The research work presented in this thesis deals with modelling, design and characterisation of passive and active optical waveguide devices. The rst part of the thesis is related to algorithm development and numerical modelling of planar optical waveguides and gratings using the Method of Lines (MoL). The basic three-point central-di erence approximation of the δ2=δx2 operator used in the Helmholtz equation is extended to a new ve-point and seven-point approximation with appropriate interface conditions for the TE and TM elds. Di erent structures such as a high-contrast waveguide and a TM surface plasmon mode waveguide are simulated, and improved numerical accuracy for calculating the optical mode and propagation constant is demonstrated. A new fast and stable non-paraxial bi-directional beam propagation method, called Cascading and Doubling algorithm, is derived to model deep gratings with many periods. This algorithm is applied to model a quasi-guided multi-layer anti-resonant reecting optical waveguide (ARROW) grating polarizing structure. In the second part of the thesis, our focus is on active optical devices such as vertical-cavity and edge-emitting lasers. With a view to improve the bandwidth of directly modulated laser, an InGaAsP quantum well with InGaAlAs barrier is studied due to its favorable band o set for hole injection as well as for electron con nement. Quantum wells with di erent barrier bandgap are grown and direct carrier transport measurements are done using time and wavelength resolved photoluminescence upconversion. Semi-insulating regrown Fabry-Perot lasers are manufactured and experimentally evaluated for light-current, optical gain, chirp and small-signal performance. It is shown that the lasers having MQW with shallow bandgap InGaAlAs barrier have improved carrier transport properties, better T0, higher di erential gain and lower chirp. For lateral current injection laser scheme, it is shown that a narrow mesa is important for gain uniformity across the active region. High speed directly modulated DBR lasers are evaluated for analog performance and a record high spurious free dynamic range of 103 dB Hz2=3 for frequencies in the range of 1-19 GHz is demonstrated. Large signal transmission experiment is performed at 40 Gb/s and error free transmission for back-to-back and through 1 km standard single mode ber is achieved. / QC 20100827

This research investigated the characteristics of single-mode optical pulses generated with orthogonal-polarization optical feedback (OPF) in Fabry-Perot type semiconductor lasers. Single-mode pulse trains with a pulse frequency of 470 MHz and 3.76 GHz were observed. A modified model was proposed to solve the inconsistency between the experimental results and the computer simulations of Otsuka and Chern¡¦s model. These results also solve the problem of a round-trip feedback distance that is too short to enable the feedback system to be implemented, making this technology accomplishable in currently working systems. Furthermore, this investigation recovered and maintained a stable oscillation of every missing longitudinal mode in a hysteresis type mode-hopping gap of a semiconductor laser. A special feature of this method is that both the laser power and spectral purity are preserved during mode recovery and mode switching. The experimental results also reveal that the OPF effectively suppressed mode-hopping in semiconductor lasers and drove the laser into a stable single-mode state. Finally, this research employed OPF to suppress the intensity noise stimulated by coherent optical feedback in a semiconductor laser. At a coherent-feedback level as strong as ¡V14 dB, an OPF ratio of ¡V29 dB could return the laser to its primitive single mode from the multimode, yielding a spectral purity and relative intensity noise (RIN) even better than the solitary values. These discoveries constitute an important contribution to our understanding of applications of semiconductor lasers.

Semiconductor ring laser diodes (SLD) have been receiving attention for their potential use as source in photonic integrated circuits. Advantages of a ring laser include ease of integration because of no need for cleaved facets and they can be made very compact by folding their cavity . Ring laser have a unique feature, clockwise and counter- clockwise, in their lasing modes. If unidirectional traveling-wave oscillation can be achieved, spatial hole burning effects seen in Fabry-Perot and distributed feedback lasers can be avoided. In this work, the unidirectional oscillation is accomplished by controlling the taper shape structure. The whole laser cavity is formed using four reflection mirrors (TIR) and an output coupler passive waveguide. According to the Beam propagation Method (BPM) simulation, we find that the clockwise and counterclockwise oscillations have different behavior under various taper shape , indicating bidirectional oscillation can be eliminated. Moreover, bending loss¡Bmode transformation and optical gain are all included in calculation model. The waveguide is fabricated in the following steps: (1) ion implantation to get electrical isolation (2) selectively wet etching to form waveguide ridge (3) evaporation n- and p- electrode (4)spatter with Si3N4(5) planarization (6) evaporation microwave transmission line.

<p>Vertical-cavity surface-emitting lasers (VCSELs) areattractive as potential inexpensive high-performance emittersfor fibre-optical communication systems. Their surface-normalemission together with the small dimensions are beneficial forlow-cost fabrication since it allows on-wafer testing,simplified packaging and effective fibre-coupling. Forhigh-speed data transmission up to hundreds of metres, 850-nmVCSELs are today the technology of choice. For higher bandwidthand longer distance networks, emission at long-wavelength(1.3-1.55 µm) is required. Long-wavelength VCSELs are,however, not available since no materials system offershigh-index-contrast distributed Bragg reflectors (DBRs) as wellas high-gain active regions at such wavelengths.High-performance DBRs may be built up from AlGaAs/GaAsmultilayers, but long wavelength quantum wells (QWs) are onlywell established in the InP system. Therefore, the bestperforming devices have relied on wafer-fusion betweenInP-based QWs and AlGaAs-DBRs. More recently, however, the mainefforts have been shifted towards all-epitaxial GaAs-baseddevices, employing 1.3-µm GaInNAs QWs.</p><p>In this thesis, different processing technologies forlong-wavelength VCSELs are described. This includes a thoroughinvestigation of wafer-fusion between InP and GaAs regardingelectro-optical as well as metallurgical properties, and thedevelopment of a stable low-pressure process for the selectiveoxidation of AlAs. Optimised AlGaAs/GaAs DBRs were designed andfabricated. An important and striking observation from thatstudy is that n-type doping potentially is much moredetrimental to device performance than previously anticipated.These investigations were exploited in the realisation of twonew VCSEL designs. Near-room-temperature continuous-waveoperation of a single-fused 1.55-µm VCSEL was obtained.This demonstrated the potential of InGaAsP/InP DBRs inhigh-performance VCSELs, but also revealed a high sensitivityto self-heating. Further efforts were therefore directedtowards all-epitaxial GaAs-based structures. This resulted in ahigh-performance 1215-nm VCSEL with a highly strained InGaAssingle QW. This can be viewed as a basis for longer-wavelengthVCSELs, i.e., with an emission wavelength approaching 1300 nm,either by an extensive device detuning or with GaInNAs QWs.</p><p><b>Keywords</b>: VCSEL, vertical cavity laser, semiconductorlaser, long-wavelength, DBR, oxidation, wafer fusion, InGaAs,semiconductor processing</p>

Broadband light emitters operation, which covers multiple wavelengths of the electromagnetic spectrum, has been established as an indispensable element to the human kind, continuously advancing the living standard by serving as sources in important multi-disciplinary field applications such as biomedical imaging and sensing, general lighting and internet and mobile phone connectivity. In general, most commercial broadband light sources relies on complex systems for broadband light generation which are bulky, and energy hungry. Recent demonstration of ultra-broadband emission from semiconductor light sources in the form of superluminescent light emitting diodes (SLDs) has paved way in realization of broadband emitters on a completely novel platform, which offered compactness, cost effectiveness, and comparatively energy efficient, and are already serving as a key component in medical imaging systems. The low power-bandwidth product is inherent in SLDs operating in the amplified spontaneous emission regime. A quantum leap in the advancement of broadband emitters, in which high power and large bandwidth (in tens of nm) are in demand. Recently, the birth of a new class of broadband semiconductor laser diode (LDs) producing multiple wavelength light in stimulated emission regime was demonstrated. This very recent manifestation of a high power-bandwidth-product semiconductor broadband LDs relies on interband optical transitions via quantum confined dot/dash nanostructures and exploiting the natural inhomogeneity of the self-assembled growth technology. This concept is highly interesting and extending the broad spectrum of stimulated emission by novel device design forms the central focus of this dissertation. In this work, a simple rate equation numerical technique for modeling InAs/InP quantum dash laser incorporating the properties of inhomogeneous broadening effect on lasing spectra was developed and discussed, followed by a comprehensive experimental analysis of a novel epitaxial structure design. The layered structure is based on chirping the barrier layer thickness of the over grown quantum dash layer, in a multi-stack quantum dash/barrier active region, with the aim of inducing additional inhomogeneity. Based on material-structure and device characterization, enhanced lasing-emission bandwidth is achieved from the narrow (2 u m)ridge-waveguide LDs as a result of the formation of multiple ensembles of quantum dashes that are electronically different, in addition to improved device performance. Moreover, realization of SLDs from this device structure demonstrated extra-ordinary emission bandwidth covering the entire international telecommunication union (O- to U-) bands. This accomplishment is a collective emission from quantum wells and quantum dashes of the device active region. All these results lead to a step forward in the eventual realization of more than 150 nm lasing bandwidth from a single semiconductor laser diode.

A systematic study of microscopic many-body dynamics is used to analyze a strategy for how to generate ultrashort mode locked pulses in the vertical external-cavity surface-emitting lasers with a saturable absorber mirror. The field propagation is simulated using Maxwell's equations and is coupled to the polarization from the quantum wells using the semiconductor Bloch equations. Simulations on the level of second Born-Markov are used to fit coefficients for microscopic higher order correlation effects such as dephasing of the polarization, carrier-carrier scattering and carrier relaxation. We numerically examine recent published experimental results on mode locked pulses, as well as the self phase modulation in the gain chip and SESAM.

The past decade witnessed the rapid development of III-nitride light-emitting diodes (LEDs) and laser diodes (LDs), for smart lighting, visible-light communication (VLC), optical storage, and internet-of-things. Recent studies suggested that the GaN-based LDs, which is free from efficiency droop, outperform LEDs as a viable high-power light source. Conventionally, the InGaN-based LDs are grown on polar, c-plane GaN substrates. However, a relatively low differential gain limited the device performance due to a significant polarization field in the active region. Therefore, the LDs grown on nonpolar m-plane and semipolar (2021)-plane GaN substrates are posed to deliver high-efficiency owing to the entirely or partially eliminated polarization field. To date, the smart lighting and VLC functionalities have been demonstrated based on discrete devices, such as LDs, transverse-transmission modulators, and waveguide photodetectors. The integration of III-nitride photonic components, including the light emitter, modulator, absorber, amplifier, and photodetector, towards the realization of III-nitride photonic integrated circuit (PIC) offers the advantages of small-footprint, high-speed, and low power consumption, which has yet to be investigated. This dissertation presents the design, fabrication, and characterization of the multi-section InGaN laser diodes with integrated functionalities on semipolar (2021)-plane GaN substrates for enabling such photonic integration. The blue-emitting integrated waveguide modulator-laser diode (IWM-LD) exhibits a high modulation efficiency of 2.68 dB/V. A large extinction ratio of 11.3 dB is measured in the violet-emitting IWM-LD. Utilizing an integrated absorber, a high optical power (250mW), droop-free, speckle-free, and large modulation bandwidth (560MHz) blue-emitting superluminescent diode is reported. An integrated short-wavelength semiconductor optical amplifier with the laser diode at ~404 nm is demonstrated with a large gain of 5.32 dB at 6 V. A high-performance waveguide photodetector integrated LD at 405 nm sharing the single active region is presented, showing a significant large modulation bandwidth of 230 MHz. Thus these seamlessly integrated elements enable photonic IC at the visible wavelength for many important applications, such as smart lighting and display, optical communication, switching, clocking, and interconnect. The findings are therefore significant in developing an energy-saving platform technology that powers up human activities in a safe, health- and environmental-friendly manner.

The main objectives of this thesis are to develop viable process and/or device technologies for bandgap tuning of 1300-nm InGaAs/GaAs quantum-dot (QD) laser structures, and broad linewidth 1300-nm InGaAsP/InP quantum well (QW) superluminescent diode structures. The high performance bandgap-engineered QD laser structures were achieved by employing quantum-dot intermixing (QDI) based on impurity free vacancy diffusion (IFVD) technique for eventual seamless active-passive integration, and bandgap-tuned lasers. QDI using various dielectric-capping materials, such as HfO2, SrTiO3, TiO2, Al2O3 and ZnO, etc, were experimented in which the resultant emission wavelength can be blueshifted to ∼ 1100 nm ─ 1200 nm range depending on process conditions. The significant results extracted from the PL characterization were used to perform an extensive laser characterization. The InAs/GaAs quantum-dot lasers with QDs transition energies were blueshifted by ~185 nm, and lasing around ~1070 – 1190 nm was achieved. Furthermore, from the spectral analysis, a simultaneous five-state lasing in the InAs/InGaAs intermixed QD laser was experimentally demonstrated for the first time in the very important wavelength range from 1030 to 1125 nm. The QDI methodology enabled the facile formation of a plethora of devices with various emission wavelengths suitable for a wide range of applications in the infrared. In addition, the wavelength range achieved is also applicable for coherent light generation in the green – yellow – orange visible wavelength band via frequency doubling, which is a cost-effective way of producing compact devices for pico-projectors, semiconductor laser based solid state lighting, etc. [1, 2] In QW-based superluminescent diode, the problem statement lies on achieving a flat-top and ultra-wide emission bandwidth. The approach was to design an inhomogeneous active region with a comparable simultaneous emission from different transition states in the QW stacks, in conjunction with anti-reflection coating and tilted ridge-waveguide device configuration. In this regard, we achieved 125 nm linewidth from InGaAsP/InP multiple quantum well (MQW) superluminescent diode with a total output power in excess of 70 mW with an average power spectral density of 0.56 mW/nm, and a spectral ripple of ≤1.2 ± 0.5 dB. The high power and broadband SLD with flat-top emission spectrum is a desirable as optical source for noninvasive biomedical imaging techniques employing low coherence interferometry, for instance, optical coherence tomography (OCT).

Gallium nitride (GaN) is a semiconductor material highly regarded for visible light generation since it provides the most efficient platform for compact violet, blue, and green light emitters, and in turn, high-quality and ubiquitous white lighting. Despite this fact, the potential of the GaN platform has not been fully exploited. This potential must enable the precise control in the various properties of light, realizing functions beyond the conventional. Simultaneously, the field of the telecommunications is looking for candidate technologies fit for wireless transmission in the next generations of communication. Visible light communication (VLC) may play a significant role in the future of the last mile of the network by providing both a fast internet connection and a high-quality illumination. Hence, a variety of optoelectronic platforms, including distributed-feedback (DFB) lasers, superluminescent diodes (SLDs), and multi-section lasers, can be used to exploit the full potential of GaN while offering unprecedented solutions for VLC and other applications, such as atomic clocks, high-resolution fluorescence microscopy, and on-chip nonlinear processing at visible wavelengths. This dissertation demonstrates green and sky-blue DFB lasers based on GaN, with resolution-limited single-mode emission at wavelengths around 514 nm and 480 nm, side-mode suppression ratio as large as 42.4 dB, and application to up to 10.5 Gbit/s data transmission. Preliminary observations of DFB lasers with emission close to the Fraunhofer lines are presented, offering a pathway for low-background noise applications. Blue-emitting SLDs are used to demonstrate a 3.8 Gbit/s transmitter while achieving spectral efficiency of up 118.2 (mW・nm)/(kA/cm2) in continuous-wave operation. Visual quality is confirmed by coherence length and white light generation. Short-wavelength SLDs have the potential for higher resolution and fluorescence excitation in classical optical coherence tomography and fiber gyroscopes. The demonstration of a two-section green laser diode is presented, achieving coupled-cavity lasing at wavelengths of 514 nm based on an integrated green laser–absorber in self-colliding pulse configuration, operated in continuous-wave electrical injection. The integrated laser offer potential for mode- locked and Q-switched lasing. The integrated laser is suitable for reconfiguration where laser–modulator, laser–absorber, and laser–amplifier are proposed and investigated at green wavelengths.

京都大学 / 0048 / 新制・論文博士 / 博士(工学) / 乙第12860号 / 論工博第4107号 / 新制||工||1609(附属図書館) / 31540 / (主査)教授 北野 正雄, 教授 川上 養一, 准教授 酒井 道 / 学位規則第4条第2項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM