by So King Lung, Benny. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1996. / Includes bibliographical references (leaves 102-109). / ABSTRACT --- p.v / ACKNOWLEDGEMENTS --- p.vii / LIST OF FIGURES --- p.viii / LIST OF TABLES --- p.xiii / Chapter Chapter 1 --- Background of the study --- p.1 / Chapter 1.1 --- Introduction --- p.1 / Chapter 1.2 --- Surface passivation techniques --- p.3 / Chapter 1.2.1 --- Sulfide solution passivation --- p.3 / Chapter 1.2.2 --- Gas-phase sulfide passivation --- p.4 / Chapter 1.3 --- Surface structure of sulfide-passivated surface --- p.5 / Chapter 1.4 --- Objectives of the present study --- p.7 / Chapter Chapter 2 --- Instrumentation --- p.9 / Chapter 2.1 --- Introduction --- p.9 / Chapter 2.2 --- X-ray photoelectron spectroscopy (XPS) --- p.9 / Chapter 2.2.1 --- The development of XPS --- p.9 / Chapter 2.2.2 --- Basic principle of XPS --- p.9 / Chapter 2.2.3 --- Quantitative analysis of XPS --- p.14 / Chapter 2.2.3.1 --- Atomic concentration of a homogenous material --- p.14 / Chapter 2.2.3.2 --- Layer structure --- p.15 / Chapter 2.2.3.3 --- Simulation of XPS atomic concentration ratios from proposed surface structural models --- p.17 / Chapter 2.2.4 --- XPS experiment --- p.19 / Chapter 2.3 --- Low energy electron diffraction (LEED) --- p.21 / Chapter 2.3.1 --- The development of LEED --- p.21 / Chapter 2.3.2 --- Basic principle of LEED --- p.23 / Chapter 2.3.3 --- LEED experiment --- p.28 / Chapter 2.3.3.1 --- The ultra high vacuum chamber (UHV) --- p.28 / Chapter 2.3.3.2 --- The electron gun --- p.28 / Chapter 2.3.3.3 --- The sample --- p.30 / Chapter 2.3.3.4 --- The detector system --- p.30 / Chapter Chapter 3 --- Surface treatments --- p.31 / Chapter 3.1 --- Semiconductor wafers --- p.31 / Chapter 3.2 --- Cleaning procedure --- p.31 / Chapter 3.3 --- Polysulfide passivation --- p.33 / Chapter Chapter 4 --- Gas-phase polysulfide passivation of the InP(100) surface --- p.37 / Chapter 4.1 --- Introduction --- p.37 / Chapter 4.2 --- Sulfide-assisted reordering at the InP(100) surface --- p.38 / Chapter 4.2.1 --- Gas-phase polysulfide-treated InP( 100) surface --- p.38 / Chapter 4.2.2 --- Further annealing of the gas-phase polysulfide-treated surface --- p.47 / Chapter 4.2.3 --- Comparison with the UV/O3-HF treatment --- p.48 / Chapter 4.2.4 --- Sulfide at the interface of SiNx/InP --- p.49 / Chapter 4.3 --- Conclusions --- p.53 / Chapter Chapter 5 --- Gas-phase polysulfide passivation of the GaAs(lOO) surface --- p.55 / Chapter 5.1 --- Introduction --- p.55 / Chapter 5.2 --- Gas-phase poly sulfide-passivated GaAs( 100) surface --- p.56 / Chapter 5.2.1 --- Surface structure of the as-treated surface --- p.56 / Chapter 5.2.2 --- Surface structure after further annealing --- p.64 / Chapter 5.2.3 --- Mechanism of the gas-phase polysulfide passivation --- p.67 / Chapter 5.3 --- Conclusions --- p.68 / Chapter Chapter 6 --- Gas-phase polysulfide passivation of the GaAs(100) surface --- p.69 / Chapter 6.1 --- Introduction --- p.69 / Chapter 6.2 --- Reordering at the gas-phase polysulfide-passivated GaAs(100) surface --- p.70 / Chapter 6.2.1 --- Adsorption of polysulfide on the GaAs(100) surface --- p.70 / Chapter 6.2.2 --- Ordered sulfide at the GaAs(l 10) surface --- p.73 / Chapter 6.2.3 --- Further analysis of the LEED pattern --- p.80 / Chapter 6.3 --- Conclusions --- p.83 / Chapter Chapter 7 --- Sulfide Solution passivation of the GaAs(100) surface --- p.84 / Chapter 7.1 --- Introduction --- p.84 / Chapter 7.2 --- Sulfide solution passivation on the GaAs(l 10) surface --- p.85 / Chapter 7.2.1 --- Etching of sulfide solution on the GaAs(l 10) surface --- p.85 / Chapter 7.2.2 --- Annealing of sulfide solution-passivated GaAs( 110) surface --- p.88 / Chapter 7.2.3 --- Further analysis of the LEED pattern --- p.92 / Chapter 7.2.4 --- Shift of XPS peak position during annealing --- p.95 / Chapter 7.3 --- Conclusions --- p.97 / Chapter Chapter 8 --- Conclusions and further work --- p.99 / Chapter 8.1 --- Conclusions --- p.99 / Chapter 8.2 --- Further work --- p.100 / References --- p.102

<p>This thesis contains new results on the problem of coordinating a group of vehicles. The main motivation driving this work is the development of control laws that steer individual members of a formation, such that desired group behavior emerges. Special attention is paid to analysis of coordination issues, in particular formation control of marine craft where robustness to unknown environmental forces is important. Coordinated control applications for marine craft include: underway replenishment, maintaining a formation for increased safety during travel and instrument resolution, and cooperative transportation. A review of formation control structures is given, together with a discussion of special issues that arise in coordination of independent vehicles.</p><p>The main contributions of this thesis may be grouped into two categories:</p><p>• Path-following designs for controlling a group of vehicles</p><p>• Multi-body motivated formation modeling and control</p><p>A previously developed path following design is used to control a group of vehicles by synchronizing the individual path parameters. The path following design is advantageous since the path parameter, i.e., that parameter which determines position along a path, is scalar; hence coordination is achieved with a little amount of real-time communication. The path following design is also extended to the output-feedback case for systems where only parts of the state vector are known. The path following scheme is exploited further in a passivity-based design for coordination where the structural properties render an extended selection of functions for synchronization available. Performance and robustness properties in different operational conditions can be enhanced with a careful selection of these functions. Two designs are presented; a cascaded interconnection where a consensus system provides synchronized path parameters as input to the individual path following systems renders time-varying formations possible and increases robustness to communication problems; a feedback interconnection which is more robust to vehicle failures. Both designs are extended to sampled-data designs where plant and controller dynamics are updated in continuous-time and path parameters are exchanged over a communication network where transmission occurs at discrete intervals. Bias estimation is included to provide integral action against slowlyvarying environmental forces and model uncertainties.</p><p>A scheme for formation modeling and control, inspired by analytical mechanics of multi-body systems and Lagrangian multipliers, is proposed. In this approach to formation control, various formation behaviors are determined by imposing constraint functions on group members. Several examples illustrate these formation behaviors. The stabilization scheme presented is made more robust with respect to unknown time-varying disturbances. In addition, the scheme is extended towards adaptive estimation of unknown plant and parameters. Furthermore, it can be applied with no major modifications to the case of position control for a single vehicle.</p><p>The formation control scheme is such that it may be used in combination with a set of position control laws for a single vessel, thus enabling the designer to choose from a large class of control laws available in the literature. The input-to-state stability (ISS) framework is utilised to investigate robustness to environmental and communication disturbances. A loop-transform, together with the ISS framework, yields an upper bound on the inter-vessel time delay below which formation stability is maintained.</p>

In this thesis, the problem of controlling a surgical masterand slave system with force reflection is studied. The problemof stiff contacts between the slave and the environment isgiven specific attention. The work has been carried out at KTHbased on an initial cooperation with Karolinska Sjukhuset. Theaim of the over all project is to study the possibilities forintroduction of a force reflective teleoperator in neurologicalskullbase operations for the particular task of bone millingand thereby, hopefully, increase patient safety, decreasesurgeon workload and cost forthe society. The main contributions of this thesis are: Derivation of a dynamical model of the master andoperator’s finger system and, experimental identificationof ranges on model parameter values. Based on this model, theinteraction channel controllers optimized for transparency arederived and modified to avoid the influence of the uncertainmodel parameters. This results in a three channel structure. Todecrease the influence of the uncertain parameters locally atthe master, a control loop is designed such that the frequencyresponse of the reflected force is relatively unaffected by theuncertainties, a result also confirmed in a transparencyanalysis based on the H-matrix. The developed teleoperatorcontrol structure is tested in experiments where the operatorcould alter the contact force without facing any problems aslong as the slave is in contact with the environment. As a result of the severe difficulties for the teleoperatorto move from free space motion to in-contact manipulationwithout oscillative behaviour, a new detection algorithm basedon passivity theory is developed. The algorithm is able todetect the non-passive behaviour of the actual teleoperatorinduced by the discrete change in system dynamics occurring atthe contact instant. A stabilization controller to be activatedby the detection algorithm is designed and implemented on themaster side of the teleoperator. The detection algorithm andthe stabilization controller are shown highly effective in realexperiments. All major research results presented in the thesis have beenverified experimentally. KeywordsTeleoperator, Force Feedback, Passivity, StiffContacts, Control, Robustness, Transparency, Bone Milling,Uncertainty

This thesis contains new results on the problem of coordinating a group of vehicles. The main motivation driving this work is the development of control laws that steer individual members of a formation, such that desired group behavior emerges. Special attention is paid to analysis of coordination issues, in particular formation control of marine craft where robustness to unknown environmental forces is important. Coordinated control applications for marine craft include: underway replenishment, maintaining a formation for increased safety during travel and instrument resolution, and cooperative transportation. A review of formation control structures is given, together with a discussion of special issues that arise in coordination of independent vehicles. The main contributions of this thesis may be grouped into two categories: • Path-following designs for controlling a group of vehicles • Multi-body motivated formation modeling and control A previously developed path following design is used to control a group of vehicles by synchronizing the individual path parameters. The path following design is advantageous since the path parameter, i.e., that parameter which determines position along a path, is scalar; hence coordination is achieved with a little amount of real-time communication. The path following design is also extended to the output-feedback case for systems where only parts of the state vector are known. The path following scheme is exploited further in a passivity-based design for coordination where the structural properties render an extended selection of functions for synchronization available. Performance and robustness properties in different operational conditions can be enhanced with a careful selection of these functions. Two designs are presented; a cascaded interconnection where a consensus system provides synchronized path parameters as input to the individual path following systems renders time-varying formations possible and increases robustness to communication problems; a feedback interconnection which is more robust to vehicle failures. Both designs are extended to sampled-data designs where plant and controller dynamics are updated in continuous-time and path parameters are exchanged over a communication network where transmission occurs at discrete intervals. Bias estimation is included to provide integral action against slowlyvarying environmental forces and model uncertainties. A scheme for formation modeling and control, inspired by analytical mechanics of multi-body systems and Lagrangian multipliers, is proposed. In this approach to formation control, various formation behaviors are determined by imposing constraint functions on group members. Several examples illustrate these formation behaviors. The stabilization scheme presented is made more robust with respect to unknown time-varying disturbances. In addition, the scheme is extended towards adaptive estimation of unknown plant and parameters. Furthermore, it can be applied with no major modifications to the case of position control for a single vehicle. The formation control scheme is such that it may be used in combination with a set of position control laws for a single vessel, thus enabling the designer to choose from a large class of control laws available in the literature. The input-to-state stability (ISS) framework is utilised to investigate robustness to environmental and communication disturbances. A loop-transform, together with the ISS framework, yields an upper bound on the inter-vessel time delay below which formation stability is maintained.

The design of optimal strictly positive real (SPR) compensators using numerical optimization is considered. The plants to be controlled are linear and nonlinear flexible manipulators. For the design of SISO and MIMO linear SPR controllers, the optimization objective function is defined by reformulating the H2-optimal control problem subject to the constraint that the controllers must be SPR. Various controller parameterizations using transfer functions/matrices and state-space equations are considered. Depending on the controller form, constraints are enforced (i) using simple inequalities guaranteeing SPRness, (ii) in the frequency domain, or (iii) by implementing the Kalman-Yakubovich- Popov lemma. The design of a gain-scheduled SPR controller using numerical optimization is also considered. Using a family of linear SPR controllers, the time dependent scheduling signals are parameterized, and the objective function of the optimizer seeks to find the form of the scheduling signals which minimizes the manipulator tip tracking error while minimizing the control effort.

This thesis is concerned with input-output stability theory. Within this framework, it is of interest how inputs map to outputs through an operator that represents a system to be controlled or the controller itself. The Small Gain, Passivity, and Conic Sector Stability Theorems can be used to assess the stability of a negative feedback interconnection involving two systems that each have specific input-output properties. Our first contribution concerns characterization of the input-output properties of linear time-varying (LTV) systems. We present various theorems that ensure that a LTV system has finite gain, is passive, or is conic. We also consider the stability of various negative feedback interconnections. Motivated by the robust nature of passivity-based control, we consider how to overcome passivity violations. This investigation leads to the hybrid conic systems framework whereby systems are described in terms of multiple conic bounds over different operating ranges. A special case relevant to systems that experience a passivity violation is the hybrid passive/finite gain framework. Sufficient conditions are derived that ensure the negative feedback interconnection of two hybrid conic systems is stable. The input-output properties of gain-scheduled systems are also investigated. We show that a gain-scheduled system composed of conic subsystems has conic bounds as well. Using the conic bounds of the subsystems along with the scheduling signal properties, the overall conic bounds of the gain-scheduled system can be calculated. We also show that when hybrid very strictly passive/finite gain (VSP/finite gain) subsystems are gain-scheduled, the overall map is also hybrid VSP/finite gain. Being concerned with the control of aerospace systems, we use the theory developed in this thesis to control two interesting plants. We consider passivity-based control of a spacecraft endowed with magnetic torque rods and reaction wheels. In particular, we synthesize a LTV input strictly passive controller. Using hybrid theory we control single- and two-link flexible manipulators. We present two controller synthesis schemes, each of which employs numerical optimization techniques and attempts to have the hybrid VSP/finite gain controllers mimic a H2 controller. One of our synthesis methods uses the Generalized Kalman-Yakubovich-Popov Lemma, thus realizing a convex optimization problem.

The design of optimal strictly positive real (SPR) compensators using numerical optimization is considered. The plants to be controlled are linear and nonlinear flexible manipulators. For the design of SISO and MIMO linear SPR controllers, the optimization objective function is defined by reformulating the H2-optimal control problem subject to the constraint that the controllers must be SPR. Various controller parameterizations using transfer functions/matrices and state-space equations are considered. Depending on the controller form, constraints are enforced (i) using simple inequalities guaranteeing SPRness, (ii) in the frequency domain, or (iii) by implementing the Kalman-Yakubovich- Popov lemma. The design of a gain-scheduled SPR controller using numerical optimization is also considered. Using a family of linear SPR controllers, the time dependent scheduling signals are parameterized, and the objective function of the optimizer seeks to find the form of the scheduling signals which minimizes the manipulator tip tracking error while minimizing the control effort.

This thesis is concerned with input-output stability theory. Within this framework, it is of interest how inputs map to outputs through an operator that represents a system to be controlled or the controller itself. The Small Gain, Passivity, and Conic Sector Stability Theorems can be used to assess the stability of a negative feedback interconnection involving two systems that each have specific input-output properties. Our first contribution concerns characterization of the input-output properties of linear time-varying (LTV) systems. We present various theorems that ensure that a LTV system has finite gain, is passive, or is conic. We also consider the stability of various negative feedback interconnections. Motivated by the robust nature of passivity-based control, we consider how to overcome passivity violations. This investigation leads to the hybrid conic systems framework whereby systems are described in terms of multiple conic bounds over different operating ranges. A special case relevant to systems that experience a passivity violation is the hybrid passive/finite gain framework. Sufficient conditions are derived that ensure the negative feedback interconnection of two hybrid conic systems is stable. The input-output properties of gain-scheduled systems are also investigated. We show that a gain-scheduled system composed of conic subsystems has conic bounds as well. Using the conic bounds of the subsystems along with the scheduling signal properties, the overall conic bounds of the gain-scheduled system can be calculated. We also show that when hybrid very strictly passive/finite gain (VSP/finite gain) subsystems are gain-scheduled, the overall map is also hybrid VSP/finite gain. Being concerned with the control of aerospace systems, we use the theory developed in this thesis to control two interesting plants. We consider passivity-based control of a spacecraft endowed with magnetic torque rods and reaction wheels. In particular, we synthesize a LTV input strictly passive controller. Using hybrid theory we control single- and two-link flexible manipulators. We present two controller synthesis schemes, each of which employs numerical optimization techniques and attempts to have the hybrid VSP/finite gain controllers mimic a H2 controller. One of our synthesis methods uses the Generalized Kalman-Yakubovich-Popov Lemma, thus realizing a convex optimization problem.

As the complexity of interconnects and packages increases and the rise and fall time of the signal decreases, the electromagnetic effects of distributed passive devices are becoming an important factor in determining the performance of gigahertz systems. The electromagnetic behavior extracted using an electromagnetic simulation or from measurements is available as frequency dependent data. This information can be represented as a black box called a macromodel, which captures the behavior of the passive structure at the input/output ports. In this dissertation, the macromodels have been categorized as scalable, passive and broadband macromodels. The scalable macromodels for building design libraries of passive devices have been constructed using multidimensional rational functions, orthogonal polynomials and selective sampling. The passive macromodels for time-domain simulation have been constructed using filter theory and multiport passivity formulae. The broadband macromodels for high-speed simulation have been constructed using band division, selector, subband reordering, subband dilation and pole replacement. An automated construction method has been developed. The construction time of the multiport macromodel has been reduced. A method for reducing the order of the macromodel has been developed. The efficiency of the methods was demonstrated through embedded passive devices, known transfer functions and distributed interconnect networks.

<p>In this thesis, the problem of controlling a surgical masterand slave system with force reflection is studied. The problemof stiff contacts between the slave and the environment isgiven specific attention. The work has been carried out at KTHbased on an initial cooperation with Karolinska Sjukhuset. Theaim of the over all project is to study the possibilities forintroduction of a force reflective teleoperator in neurologicalskullbase operations for the particular task of bone millingand thereby, hopefully, increase patient safety, decreasesurgeon workload and cost forthe society.</p><p>The main contributions of this thesis are:</p><p>Derivation of a dynamical model of the master andoperator’s finger system and, experimental identificationof ranges on model parameter values. Based on this model, theinteraction channel controllers optimized for transparency arederived and modified to avoid the influence of the uncertainmodel parameters. This results in a three channel structure. Todecrease the influence of the uncertain parameters locally atthe master, a control loop is designed such that the frequencyresponse of the reflected force is relatively unaffected by theuncertainties, a result also confirmed in a transparencyanalysis based on the H-matrix. The developed teleoperatorcontrol structure is tested in experiments where the operatorcould alter the contact force without facing any problems aslong as the slave is in contact with the environment.</p><p>As a result of the severe difficulties for the teleoperatorto move from free space motion to in-contact manipulationwithout oscillative behaviour, a new detection algorithm basedon passivity theory is developed. The algorithm is able todetect the non-passive behaviour of the actual teleoperatorinduced by the discrete change in system dynamics occurring atthe contact instant. A stabilization controller to be activatedby the detection algorithm is designed and implemented on themaster side of the teleoperator. The detection algorithm andthe stabilization controller are shown highly effective in realexperiments.</p><p>All major research results presented in the thesis have beenverified experimentally.</p><p><b>Keywords</b>Teleoperator, Force Feedback, Passivity, StiffContacts, Control, Robustness, Transparency, Bone Milling,Uncertainty</p>