The objective of the current work has been to develop a system which will allow continuous monitoring of areal mass density, lateral stress, and temperature during a process with real time presentation of results making possible either manual or automated control of the process. The system uses three quartz resonators of different crystallographic cuts (AT cut, BT cut and SC cut) in the same environment. The development of an algorithm to solve a system of equations representing a complete representation of the temperature characteristics of the three resonators is presented. This is followed by an analysis of the potential accuracy of the system and the limitations imposed by the assumptions made in the mathematical models of the system. Sputtering yields were verified using Rutherford backscattering analysis. Experimental apparatus including the physical mounting of the resonators in an experimental environment, details of the oscillator circuitry and frequency counter, and use of a personal computer for data acquisition and control are described. The results presented show, in addition to the mass change and lateral stress build-up which occur when sputtering a gold film with an argon ion beam, the radiation induced temperature rise and the radiation induced stress caused by temperature gradients. An experiment using beams of Sb+ at 50keV and Sb2+ at 100keV has been used to demonstrate the enhancement of sputtering yield that occurs when Au films are bombarded with monomers and dimers of Sb at the same energy per atom. Results are compared with simulations using both the TRIM program and molecular dynamics code.

At the Tandem accelerator in the Ångström laboratory, Uppsala, Rutherford backscattering spectrometry (RBS) is one of the methods used for thin film analysis, providing information on thickness and composition. The films are commonly grown on silicon substrates, whose crystal structure gives rise to channelling effects (a strong angular dependence in the intensity of the signal), which can cause faulty results. For other samples, channelling may also be used to get information on crystal structure and quality. This work demonstrates new functions to the existing software, aiming at minimizing these effects. The new methods have been tested by measurements both in channelling directions and in directions determined by the old method. In comparison with the earlier method the worst-case error is of order 80 %,commonly around 20 %, but it is possible to achieve an error which is not detectable. It is worth to note that the stated errors appear in tests oriented for maximum channelling, where effects without the new methods give an error corresponding to an apparent thin-film thickness almost 18 times that of the actual thickness. / Vid Tandemlabbet i Ångströmlaboratoriet, Uppsala, används bland annat Rutherford backscattering spectrometry (RBS) för att undersöka egenskaper, t.ex tjocklek och sammansättning, hos tunnfilmer som ofta är odlade på kiselsubstrat. Kiselkristallernas struktur ger upphov till kanaliseringseffekter, d.v.s starkt vinkelberoende intensitet, som i detta sammanhang kan ge felaktiga resultat. För andra prover kan kanaliseringseffekter användas för att få information om kristallstruktur och kvalitet. I det här arbetet demonstreras nyskrivna funktioner till befintlig mjukvara med syfte att minimera dessa effekter. De nya funktionerna har testats genom provtagningar i orienteringar som är gynnsamma och icke gynnsamma för kanalisering. Vid jämförelse med tidigare metoder ger de nya metoderna ett fel på i värsta fall ca. 80%, med bättre parametrar sjunker felet till ca 20 % och med rätt val av parametrar försvinner felet jämfört med tidigare metod. Värt att notera är att ovanstående maximala fel uppstår vid test orienterat för maximal kanalisering, där effekterna utan de nya metoderna ger ett fel på uppemot en faktor 18.

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<p><font face="Times-Roman"> <p align="left">The growth of the Internet has led to many interesting developments for both educational and commercial purposes. In this project an attempt was made to use the Internet for a research purpose to facilitate the determination of the thermal stability of diffusion barriers. Another purpose of this thesis is to investigate the teaching and training use of the Internet through the development of online interactive tools and activities as well as materials. The training aspects are mentioned as it is hoped that this thesis can serve as a form of documentation of the use of the Internet, while the central part was the determination of thermal stability of TiN, TaN and TiW diffusion <font face="Times-Roman">barriers on Ag.</font></p> </font></p>

The purpose of this study is to investigate the role of strain in the accumulation of crystalline defects created by ion irradiation. Previous studies state that strained Si1xGex is more easily amorphized by ion irradiation than unstrained, bulk Si in a periodic superlattice structure; however, the reason for preferential amorphization of the strained Si1xGex layer in the periodic structure of strained and unstrained layers is not well understood. In this study, various ion irradiations will be carried out on SiGe strained layer superlattices grown on (100)-orientation bulk Si by low temperature molecular beam epitaxy. The samples under investigation are 50 nm surface Si0:8Ge0:2/bulk Si and 50 nm surface Si/60 nm Si0:8Ge0:2/bulk Si. Defects will be created in both surface and buried SiGe strained layers by medium and high energy light ion irradiation. The amount of permanently displaced atoms will be quantified by channeling Rutherford backscattering spectrometry. The amorphization model, the path to permanent damage creation, of bulk Si and surface strained SiGe will be investigated. The strain in surface and buried Si0:8Ge0:2 layers will be measured by comparison to bulk Si with Rutherford backscattering spectrometry by a novel technique, channeling analysis by multi-axial Rutherford backscatter- ing spectrometry, and the limitations of measuring strain by this technique will be explored. Results of this study indicated that the amorphization model, the number of ion collision cascades that must overlap to cause permanent damage, of strained Si0:8Ge0:2 is similar to that of bulk Si, suggesting that point defect recombination is less efficient in strained Si0:8Ge0:2. Additionally, a surface strained Si0:8Ge0:2 is less stable under ion irradiation than buried strained Si0:8Ge0:2. Repeated analysis by multi-axial channeling Rutherford backscattering spectrometry, which requires high fluence of 2 MeV He ions, proved destructive to the surface strained Si0:8Ge0:2 layer.

<p><font face="Times-Roman"> <p align="left">The growth of the Internet has led to many interesting developments for both educational and commercial purposes. In this project an attempt was made to use the Internet for a research purpose to facilitate the determination of the thermal stability of diffusion barriers. Another purpose of this thesis is to investigate the teaching and training use of the Internet through the development of online interactive tools and activities as well as materials. The training aspects are mentioned as it is hoped that this thesis can serve as a form of documentation of the use of the Internet, while the central part was the determination of thermal stability of TiN, TaN and TiW diffusion <font face="Times-Roman">barriers on Ag.</font></p> </font></p>

abstract: Nickel-Copper metallization for silicon solar cells offers a cost effective alternative to traditional screen printed silver paste technology. The main objective of this work is to study the formation of nickel silicide contacts with and without native silicon dioxide SiO2. The effect of native SiO2 on the silicide formation has been studied using Raman spectroscopy, Rutherford backscattering spectrometry and sheet resistance measurements which shows that SiO 2 acts as a diffusion barrier for silicidation at low temperatures of 350°C. At 400°C the presence of SiO2 results in the increased formation of nickel mono-silicide phase with reduced thickness when compared to samples without any native oxide. Pre and post-anneal measurements of Suns Voc, photoluminescence and Illuminated lock in thermography show effect of annealing on electrical characteristics of the device. The presence of native oxide is found to prevent degradation of the solar cells when compared to cells without any native oxide. A process flow for fabricating silicon solar cells using light induced plating of nickel and copper with and without native oxide (SiO2) has been developed and cell results for devices fabricated on 156mm wafers have been discussed. / Dissertation/Thesis / Masters Thesis Materials Science and Engineering 2016

A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization of thin films at temperatures from -100 to 800 °C is described. The implemented techniques comprise magnetron sputtering, ion irradiation, Rutherford backscattering spectrometry, Raman spectroscopy and spectroscopic ellipsometry. The capability of the cluster tool is demonstrated for a layer stack MgO/ amorphous Si (~60 nm)/ Ag (~30 nm), deposited at room temperature and crystallized with partial layer exchange by heating up to 650°C. Its initial and final composition, stacking order and structure were monitored in situ in real time and a reaction progress was defined as a function of time and temperature.

>Magister Scientiae - MSc / To study nuclear reactions and nuclear structures, target materials are bombarded with high-energy particles. The target material can either be in a form of a metal film or gas. A target material designed to study certain nuclear reactions or to produce nuclei to study their structure should yield as minimum as possible of competing reactions under ion bombardment. This requires a chemically and isotopically pure target material prepared as a self supporting thin film, or as alternative, prepared on a thin career foil. Additional requirement for lifetime measurement experiments are homogeneity and precise thickness of the target material. Some of the data obtained from the stopping power experiment where targets of 114Cd were used for lifetime measurement are presented. Moreover, a nuclear target should influence the spectroscopic resolution as little as possible. Thus, film thickness must be adjusted to the respective reaction under study while observing the optimum thickness homogeneity.

A review of the main natural dyes (particularly yellow flavonoids and red anthraquinones) and proteinaceous substrates used in Historical Tapestries and North American porcupine quill work was undertaken, and is summarised in Chapter 1. The analysis of natural dyes which have been used on museum artefacts other than textiles has received little systematic study, particularly those of non-European origin. In this research, the use of Ultra Performance Liquid Chromatography (UPLC) for study of natural dyes found on historical textiles and ethnographical objects decorated with porcupine quill work is explored; this required a transfer of existing analytical protocols and methodology. The advantages of using Ultra Performance Liquid Chromatography (UPLC) was evaluated through a method development based on the separation and quantification of ten flavonoid and anthraquinone dyes as described in Chapter 2. These methods were then applied to the characterisation of the dye sources found on a group of sixteenth century historical tapestries which form an important part of the Burrell Collection in Glasgow and are believed to have been manufactured in an English workshop (Chapter 3) and also to the analysis of some late nineteenth century North American porcupine quill work from a collection owned by National Museums Scotland (Chapter 5); allowing exciting conclusions to be drawn in each case about the range of dyestuffs used in their manufacture. The second aim of this research was the development of methodology for the non-invasive quantification of metal ion residues on porcupine quill substrates. This was achieved through a comparative study of reference porcupine quills prepared in-house with dyebaths containing a range of metal ion concentrations (copper and tin). The concentration of metal ions sorbed by the porcupine quills was then quantified with Inductively Coupled Plasma (ICP) coupled to Optical Emission Spectrometry (OES) and non-invasive Particle Induced X-Ray Emission analysis (PIXE) coupled with Rutherford Backscattering Spectrometry (RBS) as described in Chapter 4. The responses provided by the different methods were compared and they were then applied to the study of micro-samples collected from mid-nineteenth century Northern Athapaskan porcupine quill work. Unexpectedly, the use of UPLC analysis and RBS-PIXE analysis allowed the characterisation of traded European natural dyes used with metallic mordants (copper and tin) on these samples, highlighting how European contact impacted on traditional Athapaskan porcupine quill work in the late nineteenth century (Chapter 5).