established by the finite element method.¡@A linear model described this relation with the applied loading as the input and the desired pressure distribution as the output. The unknown coefficients of the model were then derived from the simulation data by the finite element method. When a desired pressure distribution was given, the applied loadings could be solved from the model by either the simultaneous equation method or the least squared error method.¡@A main issue to investigate in the study was to examine whether a pressure distribution with an arbitrary wavelength spectrum could be obtained by the proposed scheme. A detailed analysis about the effect of wavelength in pressure distribution on the precision of loading estimation was done. Four conclusions could be made from the study. 1.The proposed polishing system can be applied to a free surface with either concave or convex geometrical features 2.The proposed linear model can suggest proper loadings to generate desired pressure distribution with good precision if the wavelength of pressure distribution is large enough. 3.The Shannon sampling theorem can be used to give a qualitative description of the properness of the model in generating a desired pressure distribution. 4.The proposed polishing method has a high machining repeatability when the operating condition is well controlled.

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