Extreme ultraviolet lithography(EUVL) is being developed worldwide as the next generation technology to be inserted in ~ 2009 for the mass production of IC chips with feature sizes <35 nm. One major challenge to its implementation is the development of a 13.5 nm EUV source of radiation that meets the requirements of current roadmap designs of the source of illumination in commercial EUVL scanners. The light source must be debris-free, in a free-space environment with the imaging EUV optics that must provide sufficient, narrow spectral band EUV power to print 100 wafers/hr. To meet this need, extensive studies on emission from a laser plasma source utilizing tin-doped droplet target was conducted. Presented in this work, are the many optical techniques such as spectroscopy, radiometry, and imaging, that were employed to characterize and optimize emission from the laser plasma source State of the art EUV spectrographs were employed to observe the source's spectrum under various laser irradiation conditions. Comparing the experimental spectra to those from theory, has allowed the determination of the Sn ion stages responsible for emitting into the useful EUV bandwidth. Experimental results were compared to spectral simulations obtained using Collisional-Radiative Equilibrium (CRE) model, as well. Moreover, extensive measurements surveying source emission from 2 nm to 30 nm, which is the region of the electromagnetic spectrum defined as EUV, was accomplished. Absolutely calibrated metrology was employed with the Flying Circus instrument from which the source's conversion efficiency (CE)--from laser to the useful EUV energy--was characterized under various laser irradiation conditions. Hydrodynamic simulations of the plasma expansion together with the CRE model predicted the condition at which optimum conversion could be attained. The condition was demonstrated experimentally, with the highest CE to be slightly above 2%, which is the highest value among all EUV source contenders. In addition to laser intensity, the CE was found to depend on the laser wavelength. For better understanding, this observation is compared to results from simulations. Through a novel approach in imaging, the size of the plasma was characterized by recording images of the plasma within a narrow band, around 13.5 nm. The size, approximately 100 ìm, is safely within the etendue limit set by the optical elements in the EUV scanner. Finally, the notion of irradiating the target with multiple laser beams was explored for the possibility of improving the source's conversion efficiency.

With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region (5nm - 40nm) of the electromagnetic spectrum is currently being explored for applications of nanoscale printing and imaging. Advances made in this area have consequences for many areas of science. Research for producing a compact, bright EUV source for laboratory use has gained momentum in recent years. For this study, EUV radiation is produced by irradiating target materials using a focused laser beam. Focused laser beam ionizes the target to create a hot, dense, pulsed plasma source, where emission is a result of the relaxation of excited levels. Spectroscopy is used as the main diagnostic to obtain the spectral signature of the plasma. Spectral characteristics are used to deduce the physical state of plasma, thus enabling the tuning of laser irradiance conditions to maximize the needed emission bandwidth. Various target materials are studied, as well as different target geometries, with spectroscopy below 200 nm on pulsed micro-plasmas being a particularly daunting task. Total range spectroscopy from 1 nm to greater than 1 micron is completed for tin-doped spherical droplet plasma source. Reliable plasma diagnostics require both accurate measurements and solid theoretical support in order to interpret the experimental results. Using existing 1D-hydrocode, temperature and density characteristics of the expanding plasma is simulated for any set of experimental conditions. Existing atomic codes written for calculating one-electron radial wavefunctions with LS-coupling scheme via Hartree-Fock method is used in order to gain details of the ion stages, populations, transitions, etc, contributing to the spectral data.

This thesis presents results on the theoretical description of ion acceleration using ultra-short ultra-intense laser pulses. It consists of two parts. One deals with the very general and underlying description and theoretic modeling of the laser interaction with the plasma, the other part presents three approaches of optimizing the ion acceleration by target geometry improvements using the results of the first part. In the first part, a novel approach of modeling the electron average energy of an over-critical plasma that is irradiated by a few tens of femtoseconds laser pulse with relativistic intensity is introduced. The first step is the derivation of a general expression of the distribution of accelerated electrons in the laboratory time frame. As is shown, the distribution is homogeneous in the proper time of the accelerated electrons, provided they are at rest and distributed uniformly initially. The average hot electron energy can then be derived in a second step from a weighted average of the single electron energy evolution. This result is applied exemplary for the two important cases of infinite laser contrast and square laser temporal profile, and the case of an experimentally more realistic case of a laser pulse with a temporal profile sufficient to produce a preplasma profile with a scale length of a few hundred nanometers prior to the laser pulse peak. The thus derived electron temperatures are in excellent agreement with recent measurements and simulations, and in particular provide an analytic explanation for the reduced temperatures seen both in experiments and simulations compared to the widely used ponderomotive energy scaling. The implications of this new electron temperature scaling on the ion acceleration, i.e. the maximum proton energy, are then briefly studied in the frame of an isothermal 1D expansion model. Based on this model, two distinct regions of laser pulse duration are identified with respect to the maximum energy scaling. For short laser pulses, compared to a reference time, the maximum ion energy is found to scale linearly with the laser intensity for a simple flat foil, and the most important other parameter is the laser absorption efficiency. In particular the electron temperature is of minor importance. For long laser pulse durations the maximum ion energy scales only proportional to the square root of the laser peak intensity and the electron temperature has a large impact. Consequently, improvements of the ion acceleration beyond the simple flat foil target maximum energies should focus on the increase of the laser absorption in the first case and the increase of the hot electron temperature in the latter case. In the second part, exemplary geometric designs are studied by means of simulations and analytic discussions with respect to their capability for an improvement of the laser absorption efficiency and temperature increase. First, a stack of several foils spaced by a few hundred nanometers is proposed and it is shown that the laser energy absorption for short pulses and therefore the maximum proton energy can be significantly increased. Secondly, mass limited targets, i.e. thin foils with a finite lateral extension, are studied with respect to the increase of the hot electron temperature. An analytical model is provided predicting this temperature based on the lateral foil width. Finally, the important case of bent foils with attached flat top is analyzed. This target geometry resembles hollow cone targets with flat top attached to the tip, as were used in a recent experiment producing world record proton energies. The presented analysis explains the observed increase in proton energy with a new electron acceleration mechanism, the direct acceleration of surface confined electrons by the laser light. This mechanism occurs when the laser is aligned tangentially to the curved cone wall and the laser phase co-moves with the energetic electrons. The resulting electron average energy can exceed the energies from normal or oblique laser incidence by several times. Proton energies are therefore also greatly increased and show a theoretical scaling proportional to the laser intensity, even for long laser pulses.

This thesis presents results on the theoretical description of ion acceleration using ultra-short ultra-intense laser pulses. It consists of two parts. One deals with the very general and underlying description and theoretic modeling of the laser interaction with the plasma, the other part presents three approaches of optimizing the ion acceleration by target geometry improvements using the results of the first part. In the first part, a novel approach of modeling the electron average energy of an over-critical plasma that is irradiated by a few tens of femtoseconds laser pulse with relativistic intensity is introduced. The first step is the derivation of a general expression of the distribution of accelerated electrons in the laboratory time frame. As is shown, the distribution is homogeneous in the proper time of the accelerated electrons, provided they are at rest and distributed uniformly initially. The average hot electron energy can then be derived in a second step from a weighted average of the single electron energy evolution. This result is applied exemplary for the two important cases of infinite laser contrast and square laser temporal profile, and the case of an experimentally more realistic case of a laser pulse with a temporal profile sufficient to produce a preplasma profile with a scale length of a few hundred nanometers prior to the laser pulse peak. The thus derived electron temperatures are in excellent agreement with recent measurements and simulations, and in particular provide an analytic explanation for the reduced temperatures seen both in experiments and simulations compared to the widely used ponderomotive energy scaling. The implications of this new electron temperature scaling on the ion acceleration, i.e. the maximum proton energy, are then briefly studied in the frame of an isothermal 1D expansion model. Based on this model, two distinct regions of laser pulse duration are identified with respect to the maximum energy scaling. For short laser pulses, compared to a reference time, the maximum ion energy is found to scale linearly with the laser intensity for a simple flat foil, and the most important other parameter is the laser absorption efficiency. In particular the electron temperature is of minor importance. For long laser pulse durations the maximum ion energy scales only proportional to the square root of the laser peak intensity and the electron temperature has a large impact. Consequently, improvements of the ion acceleration beyond the simple flat foil target maximum energies should focus on the increase of the laser absorption in the first case and the increase of the hot electron temperature in the latter case. In the second part, exemplary geometric designs are studied by means of simulations and analytic discussions with respect to their capability for an improvement of the laser absorption efficiency and temperature increase. First, a stack of several foils spaced by a few hundred nanometers is proposed and it is shown that the laser energy absorption for short pulses and therefore the maximum proton energy can be significantly increased. Secondly, mass limited targets, i.e. thin foils with a finite lateral extension, are studied with respect to the increase of the hot electron temperature. An analytical model is provided predicting this temperature based on the lateral foil width. Finally, the important case of bent foils with attached flat top is analyzed. This target geometry resembles hollow cone targets with flat top attached to the tip, as were used in a recent experiment producing world record proton energies. The presented analysis explains the observed increase in proton energy with a new electron acceleration mechanism, the direct acceleration of surface confined electrons by the laser light. This mechanism occurs when the laser is aligned tangentially to the curved cone wall and the laser phase co-moves with the energetic electrons. The resulting electron average energy can exceed the energies from normal or oblique laser incidence by several times. Proton energies are therefore also greatly increased and show a theoretical scaling proportional to the laser intensity, even for long laser pulses.