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<p>Scanning transmission x-ray microscopes (STXM) focus monochromatic x-rays into an intense sub-30 nm diameter spot. Samples are then positioned at the focal plane and raster scanned through the spot while the transmitted x-rays are acquired to build up images at x-ray photon energies. In addition, x-ray absorption spectroscopy (XAS) can be performed by recording image sequences over a photon energy range of interest. STXMs excel at characterizing thin sections of inhomogeneous soft matter with their combination of high spatial (<30 nm) and photon energy (<0.1 eV) resolution. However, the overarching theme of this thesis is to apply the intense, tightly focused spot of x-rays to induce spatially resolved chemical and physical changes, and directly pattern materials, primarily thin polymer films. The irradiated areas are then investigated using several types of microscopy (scanning transmission x-ray, atomic force, scanning electron) and XAS. The experiments cover three broad areas: i) Nanofabrication; realization of the smallest possible feature sizes, and fabrication schemes unique to focused x-rays with applications including nanofluidics. ii) Radiation chemistry and physics; investigating the mechanisms of radiation-induced processes such as bond formation/loss, morphological change, carbon contamination, and temperature increase. iii) X-ray optics; the spatial distribution of x-rays at a focal plane can be recorded in a thin polymer film and later read out using an atomic force microscope. Applications include feedback for optics fabrication and enhanced image processing, the ultimate goal being increased spatial resolution.</p> / Doctor of Philosophy (PhD)

The study of nanomaterials is a developing science with potentially large benefits in the development of catalysts, optical and chemical sensors, and solid state memory devices. As several of these devices require large arrays of nanoparticles, one of the greatest obstacles in material characterization and device development is the reliable manufacture of nanopatterns over a large surface area. In addition, various applications require different nanoparticle size and density. High density arrays with small nanoparticle sizes are difficult to achieve over a large surface area using current manufacturing processes. Herein, Nanoimprint Lithography (NIL) and Dynamic Templating are combined to create a new manufacturing process capable of developing high density arrays with small nanoparticle sizes. The NIL process involves the stamping of a polymer coated substrate by a silicon stamp with patterned nanofeatures. The stamp is then removed, leaving the pattern in the polymer, which is first etched and then coated with a thin layer of metal, filling the recessed regions of the pattern. The excess polymer is dissolved, leaving a pattern of nanoparticles on the substrate matching the pattern on the stamp. When Dynamic Templating is applied, a very thin layer of metal can be coated, which forms small nanoparticle sizes when dewetted. A custom NIL system has been developed to combine these two processes together, which has now proven to yield consistent large-area, dense arrays with a small nanoparticle size. An array spacing of 700 nm has been achieved, along with a nanoparticle size of 90 nm. Arrays have been created in gold and palladium, where there is now the potential to combine them with other solution-based syntheses which should lead to complex nanoparticle geometries suitable for sensor applications. / Mechanical Engineering

Incorporation of silver nanoparticles (AgNPs) into an increasing number of consumer products has led to concern over the potential ecological impacts of their unintended release to the environment. Dissolution is an important environmental transformation that affects the form and concentration of AgNPs in natural waters; however, studies on AgNP dissolution kinetics are complicated by nanoparticle aggregation. Herein, nanosphere lithography (NSL) was used to fabricate uniform arrays of AgNPs immobilized on glass substrates. Nanoparticle immobilization enabled controlled evaluation of AgNP dissolution in an air-saturated phosphate buffer (pH 7, 25 °C) under variable NaCl concentrations in the absence of aggregation. Atomic force microscopy (AFM) was used to monitor changes in particle morphology and dissolution. Over the first day of exposure to ≥10 mM NaCl, the in-plane AgNP shape changed from triangular to circular, the sidewalls steepened, and the height increased by 6-12 nm. Subsequently, particle height and in-plane radius decreased at a constant rate over a 2-week period. Dissolution rates varied linearly from 0.4 to 2.2 nm/d over the 10-550 mM NaCl concentration range tested. NaCl-catalyzed dissolution of AgNPs may play an important role in AgNP fate in saline waters and biological media. This study demonstrates the utility of NSL and AFM for the direct investigation of un-aggregated AgNP dissolution. / Master of Science

Metal-based nanoparticles (MNPs) are becoming increasingly common in commercial products. Release of these materials into the environment raises concerns about the potential risks they pose to aquatic life. Predicting these risks requires an understanding of MNPs' chemical transformations. In this study, arrays of immobilized MNPs fabricated by nanosphere lithography (NSL) were used to investigate environmental transformations of MNPs. Specifically, sulfidation of silver nanoparticles (Ag NPs) and dissolution of copper-based nanoparticles (Cu NPs) were investigated. Atomic force microscopy (AFM) and transmission electron microscopy were the primary analytical techniques for these investigations. Because the MNPs were immobilized on a solid surface, the samples were field deployable, environmentally relevant metal concentrations were maintained, and the confounding influence of MNP aggregation was eliminated. Ag NP samples were deployed in a full-scale wastewater treatment plant. Sulfidation occurred almost exclusively in anaerobic zones of the WWTP, where the initial sulfidation rate was 11-14 nm of Ag converted to Ag2S per day. Conversion to Ag2S was complete within 7-10 d. Dissolution rates of Cu-based NPs were measured in situ over a range of pH by flow-cell AFM. Based on the measured rates, CuO/Cu(OH)2 NPs dissolve completely within a matter of hours at any pH, metallic Cu NPs persist for a few hours to days, and CuxS NPs do not dissolve significantly over the time scales studied. Field deployment of samples in a freshwater stream confirmed these conclusions for a natural aquatic system. This research demonstrates that environmental transformations of MNPs will be a key factor in determining the ultimate form and concentration of NPs that aquatic organisms will be exposed to. / Ph. D.

Scanning Electrochemical Microscopy (SECM) is most commonly used to spatially resolve reaction rates, image surface topography and surface reactivity. In this research, SECM is applied to various chemical systems in order to resolve local reaction chemistry and to produce patterns with dimensions of tens of microns in n-alkanethiol passivated gold substrates. Upon completing construction of the instrumentation, SECM was applied to capillary electrophoresis to accurately and reproducibly place the electrode directly above a very small capillary opening. Feedback SECM was then used to image and pattern surfaces, effectively distinguishing between insulating and conductive domains. Finally, the size of desorbed features patterned on a passivated gold substrate were studied as a function of both applied potential and ionic strength. Electrochemical detection in capillary electrophoresis requires decoupling the voltage applied to the working electrode from the separation voltage applied across the capillary. End-capillary electrochemical detection achieves this by placing the electrode just outside the ground end of the separation capillary. Obtaining adequate signal-to-noise in this arrangement requires using small inner diameter capillaries. Decreasing the inner diameter of the separation capillary, however, increases the difficulty of aligning the microelectrode with the open end of the capillary. Using SECM, the position of the capillary opening is determined while electroactive material is continuously emerging from the end of the capillary. The SECM instrument is then used to place the electrode at the position of maximum current for subsequent separations. Subsequent measurements found that the best signal-to-noise is obtained when the detection electrode is placed directly opposite the capillary opening and just outside of the capillary opening. When the electrode is further above the opening (but still opposite the capillary opening), the signal-to-noise does not dramatically decrease until the electrode is more than 30 μm above the 10 μm inner-diameter capillary. Limits of detection for 2,3-dihydroxybenzoic acid were found to be 8.2 fmol when aligned manually, and 3.8 fmol when the SECM is used to automatically align the microelectrode. SECM was then used to image a series of multi-disk electrode arrays in order to demonstrate the ability of the instrument to discriminate between conductive and insulating domains. Upon demonstrating the capacity of the SECM to image very small domains of conductor on an insulating substrate, n-alkanethiol passivated gold surfaces were patterned using site-selective desorption. A number patterns, potentially useful for enzyme deposition, were subsequently produced in the passivated gold substrate. The feature size of the desorbed domains was monitored as a function of applied potential and the ionic strength of the solution used for desorption. Results showed that applying a more negative potential or increasing the ionic strength of the solution increased the magnitude of the electric field at the surface of the passivated gold substrate and resulted in a more complete, larger desorption. Both ionic strength and applied desorption potential prove to be parameters useful for controlling the size of patterned features in site selective desorption. / Master of Science

The environmental fate and transport of engineered nanomaterials have been broadly investigated and evaluated in many published studies. Silver nanoparticles (AgNPs) represent one of the most widely manufactured nanomaterials. They are currently being incorporated into a wide range of consumer products due to their purported antimicrobial properties. However, either the AgNPs themselves or dissolved Ag+ ions has a significant potential for the environmental release. The safety issues for nanoparticles are continuously being tested because of their potential danger to the environment and human health. Studies have explored the toxicity of AgNPs to a variety of organisms and have shown such toxicity is primarily driven by Ag+ ion release. Dissolution of nanoparticles is an important process that alters their properties and is a critical step in determining their safety. Therefore, studying nanoparticles' dissolution can help in the current move towards safer design and application of nanoparticles. This research endeavor sought to acquire comprehensive kinetic data of AgNP dissolution to aid in the development of quantitative risk assessments of AgNP fate. To evaluate the dissolution process in the absence of nanoparticle aggregation, AgNP arrays were produced on glass substrates using nanosphere lithography (NSL). Changes in the size and shape of the prepared AgNP arrays were monitored during the dissolution process by atomic force microscopy (AFM). The dissolution of AgNP is affected by both internal and external factors. First, surface coating effects were investigated by using three different coating agents (BSA, PEG1000, and PEG5000). Capping agent effects nanoparticle transformation rate by blocking reactants from the nanoparticle surface. Coatings prevented dissolution to different extents due to the various way they were attached to the AgNP surface. Evidence for the existence of bonds between the coating agents and the AgNPs was obtained by surface enhanced Raman spectroscopy. Moreover, to study the size effects on AgNP dissolution, small, medium, and large sized AgNPs were used. The surrounding medium and temperature were the two variables that were included in the size effects study. Relationships were established between medium concentration and dissolution rate for three different sized AgNP samples. By using the Arrhenius equation to plot the reaction constant vs. reaction temperature, the activation energy of AgNPs of different sizes were obtained and compared. / Doctor of Philosophy / Nanomaterials, defined as materials with at least one characteristic dimension less than 100 nm, often have useful attributes that are distinct from the bulk material. The novel physical, chemical, and biological properties enable the promising applications in various manufacturing industry. Silver nanoparticles (AgNPs) represent one of the most widely manufactured nanomaterials and has been used as the antimicrobial agent in a wide range of consumer products. However, either the AgNPs themselves or dissolved Ag+ ions has a significant potential for the environmental release. The environmental fate and transport of AgNPs drawn considerable attentions because of the potential danger to environment and human health. Dissolution of nanoparticles is an important process that alters their properties and is a critical step in determining their safety. Ag+ ions migrate from the nanoparticle surface to the bulk solution when an AgNP dissolves. Studying nanoparticles' dissolution can help in the current move towards safer design and application of nanoparticles. This research aimed to acquire comprehensive kinetic data of AgNP dissolution to aid in the development of quantitative risk assessments of AgNP fate. AgNP arrays were produced on glass substrates using nanosphere lithography (NSL) and changes in the size and shape during the dissolution process were monitored by atomic force microscopy (AFM). First, surface coating effects were investigated by using three different coating agents. Coatings prevented dissolution to different extents due to the various way they were attached to the AgNP surface. Moreover, small, medium, and large sized AgNPs were used to study the size effects on AgNP dissolution. The surrounding medium concentration and temperature were the two variables that were included in the size effects study.

Sub-micron patterning is fundamental to the fabrication of numerous devices Traditional commercial manufacturing methods either lack the resolution needed to attain the appropriate size or are prohibitively expensive due to low throughput or the necessity of expensive equipment. Imprint lithography is a rapid, inexpensive alternative to making sub-micron features that can be tailored to work with a variety of materials. Imprint lithography, while traditionally used with pure polymers has been tailored to be used with nanoparticle-polymer hybrid films. This work has achieved high-fidelity pattern transfer onto polymer-nanoparticle hybrid films with feature sizes as small as 250 nm. The polymer-nanoparticle hybrid was fabricated by creating a liquid suspension of functionalized ZnO nanoparticles and poly(methyl methacrylate) (PMMA) in a solvent. The ZnO particles were functionalized by adding nonanoic acid in order to facilitate the dispersion of the particles in a non-polar solvent. This suspension was spread onto substrate, imprinted with a patterned stamp, allowed to dry, and was demolded. The final result was features ranging from 250 nm to 1 μm in size with good fidelity as determined by the accuracy of the feature replication and the surface roughness of the overall sample. The effect of the ZnO content as well as the method of combining the suspension components on the feature fidelity was studied. In general, it was found that feature fidelity is acceptable up to a dry-film composition of 15 vol% ZnO and that feature sizes above 500 nm were more tolerant of higher solids loading. The same imprint lithography method was also used to pattern a polymer-derived SiOC glass. The SiOC was shown to be have interesting shrinkage properties where the feature-level linear shrinkage was up to 5% more than that of the bulk. The features were shown to be stable during pyrolysis up to 1000°C and stable at operating temperatures up to 1000°C. A constant number Monte Carlo simulation was used to describe the suspension behavior to confirm the empirical results from the physical experiments. The effects of Van der Waals forces, steric stabilization, depletion flocculation, as well as the physical impediment of entangled polymer chains were considered. A similar agglomeration behavior was shown in the simulations compared to the physical experiments. This thesis shows that polymer-nanoparticle hybrid films are a compatible material for imprint lithography using appropriate suspension parameters. This is very important for a variety of applications and devices. Using imprint lithography to make these devices makes them cheaper and more accessible to the commercial market and can make a large number of theoretical devices a reality. / Ph. D. / Sub-micron patterning is an integral part of making many modern technologies such as memory storage devices or integrated circuits. As this technology becomes smaller and smaller, the limiting factor for making these devices has become the ability to manufacture effectively at the appropriate scale. Traditional commercial manufacturing methods lack the resolution needed to attain small enough features. Manufacturing methods that can make small enough features are often either extremely expensive or offer incomplete control of the feature morphology. Imprint lithography is a high-throughput, inexpensive alternative to making sub-micron features that can be tailored to work with a variety of materials. Imprint lithography is simple process in which a patterned stamp is pressed into a softened film of material in order to transfer the pattern of the stamp onto that material. Traditionally, imprint lithography works best with polymers and researchers have struggled to pattern nanoparticle-based materials. This work has achieved high-fidelity pattern transfer onto polymer-nanoparticle hybrid films with feature sizes on the same order as the polymer films found reported in literature. The polymer-nanoparticle hybrid was realized by creating a liquid suspension of functionalized ZnO nanoparticles and poly(methyl methacrylate) (PMMA) in a solvent. The ZnO particles were functionalized by adding nonanoic acid, allowing the normally polar particles to disperse in the non-polar solvent needed to dissolve the PMMA. This suspension was spread onto a glass substrate, imprinted with a patterned stamp, allowed to dry, and was demolded. The final result was the successful transfer of features ranging from 250 nm to 1 μm in size with good fidelity. The effect of the ZnO content as well as the method of combining the suspension components on the feature fidelity was studied. To help prove the broad applicability of this imprint method, it was adapted for use with polymer-derived ceramics. Additionally, a computer simulation was developed to help understand the behavior of the nanoparticle-polymer suspension during the imprint process.