This dissertation presents several studies relating to fundamental characterization of CMP consumables in planarization processes. These are also evaluated with the purposes of minimizing environmental impact and reducing cost of ownership (COO).The first study is conducted to obtain the retaining ring wear rate in a typical ILD CMP process and is specifically intended to investigate the effect of retaining ring materials and slot designs during the CMP process. The results show that retaining ring materials have effect on the COF, pad temperature and retaining ring wear rate, while retaining ring slot designs affect the pad surface abruptness. The second study is performed to compare the effect of different retaining ring slot designs on the slurry film thickness within the pad-wafer interface. A novel non-intrusive optical technique, dual emission UV-enhanced fluorescence (DEUVEF), was applied to accurately measure the film thickness of the slurry underneath the wafer during polishing. It is indicated that the optimized retaining ring slot design can significantly reduce the COO of CMP processes by increasing slurry utilization.A COF method is applied to measure the slurry mean residence time (MRT) during CMP. This technique uses transient COF data induced by a shift in slurry concentration to determine MRT. Variations in consumables as well as sliding velocity, pressure and slurry flow rate can affect the slurry MRT. One study in this dissertation focus on the effect of retaining ring slot designs on the slurry MRT. Another study compares the slurry MRT under same polishing conditions using pads with different groove width. Both studies are conducted on multiple sliding velocity, pressure and slurry flow rate variations to understand the characteristics of consumable designs. The method of measuring MRT during polishing presented in this dissertation can be easily applied in general CMP processes.The subsequent studies focus in the diamond conditioner discs characterization techniques. A newly developed method for determining active diamonds and aggressive diamonds on a diamond conditioner disc under a certain vertical load is elaborated in this dissertation. Later, this technique together with scanning electron microscopy (SEM) imaging is implemented to analyze diamond pullout and fracture in CMP. Five different types of diamond conditioner discs are subjected to a novel accelerated wear test respectively to compare the extent of diamond pullout and fracture under the same conditioning condition

This dissertation presents a series of studies related to the slurry mean residence time analysis and the pad-wafer contact characterization in Chemical Mechanical Planarization (CMP). The purpose of these studies is to further understand the fundamentals of CMP and to explore solutions to some of CMP's challenges. Mean residence time (MRT) is a widely used term that is mostly seen in classical chemical engineering reactor analysis. In a CMP process, the wafer-pad interface can be treated as a closed system reactor, and classical reactor theory can be applied to the slurry flow through the region. Slurry MRT represents the average time it takes for fresh incoming slurry to replace the existing slurry in the region bound between the pad and the wafer. Understanding the parameters that have an impact on MRT, and therefore removal rate, is critical to maintain tight specifications in the CMP process. In this dissertation, we proposed a novel slurry injection system (SIS) which efficiently introduced fresh slurry into the pad-wafer interface to reduce MRT. Results indicated that SIS exhibited lower slurry MRT and dispersion numbers but higher removal rates than the standard pad center slurry application by blocking the spent slurry and residual rinse water from re-entering the pad-wafer interface during polishing. Another study in this dissertation dealt with the effect of pad groove width on slurry MRT in the pad-wafer interface as well as slurry utilization efficiency (η). Three concentrically grooved pads with different groove widths were tested at different polishing pressures to experimentally determine the corresponding MRT using the residence time distribution (RTD) technique. Results showed that MRT and η increased significantly when the groove width increased from 300 to 600μm. On the other hand, when the groove width increased further to 900μm, MRT continued to increase while n remained constant. Results also indicated that MRT was reduced at a higher polishing pressure while η did not change significantly with pressure for all three pads. In the last study of this dissertation, the effect of pad surface micro-texture on removal rate during tungsten CMP was investigated. Two different conditioner discs ("Disc A" and "Disc B") were employed to generate different pad surface micro-textures during polishing. Results showed that "Disc B" generated consistently lower removal rates and coefficients of friction than "Disc A". To fundamentally elucidate the cause(s) of such differences, pad surface contact area and topography were analyzed using laser confocal microscopy. The comparison of the pad surface micro-texture analysis on pad surfaces conditioned by both discs indicated that "Disc A" generated a surface having a smaller abruptness (λ) and more solid contact area which resulted in a higher removal rate. In contrast, "Disc B" generated many large near-contact areas as a result of fractured and collapsed pore walls.

This work explores the hydraulic performance of a wastewater lagoon system located in San Antonio, Bolivia. The system consists of one facultative pond and two maturation ponds in series and is managed through a locally elected water committee. A tracer study was performed on the primary facultative pond and an analysis of the solids accumulation on the bottom of the facultative lagoon was also performed. The results were used to generate residence time distribution curves and provide an estimate of mean residence time in the system. The data was used to examine hydraulic efficiency as it relates to short-circuiting and dead zones. A sludge study accumulation study was performed using the white towel method and the resulting measurements were interpolated to determine a total estimated sludge volume of 169 m3 (which is 8% of the facultative pond volume). An orange study was also performed to assess the surface flow pattern in the system. The results were compared with a computational 2-d model. The 2-d model incorporated the estimated sludge distribution and provided a good fit for the tracer dye concentrations measured in the field over the 12 day study period. Simple models such as the Tanks in Series and the Completely mixed model were evaluated and abandoned because of their inability to model the physical behavior in the system. The Completely mixed model did however perform better than the Plug flow model. After comparing the tracer results from the reactor models that were considered: Tanks in Series, Completely mixed fluid, manual interpolation and the results from the 2-d cfd flow simulation, the results that provided the best fit for the data over 12 days was the manual interpolation method at a flow rate of 98 m3/day and configuration D at 60 m3/day. However, because of uncertainty as to what depth to obtain a representative area for the 2-d simplification and sensitivity to flow; all four configurations were considered for estimating the MHRT at the lowest measured flow rate of 60 m3/day. The results at a flow rate of 60 m3/day varied between 10.88 and 13.04 days for the MHRT with a hydraulic efficiency that varied between 33-51.6% (accounting for sludge volume). This is much shorter than the actual nominal retention time of 37 days and the design nominal retention time of 26 days. As a result it was concluded that short-circuiting was occurring in the facultative lagoon.

Flow and mean residence time in epikarst and unsaturated zone was studied above the Ochoz cave in the Moravian Karst. I studied various flow components with different residence time in unsaturated zone and the influence of soil and epikarst on seepage composition and residence time by means of several methods (longterm monitoring of conductivity, flowrate of seepage and soil water, use of environmental tracers - 18 O, 3 H, CFC and SF6, flow into the soil and detailed sampling during intesive rain events). Seepage sites Kašna in the Rudické propadání cave system and Mapa Republiky in Býčí skála were reference localities in unsaturated zone. For comparison I modeled residence time in saturated zone: at Kaprálka outlet close to the Ochoz cave, at Stará řeka (Rudické propadání) and Konstantní přítok (Amatérská cave). Mean residence time in unsaturated zone above the Ochoz cave reaches 7 - 20 years, while it is only few months in the soil (1 - 8 months, depending on the depth). At Kašna seepage site, the reasidence time is similar to the Ochoz cave - about 18 - 20 years, at Mapa republiky seepage site, it reaches 150s year due to unusual geological settings. Mean residence time in order of 10 - 20 years corresponds to storativity values (0.6 % in average) calculated from parallel water level recession...

Atrial fibrillation (AF) is the most common arrhythmia that leads to thrombus formation, mostly in the left atrial appendage (LAA). The current standard of stratifying stroke risk, based on the CHA2DS2-VASc score, does not consider LAA morphology, and the clinically accepted LAA morphology-based classification is highly subjective. The aim of this study was to determine whether LAA blood-borne particle residence time distribution and the proposed quantitative index of LAA 3D geometry can add independent information to the CHA2DS2-VASc score. Data were collected from 16 AF subjects. Subject-specific measurements included left atrial (LA) and LAA 3D geometry obtained by cardiac computed tomography, cardiac output, and heart rate.We quantified 3D LAA appearance in terms of a novel LAA appearance complexity index (LAA-ACI). We employed computational fluid dynamics analysis and a systems-based approach to quantify residence time distribution and associated calculated variable (LAA mean residence time, tm) in each subject. The LAA-ACI captured the subject-specific LAA 3D geometry in terms of a single number. LAA tm varied significantly within a given LAA morphology as defined by the current subjectivemethod and it was not simply a reflection of LAA geometry/appearance. In addition, LAA-ACI and LAA tm varied significantly for a given CHA2DS2-VASc score, indicating that these two indices of stasis are not simply a reflection of the subjects’ clinical status. We conclude that LAA-ACI and LAA tm add independent information to the CHA2DS2-VASc score about stasis risk and thereby can potentially enhance its ability to stratify stroke risk in AF patients.

Water flow and geochemical processes within the unsaturated zone (UZ) in two distinct types of karst environment were investigated using natural tracers (chemistry, stable isotopes 13 C, 18 O, 2 H, and 3 H, 14 C, 87 Sr/86 Sr). The extent of horizontal flow component and the response of drip water chemistry to recharge events were examined in the Moravian Karst (Czech Republic), while the character of water flow and its chemistry were studied in salt diapirs in southeastern part of the Zagros mountains (Iran). Under the conditions of well-developed epikarst, the horizontal flow component, defined as Hmax/T (Hmax = horizontal migration component, T - thickness of VZ) typically reaches values of 0.1 - 0.6 (Moravian and Slovenian Karst). However, in areas where epikarst was stripped off by glacial or human activity, the proportion of horizontal flow component is far greater (Hmax/T 1.6 - 24). This parameter is vital for the design of water source protection zones above caves. Nitrate mean residence time in 120 m thick VZ of the Moravian karst exceeded 16 years. The VZ above the Ochoz Cave (Moravian Karst) represents a semi-open to open system with respect to soil CO2. Under a high drip rate (high flow), the event water only made 5% of the total. During the year, water degassing and so called prior...

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