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Hafnium-doped tantalum oxide high-k gate dielectric films for future CMOS technologyLu, Jiang 25 April 2007 (has links)
A novel high-k gate dielectric material, i.e., hafnium-doped tantalum oxide (Hf-doped
TaOx), has been studied for the application of the future generation metal-oxidesemiconductor
field effect transistor (MOSFET). The film's electrical, chemical, and
structural properties were investigated experimentally. The incorporation of Hf into TaOx
impacted the electrical properties. The doping process improved the effective dielectric
constant, reduced the fixed charge density, and increased the dielectric strength. The
leakage current density also decreased with the Hf doping concentration. MOS capacitors
with sub-2.0 nm equivalent oxide thickness (EOT) have been achieved with the lightly
Hf-doped TaOx. The low leakage currents and high dielectric constants of the doped films
were explained by their compositions and bond structures. The Hf-doped TaOx film is a
potential high-k gate dielectric for future MOS transistors.
A 5 ÃÂ
tantalum nitride (TaNx) interface layer has been inserted between the Hf-doped
TaOx films and the Si substrate to engineer the high-k/Si interface layer formation and
properties. The electrical characterization result shows that the insertion of a 5 ÃÂ
TaNx
between the doped TaOx films and the Si substrate decreased the film's leakage current density and improved the effective dielectric constant (keffective) value. The improvement
of these dielectric properties can be attributed to the formation of the TaOxNy interfacial
layer after high temperature O2 annealing. The main drawback of the TaNx interface layer
is the high interface density of states and hysteresis, which needs to be decreased.
Advanced metal nitride gate electrodes, e.g., tantalum nitride, molybdenum nitride,
and tungsten nitride, were investigated as the gate electrodes for atomic layer deposition
(ALD) HfO2 high-k dielectric material. Their physical and electrical properties were
affected by the post metallization annealing (PMA) treatment conditions. Work functions
of these three gate electrodes are suitable for NMOS applications after 800ðC PMA.
Metal nitrides can be used as the gate electrode materials for the HfO2 high-k film.
The novel high-k gate stack structures studied in this study are promising candidates
to replace the traditional poly-Si-SiO2 gate stack structure for the future CMOS
technology node.
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Estudo de transistores SOI de múltiplas portas com óxidos de porta de alta constante dielétrica e eletrodo de porta metálico. / Study of SOI multiple gate transistors with gate oxide of high dieletric constant and metal gate electrode.Michele Rodrigues 30 November 2010 (has links)
Este trabalho tem como objetivo investigar o comportamento de transistores SOI de porta tripla com óxido de porta de alta constante dielétrica e eletrodo de porta de metal. Inicialmente estudou-se a aplicação dos métodos de extração de parâmetros através de curvas da capacitância, previamente desenvolvidos para estruturas SOI planares, em dispositivos de porta tripla com óxido de porta de háfnio (HfO2) e porta de metal com nitreto de titânio (TiN). Foram utilizados dispositivos com grandes dimensões, onde a influência das portas laterais pode ser desprezada, apresentando desta forma, um comportamento similar aos dispositivos com geometria planar. Simulações numéricas tridimensionais seguidas de medidas experimentais validam a utilização desses métodos em estruturas de múltiplas portas com grande largura de canal. A capacitância também foi utilizada para se analisar a influência que o efeito de canto exerce sobre estas estruturas de múltiplas portas. Na seqüência, foi investigado o impacto que a variação da espessura da porta de metal TiN causa nas características elétricas dos transistores SOI de porta tripla com óxido de porta de silicato de óxido de háfnio (HfSiO). Parâmetros como tensão de limiar, função de trabalho, mobilidade, cargas de interface assim como as características analógicas foram analisadas. Os resultados indicaram que camadas de TiN mais finas são mais atrativas, apresentando menor tensão de limiar e armadilhas de interface, assim como um aumento na mobilidade e no ganho intrínseco do transistor. Contudo uma maior corrente de fuga pelo óxido de porta é vista nestes dispositivos. Juntamente com esta análise, o comportamento de transistores de porta tripla com dielétrico de porta de silicato de óxido de háfnio nitretado (HfSiON) também foi estudado, onde observou-se um maior impacto nas cargas de interface para o óxido de háfnio nitretado. Contudo, o mesmo é capaz de reduzir a difusão de impurezas até o óxido de silício (SiO2) interfacial com o canal de silício. Finalmente transistores de porta tripla com diferentes composições de estrutura de porta foram estudados experimentalmente, onde uma camada de óxido de disprósio (Dy2O3) foi depositada entre o silicato de óxido de háfnio (HfSiO) e a porta de metal TiN. Observou-se uma redução na tensão de limiar nos dispositivos com o óxido de disprósio assim como uma variação na tensão de faixa plana. Em resumo, quando a camada de óxido de disprósio foi depositada dentro da porta de metal TiN, uma melhor interface foi obtida, assim como uma maior espessura de óxido efetivo, indicando desta forma uma menor corrente de fuga. / The main goal of this work is to investigate the behavior of SOI triple gate transistors with high dielectric constant gate oxide and metal gate material. Initially it was studied the application of process parameters extraction methods through capacitance curves, developed previously for planar SOI structures, in the triple-gate devices with hafnium gate oxide (HfO2) and metal gate of titanium nitride (TiN). Devices with larger dimensions were used, where the lateral gate influence can be neglected, presenting a planar behavior. Three-dimensional numerical simulations followed by experimental measurements validated the methods used in multiple-gate structures with wide channel width. The capacitance was also used in order to analyze the corner effect influence under these structures. In sequence, it was investigated the impact that the metal gate TiN thickness variation cause on the electric characteristics on the SOI triple gate transistors with silicate of hafnium oxide (HfSiO) as gate oxide. Beyond threshold voltage, work function, mobility, interface trap density and analog characteristics were analyzed. The results showed that thinner TiN are highly attractive, showing a reduction on the threshold voltage and trap density, an improved mobility and of the intrinsic gain of the transistor. However, an increase on the leakage current is observed in these devices. Together with this analyzes the behavior of triple gate transistors with gate dielectric of silicate of hafnium oxide nitrated (HfSiON) was also studied, where for the HfSiON a higher interface trap density impact was observed. Nevertheless it is efficient on the reduction impurity diffusion to cross until the silicon oxide (SiO2) that interfaces with the silicon channel. Finally, triple gate transistors with different gate stacks were experimentally studied, where a dysprosium oxide layer (Dy2O3) was deposited between the silicate of hafnium oxide (HfSiO) and the TiN metal gate. We observed a reduction in the threshold voltage of theses devices with dysprosium oxide as well as a variation of flatband voltage. In summary, when the dysprosium oxide layer was deposited inside the TiN metal gate, a better interface was obtained, as well as a higher effective oxide thickness, resulting in a lower leakage current.
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Estudo de transistores SOI de múltiplas portas com óxidos de porta de alta constante dielétrica e eletrodo de porta metálico. / Study of SOI multiple gate transistors with gate oxide of high dieletric constant and metal gate electrode.Rodrigues, Michele 30 November 2010 (has links)
Este trabalho tem como objetivo investigar o comportamento de transistores SOI de porta tripla com óxido de porta de alta constante dielétrica e eletrodo de porta de metal. Inicialmente estudou-se a aplicação dos métodos de extração de parâmetros através de curvas da capacitância, previamente desenvolvidos para estruturas SOI planares, em dispositivos de porta tripla com óxido de porta de háfnio (HfO2) e porta de metal com nitreto de titânio (TiN). Foram utilizados dispositivos com grandes dimensões, onde a influência das portas laterais pode ser desprezada, apresentando desta forma, um comportamento similar aos dispositivos com geometria planar. Simulações numéricas tridimensionais seguidas de medidas experimentais validam a utilização desses métodos em estruturas de múltiplas portas com grande largura de canal. A capacitância também foi utilizada para se analisar a influência que o efeito de canto exerce sobre estas estruturas de múltiplas portas. Na seqüência, foi investigado o impacto que a variação da espessura da porta de metal TiN causa nas características elétricas dos transistores SOI de porta tripla com óxido de porta de silicato de óxido de háfnio (HfSiO). Parâmetros como tensão de limiar, função de trabalho, mobilidade, cargas de interface assim como as características analógicas foram analisadas. Os resultados indicaram que camadas de TiN mais finas são mais atrativas, apresentando menor tensão de limiar e armadilhas de interface, assim como um aumento na mobilidade e no ganho intrínseco do transistor. Contudo uma maior corrente de fuga pelo óxido de porta é vista nestes dispositivos. Juntamente com esta análise, o comportamento de transistores de porta tripla com dielétrico de porta de silicato de óxido de háfnio nitretado (HfSiON) também foi estudado, onde observou-se um maior impacto nas cargas de interface para o óxido de háfnio nitretado. Contudo, o mesmo é capaz de reduzir a difusão de impurezas até o óxido de silício (SiO2) interfacial com o canal de silício. Finalmente transistores de porta tripla com diferentes composições de estrutura de porta foram estudados experimentalmente, onde uma camada de óxido de disprósio (Dy2O3) foi depositada entre o silicato de óxido de háfnio (HfSiO) e a porta de metal TiN. Observou-se uma redução na tensão de limiar nos dispositivos com o óxido de disprósio assim como uma variação na tensão de faixa plana. Em resumo, quando a camada de óxido de disprósio foi depositada dentro da porta de metal TiN, uma melhor interface foi obtida, assim como uma maior espessura de óxido efetivo, indicando desta forma uma menor corrente de fuga. / The main goal of this work is to investigate the behavior of SOI triple gate transistors with high dielectric constant gate oxide and metal gate material. Initially it was studied the application of process parameters extraction methods through capacitance curves, developed previously for planar SOI structures, in the triple-gate devices with hafnium gate oxide (HfO2) and metal gate of titanium nitride (TiN). Devices with larger dimensions were used, where the lateral gate influence can be neglected, presenting a planar behavior. Three-dimensional numerical simulations followed by experimental measurements validated the methods used in multiple-gate structures with wide channel width. The capacitance was also used in order to analyze the corner effect influence under these structures. In sequence, it was investigated the impact that the metal gate TiN thickness variation cause on the electric characteristics on the SOI triple gate transistors with silicate of hafnium oxide (HfSiO) as gate oxide. Beyond threshold voltage, work function, mobility, interface trap density and analog characteristics were analyzed. The results showed that thinner TiN are highly attractive, showing a reduction on the threshold voltage and trap density, an improved mobility and of the intrinsic gain of the transistor. However, an increase on the leakage current is observed in these devices. Together with this analyzes the behavior of triple gate transistors with gate dielectric of silicate of hafnium oxide nitrated (HfSiON) was also studied, where for the HfSiON a higher interface trap density impact was observed. Nevertheless it is efficient on the reduction impurity diffusion to cross until the silicon oxide (SiO2) that interfaces with the silicon channel. Finally, triple gate transistors with different gate stacks were experimentally studied, where a dysprosium oxide layer (Dy2O3) was deposited between the silicate of hafnium oxide (HfSiO) and the TiN metal gate. We observed a reduction in the threshold voltage of theses devices with dysprosium oxide as well as a variation of flatband voltage. In summary, when the dysprosium oxide layer was deposited inside the TiN metal gate, a better interface was obtained, as well as a higher effective oxide thickness, resulting in a lower leakage current.
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Zirconium-doped tantalum oxide high-k gate dielectric filmsTewg, Jun-Yen 17 February 2005 (has links)
A new high-k dielectric material, i.e., zirconium-doped tantalum oxide (Zr-doped TaOx), in the form of a sputter-deposited thin film with a thickness range of 5-100 nm, has been studied. Important applications of this new dielectric material include the gate dielectric layer for the next generation metal-oxide-semiconductor field effect transistor (MOSFET). Due to the aggressive device scaling in ultra-large-scale integrated circuitry (ULSI), the ultra-thin conventional gate oxide (SiO2) is unacceptable for many practical reasons. By replacing the SiO2 layer with a high dielectric constant material (high-k), many of the problems can be solved. In this study, a novel high-k dielectric thin film, i.e., TaOx doped with Zr, was deposited and studied. The films electrical, chemical, and structural properties were investigated experimentally. The Zr dopant concentration and the thermal treatment condition were studied with respect to gas composition, pressure, temperature, and annealing time. Interface layer formation and properties were studied with or without an inserted thin tantalum nitride (TaNx) layer. The gate electrode material influence on the dielectric properties was also investigated. Four types of gate materials, i.e., aluminum (Al), molybdenum (Mo), molybdenum nitride (MoN), and tungsten nitride (WN), were used in this study. The films were analyzed with ESCA, XRD, SIMS, and TEM. Films were made into MOS capacitors and characterized using I-V and C-V curves. Many promising results were obtained using this kind of high-k film. It is potentially applicable to future MOS devices.
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Zirconium-doped tantalum oxide high-k gate dielectric filmsTewg, Jun-Yen 17 February 2005 (has links)
A new high-k dielectric material, i.e., zirconium-doped tantalum oxide (Zr-doped TaOx), in the form of a sputter-deposited thin film with a thickness range of 5-100 nm, has been studied. Important applications of this new dielectric material include the gate dielectric layer for the next generation metal-oxide-semiconductor field effect transistor (MOSFET). Due to the aggressive device scaling in ultra-large-scale integrated circuitry (ULSI), the ultra-thin conventional gate oxide (SiO2) is unacceptable for many practical reasons. By replacing the SiO2 layer with a high dielectric constant material (high-k), many of the problems can be solved. In this study, a novel high-k dielectric thin film, i.e., TaOx doped with Zr, was deposited and studied. The films electrical, chemical, and structural properties were investigated experimentally. The Zr dopant concentration and the thermal treatment condition were studied with respect to gas composition, pressure, temperature, and annealing time. Interface layer formation and properties were studied with or without an inserted thin tantalum nitride (TaNx) layer. The gate electrode material influence on the dielectric properties was also investigated. Four types of gate materials, i.e., aluminum (Al), molybdenum (Mo), molybdenum nitride (MoN), and tungsten nitride (WN), were used in this study. The films were analyzed with ESCA, XRD, SIMS, and TEM. Films were made into MOS capacitors and characterized using I-V and C-V curves. Many promising results were obtained using this kind of high-k film. It is potentially applicable to future MOS devices.
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