Avec la diminution perpétuelle des dimensions des circuits intégrés, la gravure de dispositifs à l’échelle nanométrique constitue un véritable défi pour les procédés plasma qui montrent des limites dans le cas d’empilement de couches minces notamment. L’anisotropie de gravure réside sur la formation de couches de passivations sur les flancs des motifs, qui agissent comme film protecteur bloquant la gravure latérale par les radicaux du plasma. Cependant, cette fine couche est responsable de l’apparition de pente dans les profils gravés et il est difficile de contrôler son épaisseur. De plus, une deuxième couche réactive est aussi formée en fond de motifs. Les produits de gravures sont formés au sein de cette couche permettant d’augmenter la vitesse de gravure du substrat. Il a récemment été admis que contrôler l’épaisseur de ces couches réactives constitue le paramètre clé pour obtenir une gravure à très haute sélectivité.Cependant, les couches réactives à analyser hautement réactives, en raison de leur forte concentration en halogènes, s’oxydent immédiatement lors de la remise à l’air.Cette étude se propose de développer une approche originale, simple et extrêmement puissante pour observer ces couches de passivation quasi in-situ (sans contact avec l’air ambiant) : Apres gravure, l’échantillon est transporté sous vide à l’intérieur d’une valise spécifique jusqu’à une enceinte de dépôt, où il est alors encapsulé par une couche métallique (PVD assisté par magnétron). L’échantillon ainsi encapsulé peut être observé ex-situ sans modification chimique grâce à des analyses STEM EDX. / As the size of integrated circuit continues to shrink, plasma processes are more and more challenged and show limitations to etch nanometer size features in complex stacks of thin layers. The achievement of anisotropic etching relies on the formation of passivation layers on the sidewalls of the etched features, which act like a protective film that prevents lateral etching by the plasma radicals. However, this layer also generate a slope in the etch profile and it’s difficult to control its thickness. Another thin layer called “reactive layer” is also formed at the bottom of the features. Etch products are formed in this layer allowing a high etch rate of the substrate. It starts to be realized that controlling the thickness of this reactive layer is the key to achieve very high selective processes.However, the layers to be analyzed are chemically highly reactive because they contain large concentrations of halogens and they get immediately modified (oxidized) when exposed to ambient atmosphere.In this work we develop an original, simple and extremely powerful approach to observe passivation layers quasi in-situ (i.e. without air exposure): After plasma etching, the wafer is transported under vacuum inside an adapted suitcase to a deposition chamber where it is encapsulated by a metallic layer (magnetron sputtering PVD). Then, the encapsulated features can be observed ex situ without chemical / thickness modification thanks to (S)TEM-EDX analysis.

Les illites et les chlorites sont des minéraux ubiquistes dans la plupart des roches diagénétiques. Leurs compositions chimiques dépendent des conditions physiques subies (pression, P ; température, T) et de la composition de l’encaissant (e.g. Vidal et al., 1999 ; Parra et al., 2002a, 2002b). Ces minéraux peuvent donc potentiellement être de très bons marqueurs de l’histoire de l’enfouissement, et sont à la base de nombreuses méthodes empiriques ou thermodynamiques d’estimation des conditions P-T.Une compilation de données naturelles et la comparaison des thermobaromètres existants ont permis d’établir leurs limitations respectives. Pour s’en affranchir, un nouveau modèle ordonné de solution solide pour les chlorites a été développé, qui rend compte des forts contenus en silicium observés dans les chlorites naturelles de basses températures. La calibration de ce nouveau thermobaromètre sur des domaines géologiques variés de BT-BP a été testée sur des analyses de chlorites naturelles de la Gulf Coast (Texas) au pic de température (où les données P-T ont été mesurées in situ) et montre d’excellents résultats. Concernant les illites, le modèle thermodynamique le plus abouti (Dubacq et al., 2010) a également été testé de manière à estimer sa précision. L’étude a été complétée par la quantification de l’influence du fer ferrique. Les analyses chimiques utilisées ont été obtenues grâce à un protocole analytique à haute résolution spatiale. Alliant FIB et MET-EDS, ce protocole a permis une étude microtexturale et chimique fine des chlorites et des illites. Il en ressort que ces minéraux possèdent une diversité intracristalline dans leurs compositions et que la zonation chimique résultante apparaît comme une potentielle source d’erreurs dans la calibration des thermobaromètres, tout en permettant d’envisager la notion d’équilibre à l’échelle locale.Cette approche a été utilisée pour quantifier les trajets P-T d’unités géologiques des Alpes de Glarus. Ces résultats, comparés à ceux obtenus avec des méthodes thermobarométriques conventionnelles, donnent une bonne image des processus d’enfouissement et d’exhumation des roches de basse température. Ainsi, il apparaît que chaque composition enregistre une portion du chemin P-T rétrograde. D’une manière générale, chaque zone d’un même cristal renvoie à une partie de l’histoire de la roche. / Illite and chlorite are ubiquitous in most diagenetic rocks. Their chemical compositions are sensitive to thermobarometric conditions (pressure, P; temperature, T) and the bulk composition (e.g. Vidal et al., 1999; Parra et al., 2002a, 2002b). These minerals can be good indicators of burial history, and are the basis of several empiric or thermodynamic methods to estimate P-T conditions. A compilation of natural data and the comparison of existing thermobarometers allowed to establish their limitations. To circumvent it, an ordered model of solid solution for chlorites was developed which considers Si-rich low-T compositions. The calibration of this new thermobarometer on various LT-LP geologic fields was tested on natural chlorites analysis of Gulf Coast (Texas) at metamorphic peak, and gives accurate results. Concerning illites, the thermodynamic model of Dubacq et al. (2010) was also tested to estimate its precision. The study was completed by the quantification of the Fe3+ effects. Chemical analyses were obtained by an analytical protocol with high spatial resolution. Combining FIB and EDX-TEM, this protocol allowed an accurate microstructural study of chlorites and illites. These minerals have an intracristalline diversity of their chemical composition. The resulting chemical zonation is a potential error in calibration of thermometers, but allowed consideration of local equilibrium.This approach was used to quantify the P-T path of geologic units in Alps (near Glarus). These results, compared to results of conventional thermobarometers, give a good representation of burial and exhumation process for low-T rocks. Thus, the chemistry records a part of retrograde P-T path and each part of a crystal zoning corresponds to a part of rocks history.

Ein Spezialgebiet der modernen Mikroelektronik ist die Miniaturisierung und Entwicklung von neuen nanostrukturierten und Komposit-Materialen aus 3d-Metallen. Durch geeignete Zusammensetzungen können diese sowohl mit einer hohen Sättigungsmagnetisierung und Koerzitivfeldstärke als mit besserer Oxidationsbeständigkeit im Vergleich zu den reinen Elementen erzielt werden.<br /> <br /> In der vorliegenden Arbeit werden neue Methoden für die Herstellung von bimetallischen kolloidalen Nanopartikeln vor allem mit einer Kern-Hülle-Struktur (Kern@Hülle) präsentiert. Bei der überwiegenden Zahl der vorgestellten Reaktionen handelt es sich um die thermische Zersetzung von metallorganischen Verbindungen wie Kobaltcarbonyl, Palladium- und Platinacetylacetonate oder die chemische Reduktion von Metallsalze mit langkettigem Alkohol in organischem Lösungsmittel. Daneben sind auch Kombinationen aus diesen beiden Verfahren beschrieben. Es wurden Kolloide aus einem reinen Edelmetall (Pt, Pd, Ag) in einem organischen Lösungsmittel synthetisiert und daraus neue, bisher in dieser Form nicht bekannte Ag@Co-, Pt@Co-, Pd@Co- und Pt@Pd@Co-Nanopartikel gewonnen.<br /> <br /> Der Kobaltgehalt der Ag@Co-, Teilchen konnte im Bereich von 5 bis 73 At. % beliebig eingestellt werden. Der mittlere Durchmesser der Ag@Co-Partikel wurde von 5 nm bis 15 nm variiert. Bei der Herstellung von Pt@Co-Teilchen wurde eine unterschiedlich dicke Kobalt-Hülle von ca. 1,0 bis 2,5 nm erzielt. Im Fall des Palladiums wurden sowohl monodispere als auch polydisperse Pd-Nanopartikel mit einer maximal 1,7-2,0nm dicken Kobalthülle synthetisiert.<br /> <br /> Ein großer Teil dieser Arbeit befasst sich mit den magnetischen Eigenschaften der kolloidalen Teilchen, wobei die SQUID-Magnetometrie und Röntgenzirkulardichroismus (XMCD) dafür eingesetzt wurden. Weil magnetische Messungen alleine nur indirekte Schlüsse über die untersuchten Systeme erlauben, wurde dabei besonderer Wert auf die möglichst genaue strukturelle Charakterisierung der Proben mittels moderner Untersuchungsmethoden gelegt. Röntgendiffraktometrie (XRD), Röntgenabsorptionsfeinstruktur- (EXAFS) und UV-Vis-Spektroskopie sowie Transmissionselektronenmikroskopie (TEM) in Kombination mit Elektronen Energieverlustspektroskopie (EELS) und energiedispersive Röntgenfluoreszensanalyse (EDX) wurden verwendet. / Magnetic colloidal particles are attractive because of their possible application to ultra-high-density magnetic data storage media, sensors, electronic devices and medical diagnostics. The properties of small particles depend on their composition, shape, and method of preparation. The combination of 3d-metals (Fe, Co, Ni) with noble metals improves the stability of the colloids and leads to new properties of the magnetic systems, often distinct from those of the corresponding monometallic particles. Core-shell particles, where dia- or paramagnetic noble metal-cores are surrounded by a ferromagnetic Co-shell, are an interesting system to study surface and interfacial magnetism such as an induced polarization or a giant magnetoresistance effect. <br /> <br /> In this work, new synthetic routes for the preparation of monometallic (Pt, Pd, Ag) and bimetallic magnetic nanocrystals (Ag@Co, Pt@Co, Pd@Co) with core-shell structure are presented. Stable colloids with a narrow particle size distribution were obtained in organic solvents using methods of wet chemistry. The method of preparation of Ag@Co is based on the thermal decomposition of dicobalt octycarbonyl in combination with a transmetalation reaction with water free AgClO4. The cobalt amount in the Ag@Co system could be tuned from 5 to 73 at. %. The average diameter of the particles was varied from 5 to 15 nm. <br /> <br /> The reduction of platinum and palladium salts in organic solution using long chained alcohol as the reductant leads to stable metal nanostructures. Monodisperse Pd and Pt particles with average sizes of 1.7 to 7.0 nm were synthesized via thermal decomposition of metal-surfactant complexes too. Alkylamines and alkylphosphines were used in this procedure. The thickness of the Co-shell was controlled by a simple high-temperature thermolysis of dicobalt octacarbonyl at the presence of Pd and Pt seeds and was tunable from 0.5 to 2.5 nm. <br /> <br /> The crystalline structure of the samples was characterized by transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy (EDX), UV-VIS and electron-energy loss spectroscopy (EELS). SQUID magnetometry, x-ray magnetic circular dichroism (XMCD) and extended x-ray absorption fine structure (EXAFS) measurements gave information about the magnetic properties of the bimetallic systems and revealed their dependency on the particle size and the chemical composition. A high spin to orbital moments ratio µL/µS of 0.26±0.06 for Ag@Co and 0.22±0.05 for Pt@Co nanocrystals was observed at XMCD measurements due to the lowered dimensionality the investigated systems.

Sulfate-reducing bacteria (SRB) frequently occur in the deep granitic rock aquifers at the Äspö Hard Rock Laboratory (Äspö HRL), Sweden. The new SRB strain Desulfovibrio äspöensis could be iso-lated. The objective of this project was to explore the basic interaction mechanisms of uranium, curium, neptunium and plutonium with cells of D. äspöensis DSM 10631T. The cells of D. äspöensis were successfully cultivated under anaerobic conditions as well in an optimized bicarbonate-buffered mineral medium as on solid medium at 22 °C. To study the interaction of D. äspöensis with the actinides, the cells were grown to the mid-exponential phase (four days). The collected biomass was usually 1.0±0.2 gdry weight/L. The purity of the used bacterial cultures was verified using microscopic techniques and by applying the Amplified Ribosomal DNA Restriction Enzyme Analysis (ARDREA). The interaction experiments with the actinides showed that the cells are able to remove all four actinides from the surrounding solution. The amount of removed actinide and the interaction mechanism varied among the different actinides. The main U(VI) removal occurred after the first 24 h. The contact time, pH and [U(VI)]initial influence the U removal efficiency. The presence of uranium caused a damaging of the cell membranes. TEM revealed an accumulation of U inside the bacterial cell. D. äspöensis are able to form U(IV). A complex interaction mechanism takes place consisting of biosorption, bioreduction and bioaccumulation. Neptunium interacts in a similar way. The experimental findings are indicating a stronger interaction with uranium compared to neptunium. The results obtained with 242Pu indicate the ability of the cells of D. äspöensis to accumulate and to reduce Pu(VI) from a solution containing Pu(VI) and Pu(IV)-polymers. In the case of curium at a much lower metal concentration of 3x10-7 M, a pure biosorption of Cm(III) on the cell envelope forming an inner-sphere surface complex most likely with organic phosphate groups was detected. To summarize, the strength of the interaction of D. äspöensis with the selected actinides at pH 5 and actinide concentrations ≥10 mg/L ([Cm] 0.07 mg/L) follows the pattern: Cm > U > Pu >> Np.

Sulfate-reducing bacteria (SRB) frequently occur in the deep granitic rock aquifers at the Äspö Hard Rock Laboratory (Äspö HRL), Sweden. The new SRB strain Desulfovibrio äspöensis could be iso-lated. The objective of this project was to explore the basic interaction mechanisms of uranium, curium, neptunium and plutonium with cells of D. äspöensis DSM 10631T. The cells of D. äspöensis were successfully cultivated under anaerobic conditions as well in an optimized bicarbonate-buffered mineral medium as on solid medium at 22 °C. To study the interaction of D. äspöensis with the actinides, the cells were grown to the mid-exponential phase (four days). The collected biomass was usually 1.0±0.2 gdry weight/L. The purity of the used bacterial cultures was verified using microscopic techniques and by applying the Amplified Ribosomal DNA Restriction Enzyme Analysis (ARDREA). The interaction experiments with the actinides showed that the cells are able to remove all four actinides from the surrounding solution. The amount of removed actinide and the interaction mechanism varied among the different actinides. The main U(VI) removal occurred after the first 24 h. The contact time, pH and [U(VI)]initial influence the U removal efficiency. The presence of uranium caused a damaging of the cell membranes. TEM revealed an accumulation of U inside the bacterial cell. D. äspöensis are able to form U(IV). A complex interaction mechanism takes place consisting of biosorption, bioreduction and bioaccumulation. Neptunium interacts in a similar way. The experimental findings are indicating a stronger interaction with uranium compared to neptunium. The results obtained with 242Pu indicate the ability of the cells of D. äspöensis to accumulate and to reduce Pu(VI) from a solution containing Pu(VI) and Pu(IV)-polymers. In the case of curium at a much lower metal concentration of 3x10-7 M, a pure biosorption of Cm(III) on the cell envelope forming an inner-sphere surface complex most likely with organic phosphate groups was detected. To summarize, the strength of the interaction of D. äspöensis with the selected actinides at pH 5 and actinide concentrations ≥10 mg/L ([Cm] 0.07 mg/L) follows the pattern: Cm > U > Pu >> Np.