This dissertation describes the fabrication and operation of porous silicon gas sensors. The first chapter describes the motivation behind gas sensor research and provides the reader with background knowledge of gas sensors including the terminology and a review of various gas sensors. The following two chapters describe both how the porous silicon gas sensors are created and how they have been tested in the laboratory. Chapter 4 describes the steps required to create arrays of gas sensors to provide for a selective device through the application of patented selective coatings. Chapter 5 proposes a physical model that leads to a numerical solution for predicting the operation of the gas sensor. The next chapter builds from this model to analyze and optimize the experimental methods that are used to test both this and other gas sensors. The final chapter of this dissertation describes the prototype gas sensor system that has most recently been created, the company that was formed to further the development of that system, and the future applications of the porous silicon gas sensor.

This thesis uses injection-locked oscillators to realize spectrum and vital sign sensor. At first, the thesis discusses the factors to affect the locking range based on Adler¡¦s equation, and adopts an increase of injection power to enlarge the locking range. Then, the circuit simulation using ADS is carried out to predict the output response of an injection-locked oscillator. As an implementation result, a CMOS chip of an injection-locked oscillator achieves 70 MHz locking range at -17.5 dBm injection power. In addition, a CMOS FM demodulator is realized with the injection-locked oscillator, showing that the chip can demodulate the FSK signal with a minimum frequency deviation of 350 KHz, a minimum input power of -39.5 dBm, and a maximum data rate of 40 Mbps. With the help of the above CMOS chips, a spectrum sensor and a vital sign sensor are realized. In the test, the spectrum sensor can measure a minimum signal power of -100 dBm at a scan speed of 100 MHz/0.5 ms, while the vital sign sensor can detect the breathing and heartbeat rate at a sensing distance of 80 cm.

The increasing prevalence of diabetes and the severity of long-term complications have emphasized the need for continuous glucose monitoring. Optically-based methods are advantageous as they have potential for noninvasive or minimally invasive detection. Fluorescence-based affinity assays, in particular, can be fast, reagentless, and highly specific. Poly(ethylene glycol) (PEG) microspheres have been used to encapsulate such fluorescently labeled molecules in a hydrogel matrix for implantation into the body. The matrix is designed to retain the sensing molecules while simultaneously allowing sufficient analyte diffusion. Sensing assays which depend upon a spatial displacement of molecules, however, experience limited motility and diminished sensor response in a dense matrix. In order to overcome this, a process of hydrogel microporation has been developed to create cavities within the PEG that contain the assay components in solution, providing improved motility for large sensing elements, while limiting leaching and increasing sensor lifetime. For an implanted sensor to be successful in vivo, it should exhibit long-term stability and functionality. Even biocompatible materials that have no toxic effect on surrounding tissues elicit a host response. Over time, a fibrous capsule forms around the implant, slowing diffusion of the target analyte to the sensor and limiting optical signal propagation. To prevent this biofouling, a thermoresponsive nanocomposite hydrogel based on poly(N-isopropylacrylamide) was developed to create a self-cleaning sensor membrane. These hydrogels exist in a swollen state at temperatures below the volume phase transition temperature (VPTT) and become increasingly hydrophobic as the temperature is raised. Upon thermal cycling around the VPTT, these hydrogels exhibit significant cell release in vitro. However, the VPTT of the original formula was around 33-34 degrees C, resulting in a gel that is in a collapsed state, ultimately limiting glucose diffusion at body temperature. The hydrogel was modified by introducing a hydrophilic comonomer, N-vinylpyrrolidone (NVP), to raise the VPTT above body temperature. The new formulation was optimized with regard to diffusion, mechanical strength, and cell releasing capabilities under physiological conditions. Overall, this system is a promising method to translate a glucose-sensitive assay from the cuvette to the clinic for minimally invasive continuous glucose sensing.

Methods to improve performance of sensors with regard to sensor nonlinearity, sensor noise and sensor bandwidths are investigated and new algorithms are developed. The necessity of the proposed research has evolved from the ever-increasing need for greater precision and improved reliability in sensor measurements. After describing the current state of the art of sensor related issues like nonlinearity and bandwidth, research goals are set to create a new trend on the usage of sensors. We begin the investigation with a detailed distortion analysis of nonlinear sensors. A need for efficient distortion compensation procedures is further justified by showing how a slight deviation from the linearity assumption leads to a very severe distortion in time and in frequency domains. It is argued that with a suitable distortion compensation technique the danger of having an infinite bandwidth nonlinear sensory operation, which is dictated by nonlinear distortion, can be avoided. Several distortion compensation techniques are developed and their performance is validated by simulation and experimental results. Like any other model-based technique, modeling errors or model uncertainty affects performance of the proposed scheme, this leads to the innovation of robust signal reconstruction. A treatment for this problem is given and a novel technique, which uses a nominal model instead of an accurate model and produces the results that are robust to model uncertainty, is developed. The means to attain a high operating bandwidth are developed by utilizing several low bandwidth pass-band sensors. It is pointed out that instead of using a single sensor to measure a high bandwidth signal, there are many advantages of using an array of several pass-band sensors. Having shown that employment of sensor arrays is an economic incentive and practical, several multi-sensor fusion schemes are developed to facilitate their implementation. Another aspect of this dissertation is to develop means to deal with outliers in sensor measurements. As fault sensor data detection is an essential element of multi-sensor network implementation, which is used to improve system reliability and robustness, several sensor scheduling configurations are derived to identify and to remove outliers.

Fault tolerant control can accommodate the component faults in a control system such as sensors, actuators, plants, etc. This dissertation presents two fault tolerant control schemes to accommodate the failures of power amplifiers and sensors in a magnetic suspension system. The homopolar magnetic bearings are biased by permanent magnets to reduce the energy consumption. One control scheme is to adjust system parameters by swapping current distribution matrices for magnetic bearings and weighting gain matrices for sensor arrays, but maintain the MIMO-based control law invariant before and after the faults. Current distribution matrices are evaluated based on the set of poles (power amplifier plus coil) that have failed and the requirements for uncoupled force/voltage control, linearity, and specified force/voltage gains to be unaffected by the failure. Weighting gain matrices are evaluated based on the set of sensors that have failed and the requirements for uncoupling x1 and x2 sensing, runout reduction, and voltage/displacement gains to be unaffected by the failure. The other control scheme is to adjust the feedback gains on-line or off-line, but the current distribution matrices are invariant before and after the faults. Simulation results have demonstrated the fault tolerant operation by these two control schemes.

Thesis (M.S.)--Auburn University, 2008. / Abstract. Vita. Includes bibliographical references (p. 94-101).

In this thesis, the details of the design, fabrication, and characterization of an optical, integrated hydrogen gas and temperature sensor are explored. The hydrogen sensor is implemented by coating a ridge waveguide with a thin layer of palladium and shows very good response time and detection response for hydrogen concentrations ranging from 0.5-4%, both of which compare very favourably to similar existing technologies. Multiple film thicknesses were tested and it was found that thinner films give a faster response time at the expense of a reduced detection response. The temperature sensor is implemented with a multi-mode interferometer coupled ring resonator and has a sensing range of 100 K with good sensitivity. Both sensors are fabricated on a silicon-on-insulator platform and could easily be integrated together onto a single chip as part of an optical nose technology that would have the ability to sense multiple environmental factors simultaneously.

In this thesis, the details of the design, fabrication, and characterization of an optical, integrated hydrogen gas and temperature sensor are explored. The hydrogen sensor is implemented by coating a ridge waveguide with a thin layer of palladium and shows very good response time and detection response for hydrogen concentrations ranging from 0.5-4%, both of which compare very favourably to similar existing technologies. Multiple film thicknesses were tested and it was found that thinner films give a faster response time at the expense of a reduced detection response. The temperature sensor is implemented with a multi-mode interferometer coupled ring resonator and has a sensing range of 100 K with good sensitivity. Both sensors are fabricated on a silicon-on-insulator platform and could easily be integrated together onto a single chip as part of an optical nose technology that would have the ability to sense multiple environmental factors simultaneously.

In Wireless Sensor and Robot Networks (WSRNs), static sensors report event information to one of the robots. In the k nearest neighbour query processing problem in WSRNs, the robot receives event report needs to find exact k nearest robots (KNN) to react to the event, among those connected to it. We are interested in localized solutions, which avoid message flooding to the whole network. Several existing methods restrict the search within a predetermined boundary. Some network density-based estimation algorithms were proposed but they either result in large message transmission or require the density information of the whole network in advance which is complex to implement and lacks robustness. Algorithms with tree structures lead to the excessive energy consumption and large latency caused by structural construction. Itinerary based approaches generate large latency or unsatisfactory accuracy. In this thesis, we propose a new method to estimate a search boundary, which is a circle centred at the query point. Two algorithms are presented to disseminate the message to robots of interest and aggregate their data (e.g. the distance to query point). Multiple Auction Aggregation (MAA) is an algorithm based on auction protocol, with multiple copies of query message being disseminated into the network to get the best bidding from each robot. Partial Depth First Search (PDFS) attempts to traverse all the robots of interest with a query message to gather the data by depth first search. This thesis also optimizes a traditional itinerary-based KNN query processing method called IKNN and compares this algorithm with our proposed MAA and PDFS algorithms. The experimental results followed indicate that the overall performance of MAA and PDFS outweighs IKNN in WSRNs.

Numerous applications in the present day ranging from testing humidity in air to detecting miniscule quantities of potentially hazardous chemical and biological agents in the air or water supplies require the development of chemical sensors capable of analyte detection with high sensitivity and selectively. Further, it has become desirable to create lab-on-chip systems that can detect multiple chemical agents and allow for sampling and testing of environments at locations distant from conventional laboratory facilities. Current challenges in this area include design, development and characterization of low detection limit sensors, development of low-noise readout methods, positive identification of analytes and, identification and reduction of the effect of various noise sources - both intrinsic and extrinsic to the sensor. The current work examines the performance limits of a 10-cantilever piezoresistive microcantilever array (PµCA) sensor. The microcantilevers measure analyte concentration in terms of the surface stress associated with analyte binding to the functionalized cantilever surface. The design, fabrication, characterization and testing of this measurement platform is presented. A novel aspect of the sensors developed is the use of n-type doping which increases the sensitivity of the device by one order of magnitude. In addition, design rules for surface stress-based chemical sensors have been developed. Extensive thermal characterization of the piezoresistive microcantilevers has been performed for DC and AC electrical excitation and values of heat transfer coefficient for the associated microscale phenomena are reported. Further, a method of low-noise measurement of cantilever resistance has been developed based on phase-sensitive detection techniques and this has been integrated with a multiplexing circuit to measure piezoresistance change in multiple cantilevers. Finally, the two novel techniques of chemical sensing- double-sided sensing and thermal array-based sensing have been investigated. These methods are presented as a means of extending the applicability and functionality of piezoresistive microcantilever sensors for chemical sensing.