The electrothermomechanical characteristics of an electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant temperature dependent properties from the microactuator material are included in the model. The electrothermal model accurately predicts the steady-state power required to hold position, and the energy consumed during the thermal transient. Thermomechanical models use the predictions of temperature from the electrothermal solution to calculate displacement and force from pseudo-rigid-body approximations and commercial finite-element code. The models are verified by comparing experimental data to simulation results of a single leg-pair on a particular configuration of the device. The particular microactuator studied is called a Thermomechanical In-plane Microactuator, or TIM, and was fabricated with surface micromachining technology. A TIM requires a single releasable structural layer, is extremely flexible in design, and can operate with simple drive and control circuitry. The TIM produces linear motion of a center shuttle when slender legs on either side move the shuttle as a result of constrained thermal expansion. In a single example, when the current through a leg with dimensions 250×3×3.5 µm^3 and suspended 2 µm off the substrate is sufficient to maintain an average temperature of 615 C in air and vacuum environments, model simulated temperatures along the leg have a peak of 860 C in air and 1100 C in vacuum. The final measured and predicted displacement is 14 µm. In air, the power predicted by the model needed to maintain this average temperature profile is 95 mW while consuming 16.4 µJ in 0.22 ms to reach 90 percent of the final average temperature. In a vacuum, only 6.4 mW are required to maintain the same average temperature with 97.6 µJ consumed in 18.5 ms. Simulation results suggest that short-duration high-current pulses can improve the transient response and energy consumed in a vacuum when steady-state temperatures are not required. For a TIM leg with the dimensions above, the maximum measured force is approximately 47 µN per leg-pair when enough current is provided to move the TIM 8 µm as a result of ohmic heating and thermal expansion.

<p dir="ltr">Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available, stability of gyroscopes plays a detrimental role in the accuracy of navigation. Recent developments in micro-electromechanical systems (MEMS) based gyroscopes enabled them to penetrate into navigation grade application spaces. MEMS based miniaturization approach also revived the interest in nuclear magnetic resonance gyroscopes (NMRGs). In parallel, emerging atomic gyroscope technologies are getting attention such as using quantum defects in single crystal diamond. </p><p><br></p><p dir="ltr">Considering innovative ways MEMS can improve gyroscopes, we investigate solid state gyroscope technologies in piezoelectric MEMS and nuclear spin based platforms for next generation rotation sensing that is shock and vibration insensitive. For the first part of this study, we explore a piezoelectric resonator that can excite wine-glass mode (WGM) and tangential mode. WGM is used for rotation sensing applications in various excitation mechanisms in literature. However, we demonstrate the capability of exciting WGM without the need for segmented electrodes in piezoelectric domain that allows self-alignment of the excitation electrodes using a unique property of Lead Magnesium Niobate-Lead Titanate (PMN-PT). In the second part of the study, we explore Nitrogen-Vacancy (NV) centers in diamond to be used as gyroscopes exploiting the rotation sensitivity of nuclear spins. NV center-based gyroscopes provide solid-state solution with comparable or superior performance without any moving parts. We propose mechanical coupling to NV centers in diamond using piezoelectrically excited bulk acoustic waves (BAW) to extend the coherence time of nuclear spins by dynamical decoupling. We explore piezoelectric coupling design space of AlN thin film BAW resonators (FBARs) to enable efficient mechanical drive to improve Rabi oscillations in diamond to overcome one of the most important bottlenecks of realizing a gyroscope, which is the mitigation and control of nuclear spin and electron spin interaction in diamond NV center system.</p>

<p>With the advances in MEMS technology, the studies of the properties of magnetic crystals have reached the microscopic level. Critical information such as the magnetization and susceptibility of a magnetic sample can be obtained using a microtorque magnetometer, such as ones incorporating piezoresistive or capacitive detection that have been fabricated and tested by earlier research groups. This type of magnetic information is useful in the study of superconductivity, for example. The microtorque magnetometer designed and fabricated in this thesis has the potential of being used in this field of study.</p> <p>This thesis describes the design, fabrication and testing of a capacitive microtorque magnetometer. By using ANSYS, a computer modelling program, an ideal model of the rotating microtorque magnetometer was devised. Fabrication involved testing a variety of procedures before establishing the successful and efficient method of building the microtorque magnetometer. A fifth order resonant mode was successfully detected during the testing stage. A method of studying the desired resonant mode has been devised and explained in the later chapters of this thesis.</p> / Master of Applied Science (MASc)

Cancer is a major health issue that has been associated with over 80 million deaths worldwide in the last decade. Recently, significant improvements have been made in terms of treatment and diagnosis. However, despite these advancements there is still a demand for low-cost, high-accuracy, and easy-to-use technologies capable of classifying cells. Analysis of cell behavior in microfluidic deformability assays provides a label-free method of observing cell response to physical and chemical stimuli. This body of work shows advancements made toward reaching our goal of a robust and cost-effective biosensing device that allows for the identification of normal and cancer cells. These devices can also monitor cell responses to physical and chemical stimuli in the form of mechanical deformation and chemotherapeutic drugs, respectively. Our initial design was a microfluidic device that consisted of three channels with varying deformation and relaxation regions. Cell velocities from the deformations regions allowed us to distinguish between normal and cancer cells at the single-cell level. The next design used a singular deformation channel that was embedded with an array of electrodes in order to measure entry time, transit time and velocities as a single cell passes through the channel. These factors were found to reveal information about the biomechanical properties of single cells. Embedded electrodes were implemented in order to reduce post processing times of the data analysis and provide more insight into the bioelectrical information of cells. Finally, we report a microfluidic device with parallel deformation channels and a single electrode pair to improve throughput and automate data collection of deformability assays. This thesis demonstrates how microfluidic deformability assays, with and without embedded electrodes, show promising capabilities to classify different cells based on their biophysical traits which can be utilized as a valuable tool for testing responses to physical and chemical stimuli. / MS / Cancer is a worldwide health issue with approximately 1.7 million new cases each year in the United State alone. Although a great amount of research has been conducted in this field, the numerous uncertainties and heterogeneity among tumors, which is amplified by the large diversity between patients, has limit progress in both diagnostics and therapy. Traditionally, cancer studies have primarily focused on biological and chemical techniques. However, more recently, researchers have begun to leverage engineering techniques to acquire a new perspective on cancer to better understand the underlying biophysical attributes. Thus far, various engineering methodologies have produced meaningful results, but these techniques are costly and tend to be laborious. As a result, there is a need for low-cost, high-accuracy, and easy-to-use technologies to aid with cancer research, diagnostics, and treatment. An emerging field to alleviate these concerns is microfluidics, which is a science involving the flow of fluids in micro-scale channels. The field of microfluidics shows a great deal of promise for the development of clinically ready devices for analyzing cancer cells at both the population and single cell levels. Investigating the behavior of cancer cells at a single cell level can provide valuable information to help better understand the responsiveness of tumors to physical or chemical stimuli, such as chemotherapeutic drugs. This thesis reports multiple robust and cost-effective biomedical micro-devices that are used to analyze normal and cancerous cells. These devices consist of a microfluidic channel with sensors and are created using micro-fabrication techniques. The unique designs have enabled the evaluation of cells based on their mechanical and electrical properties. Specifically, the mechanical properties can be measured by forcing a cell into a microfluidic channel that is smaller than the diameter of the cell and recording its response to this physical stimulus. Electrical properties are measured simultaneously as the cells are probed for their mechanical properties. In general, the mechanical and electrical properties of cells can be altered when they undergo internal change (i.e. diseased cells) or experience external stimuli. Thus, these properties can be utilized as indicators of cancer progression and can be used to distinguish tumorigenic from non-tumorigenic cells. Data collection from these devices is automated, allowing for the rapid acquisition of mechanical and electrical properties of cells with minimal post-processing. Results from these devices have been promising in their ability to indicate significant differences among various normal and cancer populations based on their mechanical and electrical attributes.

Cancer metastasis is the leading cause of death related to cancer diseases. Once the cancer cells depart the primary tumor site and enter the blood circulation, they spread through the body and will likely initiate a new tumor site. Therefore, understanding the cell migration and stopping the spread in the initial stage is the utmost of importance. In this dissertation, we have proposed a 3-D microenvironment that (partially) mimics the structures, complexity and circulation of human organs for cell migration studies. We have developed the tools to fabricate 3-D complex geometries in PDMS from our previously developed single-mask, single-etch technology in silicon. In this work, 3-D patterns are transferred from silicon structures to glass following anodic bonding and high temperature glass re-flow processes. Silicon is etched back thoroughly via wet etching and the glass is used as master device to create 3-D PDMS structures for use in dielectrophoresis cell sorting applications. Furthermore, this work has been modified to fabricate 3-D master devices in PDMS to create 3-D structures in collagen hydrogels to mimic native tissue structures. We have studied the interaction of endothelial cells with model geometries of blood vessels in collagen hydrogel at different concentrations to mimic the biomechanical properties of tissues varying from normal to tumor under the growth factor stimulation. Finally, we have designed and fabricated a silicon-based transmigration well with a 30um-thick membrane and 8um pores. This platform includes a deep microfluidic channel on the back-side sealed with a glass wafer. The migratory behavior of highly metastatic breast cancer cells, MDA-MB-231, is tested under different drug treatment conditions. This versatile platform will enable the application of more complex fluidic circulation profile, enhanced integration with other technologies, and running multiple assays simultaneously. / Ph. D.

Recent advances in micro-fabrication technology have ushered a new era in miniaturization of chemical, environmental and energy systems. This foreseeable trend towards miniaturization in chemical, environmental and mechanical systems is expected to revolutionize the ways the human life is being perceived today. The high volume and mass reproducibility is seen as the striking aspect of micro-fabrication based miniature systems, offering economies far exceeding than the economies of scale obtained in large plants. The focus of this thesis work is directed at the thermodynamic feasibility and preliminary prototype design for a meso-scale refrigerator. Miniaturization to sub-centimeter domain will enable configuring these refrigerator units as sheet architectures integrated in layers, facilitating efficient local control of temperature. In the design abstraction, the entire refrigeration unit, comprising motor-compressor, evaporator, condenser, valves and fluidic control, is to be fabricated from several layers of bonded silicon wafers. The material treated in this thesis provides a perspective on the actuation mechanism of the integrated rotor-compressor through an axial-drive high-throughput variable capacitance electrostatic disk motor and underlying stator assembly. The design optimization of the motor actuation dynamics to extract optimal set of design parameters is provided to yield reasonably good output power of the compressor.

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We present studies on squeeze film effects in dynamic MEMS devices with a special emphasis on the development of compact analytical models. First, the efficacy of lumped parameter modelling of dynamic MEMS devices is illustrated in MATLAB/SIMULINK software environment using a MEMS gyroscope and a MEMS microphone as examples. This is followed by a comparative study of equivalent electrical circuit models for a MEMS microphone wherein the importance of accurate extraction of lumped mass, stiffness and damping is brought into focus. In this context, a need for an in depth study of squeeze film behaviour in MEMS structures is highlighted and a strong motivation is drawn for the development of compact squeeze film models. A 2D analytical model for estimating squeeze film damping and spring force in perforated MEMS structures is presented. The governing equations based on isothermal compressible Reynolds equation are derived by considering an approximate circular pressure cell around a hole which is representative of the spatially invariant pressure pattern over the interior of the flow domain. The advantages and limitations of the solution are discussed with relevance to MEMS structures. Next, a comprehensive analytical model for 3D MEMS structures that includes effects of compressibility, inertia, and rarefaction in the flow between two parallel plates forming the squeeze region as well as the flow through perforations is developed. A modified Reynolds equation that includes the unsteady inertial term is derived from the Navier-Stokes equation to model the flow in the circular cell and the losses through the holes are modelled using Poiseuille flow. Rarefaction effects in the flow through the air-gap as well as the holes are accounted for by considering the slip boundary conditions. The analytical results are compared with extensive numerical simulations carried out using full 3-D Navier-Stokes equation solver in a commercial simulation package (ANSYS-CFX). We show that the analytical solution performs very well in tracking the net force up to the first resonant frequency of the entrapped air.

International Telemetering Conference Proceedings / October 25-28, 1999 / Riviera Hotel and Convention Center, Las Vegas, Nevada / Obtaining a projectile’s free-flight motion profile and its aerodynamic coefficients is typically accomplished at indoor test ranges using photographic techniques synchronized to timing stations. Since these ranges are relatively short, many discrete tests are necessary to compile a complete understanding of the projectile’s behavior. When Time Space Position Information (TSPI) is requested over long-range flights, it has been gathered with expensive video, laser, and radar trackers. These can be inaccurate at times and are limited to locations where the range equipment is able to track the projectile’s entire flight. With the ever-increasing sophistication of ordnance, such as smart and competent munitions that have multi-stage thrusting and maneuvering capability, it is becoming increasingly difficult to make the necessary measurements using current measurement techniques. Microelectromechanical Systems (MEMS) sensors and other electro-optical and magnetic sensors referenced to the sun and earth allow the projectile’s angular rates (spin, pitch, and yaw) and accelerations (axial and radial) to be measured throughout the flight. These sensors have been packaged into miniaturized telemetry instrumentation systems and placed within empty voids of the munition or in place of the fuze or warhead section. By combining this sensor data with a 6-DOF trajectory code, many of the projectiles aerodynamic coefficients including drag, static moment, and damping moment over a large Mach Number range and over multiple flight paths have been obtained. These techniques decrease the number of test shots required, reduce the complexity of the test setup, and reduce the test costs. Test data from instrumented tank, artillery, and rocket flight tests are presented in this report to show the current capability of making inflight measurements using telemetry-based techniques.