Silicon (Si) and silicon nitride (Si3N4) have become the dominant photonic integrated circuit (PIC) material platforms, due to their low-cost, wafer-scale production of high-performance circuits. However, novel materials can offer additional functionalities that cannot be easily accessed in Si and Si3N4, such as light emission. Tellurium oxide (TeO2) is a novel material of interest because of its large linear and non-linear refractive indices, low material losses and large rare-earth dopant solubility, with applications including compact low-loss waveguides and on-chip light sources and amplifiers. This thesis investigates the post-processing integration of TeO2 devices onto standardized Si and Si3N4 chips to incorporate TeO2 material advantages into high-performance PICs. Chapter 1 introduces the state-of-the-art functionality for various integrated photonic materials as well as methods for integrating multiple materials onto single chips. Chapter 2 presents the development of a high-quality TeO2 thin film fabrication process by reactive RF sputtering, with material refractive indices of 2.07 and optical propagation losses of <0.1 dB/cm at 1550 nm. Chapter 3 investigates a conformally coated TeO2-Si3N4 waveguide platform capable of large TeO2 optical confinement and tight bending radii, characterizing fiber-chip edge couplers down to ~5 dB/facet, waveguide propagation losses of <0.5 dB/cm, directional couplers with 100% cross-over ratio, and microresonators with internal Q factors of 7.3 × 105. In Chapter 4 a spectroscopic study of TeO2:Er3+-coated Si3N4 waveguide amplifiers was undertaken, with internal net gains of up to 1.4 dB/cm in a 2.2-cm-long waveguide and 5 dB total in a 6.7-cm-long sample demonstrated, predicted to reach >10 dB could 150 mW of pump power be launched based on a developed rate-equation model. Chapter 5 demonstrates TeO2-coated microtrench resonators coupled to silicon waveguides, with internal Q factors of up to 2.1×105 and investigates environmental sensing metrics of devices. Chapter 6 summarizes the thesis and provides avenues for future work. / Thesis / Doctor of Philosophy (PhD)

An approach to integrated frequency-comb filtering is presented, building from a background in photonic crystal cavity design and fabrication. Previous work in the development of quantum information processing devices through integrated photonic crystals consists of photonic band gap engineering and methods of on-chip photon transfer. This work leads directly to research into coupled-resonator optical waveguides which stands as a basis for the primary line of investigation. These coupled cavity systems offer the designer slow light propagation which increases photon lifetime, reduces size limitations toward on-chip integration, and offers enhanced light-matter interaction. A unique resonant structure explained by various numerical models enables comb-like resonant clusters in systems that otherwise have no such regular resonant landscape (e.g. photonic crystal cavities). Through design, simulation, fabrication and test, the work presented here is a thorough validation for the future potential of coupled-resonator filters in frequency comb laser sources.

Cubic Zn1-xMgxO (c-Zn1-xMgxO) thin films have opened the deep ultraviolet (DUV) spectrum to exploration by oxide optoelectronic devices. These extraordinary films are readily wet-etch-able, have inversion symmetric lattices, and are made of common and safe constituents. They also host a number of new exciting experimental and theoretical challenges. Here, the relation between growth conditions of the c-Zn1-xMgxO film and performance of fabricated ultraviolet (UV) sensors is investigated. Plasma-Enhanced Molecular Beam Epitaxy was used to grow Zn1-xMgxO thin films and formation conditions were explored by varying the growth temperature, Mg source flux, oxygen flow rate, and radio-frequency (RF) power coupled into the plasma. Material review includes the effect of changing conditions on the film’s optical transmission, surface morphology, growth rate, crystalline phase, and stoichiometric composition. Oxygen plasma composition was investigated by spectroscopic analysis under varying oxygen flow rate and applied RF power and is correlated to device performance. Ni/Mg/Au interdigitated metalsemiconductor-metal detectors were formed to explore spectral responsivity and UV-Visible rejection ratio (RR). Zn1-xMgxO films ranged in Mg composition from x = 0.45 - 1.0. Generally, x increased with increasing substrate temperature and Mg source flux, and decreased with increasing oxygen flow rate and RF power. Increasing x was correlated with decreased peak responsivity intensity and increased RR. Device performance was improved by increasing the ratio of O to O+ atoms and minimizing O2 + in the plasma. Peak responsivity as high as 500 A/W was observed in visible-blind phase-segregated Zn1-xMgxO devices, while cubic iv phase solar-blind devices demonstrated peak responsivity as high as 12.6 mA/W, and RR of three orders of magnitude. Optimal conditions are predicted for the formation of DUV Zn1- xMgxO sensors

This thesis proposes research of novel hybrid photonic signal processing systems in the areas of optical communications, test and measurement, RF signal processing and extreme environment optical sensors. It will be shown that use of innovative hybrid techniques allows design of photonic signal processing systems with superior performance parameters and enhanced capabilities. These applications can be divided into domains of analog-digital hybrid signal processing applications and free-space--fiber-coupled hybrid optical sensors. The analog-digital hybrid signal processing applications include a high-performance analog-digital hybrid MEMS variable optical attenuator that can simultaneously provide high dynamic range as well as high resolution attenuation controls; an analog-digital hybrid MEMS beam profiler that allows high-power watt-level laser beam profiling and also provides both submicron-level high resolution and wide area profiling coverage; and all optical transversal RF filters that operate on the principle of broadband optical spectral control using MEMS and/or Acousto-Optic tunable Filters (AOTF) devices which can provide continuous, digital or hybrid signal time delay and weight selection. The hybrid optical sensors presented in the thesis are extreme environment pressure sensors and dual temperature-pressure sensors. The sensors employ hybrid free-space and fiber-coupled techniques for remotely monitoring a system under simultaneous extremely high temperatures and pressures.

Over a wide range of applications, optical systems have utilized conventional optics in order to provide the ability to engineer the properties of incident infra-red fields in terms of the transmitted field spectral, spatial, amplitude, phase, and polarization characteristics. These micro/nano-optical elements that provide specific optical functionality can be categorized into subcategories of refractive, diffractive, multi-layer thin film dichroics, 3-D photonic crystals, and polarization gratings. The feasibility of fabrication, functionality, and level of integration which these elements can be used in an optical system differentiate which elements are more compatible with certain systems than others. With enabling technologies emerging allowing for a wider range of options when it comes to lithographic nano/micro-patterning, dielectric growth, and transfer etching capabilities, optical elements that combine functionalities of conventional optical elements can be realized. Within this one class of optical elements, it is possible to design and fabricate components capable of tailoring the spectral, spatial, amplitude, phase, and polarization characteristics of desired fields at different locations within an optical system. Optical transmission filters, polarization converting elements, and spectrally selective reflecting components have been investigated over the course of this dissertation and have been coined  MOSSE,' which is an acronym for micro-optic-spectral-spatial-elements. Each component is developed and fabricated on a wafer scale where the thin film deposition, lithographic exposure, and transfer etching stages are decoupled from each other and performed in a sequential format. This facilitates the ability to spatially vary the optical characteristics of the different MOSSE structures across the surface of the wafer itself.

<p>This thesis proposes a new analytical self-adjoint sensitivity analysis to calculate the Jacobian of the <em>S</em>-parameters for metallic shape parameters. This method is independent of the full-wave numerical analysis and the respective system matrix. The theory works for both volumetric and infinitesimally thin metallic shapes. It exploits the computational efficiency of the self-adjoint sensitivity analysis (SASA) approach where only one EM simulation suffices to obtain both the responses and their gradients in the designable parameter space.</p> <p>There are three major advantages to this development: (1) the Jacobian computation for metallic structures is completely analytical and there is no approximation involved in the sensitivity analysis of shape parameters; (2) the implementation is straightforward and in the form of a post-processing algorithm operating on the exported field solutions on the surface or around the edge of the metallic structure; and (3) it provides the possibility for exact sensitivity analysis with all electromagnetic high-frequency simulators whose system matrices are not available to export or are not differentiable with respect to shape parameters, e.g., simulators based on the FDTD method and the MoM.</p> <p>The method was verified in a number of examples using a commercial finite-element solver. The agreement between the results calculated with the proposed method and the reference self-adjoint sensitivity curves provided with the simulator are very promising.</p> <p>Suggestions for future work are provided.</p> / Master of Applied Science (MASc)

<p>A novel planar waveguide Time Domain Optical Fourier Transformer (TD-OFT), which is composed of waveguide lenses and blazed phase gratings, is proposed. A detailed mathematical derivation based on scalar diffraction optics is presented. In order to verify the theoretical analysis, the reciprocity in TD-OFT is also studied. Three different pulse examples, including the Gaussian pulse, square pulse and square pulse train, are implemented by analytical formulations. To evaluate the device performance, the similarity coefficient is defined. The results show that the similarity increases as the device aperture increases. However, there is trade-off between the similarity and the spectra resolution. For the input pulse, under the circumstance of same similarity, the shorter temporal pulse duration (larger bandwidth) needs smaller aperture size. Improved waveguide lens is particularly designed and then the whole device is simulated by Extension of BPM (EX-BPM) with two specific pulses, Gaussian and raised cosine pulse. The simulation results are also verified by reciprocity theorem using the numerical method. The designed TD-OFT occupies a size about 600μm (in width)×5mm (in length) for an ultrafast pulse around 10fs. It is possible to make the device size even smaller either by reducing the focal length of the collimating lens or enlarging the bandwidth of input pulse. Compared with currently proposed TD-OFT made by discrete photonic and optoelectronic components, this design can be integrated with a more compact size and seems more appealing on the simulated performance and fabrication cost. As a result, the planar waveguide TD-OFT has great potential in the next ultrafast optical network.</p> / Master of Applied Science (MASc)

<p>Since the inception of integrated electronic circuits there has been a trend of miniaturizing as many electronic, optical and even mechanical circuits and systems as possible. For optical applications this naturally led to the invention of semiconductor optical sources such as the laser diode (LD) and the light emitting diode (LED). A third device, the superluminescent diode was later invented to offer an output with a power similar to that of an LD and spectral width similar to that of an LED. However, there is usually a trade off between the output power and spectral width of the generated beam. The main challenge in the development of SLD is, therefore, finding ways to mitigate the power-spectral linewidth trade off.</p> <p>Previous work has two major directions. In the first one the goal is to eliminate facet reflections thus preventing lasing from happening. The detrimental effect of lasing is that even before it starts the spectral width quickly narrows down. In the second research direction the goal is to make the material gain spectrum wider by playing with different parameters of quantum well active regions.</p> <p>This research work explores yet another way of broadening output spectrum of SLD while allowing the power to increase at the same time. The surface-plasmon waveguide (SPWG) has been proposed to replace the dielectric waveguide, for the first time. A novel SPWG structure is introduced and designed to optimize the device performance in terms of the output power, spectral width and their product known as the power-linewidth product. The effect of different parameters of the new structure on the output light is investigated and attention is given to the high power, high spectral width and high power-linewidth product regimes.</p> / Doctor of Philosophy (PhD)

<p>In this thesis, we discuss the study and realization of surface plasmon polaritons (SPPs) and their devices. Plasmonics is the emerging field that will help technologies advance further into the nano-scale without the concern for delays or size limitations. SPPs are a more advanced field of photonics as they use metals instead of the semiconductors or insulators used in optics. They operate at frequencies in the light and near infrared spectrum, as this range produces their unique characteristics. Plasmonics possess the miniaturization of electronics and the speed of photonics. They do not suffer from both the delays in nano-electronics, and the size limitations faced in optics. In this thesis, we present the optimization of plasmonic slit arrays by designing the parabolic phase profile of the array. Moreover, we present a novel multilevel plasmonic coupler that will aid in the realization of 3-D plasmonic chips, as well as quadrature modulation. The theory, procedures, and results are all presented and discussed.</p> / Master of Applied Science (MASc)

<p>This thesis contributes significantly to the advanced applications of scattering parameter sensitivity analysis including the design optimization of high-frequency printed structures and in microwave imaging. In both applications, the methods exploit the computational efficiency of the self-adjoint sensitivity analysis (SASA) approach where only one EM simulation suffices to obtain both the responses and their gradients with respect to the optimizable variables.</p> <p>An<em> S</em>-parameter self-adjoint sensitivity formula for multiport planar structures using the method of moments (MoM) current solution is proposed. It can be easily implemented with existing MoM solvers. The shape perturbation which is required in computing the system-matrix derivatives are accommodated by changing the material properties of the local mesh elements. The use of a pre-determined library system matrix further accelerates the design optimization because the writing/reading of the system matrix to/from the disk is avoided. The design optimization of a planar ultra-wide band (UWB) antenna and a double stub tuner are presented as validation examples.</p> <p>In the application of the sensitivity-based imaging, the SASA approach allows for real-time image reconstruction once the field distribution of the reference object (RO) is known. Here, the RO includes the known background medium of the object under test (OUT) and the known antennas. The field distribution can be obtained using simulation or measurement.</p> <p>The spatial resolution is an important measure of the performance of an imaging technique. It represents the smallest detail that can be detected by a given imaging method. The resolution of the sensitivity-based imaging approach has not been studied before. In this thesis, the resolution limits are systematically studied with planar raster scanning and circular array data acquisition. In addition, the method’s robustness to noise is studied. A guideline is presented for an acceptable signal-to-noise ratio (SNR) versus the spatial and frequency sampling rates in designing a data-acquisition system for the method.</p> <p>This thesis validates the sensitivity-based imaging with measured data of human tissue phantoms for the first time. The differences in dielectric properties of the targets are qualitatively reflected in the reconstructed image. A preliminary study of imaging with inexact background information of the OUT is also presented.</p> / Doctor of Philosophy (PhD)