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Accurate determination of surface texture is essential for the manufacturing of mechanical components within design specifications in engineering and materials science disciplines. It is also required for any subsequent modifications to physical properties and functional aspects of the object. A number of methods are available to characterize any surface through the measurement of roughness parameters that can then be used to describe surface texture. These methods may be divided into those in that direct contact is made with the surface and those where such contact is not required. This report describes two methods approach for the surface profiling of a quartz glass substrate for step height, and tungsten substrate for roughness measure. A stylus profilometer (contact method) and vertical scanning interferometer, (VSI) or (non-contact optical method) were used for step height and roughness parameter measurements. A comparison was made with nominal values assigned to the studied surface, and conclusions drawn about the relative merits of the two methods. Those merits were found to differ, depending on the parameters under consideration. The stylus method gave better agreement of step height values for dimensions greater than a micron. Both methods showed excellent accuracy at smaller dimensions. Both methods also provided accurate average roughness values, although the VSI data significantly overestimated 35% above the peak-to-valley parameter. Likely sources and nature of such differences are discussed based on the results presented, as well as on the previous comparison studies reported in the literature. Because of such method-specific differences, the multi-technique approach used in this work for accurate surface profiling appears to be a more rational option than reliance upon a single method. Both contact and non-contact approaches have problems with specific roughness parameters, but a hybrid approach offers the possibility of combining the strengths of both methods and eliminating their individual weaknesses.

The Hartmann screen test (HST) is a well-known technique that has been used for many years in optical metrology. This thesis describes how the technique has been adapted to create a system for continuous in situ monitoring of the internal stress in thin films during plasma deposition. Stress is almost always present in thin films. Stress can affect the physical properties of film, and also influence phenomena which are important in the technology of thin film manufacture such as adhesion and crystallographic defects. For these reasons, it is very important to control and manage the film stress during manufacture of devices based on thin films. The commonest way to infer stress is to measure the change in substrate curvature that it produces. This is often done by comparison of substrate curvatures before and after deposition with surface profilometry, or interferometry. However, these methods are unsuitable for implementing during film deposition in the vacuum chamber. A novel method for measuring changes in curvature of the thin film substrate in situ has been developed, making use of the HST. An expanded laser beam is passed through a screen containing a number of small apertures, which breaks it up into several rays. After reflecting from the surface of the thin film wafer, the rays are received on an array detector as a spot pattern. Image processing is performed on the recorded spot images to determine the positions of spots accurately. Spot centre positions are recorded at start of deposition as a reference, then their displacement is tracked with time during deposition. The spot deflections are fitted to a theoretical model, in which the change in sample profile is described by a second-order surface. The principal axes of curvature of this surface and their orientation are obtained by a least-squares fitting procedure. From this, the thin film stress can be inferred and monitored in real time. Equipment using this technique has been designed and developed in prototype form for eventual use in the RMIT cathodic arc deposition facility. First experiments with a classic Hartmann screen configuration proved that the technique gave good results, but precision was limited by diffraction and interference effects in the recorded image which made determination of spot centres more difficult. A modified configuration was developed, in which a camera is focused on the Hartmann screen, giving much sharper spot patterns and improved resolution. Tests on the prototype system and comparison with other techniques have shown that it is possible to determine changes in sample curvature with a precision of approximately 0.01 m-1. This corresponds to stress changes of around 0.5 GPa for typical wafer and film thicknesses used in practice. The Hartmann screen test is straightforward to use and to interpret. Image processing and analysis of the recorded spot patterns can be automated and performed continuously in real time during thin film deposition. The system promises to be very useful for monitoring stress and thus controlling the deposition process for improved quality of thin film manufacture.

Precisely positioned optical lenses are currently required for many highly repetitive mechanics and applications. Thus the need for micron-scale repetition between opto-mechanical units is evident, especially in industrial manufacturing and medical breakthroughs. In this thesis, a novel optical metrology system is proposed, designed, and built whose purpose is to precisely locate the center of a mechanical fixture and then to assemble a plano-convex optical lens into the located position of the fixture. Center location specifications up to ±3 µm decenter and ±0.001° tilting accuracy are required. Nine precisely positioned lenses and fixtures were built with eight units passing the requirements with a repetitive standard deviation of ±0.15 µm or less. The assembled units show satisfactory results.

Several next generation astronomical telescopes or large optical systems utilize aspheric/freeform optics for creating a segmented optical system. Multiple mirrors can be combined to form a larger optical surface or used as a single surface to avoid obscurations. In this paper, we demonstrate a specific case of the Daniel K. Inouye Solar Telescope (DKIST). This optic is a 4.2 m in diameter off-axis primary mirror using ZERODUR thin substrate, and has been successfully completed in the Optical Engineering and Fabrication Facility (OEFF) at the University of Arizona, in 2016. As the telescope looks at the brightest object in the sky, our own Sun, the primary mirror surface quality meets extreme specifications covering a wide range of spatial frequency errors. In manufacturing the DKIST mirror, metrology systems have been studied, developed and applied to measure low-to-mid-to-high spatial frequency surface shape information in the 4.2 m super-polished optical surface. In this paper, measurements from these systems are converted to Power Spectral Density (PSD) plots and combined in the spatial frequency domain. Results cover 5 orders of magnitude in spatial frequencies and meet or exceed specifications for this large aspheric mirror. Precision manufacturing of the super-polished DKIST mirror enables a new level of solar science.

Phase-extraction from fringe patterns is an inevitable procedure in the field of optical metrology and interferometry. However, speckle noise will introduce and influence the precision of wrapped phase map when a coherent light is used. In this thesis, we use the bidimensional empirical mode decomposition (BEMD) to perform the speckle-reduction. Moreover, different interpolation method in BEMD will be used to compare their performance in speckle-reduction. Finally, the database will be developed to make the BEMD a robotic tool to reduce noises. And the database also points out that the performance of BEMD is highly related to the fringe period, the fringe visibility, and the SNR of speckle noise.

A projected fringe profilometry (PFP) is a wide optical measurement technology to gauge the three dimensional appearance of object.Because of non-contact type , the short retrieve time and low environmental effect,PFP was usually used in many fields.PFP has become rather efficient and precise on gauging the three dimensional appearance of the static obiect because of its persistent development in recent years.However,it is still not mature yet to gauge the dynamic object. If we could develop a gauging way in the dynamic object , the application would be more widespread. First of all,using PFP as the gauging principle and utilzing the math algorithm for analyzing the changes between the dynamic measured object and the blurred fringes.Secondly,reconstructed the inspected object's three dimensional appearance and the velocity. Finally,found out the deformation of the measured object. The technology of this thesis broke through the typical measurement of velocity.We could analyze the velocities of three dimentional dirtions by only single optic imformation.

The ability to produce mirrors for large astronomical telescopes is limited by the accuracy of the systems used to test the surfaces of such mirrors. Typically the mirror surfaces are measured by comparing their actual shapes to a precision master, which may be created using combinations of mirrors, lenses, and holograms. The work presented here develops several optical testing techniques that do not rely on a large or expensive precision, master reference surface. In a sense these techniques provide absolute optical testing.The Giant Magellan Telescope (GMT) has been designed with a 350 m2 collecting area provided by a 25 m diameter primary mirror made out from seven circular independent mirror segments. These segments create an equivalent f/0.7 paraboloidal primary mirror consisting of a central segment and six outer segments. Each of the outer segments is 8.4 m in diameter and has an off-axis aspheric shape departing 14.5 mm from the best-fitting sphere. Much of the work in this dissertation is motivated by the need to measure the surfaces or such large mirrors accurately, without relying on a large or expensive precision reference surface.One method for absolute testing describing in this dissertation uses multiple measurements relative to a reference surface that is located in different positions with respect to the test surface of interest. The test measurements are performed with an algorithm that is based on the maximum likelihood (ML) method. Some methodologies for measuring large flat surfaces in the 2 m diameter range and for measuring the GMT primary mirror segments were specifically developed. For example, the optical figure of a 1.6-m flat mirror was determined to 2 nm rms accuracy using multiple 1-meter sub-aperture measurements. The optical figure of the reference surface used in the 1-meter sub-aperture measurements was also determined to the 2 nm level. The optical test methodology for a 1.7-m off axis parabola was evaluated by moving several times the mirror under test in relation to the test system. The result was a separation of errors in the optical test system to those errors from the mirror under test. This method proved to be accurate to 12nm rms.Another absolute measurement technique discussed in this dissertation utilizes the property of a paraboloidal surface of reflecting rays parallel to its optical axis, to its focal point. We have developed a scanning pentaprism technique that exploits this geometry to measure off-axis paraboloidal mirrors such as the GMT segments. This technique was demonstrated on a 1.7 m diameter prototype and proved to have a precision of about 50 nm rms.

The pages of this dissertation detail the development of an advanced metrology instrument for measuring large optical surfaces. The system is designed to accurately guide the fabrication of the Giant Magellan Telescope and future telescopes through loose-abrasive grinding. The instrument couples a commercial laser tracker with an advanced calibration technique and a set of external references to mitigate a number of error sources. The system is also required to work as a verification test for the GMT principal optical interferometric test of the polished mirror segment to corroborate the measurements in several low-order aberrations. A set of system performance goals were developed to ensure that the system will achieve these purposes. The design, analysis, calibration results, and measurement performance of the Laser Tracker Plus system are presented in this dissertation.

The full dielectric tensor of monoclinic Ga2O3 (β-phase) was determined by generalized spectroscopic ellipsometry in the spectral range from 1.0 eV up to 8.5 eV and temperatures in the range from 10K up to 300K. By using the oriented dipole approach, the energies and broadenings of the excitonic transitions are determined as a function of the temperature, and the exciton-phonon coupling properties are deduced.