ABSTRACT As MOSFET getting smaller, its silicon dioxide reaches physical limit. To continue its insulation and reasonable interface defects density, now, SiOxNy is the replace material to fill the transition term between SiO2 to high-k material. SiOxNy is made from silicon dioxide and silicon nitride in different scale. Due to the uncompleted of bonding, the device¡¦s reliability is dependent on defects. The discussion about defects will help us to change the growth conditions in process and avoid to produce these defects. We use PL and Raman spectrum to study the defects in SiOxNy and compare them under different process conditions especially on the change of defects. PL result on 6.2 nm film have a peak at 390 nm, and 40 nm film have peak at 535 nm. This mean that under these two process conditions the defect correspond to 3.18 eV is . The defect correspond to 2.37 eV is . In this thesis, we report formulations of how to calculate the parameters of MOS structure, using SiON/p-Si MOS structure as calculated sample. The carrier concentration were calculated and compared with the Hall results. The flat band voltage and threshold voltage were calculated and compared with measured C-V curves.

Dissertation--Philosophische Fakultät--Universität Zürich, 2000. / Mention parallèle de titre ou de responsabilité : Résultats des recherches sur le site funéraire du Haut Moyen-Âge de Sion, Sous-le-Scex. Bibliogr. p. 255-266.

The advantages of LPD method, low temperature process, low cost, conformal growth (good step coverage), selective growth and inexpensive deposition system make the method of LPD versatile in IC fabrication. LPD-SiOF is a potential method to replace traditional method of SiOF deposition. But, some drawbacks, including slightly low dielectric constant and poor performance of J-E relationship, still exist in LPD-SiOF process. In order to improve these shortcomings, with incorporating NH4OH into the LPD solution in this experiment, the SiOF:N film with high quality and low dielectric constant can be grown on Si by the TD-LPD method. In this study, the growth rate can be controlled well within 90~550 Å/h corresponding to the NH4OH concentration range of 0.1~0.8 M at the temperature range of 23~40 ¢XC. As TD-LPD-SiOF:N film deposited with 0.8 M NH4OH incorporation, the refractive index for can be kept at a constant 1.431 and the P-etch rate can be kept between 18.3 and 19.2 Å/s during the deposition temperature changes. The best experimental condition is found that incorporating 0.8 M NH4OH will get good results. If the concentration of 0.8 M is higher or lower than 0.8 M, the electrical characteristic will become poor. A model for TD-LPD-SiOF:N deposition mechanism is proposed. From the analysis of SIMS depth profile, the deposited film can be suggested that it is a combination of N-less LPD-SiOF film and N-rich accumulated interfacial layer. The properties of N-rich accumulated layer at the interface show the least effective oxide charges and lowest leakage current density. As the thickness of TD-LPD-SiOF:N film is 800 Å, the film has the best electrical characteristic. When the thickness is below or above 800 Å, all the properties become poor. TD-LPD-SiOF:N film deposited at 40 ¢XC with 0.8 M NH4OH incorporation with a thickness of 800 Å has the best physical, chemical, electrical properties. The F content for deposited film can reach 9.8 atom %. The dielectric constant can drop to about 3.07.

The aim of this Thesis was on one side to contribute to a better understanding of the phases formed in the TiAlSiN(O) system and the influence of impurities on their properties. On the other side it was also aimed in the Thesis to individually study the phases forming the nanocomposite. In each chapter the individual conclusions from that particular chapter are presented, a summary of the most relevant conclusions and achievements is listed below. ¡à Ti1-xAlxN(O) coatings The optical properties of Ti1-xAlxN(O) coatings were investigated. By changing the Al content in the coatings the properties change from the metallic character of TiN to dielectric character of AlN allowing to obtain spectrally selective coatings. For high Al content the films show low infrared reflectance and high emittance resulting in low equilibrium temperature, characteristics suitable for example for satellite temperature control. While the low emittance and high absorptance of low Al content are adequate for solar absorbers. The thermal stability of the low Al content coatings was investigated and the coatings are stable up to 400 ¨¬C without much change in the optical properties. ¡à SiyNz(O) coatings The silicon oxynitride coatings proved to be themselves interesting for their optical properties, specially the refractive index. The control of the microstructure was the key factor to control the optical properties of the coatings. Low energetic conditions in pure nitrogen atmosphere lead to the formation of closed porosity (nanovoids). The Raman results proved the encapsulation of nitrogen in the pores. Changing the N2 fraction in the gas mixture during deposition allows (at low power) to produce coatings with similar composition and mechanical properties presenting different refractive index by the introduction of the closed porosity. The closed porosity in the coatings is stable in N2 and vacuum up to 900 ¨¬C. Changing the target-substrate distance allows to produce coatings with different size of nanovoids. The possibility to extend the deposition of porous (close porosity) coatings to other systems is demonstrated. Porous silicon coatings were deposited by this method. ¡à nc-Ti1-xAlxN/a-SiyNz(O) coatings It was found from the XRD, SAED, EELS and XPS results, of coatings deposited under low energetic conditions, that the coatings are composed of a nanocrystalline cubic (Ti,Al)N phase embedded in an amorphous silicon oxynitride phase. The presence of oxygen impurities was identified particularly in non biased samples and estimated to be around 10 at% as the upper limit in these particular samples. Oxygen seems to be outside the nitride nanocrystallites, and mainly bond to silicon, forming amorphous silicon oxynitride phases and confirmed to occupy preferentially nitrogen positions (confirmed by HAADF and EFTEM) at the column boundaries. The application of substrate bias and substrate heating during deposition proved to be very efficient in reducing the oxygen incorporation in the coatings originating also denser coatings with improved mechanical properties. The different energetic conditions (either kinetic or thermal) at which the coatings were exposed during growth and the consequently obtained structures express the need for growth models were the transitions between zones can be achieved by a combination of substrate bias and substrate temperature.

ASTRACT Using an aqueous solution of ammonia hydroxide aqua, hydrosilicofluoric acid and boric acid, an oxynitride film can be deposited. The deposition rate and refractive index increase with the mole concentration of ammonia hydroxide aqua. However, the refractive index decreases as the mole concentration of ammonia hydroxide aqua becomes too high. The leakage current density as a function of mole concentration of ammonia hydroxide aqua was studied. The best experimental condition is found that incorporating ammonia hydroxide aqua of 0.8M will get good results. The SIMS depth profiles shows nitrogen and hydrogen concentration accumulate at SiON/Si interface. A deposition model is proposed and LPD-SiON can be suggested that it is a combination of N-less LPD-SiON film and N-rich accumulated layer at the interface. The best characteristics of LPD-SiON film are in the range of 110Å-thick to 210Å-thick. When the thickness scales down to 110Å, all the properties become poor. Photo-LPD-SiON process is proposed as a reference of Photo-LPD-SiO2. By mercury lamp illumination, the performances of J-E relationship and C-V characteristic become better. Nitrogen atomic concentration can increase by photo-enhancement checked by analysis of SIMS depth profile and FTIR spectrum. A novel technique of LPD process with applying a bias during the growth is proposed and it is called Bias-LPD-SiON. A model of Bias-LPD-SiON deposition mechanism is also proposed. On the negative bias substrate, high nitrogen atomic concentration can be attained. The J-E characteristic at positive bias of 0.1V and negative bias in a range of 0.1V to 1V are better than traditional LPD-SiON film. Then, the deposition rate of positive bias and negative bias LPD-SiON films at 0.1V can reach 32Å/min and 26Å/min, respectively. Therefore, high quality and high deposition rate can be prepared by Bias-LPD-SiON.

Submitted by Filipe dos Santos (fsantos@pucsp.br) on 2018-08-15T12:19:54Z No. of bitstreams: 1 Maria Alzira da Cruz Colombo.pdf: 3676811 bytes, checksum: 2e0988b9a366cb0a81b226defb5dd00a (MD5) / Made available in DSpace on 2018-08-15T12:19:54Z (GMT). No. of bitstreams: 1 Maria Alzira da Cruz Colombo.pdf: 3676811 bytes, checksum: 2e0988b9a366cb0a81b226defb5dd00a (MD5) Previous issue date: 2018-06-11 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior - CAPES / The purpose of this article is to analyze the link between the political situation in France during the 3rd Republic (1870-1914) and the progressive marginalization that the pedagogical religious congregations have suffered and that eventually led to their emigration to Brazil, from the 19th century on. My intention is to study not only the historical context, but also the sociological, cultural and political background in France in that period, that drove France to secularization, as a result of the Jules Ferry Laws in 1880. It’s also my intention to highlight the dissolution of religious schools in France and, on the other hand, the possibility of emigration, which consequently brought educational and cultural evolution to the feminine youth in Brazil during the Imperial and Republican periods. Finally, I’ve focused my research in the particular case of the congregation Our Lady of Sion as a paradigmatic example of the sister’s congregations that left France during that period and founded colleges in many cities in the southeast region of Brazil. This analysis shows the pioneering spirit of women from those important missionary congregations / Este trabalho tem por objeto o estudo da correlação entre a situação política da França da Terceira República (1870-1914) e a marginalização das congregações religiosas de ensino, como sendo um fator fundamental para a emigração das religiosas francesas para o Brasil, a partir dos meados do século XIX. Trata-se da investigação do contexto sócio-cultural e político desse período na França, da análise das diversas escolhas das religiosas francesas frente à proibição da atividade pedagógica, como decorrência da aplicação das leis de laicização, a partir das Leis Jules Ferry de 1880. Destaca-se então, num segundo nível de análise, a investigação das escolhas entre o fechamento das escolas, da secularização, ou volta à vida civil, ou então da possibilidade do exílio. A questão do exílio foi salientada, na medida em que, essa opção foi responsável pelas conseqüências mais significativas sobre evolução educacional e cultural da juventude feminina no final do Império e início da República no Brasil. Em um terceiro e último nível de análise, o trabalho concentra-se num estudo da Congregação Notre Dame deSion, como sendo representativa dessas congregações religiosas femininas francesas que para cá vieram e em particular na trajetória histórica do Colégio Sion, tanto na França, quanto em várias cidades do sudeste brasileiro, a partir de 1888. Essa análise evidencia o pioneirismo dessas congregações missionárias e o papel pioneiro das mulheres de vida consagrada

The aim of this Thesis was on one side to contribute to a better understanding of the phases formed in the TiAlSiN(O) system and the influence of impurities on their properties. On the other side it was also aimed in the Thesis to individually study the phases forming the nanocomposite. <p><p>In each chapter the individual conclusions from that particular chapter are presented, a summary of the most relevant conclusions and achievements is listed below. <p><p><p>¡à\ / Doctorat en Sciences de l'ingénieur / info:eu-repo/semantics/nonPublished

Made available in DSpace on 2016-04-28T19:34:19Z (GMT). No. of bitstreams: 1 Ana Paula Sapaterra.pdf: 848400 bytes, checksum: 7692c0c8343cedd2cff02a289261133a (MD5) Previous issue date: 2007-12-18 / Secretaria da Educação do Estado de São Paulo / The end of the nineteenth century brought many advances to São Paulo society, to keep up with the progress the elite started to demand more refined education for their daughters, so that they could no longer behave following the Portuguese colonial tradition in fashion at the time- because it didn t combine with more urbanized society. Thus, women should not only deal with the house and employees, she had to be nice at meetings and therefore it has become necessary to learn how to read, write, talk about music, painting and learn the rules of etiquette and everything that fits a lady in society. It was necessary a new profile for women suitable for this new society, without compromising their soul, moral and religion. The model of education followed by these young women of society was French, because it represented a good education without vocational, modern or feminists ideas. This study is about the Portuguese language program taught at Colégio Nossa Senhora de Sion between 1944 and 1947 in order to analyze the way Linguistics was taught in that women s institution. Besides the analysis of Portuguese material found at Sion, a historical, cultural and social investigation from the end of 19th century to the 1st half of the 20th century was made, aiming at understanding a woman s behavior, her role in the society and the reason for São Paulo elite s choice of catholic institutions for their daughter s education, future ladies of society. 11 The História das Idéias Lingüistícas (the History of Linguistic Ideas) was chosen as theoretical basis in order to support this dissertation, in such way that Linguistics and History are interconnected in the course of this study / O final do século XIX trouxe muitos avanços para a sociedade paulista e, por acompanhar esses progressos, a elite passou a exigir uma educação mais requintada para suas filhas, pois não mais podiam elas se comportar de acordo com a tradição colonial portuguesa em moda até então , isso não combinava mais com a sociedade urbanizada. Assim, não caberia mais à mulher somente a função de dirigir a casa e os empregados, era preciso que fosse agradável nas reuniões e para isso tornava-se necessário aprender a ler, escrever, conversar, conhecer regras de etiqueta, música, pintura e tudo o que coubesse a uma dama da sociedade. Era preciso moldar um novo perfil de mulher adequado a essa nova sociedade, com uma educação voltada para o social sem que se comprometesse a alma, a moral e a religiosidade. O francês foi o modelo escolhido para a educação das jovens burguesas, pois representava garantia de boa educação sem idéias profissionalizantes, modernas ou feministas. Ao delimitarmos o corpus, selecionamos os programas dos exames das provas de Língua Portuguesa do Colégio Nossa Senhora de Sion, do Curso Pré-Normal, no período que se estende de 1944 a 1947, a fim de verificar como os saberes lingüísticos eram transmitidos nesta Instituição Confessional feminina. Além da análise do material de português encontrado no Sion, fez-se um levantamento histórico, cultural e social do final do século XIX, até a primeira metade do século XX, com o objetivo de entender como se portava a mulher nesse período, que função tinha na sociedade, e por que a escolha de Instituições Católicas pela elite paulista para o ensino de suas filhas, futuras damas da sociedade. Optou-se pela escolha da História das Idéias Lingüísticas (Auroux, Fávero, Orlandi) como vertente teórica para subsidiar esta dissertação, proporcionando entendimento em relação ao vernáculo, de modo que lingüística e história estão interligadas no decorrer deste trabalho

O presente trabalho tem por objetivo utilizar a abordagem dos modelos lineares generalizados e os modelos de dispersão no contexto do seguro agrícola. Os modelos lineares generalizados (MLG\'s) constituem uma extensão dos modelos lineares de regressão múltipla introduzida por Nelder e Wedderburn (1972), que inclui modelos cuja variável resposta pertence à família exponencial de distribuições. O MLG é formado por um componente aleatório, que possui distribuição pertencente à família exponencial, um componente sistemático, conectados por uma função de ligação. Jorgensen (1997) estende a utilização dos MLG para uma classe mais ampla de modelos probabilísticos, denominados modelos de dispersão. A estimação dos parâmetros foi baseada no método da máxima verossimilhança, e também, em função da amostra ser relativamente pequena, optou-se pelo método de bootstrap não-paramétrico. As duas abordagens foram aplicadas a dois conjuntos de dados de sinistros de 15 municípios do estado do Rio Grande do Sul. Os resultados mostraram que a precipitação acumulada tem influência na ocorrência de sinistros. Entretanto, na modelagem do montante do sinistro não foi encontrada nenhuma variável significativa. Usando o método de bootstrap, foi encontrada influência das variáveis precipitação acumulada e a temperatura média no numero de sinistros / The main objective of this work is to use the generalized linear models and dispersion models in the agricultural insurance context. The Generalized Linear Model (GLM) are an extension of the multiple regression linear models presented by Nelder e Wedderburn (1972). This approach include situations in which the response variable can be included in exponencial the family. The GLM is composed of a randomized component, a sistematic component and the link functions. JÁrgensen (1997) extend the application of the GLM for a more general class of probability models, called dispersion models. Both approaches were applied in two insurance datasets for 15 citys in Rio Grande do Sul. The parameters estimation was based in the maximum likelihood method, in addition, because of the relatively small sample, the non-parametric Bootstrap method was used. This study show, using GLM, that only the accumulated rainfall was statistically significant . However, any of the covariates was significant when modelling the amount of claims. In the analysis using Bootstrap method the accumulated rainfall and average temperature were significant when modelling the number of insurance clains.

Optical parametric frequency conversion based on quasi phase matching (QPM) in nonlinear optical crystals is a powerful technique for generating coherent radiation in wavelength ranges spanning from the mid-infrared (mid-IR) to the blue, displaying low thermal load and high efficiency.This thesis shows how QPM in one- (1D) or two-dimensional (2D) lattices can be employed to engineer novel devices for parametric downconversion in the IR, af-fording freedom in designing both spectral and angular properties of the parametric output. Experimental demonstrations of parametric devices are supported by theoreti-cal modelling of the nonlinear conversion processes.In particular, broadband parametric downconversion has been investigated in 1D QPM lattices, through degenerate downconversion close to the point of zero group-velocity dispersion. Ultra-broadband optical parametric generation (OPG) of 185 THz bandwidth (at 10 dB), spanning more than one octave from 1.1 to 3.7 μm, has been achieved in periodically poled 1 mol% MgO-doped near-stoichiometric LiTaO3 (MgSLT) of 25 μm QPM period, pumped at 860 nm. Such broadband gain is of high interest for ultrashort optical pulse amplification, with applications in high harmonic generation, ultrafast spectroscopy and laser ablation. Furthermore, the det-rimental impact of parasitic upconversion, creating dips in the OPG spectrum, has been investigated. By altering the pump pulse duration, energy can be backconverted to create peaks at the involved OPG wavelengths, offering a possible tool to enhance broadband parametric gain spectra.The engineering of the angular properties of a parametric output benefits greatly from 2D QPM, which is investigated in this thesis by the specific example of hexagonally poled MgSLT. It is demonstrated how two OPG processes, supported by a single 2D QPM device, can exhibit angularly and spectrally degenerate signals (idlers). This degeneracy results in a coherent coupling between the two OPG pro-cesses and a spectrally degenerate twin-beam output in the mid-IR (near IR). 2D QPM devices exhibiting such coherently coupled downconversion processes can find applications as compact sources of entangled photon-pairs. This thesis further illus-trates the design freedom of 2D QPM through the demonstration of a device support-ing multiple parametric processes, thus generating multiple beams from the mid-IR to the blue spectral regions. / <p>QC 20131204</p>