Silicon (Si) has been considered as a promising negative electrode material for lithium ion batteries (LIBs) because of its high theoretical capacity, low discharge voltage, and low cost. However, the utilization of Si electrode has been hampered by problems such as slow ionic transport, large stress/strain generation, and unstable solid electrolyte interphase (SEI). These problems severely influence the performance and cycle life of Si electrodes. In general, ionic conduction determines the rate performance of the electrode, while electron leakage through the SEI causes electrolyte decomposition and, thus, causes capacity loss. The goal of this thesis research is to design Si electrodes with high current efficiency and durability through a fundamental understanding of the ionic and electronic conduction in Si and its SEI. Multi-scale physical and chemical processes occur in the electrode during charging and discharging. This thesis, thus, focuses on multi-scale modeling, including developing new methods, to help understand these coupled physical and chemical processes. For example, we developed a new method based on ab initio molecular dynamics to study the effects of stress/strain on Li ion transport in amorphous lithiated Si electrodes. This method not only quantitatively shows the effect of stress on ionic transport in amorphous materials, but also uncovers the underlying atomistic mechanisms. However, the origin of ionic conduction in the inorganic components in SEI is different from that in the amorphous Si electrode. To tackle this problem, we developed a model by separating the problem into two scales: 1) atomistic scale: defect physics and transport in individual SEI components with consideration of the environment, e.g., LiF in equilibrium with Si electrode; 2) mesoscopic scale: defect distribution near the heterogeneous interface based on a space charge model. In addition, to help design better artificial SEI, we further demonstrated a theoretical design of multicomponent SEIs by utilizing the synergetic effect found in the natural SEI. We show that the electrical conduction can be optimized by varying the grain size and volume fraction of two phases in the artificial multicomponent SEI.

Flash memories are solid-state non-volatile memories. They play a vital role especially in information storage in a wide range of consumer electronic devices and applications including smart phones, digital cameras, laptop computers, and satellite navigators. The demand for high density flash has surged as a result of the proliferation of these consumer electronic portable gadgets and the more features they offer – wireless internet, touch screen, video capabilities. The increase in the density of flash memory devices over the years has come as a result of continuous memory cell-size reduction. This size scaling is however approaching a dead end and it is widely agreed that further reduction beyond the 20 nm technological node is going to be very difficult, as it would result to challenges such as cross-talk or cell-to-cell interference, a high statistical variation in the number of stored electrons in the floating gate and high leakage currents due to thinner tunnel oxides. Because of these challenges a wide range of solutions in form of materials and device architectures are being investigated. Among them is three-dimensional (3-D) flash, which is widely acclaimed as the ideal solution, as they promise the integration of long-time retention and ultra-high density cells without compromising device reliability. However, current high temperature (>600 °C) growth techniques of the Polycrystalline silicon floating gate material are incompatible with 3-D flash memory; with vertically stacked memory layers, which require process temperatures to be ≤ 400 °C. There already exist some low temperature techniques for producing polycrystalline silicon such as laser annealing, solid-phase crystallization of amorphous silicon and metal-induced crystallization. However, these have some short-comings which make them not suitable for use in 3-D flash memory, e.g. the high furnace annealing temperatures (700 °C) in solid-phase crystallization of amorphous silicon which could potentially damage underlying memory layers in 3-D flash, and the metal contaminants in metal-induced crystallization which is a potential source of high leakage currents. There is therefore a need for alternative low temperature techniques that would be most suitable for flash memory purposes. With reference to the above, the main objective of this research was to develop a novel low temperature method for growing silicon structures at ≤ 400 °C. This thesis thus describes the development of a low-temperature method for polycrystalline silicon growth and the application of the technique in a capacitor-like flash memory device. It has been demonstrated that silicon structures with polycrystalline silicon-like properties can be grown at ≤ 400 °C in a 13.56 MHz radio frequency (RF) plasma-enhanced chemical vapour deposition (PECVD) reactor with the aid of Nickel Formate Dihydrate (NFD). It is also shown that the NFD coated on the substrates, thermally decomposes in-situ during the deposition process forming Ni particles that act as nucleation and growth sites of polycrystalline silicon. Silicon films grown by this technique and without annealing, have exhibited optical band gaps of ~ 1.2 eV compared to 1.78 eV for films grown under identical conditions but without the substrate being coated. These values were determined from UV-Vis spectroscopy and Tauc plots. These optical band gaps correspond to polycrystalline silicon and amorphous silicon respectively, meaning that the films grown on NFD-coated substrates are polycrystalline silicon while those grown on uncoated substrates remain amorphous. Moreover, this novel technique has been used to fabricate a capacitor-like flash memory that has exhibited hysteresis width corresponding to charge storage density in the order of 1012 cm-2 with a retention time well above 20 days for a device with silicon films grown at 300 °C. Films grown on uncoated films have not exhibit any significant hysteresis, and thus no flash memory-like behaviour. Given that all process temperatures throughout the fabrication of the devices are less than 400 °C and that no annealing of any sort was done on the material and devices, this growth method is thermal budget efficient and meets the crucial process temperature requirements of 3-D flash memory. Furthermore, the technique is glass compatible, which could prove a major step towards the acquisition of flash memory-integrated systems on glass, as well as other applications requiring low temperature polycrystalline silicon.

Nous présenterons le procédé de fabrication, la caractérisation, ainsi qu’un modèle numérique permettant l’optimisation d’un nouveau dispositif permettant d’effectuer des mesures de nanocalorimétrie sur un échantillon de silicium monocristallin. Ce dernier possède entre autre des propriétés thermiques nous permettant d’effectuer des mesures à des températures supérieures à 900 C, avec une résolution meilleure que 16 C. Ceci nous a permis d’étudier la dynamique des défauts induits par implantation ionique dans le silicium monocristallin. Deux comportements différents sont observés dans la germination de la phase amorphe induite par implantation à 10 et 80 keV. Ces résultats ont été confrontés à des simulations Monte-Carlo basées sur le modèle des paires lacunesinterstitiels. La comparaison entre les simulations et les mesures expérimentales ont montré que ce modèle est incomplet car il ne reproduit qualitativement que certaines caractéristiques observées expérimentalement. Des mesures réalisées à partir de -110 C dans le silicium monocristallin et amorphisé implanté avec des ions légers, ont mis en évidence des différences claires entre la relaxation dans le silicium amorphe et le recuit des défauts dans le silicium monocristallin. Deux processus à des énergies d’activation de 0.48 et 0.6 eV ont été observés pour les implantations réalisées dans le silicium monocristallin tandis qu’un relâchement de chaleur uniforme ne révélant qu’un spectre continu d’énergie d’activation a été observé dans le silicium amorphe. / We present the fabrication process, characterization and numerical model allowing the optimization of a new device that allows us to perform nanocalorimetry measurements on a silicon single crystals. The thermal properties of this device allows us to perform measurements at temperature higher than 900 C with a resolution better than 16 C. The device is used to study the ion implantation induced defect dynamic in monocrystalline silicon. Two different behaviours regarding the nucleation of the amorphous phase are observed at 10 and 80 keV. These results are confronted to Monte Carlo simulations based on the interstitial vacancy pair model. The comparison between simulations and measurements show that the model is incomplete as it reproduces only qualitatively some features of the experimental observations. Measurements performed from -110 C in monocrystalline and amorphized silicon implanted with light ions revealed clear differences between structural relaxation in amorphous silicon and defect annealing in monocrystalline silicon. Two processes with activation energies of 0.48 and 0.6 eV are observed after implantation performed in monocrystalline silicon while a uniform heat release associated with a continuous spectrum in terms of activation energy is observed in amorphous silicon.

Malgré une vaste littérature concernant les propriétés structurelles, électroniques et ther- modynamiques du silicium amorphe (a-Si), la structure microscopique de ce semi-cond- ucteur covalent échappe jusqu’à ce jour à une description exacte. Plusieurs questions demeurent en suspens, concernant par exemple la façon dont le désordre est distribué à travers la matrice amorphe : uniformément ou au sein de petites régions hautement déformées ? D’autre part, comment ce matériau relaxe-t-il : par des changements homo- gènes augmentant l’ordre à moyenne portée, par l’annihilation de défauts ponctuels ou par une combinaison de ces phénomènes ? Le premier article présenté dans ce mémoire propose une caractérisation des défauts de coordination, en terme de leur arrangement spatial et de leurs énergies de formation. De plus, les corrélations spatiales entre les défauts structurels sont examinées en se ba- sant sur un paramètre qui quantifie la probabilité que deux sites défectueux partagent un lien. Les géométries typiques associées aux atomes sous et sur-coordonnés sont extraites du modèle et décrites en utilisant les distributions partielles d’angles tétraédriques. L’in- fluence de la relaxation induite par le recuit sur les défauts structurels est également analysée. Le second article porte un regard sur la relation entre l’ordre à moyenne portée et la relaxation thermique. De récentes mesures expérimentales montrent que le silicium amorphe préparé par bombardement ionique, lorsque soumis à un recuit, subit des chan- gements structuraux qui laissent une signature dans la fonction de distribution radiale, et cela jusqu’à des distances correspondant à la troisième couche de voisins.[1, 2] Il n’est pas clair si ces changements sont une répercussion d’une augmentation de l’ordre à courte portée, ou s’ils sont réellement la manifestation d’un ordonnement parmi les angles dièdres, et cette section s’appuie sur des simulations numériques d’implantation ionique et de recuit, afin de répondre à cette question. D’autre part, les corrélations entre les angles tétraédriques et dièdres sont analysées à partir du modèle de a-Si. / Based on a detailed study of the radial distribution function (RDF) of a model for amorphous sili- con (a-Si), we address the relation between short-range rearrangements and an increase in medium- range order induced by thermal relaxation. Recent experimental measurements have shown that a small peak appears in the RDF around 4.7 Å upon annealing, along with other subtle changes, and this is attributed to ordering among the dihedral angles. We show that, although this is a possible explanation, an increase in short-range order (up to second neighbors) is not only necessary for these changes to occur, but could also be their sole cause. To clarify the nature of disorder in the amorphous system, correlations among dihedral and tetrahedral angles are examined. The bivariate probability distribution of these two variables reveals small correlations between dihedral and te- trahedral angles, associated with the staggered and eclipsed conformations. In the first case, bond angles around 112.5◦ are favored vs. 120◦ in the second case. Bond angles between 95◦ and 100◦ are less probable in both conformations. On another issue, the nature of disorder in amorphous silicon (a-Si) is explored by investigating the spatial ar- rangement and energies of coordination defects in a numerical model. Spatial correlations between structural defects are examined on the basis of a parameter that quantifies the probability for two sites to share a bond. Pentacoordinated atoms are found to be the dominant coordination defects. They show a tendency to cluster, and about 17% of them are linked through three-membered rings. As for tricoordinated sites, they are less numerous, and tend to be distant by at least two bond lengths. Typical local geometries associated to under and overcoordinated atoms are extracted from the model and described using partial bond angle distributions. An estimate of the formation energies of structural defects is provided. Using molecular-dynamics calculations, we simulate the implantation of high-energy atoms in the initial structure in order to study the effect of relaxation on the coordination defects and their environments.

Parmi les technologies photovoltaïques à base de silicium, les cellules solaires à hétérojonction a-Si:H/c-Si (HJ) ont montré une attention croissante en ce qui concerne leur fort potentiel d’amélioration du rendement et de la réduction de coûts. Dans cette thèse, des investigations sur les cellules solaires à hétérojonction a-Si:H/c-Si de type (n) développées à l'Institut National de l'Énergie Solaire sont présentées. Les aspects technologiques et physiques du dispositif à HJ ont été revus, en mettant l'accent sur la compréhension du rôle joué par la face arrière. À travers le développement et la mise en œuvre des films de a-Si:H intrinsèques et dopés (n) de haute qualité des cellules solaires à HJ, les conditions requises en face arrière des dispositifs ont été établies. Une comparaison entre plusieurs types de champ surface arrière, avec et sans l’introduction d’une couche buffer, est présentée et les caractéristiques des cellules solaires résultants sont discutées. Une discussion autour du contact arrière de cellules solaires à HJ est aussi présentée. Une nouvelle approche d’oxyde transparent conducteur en face arrière basé sur les couches d’oxyde de zinc dopé au bore (ZnO:B) est étudié. Dans le but de développer des couches de ZnO:B de haute qualité bien adaptées à leur utilisation dans des dispositifs à HJ, différents paramètres de dépôt ainsi que des traitements après dépôt comme le post plasma d’hydrogène ou le recuit laser sont étudiés et leur influence sur des cellules solaires est évaluée. Au cours de ce travail il est montré que la face arrière des cellules solaires à HJ joue un rôle important sur l’accomplissement de hauts rendements. Cependant, l'augmentation de la performance globale du dispositif dû à l’optimisation de la face arrière de la cellule est toujours dépendante des phénomènes ayant lieu en face avant des dispositifs. L'utilisation des films optimisés pour la face arrière des HJs développées dans cette thèse, associée à des couches améliorées pour la face avant et une nouvelle approche de métallisation nous a permis d’atteindre un rendement de conversion record de plus de 22%, démontrant ainsi le grand potentiel de cette technologie à HJ de a-Si:H/c-Si. / Amongst available silicon-based photovoltaic technologies, a-Si:H/c-Si heterojunctions (HJ) have raised growing attention because of their potential for further efficiency improvement and cost reduction. In this thesis, research on n-type a-Si:H/c-Si heterojunction solar cells developed at the Institute National de l’Énergie Solaire is presented. Technological and physical aspects of HJ devices are reviewed, with the focus on the comprehension of the back side role. Then, an extensive work to optimise amorphous layers used at the rear side of our devices as well as back contact films is addressed. Through the development and implementation of high-quality intrinsic and n-doped a-Si:H films on HJ solar cells, the needed requirements at the back side of devices are established. A comparison between different back surface fields (BSF) with and without the inclusion of a buffer layer is presented and resulting solar cell output characteristics are discussed. A discussion on the back contact of HJ solar cells is also presented. A new back TCO approach based on boron-doped zinc oxide (ZnO:B) layers is studied. With the aim of developing high-quality ZnO:B layers well-adapted to their use in HJ devices, different deposition parameters as well as post-deposition treatments such as post-hydrogen plasma or excimer laser annealing are studied, and their influence on solar cells is assessed. Throughout this work it is evidenced that the back side of HJ solar cells plays an important role on the achievement of high efficiencies. However, the enhancement of the overall device performance due to the back side optimisation is always dependent on phenomena taking place at the front side of devices. The use of the optimised back side layers developed in this thesis, together with improved front side layers and a novel metallisation approach have permitted a record conversion efficiency over 22%, thus demonstrating the great potential of this technology.

Efeitos ópticos não-lineares foram estudados em filmes finos de silício amorfo hidrogenado através da técnica de varredura-Z, que utiliza um único feixe de luz laser de onda contínua, modulado na escala de tempo de milissegundos. Em tal técnica, amostras do material foram deslocadas ao longo da região focal de um feixe com perfil de intensidade gaussiano e comprimento de onda de 532 nm, enquanto a transmitância da luz foi medida no campo distante. Os filmes foram depositados sobre vidro pela técnica PECVD a baixas temperaturas (entre 50 °C e 200 °C) e foi utilizado fósforo como impureza dopante: variando-se a concentração do gás fosfina durante a deposição do material, obtêm-se diferentes quantidades de fósforo incorporado no Si-a:H. Durante a realização da varredura-Z, foi observado o efeito de lente térmica no sinal da transmitância e a resolução temporal do sinal medido possibilitou o ajuste dos dados experimentais ao Modelo de Lente Térmica. A partir dos parâmetros desse ajuste, foi possível determinar a difusividade térmica das amostras (D ~ 3x10-³ cm²/s) e estimar sua condutividade térmica (K ~ 5x10-³ W/Kcm) e seu coeficiente de temperatura do caminho óptico (ds/dT). Além disso, os valores dos deslocamentos de fase do feixe (´teta\') e dos tempos característicos de formação da lente térmica (tc0) foram obtidos. Efeitos ópticos de origem térmica geralmente são indesejados em dispositivos fotônicos e, para evitá-los, o estudo e o conhecimento das propriedades ópticas não-lineares dos materiais que compõem tais dispositivos são de grande importância. Ademais, aplicações em microssensores podem ser baseadas nas propriedades do Si-a:H estudadas neste trabalho, como, por exemplo, sua condutividade térmica. / Nonlinear optical effects have been studied in hydrogenated amorphous silicon films through the single beam Z-scan technique, using a modulated CW laser in the millisecond time-scale regime. In this technique, the samples were moved along the focal region of a focused gaussian laser beam with wavelength of 532 nm, while the light transmittance in the far field was measured. The films were deposited on glass by low temperature PECVD technique (from 50 °C to 200 °C) and phosphorus were used as a dopant impurity: during the material deposition, different concentrations of phosphine gas cause different amounts of incorporated phosphorus into a-Si:H. The thermal lens effect was observed in the transmittance signal, so the experimental data from the time-resolved Z-scan mode could be fitted in the Thermal Lens Model. It was possible to determine the samples thermal diffusivity (D ~ 3x10-³ cm²/s) and to estimate their thermal conductivity (K ~ 5x10-³ W/Kcm) and temperature coefficient of the optical path length change (ds/dT) through those fittings. Besides, the phase shift (\'teta\') and the thermal lens characteristic time (tc0) were achieved. Thermal optical effects are unwanted to photonics devices, therefore studying and knowing these effects is very important to avoid them. Moreover, applications to microsensor devices may use the a-Si:H properties studied in this work as, for example, its thermal conductivity.

Estruturas fotônicas à base de silício têm despertado grande interesse por permitirem uma perfeita integração entre processos ópticos e eletrônicos em um único chip. Além de compatíveis com a atual indústria microeletrônica, acredita-se, que tais estruturas possam aumentar consideravelmente a velocidade de processamento de informações. Uma microcavidade óptica é um exemplo de estrutura fotônica simples. Feita à base de silício, e dopada com íons terra-rara, tal microcavidade pode intensificar a emissão gerada pelo íon e resultar em um dispositivo de importância tecnológica. O projeto-construção deste tipo de microcavidade deve considerar a sua região de funcionamento e os materiais a serem utilizados. Deve contemplar, ainda, algumas condições externas que, eventualmente, possam alterar o seu funcionamento. Uma dessas condições é descrita pelo chamado coeficiente termo-óptico que indica a dependência do índice de refração com a temperatura. Dentro desse contexto a presente Tese de Doutorado foi dedicada ao estudo de microcavidades ópticas com janelas de transmissão em 650 nm e em 1550 nm – correspondendo às regiões de menores perdas de fibras ópticas de plástico e de sílica. As microcavidades compreenderam espelhos de Bragg [camadas alternadas de silício amorfo (a-Si) e nitreto de silício amorfo (a-SiN)], um filme de a-SiN como espaçador, e foram depositadas sobre substratos de sílica pela técnica de sputtering. As cavidades MC-Er e MC-ErYb tiveram como espaçadores filmes de a-SiN dopados com Er e Er + Yb, respectivamente. Medidas de fotoluminescência da MC-ErYb na região do infravermelho próximo indicaram um aumento de 48 vezes na emissão dos íons Er3+ (em ~1535 nm) comparado a um filme de a-SiN dopado com érbio devido: (1) a presença do itérbio e, (2) às múltiplas reflexões sofridas pela luz nos espelhos de Bragg. As microcavidades cujos espaçadores eram a-SiN puro foram submetidas a medidas de transmissão óptica em função da temperatura de medida. O deslocamento da janela de transmissão devido às variações de temperatura permitiu determinar o valor do TOC do a-SiN como: (6.2±0.1)×10-5 ºC-1 (em ~ 620 nm) e, (4.7±0.1)×10-5 ºC -1 (em ~ 1510 nm). Até onde sabemos, o TOC do a-SiN no VIS foi determinado pela primeira vez neste trabalho. / Silicon photonic based structures have attracted great interest for allowing a perfect integration between optical and electronic process in a single chip. Besides being compatible with the actual microelectronic industry, it is believed that such structures can considerably increase the information processing speed. An optical microcavity is an example of a simple photonic structure. Made based on silicon, and doped with rare-earth ions, such microcavity may enhance the emission generated by the ion and become a device of technological importance. The project-construction of this kind of microcavity has to consider the operation region and the materials used. It still has to take into account external conditions that may, eventually, change its operation. One of these conditions is described by the thermo-optic coefficient (TOC) that shows the dependence of the refractive index with the temperature. Within this context the present PhD thesis was dedicated to the study of optical microcavities with transmission windows at 650 nm and at 1550 nm – corresponding to the low losses regions of the plastic and silica optical fibers. The microcavities comprised Bragg mirrors [alternated layers of amorphous silicon (a-Si) and amorphous silicon nitride (a-SiN)], one film of a-SiN as spacer, and were deposited on silica substrates by the sputtering technique. The MC-Er and MC-ErYb cavities had Er and Er+Yb-doped a-SiN films as spacers, respectively. Photoluminescence measurements of the MC-ErYb in the near infrared showed an enhancement of 48 times in the emission of the Er3+ ions (at ~ 1535 nm) compared with an Er-doped a-SiN film owing to: (1) the presence of ytterbium and, (2) the multiple reflections experienced by the light at the Bragg mirrors. The microcavities whose spacers were pure a-SiN were submitted to optical transmission measurements as a function of the measurement temperature. The shift of the transmission window due to variations in the temperature allowed determining the a-SiN TOC: (6.2±0.1)×10-5 ºC-1 (at ~ 620 nm) and, (4.7±0.1)×10-5 ºC -1 (at ~ 1510 nm). To the best of our knowledge, the a-SiN TOC in the visible was determined for the first time in this work.

Apresentamos neste trabalho uma técnica alternativa para a obtenção de filmes finos de silício amorfo hidrogenado (&#945-Si:H). Nós depositamos &#945-Si:H em um sistema de deposição que utiliza descarga luminescente a baixas freqüências (60Hz). Para tanto, nós projetamos todo o reator para que este objetivo pudesse ser atingido. Os filmes obtidos por nós mostram propriedades ópticas e eletrônicas bastante próximas aquelas dos filmes produzidos pela técnica convencional de descarga luminescente a radiofreqüência (13,56 MHz). A temperatura do substrato ótima para a técnica de descarga luminescente a baixas freqüências está na faixa 150-170&#176C, em torno de 100&#176C menor do que aquela usada para radiofreqüência. Neste trabalho nós apresentamos medidas das propriedades dos filmes, incluindo condutividade no escuro, fotocondutividade, comprimento de difusão ambipolar, absorção no infra-vermelho, gap óptico, e densidade de defeitos de níveis profundos. Para realizar parte destas medidas, nós construímos sistemas experimentais de caracterização exclusivos para o &#945-Si:H. / In this work we present an alternative technique for producing hydrogenated amourphous silicon thin films (&#945-Si:H). We deposited &#945-Si:H in a low-frequency (60 Hz) glow-discharge deposition system. For this purpose, we designed completely the reactor. The films we produced show electronic and optical properties nearly equivalent to those of films prepared by the conventional radio-frequency (13,56 MHz) glow-discharge technique. The optimal substrate temperature for the low-frequency glow-discharge technique is 150-170&#176C, about 100&#176C lower than that radio-frequency. In this work, we report measurements of film properties, including dark conductivity, photoconductivity, ambipolar diffusion lenght, infrared absorption, optical band gap, and deep defect density. To do these measurements, we assembled experimental systems used to characterize &#945-Si:H.

This thesis investigates the possibility of enhancing the efficiency of thin film solar cells by including periodic material nonhomogeneities in combination with periodically corrugated back reflectors. Two different types of solar cell are investigated; p-i-n junctions solar cells made from alloys of hydrogenated amorphous silicon (a-Si:H) (containing either carbon or germanium), and Schottky barrier junction solar cells made from alloys of indium gallium nitride (InξGa1-ξN). Material nonhomogeneities are produced by varying the fractions of the constituent elements of the alloys. For example, by varying the content of carbon or germanium in the a-Si:H alloys, semiconductors with bandgaps ranging from 1:3 eV to 1:95 eV can be produced. Changing the bandgap alters both the optical and electrical properties of the material so this necessitates the use of coupled optical and electrical models. To date, the majority of solar cell simulations either prioritise the electrical portion of the simulation or they prioritise the optical portion of the simulation. In this thesis, a coupled optoelectronic model, developed using COMSOL Multiphysics®, was used to simulate solar cells: a two-dimensional finite-element optical model, which solved Maxwell's equations throughout the solar cells, was used to calculate the absorption of incident sunlight; and a finite-element electrical drift-diffusion transport model, either one- or two-dimensional depending on the symmetries of the problem, was used to calculate the steady state current densities throughout the solar cells under external voltage biases. It is shown that a periodically corrugated back reflector made from silver can increase efficiency of an a-Si:H alloy single p-i-n junction solar cell by 9:9% compared to a baseline design, while for a triple junction the improvement is a relatively meagre 1:8%. It is subsequently shown that the efficiency of these single p-i-n junction solar cells with a back reflector can be further increased by the inclusion of material nonhomogeneities, and that increasing the nonhomogeneity progressively increases efficiency, especially in thicker solar cells. In the case of InξGa1-ξN Schottky barrier junction solar cells, the gains are shown to be even greater. An overall increase in efficiency of up to 26:8% over a baseline design is reported.

Size reduction is a key issue in the development of contemporary integrated photonics. This thesis is mainly devoted to study some integrated photonic components in sub-wavelength or nanometric scales, both theoretically and experimentally. The possible approaches to reduce the sizes or to increase the functionalities of photonic components are discussed, including waveguides and devices based on silicon nanowires, photonic crystals, surface plasmons, and some near-field plasmonic components. First, some numerical methods, including the finite-difference time-domain method and the full-vectorial finite-difference mode solver, are introduced. The finite-difference time-domain method can be used to investigate the interaction of light fields with virtually arbitrary structures. The full-vectorial finite-difference mode solver is mainly used for calculating the eigenmodes of a waveguide structure. The fabrication and characterization technologies for nano-photonic components are reviewed. The fabrications are mainly based on semiconductor cleanroom facilities, which include thin film deposition, electron beam lithography, and etching. The characterization setups with the end-fire coupling and the vertical grating coupling are also described. Silicon nanowire waveguides and related devices are studied. Arrayed waveguide gratings with 11nm and 1.6nm channel spacing are fabricated and characterized. The dimension of these arrayed waveguide gratings is around 100 μm, which is 1--2 order of magnitude smaller than conventional silica based arrayed waveguide gratings. A compact polarization beam splitter employing positive/negative refraction based on a photonic crystal of silicon pillars is designed and demonstrated. Extinction ratio of ~15dB is achieved experimentally in a wide wavelength range. Surface plasmon waveguides and devices are analyzed theoretically. With surface plasmons the light field can be confined in a sub-wavelength dimension. Some related photonic devices, e.g., directional couplers and ring resonators, are studied. We also show that some ideas and principles of microwave devices, e.g., a branch-line coupler, can be borrowed for building corresponding surface plasmon based devices. Near-field plasmonic components, including near-field scanning optical microscope probes and left handed material slab lenses, are also analyzed. Some novel designs are introduced to enhance the corresponding systems. / QC 20100908