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Deformable mirrors are the standard adaptive optical elements for aberration correction in confocal microscopy. Their usage leads to increased contrast and resolution. However, these improvements are achieved at the cost of bulky optical setups. Since spherical aberrations are the dominating aberrations in confocal microscopy, it is not required to employ all degrees of freedom commonly offered by deformable mirrors. In this contribution, we present an alternative approach for aberration correction in confocal microscopy based on a novel adaptive lens with two degrees of freedom. These lenses enable both axial scanning and aberration correction, keeping the setup simple and compact. Using digital holography, we characterize the tuning range of the focal length and the spherical aberration correction ability of the adaptive lens. The operation at fixed trajectories in terms of focal length and spherical aberrations is demonstrated and investigated in terms of reproducibility. First results indicate that such adaptive lenses are a promising approach towards high-resolution, high-speed three-dimensional microscopy.

We present a fluid-membrane lens with two piezoelectric actuators that offer versatile, circular symmetric lens surface shaping. A wavefront-measurement-based control system ensures robustness against creeping and hysteresis effects of the piezoelectric actuators. We apply the adaptive lens to correct synthetic aberrations induced by a deformable mirror. The results suggest that the lens is able to correct spherical aberrations with standard Zernike coefficients between 0 μm and 1 μm, while operating at refractive powers up to about 4m-1. We apply the adaptive lens in a custom-built confocal microscope to allow simultaneous axial scanning and spherical aberration tuning. The confocal microscope is extended by an additional phase measurement system to include the control algorithm. To verify our approach, we use the maximum intensity and the axial FWHM of the overall confocal point spread function as figures of merit. We further discuss the ability of the adaptive lens to correct specimen-induced aberrations in a confocal microscope.

Diese Arbeit untersucht Fe-Oxid-Systeme mit Hilfe einer Kombination aus Mikroskopie (LEEM, Röntgen PEEMs), Beugung (LEED) und Spektroskopie (XPS) und berichtet über die elektronenoptische Entwicklung adaptiver Optiken und Aberrationskorrekturen für einen elektrostatischen abbildenden Energieanalysator. Experimentell untersuchten wir Magnetit und Hämatit Dünnschichten. Ihre Kristallstruktur, Stöchiometrie sowie deren Oberflächenterminierung können durch spezielle Herstellungsverfahren eingestellt werden. Unter Ausnutzung der Echtzeit-Beobachtung mit Mikroskopie, Beugung und Spektroskopie untersuchten wir (a) die Oberflächenmodifikationen von Fe3O4 und α-Fe2O3-Dünnschichten durch Fe Ablagerung; (b) die reversible Phasenumwandlung Fe3O4 ↔ α-Fe2O3 unter verschiedenen Oxidationsbedingungen; (c) die Bildung der metastabilen γ-Fe2O3-Phase und (d) die Wechselwirkung von Fe3O4 und α-Fe2O3 Oberflächen mit unterstützten Pt-Nanopartikeln. Es wurde ein Algorithmus entwickelt, um den LEEM Bildkontrast für inhomogene 2D Oberflächen zu simulieren. Abschließend wird das Design eines Energiefilter-System vorgestellt, das in ein PEEM/LEEM Mikroskop der neuen Generation eingebaut werden wird. Das System basiert auf dem gleichen Abbildungsprinzip wie der magnetische Ω-Filter, der erfolgreich im aktuellen SMART Mikroskop eingesetzt wird. Das neue Instrument zielt auf die Verbesserung der Orts- und Energieauflösung im XPEEM (5 nm und 70 meV). Die Mehrzahl der möglichen Aberrationen zweiter Ordnung wird durch die intrinsische Symmetrie selbstkompensiert. Die Wirkung der anderen Aberrationen wird durch ein geeignetes Design der Verzögerungs- und Beschleunigungsoptiken kombiniert mit einer optimierten Passenergie reduziert. Darüber hinaus kompensieren zusätzliche Hexapole die restlichen dominierenden Aberrationen, wodurch eine Orts- und Energieauflösung besser als 2 nm bzw. 75 meV erreicht wird. / This work presents the investigation of Fe-oxide systems, combining microscopy (LEEM, X-PEEM), diffraction (LEED) and spectroscopy (XPS), and the electron-optical development of adaptive optics and aberration corrections for an electrostatic imaging energy analyzer. Experimentally, we studied magnetite (Fe3O4) and hematite (α-Fe2O3) thin films. Their crystal structure, stoichiometry as well as their surface termination can be tuned by special preparation procedures. Taking advantage of real time observation with microscopy, diffraction and spectroscopy, we investigated (a) the surface modifications of Fe3O4 and α-Fe2O3 thin films by Fe deposition; (b) the reversible phase transformation Fe3O4 ↔ α-Fe2O3 under different oxidation conditions; (c) the formation of the metastable γ-Fe2O3 phase and (d) the interaction of Fe3O4 and α-Fe2O3 surfaces with supported Pt nanoparticles . An algorithm was developed to simulate the LEEM image contrast for inhomogeneous 2D surfaces. The possible application to experimental data and the limitation will be discussed. Finally, the design of an energy filtering system is presented, which will be implemented in a new generation PEEM/LEEM microscope. The system bases on the same imaging principle as the magnetic Ω-filter, successfully implemented in the actual SMART microscope. The new instrument aims for the improvement of lateral and energy resolution in X-PEEM (5 nm and 70 meV, respectively). The majority of the possible second order aberrations are self-compensated by intrinsic symmetry. The effect of the other aberrations is reduced by an adequate design for the deceleration-acceleration optics in combination with optimized pass energy. Furthermore, additional hexapole multipoles compensate for the residual dominating aberrations, yielding in the lateral resolution and energy resolution better than 2 nm and 75 meV, respectively.