This dissertation explores strategies to create micro-scale tools with integrated electronic and mechanical functionalities. Recently developed approaches to control the shape of flexible micro-structures are employed to fabricate micro-electronic instruments that embed components for sensing and actuation, aiming to expand the toolkit of minimally invasive surgery. This thesis proposes two distinct types of devices that might expand the boundaries of modern surgical interventions and enable new bio-medical applications. First, an electronically integrated micro-catheter is developed. Electronic components for sensing and actuation are embedded into the catheter wall through an alternative fabrication paradigm that takes advantage of a self-rolling polymeric thin-film system. With a diameter of only 0.1 mm, the catheter is capable of delivering fluids in a highly targeted fashion, comprises actuated opposing digits for the efficient manipulation of microscopic objects, and a magnetic sensor for navigation. Employing a specially conceived approach for position tracking, navigation with a high resolution below 0.1 mm is achieved. The fundamental functionalities and mechanical properties of this instrument are evaluated in artificial model environments and ex vivo tissues. The second development explores reshapeable micro-electronic devices. These systems integrate conductive polymer actuators and strain or magnetic sensors to adjust their shape through feedback-driven closed loop control and mechanically interact with their environment. Due to their inherent flexibility and integrated sensory capabilities, these devices are well suited to interface with and manipulate sensitive biological tissues, as demonstrated with an ex vivo nerve bundle, and may facilitate new interventions in neural surgery.:List of Abbreviations 1 Introduction 1.1 Motivation 1.2 Objectives and structure of this dissertation 2 Background 2.1 Tools for minimally invasive surgery 2.1.1 Catheters 2.1.2 Tools for robotic micro-surgery 2.1.3 Flexible electronics for smart surgical tools 2.2 Platforms for shapeable electronics 2.2.1 Shapeable polymer composites 2.2.2 Shapeable electronics 2.2.3 Soft actuators and manipulators 2.3 Sensors for position and shape feedback 2.3.1 Magnetic sensors for position and orientation measurements 2.3.2 Strain gauge sensors 3 Materials and Methods 3.1 Materials for shapeable electronics 3.1.1 Metal-organic sacrificial layer 3.1.2 Polyimide as reinforcing material 3.1.3 Swelling hydrogel for self assembly 3.1.4 Polypyrrole for flexible micro actuators 3.2 Device fabrication techniques 3.2.1 Photolithography 3.2.2 Electron beam deposition 3.2.3 Sputter deposition 3.2.4 Atomic layer deposition 3.2.5 Electro-polymerization of polypyrrole 3.3 Device characterization techniques 3.3.1 Kerr magnetometry 3.3.2 Electro-magnetic characterization of sensors 3.3.3 Electro-chemical analysis of polypyrrole 3.3.4 Preparation of model environments and materials 3.4 Sensor signal evaluation and processing 3.4.1 Signal processing 3.4.2 Cross correlation for phase analysis 3.4.3 PID feedback control 4 Electronically Integrated Self Assembled Micro Catheters 4.1 Design and Fabrication 4.1.1 Fabrication and self assembly 4.1.2 Features and design considerations 4.1.3 Electronic and fluidic connections 4.2 Integrated features and functionalities 4.2.1 Fluidic transport 4.2.2 Bending stability 4.2.3 Actuated micro manipulator 4.3 Magnetic position tracking 4.3.1 Integrated magnetic sensor 4.3.2 Position control with sensor feedback 4.3.3 Introduction of magnetic phase encoded tracking 4.3.4 Experimental realization 4.3.5 Simultaneous magnetic and ultrasound tracking 4.3.6 Discussion, limitations, and perspectives 5 Reshapeable Micro Electronic Devices 5.1 Design and fabrication 5.1.1 Estimation of optimal fabrication parameters 5.1.2 Device Fabrication 5.1.3 Control electronics and software 5.2 Performance of Actuators 5.2.1 Blocking force, speed, and durability 5.2.2 Curvature 5.3 Orientation control with magnetic sensors 5.3.1 Magnetic sensors on actuated device 5.3.2 Reference magnetic field 5.3.3 Feedback control 5.4 Shape control with integrated strain sensors 5.4.1 Strain gauge curvature sensors 5.4.2 Feedback control 5.4.3 Obstacle detection 5.5 Heterogenous integration with active electronics 5.5.1 Fabrication and properties of active matrices 5.5.2 Fabrication and operation of PPy actuators 5.5.3 Site selective actuation 6 Discussion and Outlook 6.1 Integrated self assembled catheters 6.1.1 Outlook 6.2 Reshapeable micro electronic devices 6.2.1 Outlook 7 Conclusion Appendix A1 Processing parameters for polymer stack layers A2 Derivation of magnetic phase profile in 3D Bibliography List of Figures and Tables Acknowledgements Theses List of Publications

Thin Film Transistors (TFTs) are widely used in large area electronics because they offer the advantage of low cost fabrication and wide substrate choice. TFTs have been conventionally used for switching applications in large area display arrays. But when it comes to designing a sensor actuator system on a flexible substrate comprising entirely of organic and inorganic TFTs, there are two main challenges – i) Fabrication of complementary TFT devices is difficult ii) TFTs have a drift in their threshold voltage (VT) on application of gate bias. Also currently there are no circuit simulators in the market which account for the effect of VT drift with time in TFT circuits. The first part of this thesis focuses on integrating the VT shift model in the commercially available AIM-Spice circuit simulator. This provides a new and powerful tool that would predict the effect of VT shift on nodal voltages and currents in circuits and also on parameters like small signal gain, bandwidth, hysteresis etc. Since the existing amorphous silicon TFT models (level 11 and level 15) of AIM-Spice are copyright protected, the open source BSIM4V4 model for the purpose of demonstration is used. The simulator is discussed in detail and an algorithm for integration is provided which is then supported by the data from the simulation plots and experimental results for popular TFT configurations. The second part of the thesis illustrates the idea of using negative feedback achieved via contact resistance modulation to minimize the effect of VT shift in the drain current of the TFT. Analytical expressions are derived for the exact value of resistance needed to compensate for the VT shift entirely. Circuit to realize this resistance using TFTs is also provided. All these are experimentally verified using fabricated organic P-type Copper Phthalocyanine (CuPc) and inorganic N-type Tin doped Zinc Oxide (ZTO) TFTs. The third part of the thesis focuses on building a robust amplifier using these TFTs which has time invariant DC voltage level and small signal gain at the output. A differential amplifier using ZTO TFTs has been built and is shown to fit all these criteria. Ideas on vertical routing in an actual sensor actuator interface using this amplifier have also been discussed such that the whole system may be “tearable” in any contour. Such a sensor actuator interface can have varied applications including wrap around thermometers and X-ray machines.