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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"strainedsi ono SGOI"" "subject:"strainedsi onn SGOI""

1

SiGe-On-Insulator (SGOI): Two Structures for CMOS Application

Cheng, Zhiyuan, Jung, Jongwan, Lee, Minjoo L., Nayfeh, Hasan, Pitera, Arthur J., Hoyt, Judy L., Fitzgerald, Eugene A., Antoniadis, Dimitri A. 01 1900 (has links)
Two SiGe-on-insulator (SGOI) structures for CMOS application are presented: surface-channel strained-Si on SGOI (SSOI) and dual-channel SGOI structures. Comparisons between two structures are made from both device performance and CMOS process point of view. We have demonstrated both structures on SGOI, and have fabricated n-MOSFET’s and p-MOSFET’s on those two structures respectively. Device characteristics are presented. The devices show enhancement on both electron and hole mobilities. / Singapore-MIT Alliance (SMA)
strained-Si
SiGe
SiGe-on-Insulator
SGOI
strained-Si on SGOI
SSOI
SOI
dual-channel
surface channel
MOSFET
mobility
bonding
etch-back

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