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The Global ETD Search service is a free service for researchers
to find electronic theses and dissertations. This service is
provided by the
Networked Digital Library of Theses and Dissertations.
Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
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Showing 41 to 50 of 101 (0.054 seconds)| 41 |
Next / Silicon Saxony e.V. (Englische Ausgabe)11 September 2024 (has links)
No description available.
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Next / Silicon Saxony e.V. (Deutsche Ausgabe)15 August 2024 (has links)
No description available.
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Next / Silicon Saxony e.V. (Englische Ausgabe)30 August 2024 (has links)
No description available.
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Optical Properties of Sputtered Tantalum Nitride Films Determined by Spectroscopic EllipsometryWaechtler, Thomas, Gruska, Bernd, Zimmermann, Sven, Schulz, Stefan E., Gessner, Thomas 16 March 2006 (has links) (PDF)
Tantalum and tantalum nitride thin films are
routinely applied as diffusion barriers in
state-of-the-art metallization systems of
microelectronic devices. In this work, such films
were prepared by reactive magnetron sputtering
on silicon and oxidized silicon substrates and
studied by spectroscopic ellipsometry in the
spectral range from 190 nm to
2.55 μm.
The complex refractive index for thick films
(75 to 380 nm) was modeled using a
Lorentz-Drude approach. These models were
applied to film stacks of
20 nm TaN / 20 nm Ta on
unoxidized and thermally oxidized Si.
With free oscillator parameters, accurate values
of the film thicknesses were obtained according
to cross-sectional scanning electron microscope (SEM)
measurements. At the same time, a strong
variation of the optical properties with film
thickness and substrate was observed.
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Hochleistungssysteme für die Fertigung elektronischer Baugruppen auf der Basis flexibler SchaltungsträgerBoiger, Matthias January 2004 (has links)
Zugl.: Erlangen, Nürnberg, Univ., Diss., 2004
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High-level optimization of performance and power in very deep sub-micron interconnectsMurgan, Tudor. Unknown Date (has links) (PDF)
Darmstadt, Techn. University, Diss., 2006.
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Entwicklung, angepasste Herstellungsverfahren und erweiterte Qualitätssicherung von einsatzgerechten elektronischen BaugruppenBigl, Thomas January 2007 (has links)
Zugl.: Erlangen, Nürnberg, Univ., Diss., 2007
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| 48 |
Grundlagenuntersuchungen zum elektrisch induzierten Phasenwechsel und Entwicklung lateraler Phasenwechselspeicherbauelemente /Merget, Florian. January 2008 (has links)
Zugl.: Aachen, Techn. Hochsch., Diss., 2008.
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Modellierung und simulative Analyse von chipinternen VersorgungsnetzenRauscher, Jürgen January 2007 (has links)
Zugl.: Ulm, Univ., Diss., 2007
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Parasitäre Effekte in PWM-Stromrichtern mit Spannungszwischenkreis und ihr Einfluss auf den Betrieb angeschlossener LastenPlotkin, Juriy January 2008 (has links)
Zugl.: Berlin, Techn. Univ., Diss., 2008
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