Scanning Probe Lithography (SPL) is a versatile nanofabrication platform that leverages microfluidic “ink” delivery systems with Scanning Probe Microscopy (SPM) for generating surface-patterned chemical functionality on the sub-100 nm length scale. One of the prolific SPL techniques is Dip Pen Nanolithography™ (DPN™). High resolution, multiplexed registration and parallel direct-write capabilities make DPN (and other SPL techniques) a power tool for applications that are envisioned in micro/nano-electronics, molecular electronics, catalysis, cryptography (brand protection), combinatorial synthesis (nano-materials discovery and characterization), biological recognition, genomics, and proteomics. One of the greatest challenges for the successful performance of the DPN process is the delivery of multiple inks to the scanning probe tips for nano-patterning. The purpose of the present work is to fabricate a microfluidic ink delivery device (called “Centiwell”) for DPN (and other SPL) applications. The device described in this study maximizes the number of chemical species (inks) for nanofabrication that can be patterned simultaneously by DPN to conform the industrial standards for fluid handling for biochemical assays (e.g., genomic and proteomic). Alternate applications of Centiwell are also feasible for the various envisioned applications of DPN (and other SPL techniques) that were listed above. The Centiwell consists of a two-dimensional array of 96 microwells that are bulk micromachined on a silicon substrate. A thermoelectric module is attached to the back side of the silicon substrate and is used to cool the silicon substrate to temperatures below the dew point. By reducing the temperature of the substrate to below the dew point, water droplets are condensed in the microwell array. Microbeads of a hygroscopic material (e.g., poly-ethylene glycol) are dispensed into the microwells to prevent evaporation of the condensed water. Furthermore, since poly-ethylene glycol (PEG) is water soluble, it forms a solution inside the microwells which is subsequently used as the ink for the DPN process. The delivery of the ink to the scanning probe tip is performed by dipping the tip (or multiple tips in an array) into the microwells containing the PEG solution. This thesis describes the various development steps for the Centiwell. These steps include the mask design, the bulk micromachining processes explored for the micro-fabrication of the microwell array, the thermal design calculations performed for the selection of the commercially available thermoelectric coolers, the techniques explored for the synthesis of the PEG microbeads, and the assembly of all the components for integration into a functional Centiwell. Finally, the successful implementation of the Centiwell for nanolithography of PEG solutions is also demonstrated.

A method offering precise control over the synthesis conditions to obtain carbon nanotube (CNT) samples of a single chirality (metallic or semi-conducting) is presented. Using this nanolithographic method of catalyst deposition, the location of CNT growth is also precisely defined. This technique obviates three significant hurdles that are preventing the exploitation of CNT in micro- and nano-devices. Microelectronic applications (e.g., interconnects, CNT gates, etc.) require precisely defined locations and spatial density, as well as precisely defined chirality for the synthesized CNT. Conventional CVD synthesis techniques typically yield a mixture of CNT (semi-conducting and metallic types) that grow at random locations on a substrate in high number density, which leads to extreme difficulty in application integration. Dip Pen Nanolithography (DPN) techniques were used to deposit the catalysts at precisely defined locations on a substrate and to precisely control the catalyst composition as well as the size of the patterned catalyst. After deposition of catalysts, a low temperature Chemical Vapor Deposition (CVD) process at atmospheric pressure was used to synthesize CNT. Various types of catalysts (Ni, Co, Fe, Pd, Pt, and Rh) were deposited in the form of metal salt solutions or nano-particle solutions. Various characterization studies before and after CVD synthesis of CNT at the location of the deposited catalysts showed that the CNT were of a single chirality (metallic or semiconducting) as well as a single diameter (with a very narrow range of variability). Additionally, X-ray photoelectron spectroscopy (XPS) was used to characterize the deposited samples before and after the CVD, as was lateral force microscopy (LFM) for determination of the successful deposition of the catalyst material immediately after DPN as well as following the CVD synthesis of the samples. The diameter of the CNT determines the chirality. The diameter of the CNT measured by TEM was found to be consistent with the chirality measurements obtained from Raman Spectroscopy for the different samples. Hence, the results showed that CNT samples of a single chirality can be obtained by this technique. The results show that the chirality of the synthesized CNT can be controlled by changing the synthesis conditions (e.g., size of the catalyst patterns, composition of the catalysts, temperature of CVD, gas flow rates, etc.).

A novel process which does not require the traditional Chemical Vapor Deposition (CVD) synthesis techniques and which works at temperatures lower than the conventional techniques was developed for synthesis of carbon nanotubes (CNT). The substrates used for this study involved MEMS (Micro Electrical Mechanical Systems) elements and passive elements. These were coated with Fullerene using Physical Vapor Deposition or through a solution in an organic solvent. Catalyst precursors were deposited on these Fullerene coated substrates using “wet processes”. These substrates were then heated using either the integrated microheaters or external heaters in an inert atmosphere to obtain CNT. Thus, in this process we tried to obviate the Chemical Vapor Deposition (CVD) process for synthesis of CNT (SWCNT and MWCNT). The synthesized CNT will be characterized using Scanning Electron Microscopy and Raman spectroscopy techniques. Also, conductivity measurements were carried out for the synthesized tubes using Dry (contact based) and Wet (electro-chemical) methods. This work also proves the concept for the feasibility for a portable hand held instrument for synthesis of CNT with tunable “on demand” chirality.

Mémoire numérisé par la Direction des bibliothèques de l'Université de Montréal.

Scanning probe microscopy (SPM) nanolithography has been found to be a powerful and low-cost approach for sub-100 nm patterning. In this thesis, the possibility of using a state-of-the-art SPM system to controllably deposit nanoparticles on patterned Si substrates with high positional control has been explored. These nanoparticles have a range of interesting properties and have been characterised by electron microscopy and scanning probe microscopy. The influence of different deposition parameters on the nanoparticle properties was studied. Contact mode atomic force microscopy (AFM)-based local oxidation nanolithography (LON) was used to oxidise sample surfaces. Two different substrates were studied which were native oxide silicon (Si) and molybdenum (Mo). A number of factors that influence the height and width of the oxide features were investigated in order to achieve the optimal oxidation efficiency. The height and width of the oxide structures were found to be strongly dependent on the applied voltage and scan speed. The tunneling AFM (TUNA) technique was used to measure the ultralow currents flowing between the tip and the sample during the oxidation process. It was found that a threshold voltage for our oxidation experiments was -4.0 ± 1.6 V applied to the tip when fabricating geometric patterns as well as 2.9 ± 1.6 V and 2.8 ± 2.2 V applied to the substrate for nanodot fabrication. In addition, comparisons of nanodot-array patterns produced with different AFM tips were studied. The influence of applied voltage, type of AFM tip and substrate, humidity and ramping time has been studied for dot formation providing a comparison between native oxide Si and Mo surfaces. The nanodot sizes were found to be clearly dependent on the applied voltage, type of substrate, relative humidity and ramping time. Dip-pen nanolithography (DPN) was used to study a direct deposition strategy for gold (Au) nanodot fabrication on a native oxide Si substrate. In this process, hydrogen tetrachloroaurate (HAuCl4) molecules were deposited onto the substrate via a molecular diffusion process, in the absence of electrochemical reactions. This approach allowed for the generation of Au dots on the SiO2 substrate without the need for surface modification or additional electrode structures. The dependence of the size of the Au dots on different „scanning coating‟ (SC) times of AFM tips was studied. A thermal annealing process was used to decompose the generated HAuCl4 molecular dots to leave Au (0) metal dots. A stereomicroscope has been used for preliminary observation of different steps of Au deposition treatments. A scanning electron microscope (SEM) was used to characterise the SC AFM tips both before and after the DPN process. SEM energy-dispersive X-ray spectroscopy (EDS) has provided information about the elemental content of deposited particles for different annealing temperatures. Fountain-pen nanolithography (FPN) has also been used to study nanowriting of HAuCl4 salt and a variety of solvents on a native oxide Si surface. In this technique, a nanopipette was mounted within an AFM to deliver appropriate solutions to the silica substrate. We found that an aqueous Au salt solution was the most suitable ink for depositing gold using the FPN technique. In the case of solvents alone, ethanol and toluene were achieved with depositing onto a SiO2 substrate using the FPN technique.

There is a need to discover advanced materials to address the pressing challenges facing humanity, however there are far too many combinations of material composition and processing conditions to explore using conventional experimentation. One powerful approach for accelerating the rate at which materials are explored is by miniaturizing the scale at which experiments take place. Reducing the size of samples has been tremendously productive in biomedicine and drug discovery through standardized formats such as microwell plates, and while these formats may not be the most appropriate for studying polymeric materials, they do highlight the advantages of studying materials in ultra-miniaturized volumes. However, precise and controlled methods for handling diverse samples at the sub-femtoliter-scale have not been demonstrated. In this thesis, we establish that scanning probes can be used as a technique for realizing and interrogating sub-femtoliter scale polymer samples. To do this, we develop and apply methods for patterning materials with control over their size and composition and then use these methods to study material systems of interest. First, we develop a closed-loop method for patterning liquid samples using scanning probes by utilizing tipless cantilevers capable of holding a discrete liquid drop together with an inertial mass sensing scheme to measure the amount of liquid loaded on the probe. Using these innovations, we perform patterning with better than 1% mass accuracy on the pL-scale. While dispensing fluid with tipless cantilevers is successful for patterning pL-scale features and can be considered a candidate for robust nanoscale manipulation of liquids for high-throughput sample preparation, the minimum amount of liquid that can be transferred using this method is limited by number of factors. Thus, in the second section of this thesis, we explore ultrafast cantilevers that feature spherical tips and find them capable of patterning aL-scale features with in situ feedback. The development of methods of interrogating polymers at the pL-scale led us to explore how the mechanical properties of photocurable polymers depend on processing conditions. Specifically, we investigate the degree to which oxygen inhibits photocrosslinking during vat polymerization and how this effect influences the mechanical properties of the final material. We explore this through a series of macroscopic compression studies and AFM-based indentation studies of the cured polymers. Ultimately, the mechanical properties of these systems are compared to pL-scale features patterned using scanning probe lithography and we find that not only does oxygen prevent full crosslinking when it is present during the post-print curing, but the presence of oxygen during printing itself irreversibly softens the material. In addition to developing new methods for realizing ultra-miniaturized samples for study, the novel scanning probe methods in this work have led to new paradigms for rapidly evaluating complex interactions between material systems. In particular, we present a novel method to quantitatively investigate the interaction between the metal-organic frameworks (MOFs) and polymers by attaching a single MOF particle to a cantilever and studying the interaction force between this MOF and model polymer surfaces. Using this approach, we find direct evidence supporting the intercalation of polymer chains into the pores of MOFs. This work lays the foundation for directly characterizing the facet-specific interactions between MOFs and polymers in a high-throughput manner sufficient to fuel a data-driven accelerated material discovery pipeline. Collectively, the focus of this thesis is the development and utilization of novel scanning probe methods to collect data on extremely small systems and advance our understanding of important classes of materials. We expect this thesis to provide the foundation needed to transform scanning probe systems into instruments for performing reliable nanochemistry by combining controlled and quantitative sample preparation at the nanoscale and high-throughput characterization of materials. To conclude, we present an outlook about the necessary technological advancements and promising directions for materials innovations that stem from this work.

The objective of this study is to develop a robust portable nano-calorimeter sensor for detection of energetic materials, primarily explosives, combustible materials and propellants. A micro-cantilever sensor array is actuated thermally using bi-morph structure consisting of gold (Au: 400 nm) and silicon nitride (Si3N4: 600 nm) thin film layers of sub-micron thickness. An array of micro-heaters is integrated with the microcantilevers at their base. On electrically activating the micro-heaters at different actuation currents the microcantilevers undergo thermo-mechanical deformation, due to differential coefficient of thermal expansion. This deformation is tracked by monitoring the reflected ray from a laser illuminating the individual microcantilevers (i.e., using the optical lever principle). In the presence of explosive vapors, the change in bending response of microcantilever is affected by the induced thermal stresses arising from temperature changes due to adsorption and combustion reactions (catalyzed by the gold surface). A parametric study was performed for investigating the optimum values by varying the thickness and length in parallel with the heater power since the sensor sensitivity is enhanced by the optimum geometry as well as operating conditions for the sensor (e.g., temperature distribution within the microcantilever, power supply, concentration of the analyte, etc.). Also, for the geometry present in this study the nano-coatings of high thermal conductivity materials (e.g., Carbon Nanotubes: CNTs) over the microcantilever surface enables maximizing the thermally induced stress, which results in the enhancement of sensor sensitivity. For this purpose, CNTs are synthesized by post-growth method over the metal (e.g., Palladium Chloride: PdCl2) catalyst arrays pre-deposited by Dip-Pen Nanolithography (DPN) technique. The threshold current for differential actuation of the microcantilevers is correlated with the catalytic activity of a particular explosive (combustible vapor) over the metal (Au) catalysts and the corresponding vapor pressure. Numerical modeling is also explored to study the variation of temperature, species concentration and deflection of individual microcantilevers as a function of actuation current. Joule-heating in the resistive heating elements was coupled with the gaseous combustion at the heated surface to obtain the temperature profile and therefore the deflection of a microcantilever by calculating the thermally induced stress and strain relationship. The sensitivity of the threshold current of the sensor that is used for the specific detection and identification of individual explosives samples - is predicted to depend on the chemical kinetics and the vapor pressure. The simulation results showed similar trends with the experimental results for monitoring the bending response of the microcantilever sensors to explosive vapors (e.g., Acetone and 2-Propanol) as a function of the actuation current.

This critical review summarizes recent developments in the fabrication of patterned polymer brushes. As top-down lithography reaches the length scale of a single macromolecule, the combination with the bottom-up synthesis of polymer brushes by surface-initiated polymerization becomes one main avenue to design new materials for nanotechnology. Recent developments in surface-initiated polymerizations are highlighted along with diverse strategies to create patterned polymer brushes on all length scales based on irradiation (photo- and interference lithography, electron-beam lithography), mechanical contact (scanning probe lithography, soft lithography, nanoimprinting lithography) and on surface forces (capillary force lithography, colloidal lithography, Langmuir–Blodgett lithography) (116 references). / Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.

The most commonly known macro scale probing devices are simply comprised of metallic leads used for measuring electrical signals. On the other hand, micromachined probing devices are realized using microfabrication techniques and are capable of providing very fine, micro/nano scale interaction with matter; along with a broad range of applications made possible by incorporating MEMS sensing and actuation techniques. Micromachined probes consist of a well-defined tip structure that determines the interaction space, and a transduction mechanism that could be used for sensing a change, imparting external stimuli or manipulating matter. Several micromachined probes intended for biological and nanotechnology applications were fabricated, characterized and tested. Probes were developed under two major categories. The first category consists of Micro Electromagnetic Probes for biological applications such as single cell, particle, droplet manipulation and neuron stimulation applications; whereas the second category targets novel Scanning Probe topologies suitable for direct nanopatterning, variable resolution scanning probe/dip-pen nanolithography, and biomechanics applications. The functionality and versatility of micromachined probes for a broad range of micro and nanotechnology applications is successfully demonstrated throughout the five different probes/applications that were studied. It is believed that, the unique advantages of precise positioning capability, confinement of interaction as determined by the probe tip geometry, and special sensor/actuator mechanisms incorporated through MEMS technologies will render micromachined probes as indispensable tools for microsystems and nanotechnology studies.

This critical review summarizes recent developments in the fabrication of patterned polymer brushes. As top-down lithography reaches the length scale of a single macromolecule, the combination with the bottom-up synthesis of polymer brushes by surface-initiated polymerization becomes one main avenue to design new materials for nanotechnology. Recent developments in surface-initiated polymerizations are highlighted along with diverse strategies to create patterned polymer brushes on all length scales based on irradiation (photo- and interference lithography, electron-beam lithography), mechanical contact (scanning probe lithography, soft lithography, nanoimprinting lithography) and on surface forces (capillary force lithography, colloidal lithography, Langmuir–Blodgett lithography) (116 references). / Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.