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A stainless steel, high temperature, phase change micro actuator has been demonstrated using the solid-liquid phase transition of mannitol at 168°C and In-Ag transient liquid phase diffusion bonding. Joints created with this bonding technique can sustain temperatures up to 695°C, while being bonded at only 180°C, and have thicknesses between 1.4 to 6.0 μm. Physical vapour deposition, inkjet printing and electroplating have been evaluated as deposition methods for bond layers. For actuation, cavities were filled with mannitol and when heated, the expansion was used to deflect a 10 μm thick stainless steel membrane. Bond strengths of the joints are found to be in the region of 0.51 to 2.53 MPa and pressurised cavities sustained pressures of up to 30 bar. Bond strength is limited by the bond contact area and the surface roughness of the bonding layers.

Les microsystèmes intégrant des techniques microfluidiques offrent la possibilité de réaliser des analyses biologiques directement sur le site de prélèvement de l’échantillon. Ils ont pour objectifs notamment d’augmenter l’efficacité, la rapidité et l’accessibilité de ces tests. Pour développer efficacement un tel dispositif, un ensemble de critères doit être fixé tels que la limitation du coût, la portabilité, la simplicité d’utilisation et la précision des résultats. Un objectif de cette thèse est également de proposer un nouveau système portable permettant de répondre à un maximum d’applications. Pour cela, il convient d’intégrer et d’automatiser des protocoles biologiques complexes c’est-à-dire nécessitant l’ajout de plusieurs réactifs et des réactions en parallèle. A titre d’exemple, les tests ELISA sont abordés.Pour répondre à cette problématique, une technique innovante utilisant un matériau hyperélastique est combinée à une architecture X-Y. Des chambres étirables, permettant de calibrer et de mélanger des volumes compris entre 1 µL et une centaine de µL, sont ainsi réalisées. Différents protocoles sont intégrés et validés par ordre de complexité croissante dans des cartes microfluidiques en commençant par une gamme de dilution qui est la première étape pour la calibration des protocoles biologiques, puis un test enzymatique et un test ELISA homogène, avant d’aborder le test ELISA hétérogène qui est le protocole visé.Un démonstrateur permettant de piloter les cartes microfluidiques est ensuite présenté. Cette plateforme est générique et compatible avec les cartes microfluidiques développées. Enfin, pour automatiser complétement la mise en œuvre des protocoles, une nouvelle technique d’embarquement de réactifs liquide est proposée. / Microsystems utilizing microfluidic techniques offer the possibility to perform point-of-need biological analysis. An objective of these systems is to increase the efficiency, speed and accessibility of these analyses. In order to effectively develop this kind of device, a set of criteria must be established and adhered to. This set should address cost limitations, portability, user-friendliness, and accuracy of the results. Another objective is to propose a new portable system that has the capability to address as many applications as possible. To this end, complex biological assays with multiple steps and multiple reagents must be integrated and automated. ELISA is one such assay being considered.To deal with this issue, an innovative technique employs a hyper-elastic material joined to an X-Y architecture. The resulting chambers are flexible, thus allowing for calibration and mixing on the range of 1 µL to hundreds of µL. Several protocols are integrated and validated in microfluidic chips in order of increasing complexity. To start, a range of dilutions is performed, which is then used to calibrate biological assay. Next, an enzymatic assay and a homogeneous ELISA are integrated. Finally, heterogeneous ELISA, which is the aimed assay, is achieved.We present here a prototype to demonstrate the handling of the microfluidic chip. This platform is versatile and compatible with those that have been previously developed. Additionally, the introduction and integration of liquid reagents is proposed in order to completely automate the protocol.

The development of magnetic technologies employing microfabricated magnetic structures for the production of integrated electronic components is a driving topic in the electronic industry. Despite the large amount of work reported in the literature towards the production of magnetic devices that can be integrated into conventional silicon technology, the published research has only achieved moderate success. The research presented in this thesis was conducted with the aim to progress towards the production of a magnetic MEMS relay based on electro-deposited NiFe that combines magnetic and electrostatic actuation and that can be integrated in a standard IC processing chain. This work includes a comprehensive design study for the proposed MEMS device and presents the development of the manufacturing processes required for its fabrication. As the theoretical performance of the device is found to be crucially reliant on the mechanical and magnetic properties of the microformed structures, a series of novel test methodologies has been devised and implemented with the aim of acquiring knowledge on the behaviour of the NiFe films. Novel mechanical test routines employing microfabricated test structures are presented and applied to build a systematic and robust system for the characterisation of the electrodeposited films. The quantitative mapping of residual stress at the wafer level using microfabricated test structures has been demonstrated for the first time and applied to optimise processes and tools. A complete fabrication process flow for manufacturing the designed magnetic MEMS switch has been proposed and the fabrication of the actuated section of the switch has been demonstrated, comprising all the functional electric and magnetic components. The fabricated magnetic devices have been tested to monitor their response to an external magnetic force and prove their viability for use in MEMS actuators. Additional work was finally conducted towards the development of a reliable and robust process aimed at increasing the device yield and thus facilitating the eventual commercialisation of magnetic MEMS switches.

<p>The aim of this work has been to develop new knowledge about macromodelling of microsystems. Doing that, we have followed two different approaches for generating macromodels, namely model order reduction and lumped modelling. The latter is a rather mature method that has been widely recognized and used for a relatively long period of time. Model order reduction, on the other hand, is a relatively new area still in rapid development. Due to this, the parts considering reduced order modelling is strongly biased towards methodology and concepts, whereas parts on lumped modelling are biased towards systems and devices.</p><p>In the first part of this thesis, we focus on model order reduction. We introduce some approaches for reducing model order for linear systems, and we give an example related to squeeze-film damping. We then move on to investigate model order reduction of nonlinear systems, where we present and use the concept of invariant manifolds. While the concept of invariant manifolds is general, we utilize it for reducing models. An obvious advantage of using invariant manifold theory is that it offers a conceptually clear understanding of effects and behaviour of nonlinear system.</p><p>We exemplify and investigate the accuracy of one method for identifying invariant manifolds. The example is based on an industrialized dual-axis accelerometer.</p><p>A new geometrical interpretation of external forcing, relating to invariant manifolds, is presented. We show how this can be utilized to deal with external forcing in a manner consistent with the invariance property of the manifold. The interpretation also aids in reducing errors for reduce models.</p><p>We extend the asymptotic approach in a manner that makes it possible to create design-parameter sensitive models. We investigate an industrialized dual-axis accelerometer by means of the method and demonstrate capabilities of the method. We also discuss how manifolds for nonlinear dissipative systems can be found.</p><p>Focusing on lumped modelling, we analyse a microresonator. We also discuss the two analogies that can be used to build electrical equivalents of mechanical systems. It is shown how the f → V analogy, linking velocity to voltage, is the natural choice. General properties of lumped modelling are investigated using models with varying degrees of freedom.</p><p>Finally, we analyse an electromagnetic system, intended for levitating objects, and we demonstrate the scaling effects of the system. Furthermore, we prove the intrinsic stability of the system, although the floating disc will be slightly tilted. This is the first analysis done assessing the stability criterions of such a systems. The knowledge arising from the analysis gives strong indications on how such a system can be utilized, designed, and improved.</p>

The aim of this work has been to develop new knowledge about macromodelling of microsystems. Doing that, we have followed two different approaches for generating macromodels, namely model order reduction and lumped modelling. The latter is a rather mature method that has been widely recognized and used for a relatively long period of time. Model order reduction, on the other hand, is a relatively new area still in rapid development. Due to this, the parts considering reduced order modelling is strongly biased towards methodology and concepts, whereas parts on lumped modelling are biased towards systems and devices. In the first part of this thesis, we focus on model order reduction. We introduce some approaches for reducing model order for linear systems, and we give an example related to squeeze-film damping. We then move on to investigate model order reduction of nonlinear systems, where we present and use the concept of invariant manifolds. While the concept of invariant manifolds is general, we utilize it for reducing models. An obvious advantage of using invariant manifold theory is that it offers a conceptually clear understanding of effects and behaviour of nonlinear system. We exemplify and investigate the accuracy of one method for identifying invariant manifolds. The example is based on an industrialized dual-axis accelerometer. A new geometrical interpretation of external forcing, relating to invariant manifolds, is presented. We show how this can be utilized to deal with external forcing in a manner consistent with the invariance property of the manifold. The interpretation also aids in reducing errors for reduce models. We extend the asymptotic approach in a manner that makes it possible to create design-parameter sensitive models. We investigate an industrialized dual-axis accelerometer by means of the method and demonstrate capabilities of the method. We also discuss how manifolds for nonlinear dissipative systems can be found. Focusing on lumped modelling, we analyse a microresonator. We also discuss the two analogies that can be used to build electrical equivalents of mechanical systems. It is shown how the f → V analogy, linking velocity to voltage, is the natural choice. General properties of lumped modelling are investigated using models with varying degrees of freedom. Finally, we analyse an electromagnetic system, intended for levitating objects, and we demonstrate the scaling effects of the system. Furthermore, we prove the intrinsic stability of the system, although the floating disc will be slightly tilted. This is the first analysis done assessing the stability criterions of such a systems. The knowledge arising from the analysis gives strong indications on how such a system can be utilized, designed, and improved.

Modern day engineering systems research presently lacks techniques to exploit the unique properties of many nanomaterials; coupled with this challenge exists the need to interface these nanomaterials with microscale and macroscale platforms. A nanomaterial of particular interest is the carbon nanotube (CNT), due to its enhanced physical properties. In addition to varied electrical properties, the CNT has demonstrated high thermal conductivity and tensile strength compared to conventional fiber materials. CNTs are beginning to see commercial applications in areas in which sufficient study has been dedicated. While a large part of the worldwide focus of CNT research has been in synthesis, an equally important area of research lies in CNT integration processes. The unique and useful properties of many nanostructured materials will never be realized in mainstream manufacturing processes and commercial applications without the proper exploration of integration methods such as those detailed in this thesis. The primary motivation for the research detailed in this thesis has been to develop CNT synthesis processing techniques that allow for novel interfacing methods between carbon nanotubes and eventual applications. In this study, an investigation was performed to look at several approaches to integrating CNTs into micro-electromechanical systems (MEMS). Synthesis of CNTs was studied in two different settings. Synthesis was first performed, directly on the microsystem, via a global scale chemical vapor deposition (CVD) process. Secondly, synthesis was performed directly onto a microsystem device via localized resistive heating. Following synthesis, the application of atomically layered, protective coatings was then investigated. Integration methods were then investigated to allow for CNT transfer to microsystem applications incapable of withstanding synthesis temperatures. The developed integration methods were evaluated by creating functional microscale electrical circuits in flexible substrates via hot emboss imprint lithography. Lastly, post synthesis processing methods were used to create micropatterned cell guidance substrates as well as neuronal stimulating substrates.

Cette thèse présente de nouvelles approches pour la gestion d'énergie dans un microsystème autonome. Le microsystème autonome est la nouvelle génération des nœuds de capteurs sans fil. Le microsystème autonome est alimenté via un microgénérateur qui récolte l'énergie ambiante. Cette thèse s'est déroulée dans le cadre du projet européen VIBES (VIBration Energy Scavenging FP6 IST-1-STREP-507911). Ce projet s'intéresse à récolter l'énergie ambiante issue de vibrations mécaniques. La problématique dans la conception du module de gestion d'énergie est la très basse tension (dizaines de millivolts), et l'ultra basse puissance (centaine de nanowatts) fournie par le microgénérateur. Trois approches sont proposées dans cette thèse. La première approche est une technique pour l'amplification de la tension du microgénérateur. Celle-ci est vérifiée par l'application d'une technique de commutation dite SSH (Synchronized Switch Harvesting). Cette technique est validée pour des générateurs de taille centimétrique. L'influence de la réduction d'échelle sur cette technique est étudiée, et une technique plus convenable pour les microgénérateurs est proposée. La deuxième approche est l'utilisation d'un multiplicateur de tension. Ce multiplicateur joue le rôle d'un AC/DC et DC/DC. Il accepte une tension d'entrée d'amplitude très faible (dizaines de millivolts). Le fonctionnement du multiplicateur à ces très basses tensions est basé sur une nouvelle structure de diode à très basse tension de seuil. La troisième approche est la proposition d'un convertisseur AC/DC ultra basse consommation (dizaines de nanowatt). Ce convertisseur peut rectifier des signaux d'amplitude de l'ordre de quelques millivolts. Les trois approches sont implémentées en utilisant deux technologies de fabrication de circuits intégrés.

When operating microsystems in harsh environments, many conventionally used techniques are limiting. Further, depending on if the demands arise from the environment or the conditions inside the system, different approaches have to be used. This thesis deals with the challenges encountered when microsystems are used at high pressures and high temperatures. For microsystems operating at harsh conditions, many parameters will vary extensively with both temperature and pressure, and to maintain control, these variations needs to be well understood. Covered within this thesis is the to-date strongest membrane micropump, demonstrated to pump against back-pressures up to 13 MPa, and a gas-tight high pressure valve that manages pressures beyond 20 MPa. With the ability to manipulate fluids at high pressures in microsystems at elevated temperatures, opportunities are created to use green solvents like supercritical fluids like CO2. To allow for a reliable and predictable operation in systems using more than one fluid, the behavior of the multiphase flow needs to be controlled. Therefore, the effect of varying temperature and pressure, as well as flow conditions were investigated for multiphase flows of CO2 and H2O around and above the critical point of CO2. Also, the influence of channel surface and geometry was investigated. Although supercritical CO2 only requires moderate temperatures, other supercritical fluids or reactions require much higher temperatures. The study how increasing temperature affects a system, a high-temperature testbed inside an electron microscope was created. One of the challenges for high-temperature systems is the interface towards room temperature components. To circumvent the need of wires, high temperature wireless systems were studied together with a wireless pressure sensing system operating at temperatures up to 1,000 °C for pressures up to 0.3 MPa. To further extend the capabilities of microsystems and combine high temperatures and high pressures, it is necessary to consider that the requirements differs fundamentally. Therefore, combining high pressures and high temperatures in microsystems results in great challenges, which requires trade-offs and compromises. Here, steel and HTCC based microsystems may prove interesting alternatives for future high performance microsystems.

This thesis addresses some important issues when designing microfluidic systems for hot pressurized water. The properties and behavior of water at elevated temperatures and in micro scale is briefly reviewed, and opportunities and possible problems of using hot pressurized water in microfluidic devices are brought up. Experimental work was focused on corrosion resistance for commonly used microsystem materials in hot pressurized water, and the microfluidic behavior for hot pressurized water. An experiment system was successfully designed, assembled and used for corrosion resistance experiments in hot pressurized water. Corrosion resistance tests were performed for some common materials used in microfluidic and microsystems (silicon, stainless steel grade 304, silicon carbide, aluminum nitride, aluminum oxide, soda-lime glass and borosilicate glass) in deionized water and in low concentration HCl (0.1 mM) at two different temperatures (180oC and 270oC). All of the tested materials, except soda-lime glass, showed a good overall performance in the low temperature range. In the high temperature range, all materials showed signs of corrosion to some extent. Severe damages and high corrosion rates were observed for silicon and the two glasses, and stainless steel 304 showed signs of pitting corrosion. A microfluidic study identified some major issues needed to be overcome to make future microfluidic studies with hot pressurized water possible. Important observations included the importance of a short traveling distance for a hot micro flow to avoid rapid cooling, and to choose a suitable dye to avoid particles clogging thin capillaries and micro channels.