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Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscopeYamashita, Masatsugu, Otani, Chiko, Kawase, Kodo, Matsumoto, Toru, Nikawa, Kiyoshi, Kim, Sunmi, Murakami, Hironaru, Tonouchi, Masayoshi 13 May 2009 (has links)
No description available.
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