Cette thèse porte sur l’élaboration et la caractérisation électrique et physico-chimique des grilles métalliques des dispositifs FDSOI MOSFET 14 nm à base d’oxyde high-K fabriqués chez STMicroelectronics. Ces grilles métalliques sont composées de couches de TiN, lanthane et aluminium, déposées par pulvérisation cathodique RF. Des structures de test et un schéma d’intégration simplifié permettant l’analyse capacitive ont été mis en place pour caractériser la modulation du travail de sortie effectif des grilles métalliques en TiN avec l’incorporation d'additifs tels que le lanthane ou l’aluminium. Ces additifs ont été incorporés suivant une approche de grille sacrificielle. Par ailleurs, une méthodologie inédite basée sur la fluorescence X a été proposée et validée pour la caractérisation précise en ligne de la diffusion des additifs. Cette méthodologie permet de prouver que la dose effective de l’espèce incorporée après recuit de diffusion peut être modélisée en fonction de l’épaisseur du TiN piédestal dans la grille sacrificielle ainsi que de la température de recuit. De plus, la variation de l’épaisseur de l’oxyde interfaciel sur une seule plaquette (oxyde biseau) autorise l’identification de l’origine physique de la modulation du travail de sortie effectif, qui s’explique par un dipôle qui évolue avec la dose effective de l’espèce incorporée. En conséquence, un modèle de la diffusion des dopants de grille dans l’oxyde high-K et de leur impact sur le travail de sortie effectif des grilles métalliques a été proposé afin de moduler avec précision la tension de seuil (VTH) des dispositifs FDSOI 14 nm. En outre, l’impact de l’oxyde high-K à la fois sur la diffusion des additifs et sur la modulation du travail de sortie effectif a été mis en évidence. Enfin, un procédé innovant de dépôt métallique, permettant la modification de la microstructure du TiN, a été développé afin d’améliorer davantage la variabilité locale du VTH des dispositifs FDSOI. / This Ph.D. thesis is focused on the fabrication and electrical and physicochemical characterization of metal gates in 14 nm high-K based FDSOI MOSFET devices, manufactured at STMicroelectronics. These metal gates are composed of TiN, lanthanum and aluminum layers, deposited by RF sputtering. Test structures and a simplified integration scheme allowing C-V measurements, have been implemented in order to characterize the modulation of the effective work function of TiN metal gates with the incorporation of dopants such as lanthanum or aluminum. These additives are incorporated in a sacrificial gate-first approach. Furthermore, a new methodology based on X-ray fluorescence was proposed and validated for accurate in-line characterization of the diffusion of dopants. This methodology enables to prove that the effective dose of the species incorporated into dielectrics after diffusion annealing may be modeled as a function of the thickness of the pedestal TiN in the sacrificial gate and the annealing temperature. Moreover, the variation of the thickness of the interfacial oxide along the wafer (bevel oxide) authorizes the identification of the origin of the modulation of the effective work function, which is explained by a dipole that evolves with the effective dose of the incorporated dopant. Accordingly, a model of the diffusion of dopants into the gate dielectrics and their impact on the effective work function of metal gates has been proposed to precisely modulate the threshold voltage (VTH) of the 14 nm FDSOI devices. In addition, the influence of the high-K oxide on both the diffusion of dopants and the modulation of the effective work function was highlighted. Lastly, an innovative process for metal deposition, allowing the modification of the microstructure of TiN, was developed in order to further improve the local VTH variability in FDSOI devices.

Dans ce travail de thèse a été développé et étudié un nouveau type d'objet semiconducteur magnétique : des boîtes quantiques de CdMnTe insérées dans des nanofils de ZnTe/ZnMgTe constituant une structure de type cœur-coquille. L'objectif était d'étudier la croissance par épitaxie par jets moléculaires et les propriétés fondamentales de ces hétéro-structures complexes. Dans ce but deux aspects principaux ont été abordés : i) la qualité et le contrôle des propriétés structurales, électroniques et magnétiques de ces objets, grâce à une maîtrise de leur croissance et ii) l'obtention d'informations quantitatives locales sur la composition chimique de ces nanostructures inhomogènes. Pour atteindre ces objectifs, nous avons divisé notre étude en quatre étapes. La première étape de ce travail a été concentrée sur l'étude quantitative de la formation des particules d'or servant de catalyseurs à la croissance des nanofils. La seconde étape a porté sur l'analyse des mécanismes de croissance et des paramètres gouvernant la croissance des fils de ZnTe. En particulier deux types de fils ont été observés : des fils cylindriques de structure wurtzite et des fils coniques de structures zinc-blende. Un modèle de croissance guidée par la diffusion a été utilisé pour rendre compte de certains des résultats quantitatifs présentés dans cette partie. La troisième étape a concerné l'insertion de boîtes quantiques de CdMnTe dans des nanofils de structure cœur-coquille ZnTe/ZnMgTe. Une étude préalable des paramètres pertinents influençant les propriétés magnéto-optiques de ces objets, tels que le confinement de la boîte quantique, l'incorporation du Mn et l'anisotropie de contrainte créée par la structure, a été menée. La quatrième et dernière étape de ce travail a porté sur l'interprétation quantitative de mesures d'analyse dispersive en énergie effectuées sur des nanofils de structure cœur-multicoquille. Un modèle géométrique a été proposé, permettant de retrouver la forme, les dimensions et la composition chimique des boîtes quantiques et des coquilles. Cette étude a été couplée à des mesures de caractérisation telles que la cathodo-luminescence, la micro-photo-luminescence et la spectroscopie magnéto-optique effectuées sur le même nanofil. / In this PhD work a novel type of magnetic semiconductor object has been developed: Cd(Mn)Te quantum dots embedded in ZnTe/ZnMgTe core-shell nanowires. The goal was to investigate the growth, by molecular beam epitaxy, and the fundamental properties of these complex heterostructures. For that purpose, two main issues were addressed: i) gaining control of the structural, electronic and magnetic properties of these quantum objects by mastering their growth; and ii) obtaining quantitative local knowledge on the chemical composition of those non-homogeneous nanostructures. To tackle these topics, our research was divided into four stages. The first stage was devoted to perform a quantitative study of the formation process of the Au particles that catalyze the growth of nanowires. The second stage involved the analysis of the mechanisms and parameters governing the growth of ZnTe nanowires. In particular, two different types of nanowires were found: cone-shaped nanowires with the zinc-blende crystal structure and cylinder-shaped nanowires with the hexagonal wurtzite structure. A diffusion-driven growth model is employed to fit some of the quantitative results presented in this part. The third stage focused on the insertion of pure CdTe quantum dots containing Mn ions in the core-shell nanowires. An initial study of the relevant parameters influencing the magneto-optical properties of these objects, such as the quantum dot confinement, the Mn incorporation, and the strain anisotropy, was performed. The four and last stage of this work concerned the quantitative interpretation of Energy-Dispersive X-ray spectroscopy measurements performed on single core-multishell nanowires. A geometrical model was proposed to retrieve the shape, the size and the local composition of the quantum dot insertions and of the multiple layers of the heterostructures. This study was coupled to other complementary characterization measurements on the same nanowire, such as cathodo-luminescence, micro-photo-luminescence and magneto-optical spectroscopy.

The path towards mitigation of anthropogenic greenhouse gas emissions lies in the transition from conventional to sustainable energy resources. The Hydrogen Economy, a cyclic economy based on hydrogen as a fuel, is suggested as a tool in the necessary energy transition. Photocatalysis makes use of sunlight to promote thermodynamically non-favoured reactions such as water splitting, allowing for sustainable hydrogen production. Harvesting thermal energy along with photonic energy is an interesting concept to decrease the activation energy of water splitting (i.e. ΔG = + 237.2 kJ∙mol−1). This work aims to confront this hypothesis in a gas phase photo-thermal reactor designed specifically for this study. The photocatalyst chosen is graphitic carbon nitride (g-C3N4), an organic semiconductor possessing a narrow band gap (i.e. 2.7 eV) as well as a band structure which theoretically permits water splitting. The photocatalytic performance of Pt/g-C3N4 for hydrogen evolution was tuned by altering its synthetic temperature. Electron paramagnetic resonance was used to gain insight on the evolution of the photocatalyst activity with synthesis temperature. Then, gold nanoparticles were deposited on g-C3N4 surface. Localized surface plasmon resonance properties of gold nanoparticles are reported in the literature to be influenced by temperature. Therefore Au/g-C3N4 appeared as a promising candidate for photo-thermal water splitting. X-ray spectroscopy unveiled interesting observations on the gold oxidation state. Moreover, under specific reduction conditions, gold nanoparticles with a wide variety of shapes characterized by sharp edges were formed. Finally, the development of the photo-thermal reactor is presented. The design process and the implementation of this innovative reactor are discussed. The reactor was successfully utilized to probe photoreactions. Then, the highly energy-demanding photocatalytic water splitting was proven not to be activated by temperature in the photo-thermal apparatus.

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Submitted by VAGNER ANTONIO MORALLES null (vagner_gner@yahoo.com.br) on 2017-04-08T20:13:43Z No. of bitstreams: 1 MORALLES, V.A. DISSERTAÇÃO.pdf: 5606116 bytes, checksum: 5a412f90292a50233a6a7f9fc513ad74 (MD5) / Approved for entry into archive by Luiz Galeffi (luizgaleffi@gmail.com) on 2017-04-17T15:00:36Z (GMT) No. of bitstreams: 1 moralles_va_me_araiq.pdf: 5606116 bytes, checksum: 5a412f90292a50233a6a7f9fc513ad74 (MD5) / Made available in DSpace on 2017-04-17T15:00:36Z (GMT). No. of bitstreams: 1 moralles_va_me_araiq.pdf: 5606116 bytes, checksum: 5a412f90292a50233a6a7f9fc513ad74 (MD5) Previous issue date: 2017-03-08 / Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) / Alguns compostos orgânicos de origem natural apresentam grande interesse para aplicação médica devido suas atividades biológicas como antioxidante, antiviral, antimicrobiano, antitumoral, entre outras. Destes estes compostos, alguns se destacam por apresentarem a possibilidade de agir como ligante em compostos de coordenação. Para o desenvolvimento desse projeto de pesquisa, em especial, foram selecionados os ligantes 3,5,7,3’,4’- pentahidroxiflavona (quercetina), ácido 3,4,5-triidroxibenóico (ácido gálico), ácido (E)-3fenil- 2-propenóico (ácido cinâmico) e (E)-3-(4-hidroxifenil)-2-propanoico (ácido p-cumárico). Pretende-se, portanto, maximizar as atividades antioxidantes e antitumorais destes ligantes de origem natural, por meio da complexação em compostos de coordenação. Além disso, estudar as propriedades estruturais e ópticas dos complexos obtidos. O desenvolvimento dessa pesquisa permitiu encontrar uma relação entre a estrutura do ligante e suas propriedades ópticas quando excitados com radiação ultravioleta e raios X. Conseguiu-se também levantar algumas hipóteses sobre a potencialidade de utilização destes compostos de coordenação como filtros solares. / Some organic compounds of natural origin are of great interest for medical application due to their biological activities as antioxidant, antiviral, antimicrobial, antitumor, among others. Of these compounds, some are notable for their ability to act as a binder in coordination compounds. For the development of this research project, in particular, the binders were selected quercetin (2-(3,4-dihydroxyphenyl)-3,5,7-trihydroxy-4H-chromen-4-one), Cinnamic acid (3-phenyl-2-propenoic acid) and p-coumaric acid ((E)-3-(4-hydroxyphenyl)-2-propenoic acid). It is therefore intended to maximize the antioxidant and antitumor activities of these naturally occurring binders by complexing into coordination compounds. In addition, to study the structural and optical properties of the complexes obtained. The development of this research allowed to find a relation between the structure of the binder and its optical properties when excited with ultraviolet radiation and X-rays. It was also possible to raise some hypotheses about the potential of using these coordination compounds as sunscreens.

Made available in DSpace on 2014-10-09T12:42:17Z (GMT). No. of bitstreams: 0 / Made available in DSpace on 2014-10-09T14:03:03Z (GMT). No. of bitstreams: 0 / O uso das amostragens ambientais para fins de salvaguardas vêm sendo aplicadas pela Agência Internacional de Energia Atômica AIEA desde 1996 e estão sendo rotineiramente utilizadas como uma medida de fortalecimento complementar aos procedimentos tradicionais de salvaguardas de materiais nucleares. O intuito é verificar se os Estados signatários aos acordos de salvaguardas não estão divergindo suas atividades nucleares pacíficas para atividades nucleares não declaradas. O presente trabalho apresenta um novo protocolo de coleta e análise de esfregaços para identificação de assinaturas nucleares que possam relacionar-se com as atividades nucleares desenvolvidas na instalação inspecionada. Neste trabalho foi utilizada como estudo de caso uma planta real de reconversão de urânio do ciclo do combustível nuclear do IPEN. A estratégia analítica proposta utiliza diferentes técnicas, como medidor de radiação alfa, MEVEDS e ICPMS para identificar assinaturas do urânio aderido ao esfregaço. Na análise dos esfregaços, foi possível identificar partículas de UO2F2 e UF4 através da comparação morfológica e análises semi-quantitativas utilizando a técnica de MEVEDS. Nesse trabalho, utilizaram-se métodos que como resultado tem-se a composição isotópica média da amostra, onde o enriquecimento (fração atômica molar) variou de 1,453 ± 0,023% a 18,24 ± 0,15% no isótopo 235U. Através das coletas realizadas externamente, uma forma não intrusiva de amostragem, foi possível à identificação de atividades de manuseio de material enriquecido com medidas de fração atômica molar de 1,453 ± 0,023% a 6,331 ± 0,055% no isótopo 235U, bem como uso de material reprocessado, através da identificação do isótopo 236U. As incertezas obtidas neste trabalho para a razão n(235U)/n(238U) variaram de 0,40% a 1,68%. / Dissertação (Mestrado) / IPEN/D / Instituto de Pesquisas Energeticas e Nucleares - IPEN-CNEN/SP