La maîtrise de la communication et de l'information est un atout primordial dans les stratégies de pouvoir, qu'elles soient militaires, politiques ou commerciales. Celui qui est capable de transmettre l'information plus vite prend l'avantage sur les autres. Tel est le moteur de la croissance et du progrès dans le domaine des télécommunications. L'omniprésence grandissante des dispositifs communicants témoigne de l'expansion exponentielle qu'a connu ce domaine depuis les premières communications sans fil. À l'époque du all-in-one, la multiplication des applications au sein d'un même appareil nécessite l'utilisation de composants toujours plus performants et petits . Au cœur de ces systèmes, les filtres ont une importance grandissante. Dans un environnement spatial, les contraintes de fiabilité et d'encombrement sont particulièrement drastiques. Le choix des matériaux est par ailleurs limité, ce qui réduit les possibilités d'innovation. Cependant, l'amélioration de la précision et de la fiabilité dans les technologies de fabrication ouvre de nouvelles perspectives d'innovation et d'amélioration des composants. Ces travaux ont ainsi été motivés par ce souci d'apporter toujours plus de performance et de fiabilité, pour un encombrement moindre en tirant profit du potentiel offert par l'association du concept SIW et de la technologie LTCC. Les résultats mettent à jour de sérieuses dispersions technologiques. Cependant, le potentiel de l'association SIW/LTCC est démontré, et les difficultés rencontrées sont surmontables. Les filtres SIW en technologie LTCC présentent donc des atouts pour s'imposer comme une alternative sérieuse aux solutions existantes. / Control of communication and information is a key asset in the strategies of power, whether military, political or commercial. Whoever is able to transmit information faster takes advantage of others. This is the engine of growth and progress in the field of telecommunications. The growing ubiquity of communicating devices demonstrates the exponential growth experienced by this area since the first wireless communications. At the time of all-in-one, multiple applications within a single device requires the use of ever more powerful and small components. At the heart of these systems, filters are becoming increasingly important. In a space environment, reliability constraints and space are particularly dramatic. The choice of materials is also limited, which reduces the possibilities of innovation. However, the improvement of accuracy and reliability in manufacturing technologies opens new opportunities for innovation and improved components. This work has been motivated by the desire to bring more performances and reliability, a smaller footprint by taking advantage of the potential offered by combining the concept SIW and LTCC. The results update serious technological dispersions. However, the potential association SIW / LTCC is shown, and the difficulties are surmountable. SIW filters in LTCC therefore have advantages for itself as a serious alternative to existing solutions.

RésuméLa diffraction et la diffusion de rayons X sont utilisées dans de nombreux domaines de la physique, de la médecine et de la technologie. Des faisceaux de haute brillance sont néanmoins requis pour améliorer les performances de ces techniques. L’utilisation de la diffusion Compton d’un laser sur un faisceau d’électrons présente un grand intérêt pour la production de rayons X. Ce processus permet l’emploi d’un anneau de stockage d’électrons compacts et d’un résonateur optique pour accroître la puissance laser. Avec un tel système, un taux de collision laser-électron supérieur au méga Hertz est envisageable permettant d’atteindre un flux de rayons X de l’ordre de 10¹³ photons/s. Dans le premier chapitre, je décris les motivations pour le développement d’une source de rayons X basée sur la diffusion Compton et utilisant un résonateur optique. Je détermine aussi les performances que l’on peut attendre de ce type de sources ainsi que l’état de l’art actuel dans ce domaine. Dans le deuxième chapitre, je décris le comportement et les propriétés des résonateurs optiques en régime impulsionnel. J’introduis la notion de phase CEP (‘carrier envelope phase’) et je montre la nécessité de contrôler à la fois la fréquence de répétition de l’oscillateur laser et cette phase CEP. Le chapitre 3 est consacré aux oscillateurs fibrés à blocage de mode. Je montre les performances du laser que j’ai construit en utilisant le phénomène de rotation de polarisation non-linéaire.La méthode d’asservissement laser-résonateur optique ‘tilt locking’ est introduite au chapitre 4. Je décris tout d’abord les études de simulations et le montage expérimental qui ont permis de tester la méthode en régime impulsionnel. Je donne ensuite les résultats expérimentaux qui démontrent la faisabilité de la méthode ‘tilt locking’ en régime impulsionnel. J’effectue aussi une comparaison expérimentale des performances de la méthode ‘tilt locking’ avec la méthode classique ‘Pound-Drever-Hall’. Je termine le chapitre en indiquant une difficulté expérimentale de la méthode pour générer plusieurs signaux d’erreurs.Je décris la conception du système optique de la machine Compton TTX de l’université Tsinghua dans le chapitre 5. Les performances attendues pour cette machine sont des flux de rayons X compris entre 10¹º et 10¹³ photons/s. / X-ray diffraction and scattering, X-ray spectroscopy, and X-ray crystallography are widely used in the life sciences, material science, and medical diagnosis. High-quality and high-brightness X-rays are a strong requirement to improve applications. Inverse Compton scattering (ICS) X-ray source has attracted great interests worldwide lately. To significantly enhance the average X-ray photon flux, a compact electron storage-ring combined with a high finesse optical enhancement cavity (OEC) can be utilized. In such a system, the collision rate between the electron beam and the laser pulse is greatly increased to the MHz range, enabling a photon flux up to 10¹³ph/s.In the first chapter, I describe the motivation behind the development of OEC based on ICS X-ray source. The characteristics of this kind of X-ray source are summarized, compared to those of the conventional low-repetition-rate Terawatt laser system based on ICS X-ray source. The latest progress and research status of OEC based on ICS X-ray source are presented. Pulsed-laser injected high-finesse OEC stacking theory and properties are discussed in Chapter 2. Not only does the OEC based on ICS X-ray source require the laser pulse repetition rate to be matched to the free spectral range (FSR) of the cavity, where both also have to match the electron storage-ring circulation frequency. In addition, we have to match the phase shift of the laser repetition rate to the phase offset introduced by the dispersion of the cavity mirrors, since our cavity finesse design value is quite high. The stacking theory is analyzed in the frequency domain. Cavity properties, including cavity mirror dispersion, finesse, and FSR, are discussed in detail. A laser frequency comb and OEC coupling is analyzed also. The laser source development is presented in Chapter 3. We constructed a mode-locked fiber laser based on nonlinear polarization rotation. The locking model, locking techniques, and the theory, simulations and experimental tests of tilt locking (TL) in the pulsed laser injected high-finesse OEC are discussed in Chapter 4. We succeeded in locking a pulsed laser to a high-finesse cavity with the TL technique. The experimental results show that the TL and the Pound–Drever–Hall techniques have the same performance: stable locking, high sensitivity, and the same power coupling rate for picosecond laser pulse case, while the test results for full spectrum TL locking show that it is uneasy to align the split-photodiode to the beam waist.Based on the above experimental study and tests, we design the OEC system for Tsinghua University X-ray project in Chapter 5. The expected X-ray flux is 10¹º to 10¹³ ph/s. We detail every subsystem requirement.

O incessante aumento do volume de informações produzido por uma sociedade cada vez mais informatizada tem elevado drasticamente os requisitos quanto ao desenvolvimento de dispositivos capazes de suportar velocidades de operação cada vez mais elevadas em tamanhos cada vez mais reduzidos. No entanto, a contínua redução do tamanho desses dispositivos, celebrado através da lei de Moore, também produz um indesejável aumento na produção de calor durante a operação dos mesmos, comprometendo seu desempenho global. Uma alternativa promissora para aliviar, ou mesmo superar, estas limitações é oferecida pelos dispositivos ópticos integrados. No entanto, todo esse avanço esbarrava no fato de que as dimensões de tais dispositivos estavam restringidas fundamentalmente ao que é largamente conhecido como limite de difração (LD). Uma maneira de contornar essa limitação é obtida através da utilização de Plásmon Poláritons de Superfície, ou SPPs, que, de maneira simplificada, são ondas que se propagam ao longo da superfície de um condutor depositado sobre um dielétrico. Estas são essencialmente ondas de luz que são localizadas na superfície por causa de sua interação com os elétrons livres do condutor. Nesta interação, os elétrons livres respondem coletivamente oscilando em ressonância com a onda de luz. No presente trabalho, o fenômeno de geração de SPPs é estudado teoricamente e aplicado na modelagem de diversas estruturas de interesse científico e tecnológico, tais como acopladores direcionais e ressoadores. O objetivo principal é a obtenção de estruturas capazes de proporcionar propagação de SPPs por longas distâncias, permitindo, assim, estender ainda mais o leque de possíveis aplicações. As estruturas são investigadas prioritariamente no COMSOL Multiphysics, um aplicativo baseado em elementos finitos que permite solução vetorial de problemas eletromagnéticos. Os resultados obtidos até o momento permitem afirmar que o conceito de SPP de longa distância (long range SPP, LRSPP) podem ser aplicados com sucesso a estruturas geometricamente complexas como os ressoadores em anel e acopladores direcionais. / The continuous growth of knowledge produced by a society with increasing access to information technologies has demanded the development of communication devices capable of supporting high processing speeds at more and more reduced sizes. Nevertheless, the continuous reduction of the size of these devices, celebrated by the Moore\'s law, has also produced an undesirable increase of heat produced during the operation of the device itself, compromising its overall performance. A promising alternative to alleviate, or even overcome, these limitations has been offered by photonic integrated circuits. However, all the advance of photonic devices was restricted to what is known as diffraction limit. A fascinating way of circumventing this limit is now available to the scientific community, and consists in the generation of Surface Plasmon Polariton (SPP) waves. In a simplified manner, SPP waves are waves that propagate along a metal/dielectric interface. These waves are essentially localized at the metal/dielectric interface because of the interaction of light with free electrons of the metal. In this interaction, the free electrons respond collectively and oscillate resonantly with the incident light. In the present work, the phenomenon of SPP generation is theoretically investigated and applied to the modeling of several structures, such as directional couplers and resonators. The primary goal of this work is to design structures capable propagating SPP waves for long distances, known as long range SPP (LRSPP). The structures are investigated mostly with COMSOL Multiphysics, a finite elements based software that allows for the vectorial solution of electromagnetic problems. The results obtained so far are extremely encouraging, and prove that the LRSPP concept can be successfully applied to geometrically complex structures, such as couplers and ring resonators.

Le domaine des métamatériaux acoustiques connaît un succès grandissant depuis maintenant une vingtaine d’années, notamment en raison de phénomènes exotiques aux perspectives d’applications plus que prometteuses : « l’invisibilité » acoustique en est l’exemple le plus manifeste. Dans cette thèse, nous présentons des métamatériaux acoustiques à résonances locales, et qui permettent de générer aussi bien de l’opacité que de la transparence acoustique. C’est plus particulièrement le couplage entre résonateurs de différentes formes qui est l’objet de nos investigations. Notre étude nous a permis de comprendre que la diffraction est l’une des principales limitation à l’omnidirectionalité des performances d’opacité, que nous avons caractérisé au moyen d’un banc ultrasonore motorisé. Un tel phénomène de diffraction est dû à la présence d’un réseau, et nous proposons dans notre étude des solutions qui permettent de dépasser cette limitation. A partir de cette étude, nous avons ainsi pu transposer au domaine sonore les résultats obtenus pour les ultrasons, ce qui nous a permis de réaliser deux principaux types de dispositifs : des métamatériaux acoustiques aux fonctions de réflecteur d’une part et d’absorbant basses fréquences d’autre part. Enfin, l’étude en homogénéisation de ce type de structure a aussi révélé un effet de densité effective quasi-nulle, dont les applications vont du contrôle de front d’onde, à la furtivité acoustique. De tels résultats offrent un potentiel d’application dans de nombreux champs, que ce soit pour le bâtiment ,l’automobile, l’aéronautique, ou l’acoustique sous-marine. / For more than twenty years now, Acoustic Metamaterials are experiencing a growing success, partlydue to exotic phenomena and their wide variety of extremely promising applications: “InvisibilityCloak” is the most vivid example of this. In this thesis, we report on designs of locally resonantacoustic metamaterials, that enable us to generate both sound opacity and transparency. It is moreparticularly coupling between resonators having different forms which is the focus of our work.This study permit us to understand that diffraction is one of the main limitation of omnidirectionalcapabilities involving locally resonant perforated plates, as supported by experimental investigationsrealized using a motorized ultrasonic set-up. We proposed solutions to overcome such a limitation,in the case where the opacity mechanism uses diffraction gratings. From this, we transposed theresults obtained in ultrasonic frequencies to the audible range, which permits us to develop twomain kinds of acoustic devices based on metamaterials: broadband reflectors and low-frequencyabsorbers. Finally, homogenization study of such structures revealed an effect of density near-zero,with applications from shaping wave front, to acoustic furtiveness. Such results paves the way forpromising applications in various field, including construction, automotive and aeronautical industries,submarine acoustics and so on.

This dissertation contains two significant investigations. One is the development of the broadband microwave bandpass filters with high out-of-band performance. The other is the development of low-loss hybrids. These researches are parts of the National Aeronautic and Space Administrator (NASA)s mission to explore the universe. The former is focused on the techniques used in microstrip line bandpass filter design that help achieving both low in-band insertion loss and high out-of-band attenuation level. Moreover, these filters achieve very broadband out-of-band attenuation bandwidth. These techniques are related to the improvement of stepped impedance resonators, coupling between resonators and effective methods to allocate transmission zeros to suppress filters out-of-band spurious responses. The later is focused on the techniques used in planar magic-T designs such that the developed magic-T obtains high isolation between port E (difference port) and port H (sum port). Moreover, it obtains low-loss and broadband characteristics. These techniques are related to the development of the low-loss broadband microstrip-toslotline (MS-to-SL transition and the magic-T with a highly symmetric structure. The theoretical analysis and experimental measurements have been performed. The experimental results of both the filter and magic-T researches show significant improvement over their prior state-of-the-art designs by number of magnitude. The designs also reduce fabrication complexity.

Wireless communication is witnessing tremendous growth with the proliferation of various standards covering wide, local, and personal area networks, which operate at different frequency bands. Future wireless terminals will not only need to support multiple standards, but also need to be multi-functional to keep pace with the demands of the consumers. For such an implementation, the local oscillator (LO) turns out to be the bottleneck, which must exhibit frequency agility by generating a very wide range of carrier frequencies in order to access all the specified communication standards. This dissertation presents various design techniques to realize compact low-cost low-power and broadband oscillators in silicon-based technologies. The two most suitable techniques for broadband signal generation: (1) Use of widely tunable active inductor, and (2) Use of switched resonator have been thoroughly evaluated. A fully reconfigurable active inductor with a widely tunable feedback resistor has been proposed. Using the proposed tunable active inductor in a VCO generates frequency tuning ranges higher than 100%, and helps achieve the highest PFTN Figure-of-Merit among Si-based active inductor VCOs reported in literature till date. The large-signal non-linearity of the active inductor has been utilized to develop the first reported broadband harmonic active inductor-based VCO. The degradation of phase noise due to active inductors is partially solved by a noise optimization guideline for active inductors. Utilizing the low saturation voltage of HBT technologies and high-Q short line inductors seems to be very useful to reduce power consumption of cross-coupled VCOs while achieving low phase noise performance simultaneously.

In recent years, there has been an increasing interest on left handed metamaterials because of their possible innovative applications. The pioneer study introducing such materials was brought out by V. G. Veselago in 1968 [1]. In his work, Veselago proposed a medium having simultaneously negative electric permittivity and magnetic permeability and investigated its electromagnetic characteristics. He found out that the electric field, magnetic field and the propagation vector form a left handed triplet, thus named such materials as &ldquo / Left Handed Materials&rdquo / . Despite the significance of Veselago&rsquo / s inferences, the metamaterial theory stayed dormant for nearly 30 years. Towards the end of 1990s, the physically realizable left handed materials were built as the combination of two periodical structures / Split Ring Resonators (SRRs) and metallic thin wire arrays [4-5]. In this thesis, electrical and magnetic characteristics of the left handed metamaterials are theoretically investigated by using the analytical models for their permittivity and permeability functions with respect to frequency. For this purpose, first, two basic metamaterial structures / the Split Ring Resonators and Thin Metallic Wire Arrays are studied individually and their electrical and magnetic characteristics are examined. Finally, the composite left handed structure containing both SRRs and thin wires is studied to investigate the resulting simultaneous resonance properties and to estimate their overall effective permeability and permittivity functions.

This thesis presents the development of wafer level vacuum packaging processes using Au-Si eutectic and glass frit bonding contributing to the improvement of packaging concepts for a variety of MEMS devices. In the first phase of this research, micromachined resonators and pirani vacuum gauges are designed for the evaluation of the vacuum package performance. These designs are verified using MATLAB and Coventorware finite element modeling tool. Designed resonators and pirani vacuum gauges and previously developed gyroscopes with lateral feedthroughs are fabricated with a newly developed Silicon-On-Glass (SOG) process. In addition to these, a process for the fabrication of similar devices with vertical feedthroughs is initiated for achieving simplified packaging process and lower parasitic capacitances. Cap wafers for both types of devices with lateral and vertical feedthroughs are designed and fabricated. The optimization of Au-Si eutectic bonding is carried out on both planar and non-planar surfaces. The bonding quality is evaluated using the deflection test, which is based on the deflection of a thinned diaphragm due to the pressure difference between inside and outside the package. A 100% yield bonding on planar surfaces is achieved at 390&ordm / C with a v holding time and bond force of 60 min and 1500 N, respectively. On the other hand, bonding on surfaces where 0.15&mu / m feedthrough lines exist can be done at 420&ordm / C with a 100% yield using same holding time and bond force. Furthermore, glass frit bonding on glass wafers with lateral feedthroughs is performed at temperatures between 435-450&ordm / C using different holding periods and bond forces. The yield is varied from %33 to %99.4 depending on the process parameters. The fabricated devices are wafer level vacuum packaged using the optimized glass frit and Au-Si eutectic bonding recipes. The performances of wafer level packages are evaluated using the integrated gyroscopes, resonators, and pirani vacuum gauges. Pressures ranging from 10 mTorr to 60 mTorr and 0.1 Torr to 0.7 Torr are observed in the glass frit packages, satisfying the requirements of various MEMS devices in the literature. It is also optically verified that Au-Si eutectic packages result in vacuum cavities, and further study is needed to quantify the vacuum level with vacuum sensors based on the resonating structures and pirani vacuum gauges.

This thesis deals with the investigations on the atomic composition, chemical surface states and microstructural features of barium titanate and other electronic ceramics namely barium polytitantes, calcium manganites and magnesium calcium titanate by surface analytical techniques. After presenting a brief introduction on the ceramic materials studied in terms of their crystal structures, electrical properties, nonstoichiometry and interfacial characteristics, the thesis describes the synthesis of the ceramics and the methodology of the different surface analytical techniques utilized such as backscattering spectrometry (BS), an ion beam analysis (IBA) technique, X-ray photoelectron spectroscopy (XPS) and energy dispersive X-ray spectroscopy (EDS). The XPS investigations on the chemical surface states of polycrystalline barium titanate having well-defined electrical characteristics reveal the prevalence of Ba in two distinct chemical environments : the one corresponding to the lower binding energy is related to the dielectric while the other having higher binding energy is correlated to semiconducting properties of the ceramics. Processes such as abrasion or polishing make the surfaces more reactive and susceptible to atmospheric contamination. Sputter cleaning causes surface modification leading to changes in the Ba (3d) and Ti (2p) spectra. Studies on the surface atomic composition by BS and microstructural features of doped barium titanate ceramics reveal their interfacial characteristics in terms segregation of dopants or metal ion constituents. Surfaces of these ceramics exhibit cationic as well as anionic nonstoichiometry depending on the processing steps involved. Ceramics synthesized by oxalate precursor route are Ti-rich while those prepared by gel-to-crystallite method are Ba-rich. These are correlated to the chemical processes and background impurities which in turn control the microstructures. Barium titanate substitued with > 1 at. % Mn are deficient in oxygen and exist as the hexagonal polymorph. Acceptors segregate at the grain boundaries accompanied by the enrichment of Ti leading to PTCR or GBLC characteristics. The oxygen nonstoichiometry prevailing in the surface regions of differently processed calcium manganites is investigated by way of depth profile measurements involving 16O(a,a) 16O resonant scattering. These studies reveal extensive compositional heterogeneity across the surface layers particularly in the manganite specimens annealed in lower po2 leading to the stabilization of brownmillerite phase. Two of the microwave dielectric ceramics namely dibarium nona-titanate and barium tetra-titanate with suitable variations in Ba:Ti ratios have been synthesized by the carbonate-gel precipitation. The corresponding dense ceramics have high permittivity (~ 52) and low temperature coefficient of permittivity (TCK ~ 5 ppm /0C). Extensive miscibility between the ilmenite-type MgTiO3 and perovskite-type CaTiO3 over a wide compositional range is brought about by the simultaneous equivalent substitution of Al3+ + La3+. The resulting (Mg1-(x+y)CaxLay)(Ti1-yAly)O3 ceramics exhibit improved microwave dielectric properties by way of high permittivity, low TCK and high quality factor. The microarea elemental distribution and chemical surface state studies reveal the complexity in the Mg/Ca distribution and its correlation with the solid state miscibility as well as dielectric properties. The discontinuous changes in the local site symmetry of the cationic substituents in these ceramics have been investigated by the photoluminescence spectra using Pr3+ as the emission probe.

An optical cavity comprises a set of mirrors between which light can be reflected a number of times. The selectivity and stability of optical cavities make them extremely useful as frequency references or discri­mi­nators. With light coupled into the cavity, a sample placed inside a cavity will experience a significantly increased interaction length. Hence, they can be used also as amplifiers for sensing purposes. In the field of laser spectroscopy, some of the most sensitive techniques are therefore built upon optical cavities. In this work optical cavities are used to measure properties of gas samples, i.e. absorption, dispersion, and refractivity, with unprecedented precision. The most sensitive detection technique of all, Doppler-broadened noise-immune cavity enhanced optical heterodyne molecular spectrometry (Db NICE-OHMS), has in this work been developed to an ultra-sensitive spectroscopic technique with unprecedented detection sensitivity. By identifying limiting factors, realizing new experimental setups, and deter­mining optimal detection conditions, the sensitivity of the technique has been improved several orders of magnitude, from 8 × 10-11 to 9 × 10-14 cm-1. The pressure interval in which NICE-OHMS can be applied has been extended by deri­vation and verification of dispersions equations for so-called Dicke narrowing and speed dependent broadening effects. The theoretical description of NICE-OHMS has been expanded through the development of a formalism that can be applied to the situations when the cavity absorption cannot be considered to be small, which has expanded the dynamic range of the technique. In order to enable analysis of a large number of molecules at their most sensitive transitions (mainly their funda­mental CH vibrational transitions) NICE-OHMS instrumentation has also been developed for measurements in the mid-infrared (MIR) region. While it has been difficult to realize this in the past due to a lack of optical modulators in the MIR range, the system has been based on an optical para­metric oscillator, which can be modulated in the near-infrared (NIR) range. As the index of refraction can be related to density, it is possible to retrieve gas density from measurements of the index of refraction. Two such instru­men­tations have been realized. The first one is based on a laser locked to a measure­ment cavity whose frequency is measured by compassion with an optical frequency comb. The second one is based on two lasers locked to a dual-cavity (i.e. one reference and one measurement cavity). By these methods changes in gas density down to 1 × 10-9 kg/m3 can be detected. All instrumentations presented in this work have pushed forward the limits of what previously has been considered measurable. The knowledge acquired will be of great use for future ultrasensitive cavity-based detection methods.