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This thesis describes the development of a new zero-turn-radius (ZTR) differentially driven robotic vehicle hereinafter referred to as NEVEL. The primary objective of this work was to develop a device that could be used as a test-bed for continued autonomous vehicle research at Virginia Tech while meeting the entry requirements of the Annual International Unmanned Ground Robotics Competition. In developing NEVEL, consideration was given to the vehicle's mechanical and electrical design, sensing and computing systems, and navigation strategy. Each of these areas was addressed individually, but always within the context of optimal integration to produce the best overall vehicle system. A constraint that directed much of the design process was the desire to integrate industrially available and proven components rather than creating custom designed systems. This thesis also includes a review of the relevant literature as it pertains to both subsystem and overall vehicle design. NEVEL, the vehicle that was created from this research effort, is novel in several respects. It is one of the few true embodiments of a fully functioning, three-wheel, differential drive autonomous vehicle. Several previous studies have developed this concept for indoor applications, but none has resulted in a working test-bed that can be applied to an unstructured, outdoor environment. NEVEL also appears to be one of the few autonomous vehicle systems to fully incorporate a commercially available laser range finder. These features alone would make NEVEL a useful platform for continued research. In addition, however, by using common, off-the-shelf components and a personal computer platform for all computation and control, NEVEL has been created to facilitate testing of new navigation and control strategies. As testimony to the success of this design, NEVEL was recognized at the Sixth Annual International Unmanned Ground Robotics Competition as the best overall design. / Master of Science

Now-a-days sensors are not limited only to industry or research laboratories but have come to common man’s usage. From kids toys to house hold equipment like washing machine, microwave oven as well as in automobiles, a wide variety of sensors and actuators can be easily seen. The aim of the present thesis work is to discuss the design, development, fabrication and testing of miniaturized piezoresistive, absolute type, low pressure sensor and flow sensor. Detailed performance study of these sensors in different ambient conditions (including harsh environment such as radiation, temperature etc.) has been reported. Extensive study on designing of thin silicon diaphragms and optimization of piezoresistor parameters is presented. Various experiments have been performed to optimize the fabrication and packaging processes. In the present work, two low range absolute type pressure sensors (0-0.5 bar and 0-1 bar) and a novel flow sensor (0-0.1 L min-1) for gas flow rate measurement are developed. The thesis is divided into following six chapters. Chapter 1: It gives a general introduction about miniaturization, MEMS technology and its applications in sensors area. A brief overview of different micromachining techniques is presented, giving their relative advantages and limitations. Literature survey of various types of MEMS based pressure sensors along with recent developments is presented. At the end, the motivation for the present work and organization of the thesis is discussed. Chapter 2: In this chapter, various design aspects of low, absolute type pressure sensors (0-0.5 bar and 0-1 bar) are discussed in detail. Static analysis of the silicon diaphragms has been carried out both analytically as well as through finite element simulations. Piezoresistive analysis is carried out to optimize the piezoresistor dimensions and locations for maximum sensitivity and minimum nonlinearity. All the Finite Element Analyses (FEA) were carried out using Coventorware software. A novel approach for the selection of resistor parameters (sheet resistance, length to width ratio) is reported . Finally, the expected performance of the designed sensors is summarized. Chapter 3: This chapter is divided into two parts. The first part presents the fabrication process flow adopted to develop these low range absolute pressure sensors. Two fabrication process approaches (wet etching and dry etching) which are used to fabricate the thin diaphragms are discussed in detail. Following an overall description, various aspects of the fabrication are elaborated on, like mask design, photolithography process, ion-implantation, bulk micromachining and wafer bonding. The required parameters for implantation doses, annealing cycles, low stress nitride deposition and anodic bonding are optimized through extensive experimental trials. The second part of this chapter discusses about the different levels of packaging involved in the realization of pressure sensors. Finite Element Analyses (FEA) of Level -0 and Level-1 packages has been carried out using ANSYS software to optimize the packaging materials. Exhaustive experimental studies on the selection of die attach materials and their characterization is carried out. Based upon these studies, the glass thickness and die-attach materials are selected. Chapter 4: The chapter discusses the measurement of the fabricated devices. The wafer level characterization which includes I-V characterization, measurement of offset and full scale output is discussed first. And then the temperature coefficient of resistance and offset is measured at wafer level itself. The performance characteristics like sensitivity, nonlinearity, hysteresis and offset of packaged pressure sensors is presented for all the variants (0.5 bar and 1 bar sensors fabricated by KOH and DRIE process) and their comparison with simulated values shows a close match. The measurement of dynamic characteristics using in-house developed test set-up are presented. The next section discussed detailed study about the stability of the developed sensors. The last part of this chapter reports the harsh environment characterization of the sensors viz. high temperature, humidity exposure, radiation testing etc. Chapter 5: The development of a novel micro-orifice based flow sensor for the flow rate measurement in the range of L min-1 is presented in this chapter. The sensing element is a thin silicon diaphragm having four piezoresistors at the edges. A detailed theoretical analysis showing the relationship between output voltage generated and flow rate has been discussed. The flow sensor is calibrated using an in-house developed testing set-up. Novelty of the design is that the differential pressure is measured at the orifice plate itself without the need of two pressure sensors or u-tube which is required otherwise. Chapter 6: This chapter summarizes the salient features of the work presented in this thesis with the conclusion. And then the scope for carrying out the further work is discussed.

Microsensor technologies based on nitride semiconductor materials were developed as options for improved exhaust gas sensors in diesel exhaust systems. The main goals were to develop new sensors that can meet the requirements given by Peugeot PSA to meet upcoming EU emissions regulations for NO, NO2, and NH3 detection. Two different sensor technologies were developed based on Schottky junction and high electron mobility transistor (HEMT) devices. Novel materials such as BGaN and BGaN/GaN superlattice structures are explored. For each device, a comprehensive analytical model is developed and simulations are carried out to optimize and design the sensor devices. Materials growth is then conducted for the different semiconductor layers, followed by materials characterizations to ensure high quality materials. Device prototypes are fabricated using various materials and functional layer designs. For device testing, an experimental setup is developed. Our experimental results show excellent sensitivity; we also report selectivity between NO and NO2 for the first time for these types of devices. Finally, we modify our devices for other sensing applications such as the detection of other harmful gases and pollutants in liquid environments.

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International Telemetering Conference Proceedings / October 30-November 02, 1995 / Riviera Hotel, Las Vegas, Nevada / Benefiting from the Automotive world, Micro-Machined Sensor Technology moves into the Military arena with greater accuracy at a reduced price tag. Advances in Micro-Machining have produced silicone cantilever beam Sensors which meet or exceed some Military environmental specifications while providing a higher overall accuracy, compared to traditional cantilever beam designs. There are several companies such as Motorola, Analog Devices, Sensym, Silicone Designs, and NovaSensor to name a few who have established product lines in Accelerometers and Pressure Transducers. This paper describes an experience utilizing micro-technology Accelerometers which were designed to replace older technology sensors.