Orientador: Vera Lucia da Silveira Nantes Button / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação / Made available in DSpace on 2018-08-04T03:25:15Z (GMT). No. of bitstreams: 1 Duarte_MauricioGomes_M.pdf: 2754469 bytes, checksum: 075905e730585b96c40637855bee28c3 (MD5) Previous issue date: 2003 / Resumo: o objetivo deste trabalho foi aprimorar o processo de apodização de discos de cerâmica piezoelétrica utilizado no LUS (Laboratório de Ultra-Som, DEB/FEEC e CEB, UNlCAMP), buscando estabelecer uma melhor relação entre tempo de aplicação do campo elétrico e a temperatura do banho de óleo isolante usado no processo. A apodização das cerâmicas piezoelétricas é utilizada para reduzir a difração no campo acústico gerado por transdutores de ultra-som, como já foi comprovado no LUS em trabalhos anteriores. Buscou-se reduzir o tempo de aplicação do campo elétrico através do ensaio de temperaturas diferentes do óleo mineral que banha o disco cerâmico e verificando em quais ensaios foi obtida uma boa apodização. Foram utilizadas cerâmicas piezoelétricas PZT-5A de 12,7mm de diâmetro, com 0,885mm (EDO Acoustics) e lmm (APCI) de espessura. O campo elétrico aplicado foi de 2kV/mm de espessura de cerâmica, e um eletrodo esférico de 5mm de raio foi usado para formatar o campo elétrico de apodização. Foram utilizados dois tipos de óleo mineral: o Nujol, que acima de 160°C evapora rapidamente e o óleo da CooperPower, que permitiu utilizar temperaturas até 250°C, com pouca evaporação. Os discos cerâmicos apodizados para os quais o coeficiente eletromecânico do modo espessura, kt, resultou em valores acima de 0,37, foram considerados bem apodizados. O óleo isolante foi aquecido a temperaturas diferentes entre 120°C e 250°C e o campo elétrico foi aplicado por períodos de 2 minutos até 4 horas e 30 minutos (tempo necessário para a temperatura do óleo resfriar até 25°C). Este estudo também incluiu a avaliação do efeito de sucessivas despolarizações e repolarlzações nos modos de vibração da cerâmica piezoelétrica. Os resultados confirmaram que, usando temperaturas mais altas (acima de 200°C), o campo elétrico precisa ser aplicado durante um período menor. Apodizações que utilizaram temperatura igual a 160°C, só mostraram acoplamentos bons quando o campo permaneceu aplicado enquanto o óleo resfriava até 25°C. Apodizações em que o óleo foi aquecido a temperaturas inferiores a 160°C não apresentaram bons resultados, independentemente do tempo de aplicação do campo elétrico. Os resultados também mostraram que o efeito de aplicar o campo elétrico ainda antes do óleo ser aquecido foi um aumento do acoplamento eletromecânico obtido, comparando com o resultado de um processo de apodização semelhante, mas em que o campo elétrico só foi aplicado depois do aquecimento do óleo. O mesmo efeito não foi observado com as apodizações em que utilizou-se a temperatura mais alta possível, 250°C, usando o óleo mineral da Copper Power. Concluiu-se que, usando a temperatura igual a 250°C, foi possível reduzir o tempo de aplicação do campo elétrico de apodização, com resultados satisfatórios, de mais de 4 horas para apenas 2 minutos. No entanto, o processo que utiliza uma dada relação tempo de aplicação do campo/temperatura do óleo, e que apodiza satisfatoriamente uma cerâmica com lmm de espessura, pode resultar na polarização convencional (linear) de uma cerâmica mais fina, como a cerâmica com espessura igual a O,885mm. Algumas das cerâmicas apodizadas foram usadas para construir transdutores de ultra-som. Os campos acústicos gerados pelos transdutores construidos foram mapeados, confirmando o aumento da profundidade do campo acústico, como conseqüência da redução da difração acústica, obtida a partir da apodização da polarização das cerâmicas piezoelétricas / Abstract: The objective of this work was to optimize the process of apodization of piezoelectric ceramics disks, looking for the better relation between the insulating oil bath temperature and the smaIlest period of time through which the poling field must be applied. The apodization of the piezoelectric ceramic is performed to reduce the diffraction in the acoustic field generated by ultrasonic transducers. We looked for the best initial temperature of the insulating mineral oil that surrounds the piezoelectric ceramic, and how long the poling electric field must be applied to the ceramic to achieve a good apodization. We used 12.7mm diameter, 0.885mm and lmm thickness PZT-5A ceramic disks. The non-uniform poling electric field (2kV/mm) has been shaped by a 5mm radius spherica1 electrode. The apodized ceramic disks which showed piezoelectric coupling coefficient values larger than 0.37, were considered well apodizated. We used oil temperatures from 120°C to above 200°C and the electric field was applied for periods of at least 2 minutes to up to 4 hours and third minutes (until the oil temperature cooled down to 25°C). This study a1so inc1uded the ceramic disk evaluation after successive depolarizations and repolarizations. The results showed that using higher temperatures (above 200°C) we needed to apply the poling field for a shorter time. Temperature equa1160°C was efficient on1y ifthe poling field was applied until the oil was cooled down to 25°C (4 hours and thirty minutes). The results also showed that if the poling electric field was applied to the piezoelectric ceramic even before the oil was heated, we obtained larger piezoelectric coupling coefficients, compared to the poling processes where the electric field was applied to the ceramic on1y afier the oil was heated. This was not necessary if we used higher temperatures (250°C). We concluded that using higher temperatures (250°C) it was possible to reduce the apodization process, with good results, from more than 4 hours to on1y 2 minutes. Ultrasound transducers were built; their acoustic fields were mapped in a water tank, and the results confirmed the increasing of the depth of the acoustic field, as consequence of the acoustic difraction reduction / Mestrado / Engenharia Biomedica / Mestre em Engenharia Elétrica

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This thesis presents the design and analysis for development of a Capacitive Micromachined Ultrasonic Transducer (CMUT), a novel sensor and actuator, aimed at replacing the conventional piezoelectric transducers for air-coupled ultrasonic imaging applications. These CMUTs are fabricated using the silicon micromachining technology wherein all fabrication is done on the surface of a silicon wafer by means of thin-film depositions, patterning with photolithography and etching. The main emphasis of this study is on developing analytical models that serve as effective design tools for the development of these devices. A desirable goal of such study is to create reasonable mathematical models, obtain analytical solutions, wherever possible, for various measures of transducer performance and provide design aids. A logical start is the lumped parameter modeling wherein the explicit dependence of the physical parameters on the spatial extent of the device is ignored. The system lumped parameters, such as the equivalent stiffness, the equivalent mass, and the equivalent damping are extracted from reasonable analytical or numerical models and subsequently used in the static and dynamic analysis of the device. Useful predictions are made with regard to the key transducer parameters, such as, the pull-in voltage, the static deflection, the dynamic response and the acoustic field produced. The modeling work presented embodies two main objectives: (i) it serves to provide direction in the design phase, and, (ii) it serves to aid in the extraction of critical parameters which affect the device behavior. Comparison of the results with the more rigorous FEM simulations as well as with those present in the existing literature assure that the developed models are accurate enough to serve as useful design tools. The distributed parameter modeling is presented next. Analysis of MEMS devices which rely on electrostatic actuation is complicated due to the fact that the structural deformations alter the electrostatic forces, which redistribute and modify the applied loads. Hence, it becomes imperative to consider the electro-elastic coupling aspect in the design of these devices. An approximate analytical solution for the static deflection of a thin, clamped circular plate caused by electrostatic forces which are inherently nonlinear, is presented. The model is based on the Kirchhoff-Love assumptions that the plate is thin and the deflections and slopes are small. The classical thin-plate theory is adequate when the ratio of the diameter to thickness of the plate is very large, a situation commonly prevalent in many MEMS devices, especially the CMUTs. This theory is used to determine the static deflection of the CMUT membrane due to a DC bias voltage. The thin-plate electro-elastic equation is solved using the Galerkin weighted residual technique under the assumption that the deflections are small in comparison to the thickness of the plate. The results obtained are compared to those obtained from ANSYS simulations and an excellent agreement is observed between the two. The pull-in voltage predicted by our model is close to the value predicted by ANSYS simulations. A simple analytical formula, which gives fairly accurate results (to within 3% of the value predicted by ANSYS simulations) for determination of the pull-in voltage, is also presented. As stated, this formula accounts for the elastic deflection of the membrane due to the coupled interaction with the electrostatic field. The effect of vacuum sealing the backside cavity of a CMUT is investigated in some detail. The presence or absence of air inside the cavity has a marked effect upon the system parameters, such as the natural frequency and the pull-in voltage. The possibility of using sealed CMUT cavities with air inside at ambient pressure is explored. In order to estimate the transducer loss due to the presence of air in the sealed cavity, the squeeze film forces resulting from the compression of the trapped air film are evaluated. Towards this end, the linearized Reynolds equation is solved in conjunction with the appropriate boundary conditions, taking the flexure of the membrane into account. From this analysis, it is concluded that, for a sealed CMUT cavity, the presence of air does not cause any squeeze film damping even when the flexure of the membrane is taken into account (the case of a rigid plate is already known). Although the emphasis of the study undertaken here is not on the physical realization of a working CMUT, a single cell as well as a linear array based on the design presented here, were fabricated (in a foundry elsewhere) in order to verify some of the most fundamental device parameters from experimental measurements. The fabricated devices have been characterized for their resonant frequency, quality factor, and structural integrity. These tests were conducted using the laser Doppler vibrometer and the Focused Ion Beam milling. Having investigated thoroughly the behavior of a single cell, we proceed to demonstrate how these cells can be arranged optimally in the form of an array to provide a comprehensive ultrasonic imaging system. A thorough analysis of the requirements for the array architecture is undertaken to determine the optimal configuration. The design constraints that need to be taken into account for CMUT arrays, especially for NDE applications, are presented. The main issue of designing an array consisting of a large number of CMUT cells required for producing a pressure wave of sufficient strength which is detectable upon reflection from the desired location even after suffering severe attenuation resulting from propagation in various media is addressed. A scalable annular array architecture of CMUT cells is recommended based on the analysis carried out.

Ultrasound imaging is a ubiquitous part of the modern medical diagnostics toolbox. It has widespread applications to many areas of medicine, including angiology, cardiology, nephrology, urology, and obstetrics. It is often preferred over other imaging modalities, such as x-ray computed tomography (CAT) and magnetic resonance imaging (MRI) because it is non-invasive, non-ionizing, inexpensive, and has excellent penetration depth in the body. The design, optimization, and manufacturing of ultrasound transducers used in ultrasound imaging is a challenging engineering problem. Faced with a variety of different imaging environments, ultrasound transducers must often be optimized for performance in very specific applications. This is especially true for catheter-based solutions, such as intracardiac and intravascular ultrasound, where imaging performance is strongly dependent on the strength of backscatter from tissue due to significant limitations in device size, electronics, and signal-to-noise ratio. Currently, there is a need for the accurate and fast simulation of the imaging process used in ultrasound imaging, including the ability to capture the effects of backscatter from a variety of different tissues. This thesis discusses the development of simulation tools for the quantitative simulation of tissue backscatter and blood motion from acoustic fields coupled to spatial array transducers, based on an application of the Rayleigh speckle model to the linear systems model for acoustic diffraction from spatial array transducers. These simulation tools have potential applications in the field of medical ultrasonics, with particular attention to the areas of transducer design and optimization, beamforming and array processing, and image reconstruction. We demonstrate how the simulation tools developed here can be used to characterize array imaging performance and to investigate reconstruction performance of common flow algorithms for Doppler ultrasound imaging.

International Telemetering Conference Proceedings / October 21, 2002 / Town & Country Hotel and Conference Center, San Diego, California / Replacing and maintaining sensors in existing legacy systems is costly and time consuming since no information beyond voltage or current is supplied by these sensors. When a sensor is replaced or added, information for that sensor has to be incorporated by the software programmer into the main system software – a costly and time-consuming process. A method has been developed to give these old sensors the intelligence to meet the requirements of the proposed IEEE P1451.3 standard. This is accomplished with no changes to the legacy hardware and a minor, one time change to the legacy main system software.

ITC/USA 2008 Conference Proceedings / The Forty-Fourth Annual International Telemetering Conference and Technical Exhibition / October 27-30, 2008 / Town and Country Resort & Convention Center, San Diego, California / In this paper we describe extensions to the Instrument Hardware Abstraction Language (IHAL). Since IHAL was first presented to ITC in 2006, a number of improvements were made to the design of IHAL. Major changes to the schema include splitting it into multiple XML Schema (XSD) files, separation of the description of instrumentation functions from the description of the hardware, and addition of a function pool.

International Telemetering Conference Proceedings / October 23-26, 2000 / Town & Country Hotel and Conference Center, San Diego, California / This presentation summarizes a study characterizing strain gages and pressure transducers used to measure the fluid pressure within aircraft hydraulic lines. A series of laboratory calibrations and finite element analyses was performed to demonstrate the quality of data from both pressure transducers and strain gages under variations in both temperature and external strains on the hydraulic lines. Strain gages showed a marked susceptibility to external strains on hydraulic lines, and wide variations in susceptibility to temperature changes. Pressure transducers were found to be relatively immune to both conditions. It is recommended that strain gages be used for trend data only.

Electromagnetic Acoustic Transducers (EMATs) are advanced ultrasonic transducers that generate and detect acoustic waves in an electrically conducting material without making physical contact with the material unlike its counterpart, the piezoelectric transducers (PZT). The conventional EMAT consists of copper coil that generates the dynamic field when excited with a sinusoidal current, a permanent or electromagnet that provides the bias field and the conducting material specimen. The complex interaction between the bias field and the Eddy current induced within the skin depth of the conducting material by the dynamic field gives rise to the acoustic wave that then propagates within the surface of the material. Within the research a finite element EMAT model was developed using commercial software Comsol Multiphysics, to study and compare the Eddy current density and Lorentz force density generated by three EMAT configurations: The Meander-line, Spiral and Key Type EMAT configuration respectively. It was observed that apart from the ease of fabrication and simplicity of connectivity when stacked in layers, the Key Type coil EMAT showed a high tendency to generate higher amplitude of Eddy current and Lorentz force test materials especially when stacked in layers. Also, the effect of varying some key EMAT parameters was investigated to determine the optimal performance of Key Type EMAT configuration on CS70 pipe steel plate. The research further developed a coupled finite element model using the same software, Comsol Multiphysics to account for the generation, propagation and detection of acoustic wave by the Key Type EMAT configuration on CS70 grade of pipe steel. The model can solve the magnetostatic, electrodynamic and elastic equations that give rise to acoustic wave generation, propagation and detection on the test material. The developed coupled finite element model was validated both analytically and experimentally to establish the validity of the finite element model. The analytical and experimental results obtained were consistent with the numerical result with an average discrepancy less than 9 % percent. Finally, the research developed a novel modelling strategy to decouple and quantify the various transduction forces in operation when normally-biased EMAT and magnetostrictive EMAT configurations are used on various grades of pipe steel materials. The strategy established the value of the critical excitation current beyond which acoustic wave is generated solely by the dynamic Lorentz force mechanism. The critical excitation currents when Magnetostrictive EMAT configurations are used to generate acoustic wave was found to be; 268A, 274A, 279A, 290A and 305A for CS70, L80SS, L80A, TN80Cr3 and J55 respectively. While for Normally-Biased EMAT configurations, the critical excitation current was found to be 190A, 205A, 240A, 160A and 200A respectively. This work also compared the critical excitation current of the two EMAT configurations studied and established that normally-biased EMATs are more efficient in the generation of acoustic waves than their magnetostrictive counterpart due to their lower value of critical excitation current.