La miniaturisation des systèmes électroniques est aujourd’hui l’un des enjeux majeurs de la recherche et demande une importante évolution des sources d’énergie. Les micro-accumulateurs tout solide sont une réponse parfaitement adaptée à ce besoin. Leur capacité est toutefois actuellement limitée à 50-200 µAh.cm-2 du fait de la difficulté d’employer des couches de matériaux actifs d’épaisseur supérieure à 5 µm. L’une des pistes pour augmenter la capacité spécifique des micro-accumulateurs est de déposer les différents matériaux sur un substrat texturé. Les techniques de dépôt sous vide classiques ne permettent pas de déposer des films conformes sur de telles surfaces, principalement à cause d’effets d’ombrage. L’objectif de ce travail de thèse a donc été de développer de nouvelles voies de dépôt pour la réalisation de micro-accumulateurs tout-solide 3D. Deux voies de dépôt chimique ont été explorées : la synthèse sol-gel et l’électrodépôt sous conditions hydrothermales. La synthèse sol-gel n’a pas permis d’aboutir à la réalisation de films denses et conformes. Cependant, elle s’est avérée très intéressante pour synthétiser des poudres de LiCoO2 rhomboédrique présentant d’importantes surfaces spécifiques, sans étape de broyage, à des températures de synthèse modérées (600-700°C). Le dépôt électrolytique en conditions hydrothermales s’est quant à lui révélé très prometteur tant pour sa vitesse de dépôt importante, jusqu’à 300 nm.mn-1, que pour sa température de synthèse basse, à partir de 125°C, sans nécessiter de recuit. Les films synthétisés présentent d’excellentes performances électrochimiques en électrolyte liquide et une conformité sur des substrats texturés supérieure à 97 %. / The miniaturization of electronic systems is today a main topic of research and requires an important evolution of energy sources. All solid state micro-batteries are a perfectly adapted solution for this need. However, their specific capacity is limited to 50-200 µAh.cm-2 due to the difficulty to use films of active materials thickness over than 5 µm. One of the answers to enhance micro-batteries specific capacity is to deposit materials on textured substrate. Nevertheless, classical vacuum deposition techniques are not adapted to deposit conformal thin films on such surfaces because of shadow effects. The aim of this PhD-work was to develop new synthesis routes to realize 3D all solid state micro-batteries. Two chemical synthesis routes were studied: the sol-gel method and the electrodeposition under hydrothermal conditions. The sol-gel synthesis was not efficient to realize conformal and dense films. However, this technique was very effective to obtain rhombohedra LiCoO2 powders with high specific surface, without grinding step, at moderate temperature (600-700°C). The electrodeposition under hydrothermal conditions was very promising, both for its high deposition rate (up to 300 nm.mn-1) and its low synthesis temperature (from 125°C) without any annealing. The synthesized films exhibited excellent electrochemical performances in liquid electrolyte and a conformity higher than 97 % on textured substrates.

This paper reports a novel and remarkably facile approach towards vertically aligned nanosheets on three-dimensional (3D) Ni foams. Conducting polypyrrole (PPy) sheets were grown on Ni foam through the volatilization of the environmentally friendly solvent from an ethanol–water solution of pyrrole (Py), followed by the polymerization of the coated Py in ammonium persulfate (APS) solution. The PPy-decorated Ni foams and commercial activated carbon (AC) modified Ni foams were employed as the two electrodes for the assembly of flexible all-solid-state asymmetric supercapacitors. The sheet-like structure of PPy and the macroporous feature of the Ni foam, which render large electrode–electrolyte interfaces, resulted in good capacitive performance of the supercapacitors. Moreover, a high energy density of ca. 14 Wh kg−1 and a high power density of 6.2 kW kg−1 were achieved for the all-solid-state asymmetric supercapacitors due to the wide cell voltage window.

This paper reports a novel and remarkably facile approach towards vertically aligned nanosheets on three-dimensional (3D) Ni foams. Conducting polypyrrole (PPy) sheets were grown on Ni foam through the volatilization of the environmentally friendly solvent from an ethanol–water solution of pyrrole (Py), followed by the polymerization of the coated Py in ammonium persulfate (APS) solution. The PPy-decorated Ni foams and commercial activated carbon (AC) modified Ni foams were employed as the two electrodes for the assembly of flexible all-solid-state asymmetric supercapacitors. The sheet-like structure of PPy and the macroporous feature of the Ni foam, which render large electrode–electrolyte interfaces, resulted in good capacitive performance of the supercapacitors. Moreover, a high energy density of ca. 14 Wh kg−1 and a high power density of 6.2 kW kg−1 were achieved for the all-solid-state asymmetric supercapacitors due to the wide cell voltage window.

The deposition of boron oxide (B₂O₃) films on silicon substrates is of significant interest in microelectronics for ultrashallow doping applications. However, thickness control and conformality of such films has been an issue in high aspect ratio 3D structures which have long replaced traditional planar transistor architectures. B₂O₃ films are also unstable in atmosphere, requiring a suitable capping barrier for passivation. The growth of continuous, stoichiometric B₂O₃ and boron nitride (BN) films has been demonstrated in this dissertation using Atomic Layer Deposition (ALD) and enhanced ALD methods for doping and capping applications. Low temperature ALD of B₂O₃ was achieved using BCl₃/H₂O precursors at 300 K. In situ x-ray photoelectron spectroscopy (XPS) was used to assess the purity and stoichiometry of deposited films with a high reported growth rate of ~2.5 Å/cycle. Free-radical assisted ALD of B₂O₃ was also demonstrated using non-corrosive trimethyl borate (TMB) precursor, in conjunction with mixed O₂/O-radical effluent, at 300 K. The influence of O₂/O flux on TMB-saturated Si surface was investigated using in situ XPS, residual gas analysis mass spectrometer (RGA-MS) and ab initio molecular dynamics simulations (AIMD). Both low and high flux regimes were studied in order to understand the trade-off between ligand removal and B₂O₃ growth rate. Optimization of precursor flux was discovered to be imperative in plasma and radical-assisted ALD processes. BN was investigated as a novel capping barrier for B₂O₃ and B-Si-oxide films. A BN capping layer, deposited using BCl₃/NH₃ ALD at 600 K, demonstrated excellent stoichiometry and consistent growth rate (1.4 Å/cycle) on both films. Approximately 13 Å of BN was sufficient to protect ~13 Å of B₂O₃ and ~5 Å of B-Si-oxide from atmospheric moisture and prevent volatile boric acid formation. BN/B₂O₃/Si heterostructures are also stable at high temperatures (>1000 K) commonly used for dopant drive-in and activation. BN shows great promise in preventing upward boron diffusion which causes a loss in the dopant dose concentration in Si. The capping effects of BN were extended to electrochemical battery applications. ALD of BN was achieved on solid Li-garnet electrolytes using halide-free tris(dimethylamino)borane precursor, in conjunction with NH₃ at 723 K. Approximately 3 nm of BN cap successfully inhibited Li₂CO₃ formation, which is detrimental to Li-based electrolytes. BN capped Li-garnets demonstrated ambient stability for at least 2 months of storage in air as determined by XPS. BN also played a crucial role in stabilizing Li anode/electrolyte interface, which drastically reduced interfacial resistance to 18 Ω.cm², improved critical current density and demonstrated excellent capacitance retention of 98% over 100 cycles. This work established that ALD is key to achieving conformal growth of BN as a requirement for Li dendrite suppression, which in turn influences battery life and performance.

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Porous carbons are promising anode materials for next generation lithium batteries due to their large lithium storage capacities. However, their highsloping capacity during lithiation and delithiation as well as capacity fading due to intense formation of solid electrolyte interphase (SEI) limit their gravimetric and volumetric energy densities. Herein we compare a microporous carbide derived carbon material (MPC) as promising future anode for all solid state batteries with a commercial high performance hard carbon anode. The MPC obtains high and reversible lithiation capacities of 1000 mAh g 1 carbon in half cells exhibiting an extended plateau region near 0 V vs. Li/Liþ preferable for full cell application. The well defined microporosity of the MPC with a specific surface area of >1500 m2 g 1 combines well with the argyrodite type electrolyte (Li6PS5Cl) suppressing extensive SEI formation to deliver high coulombic efficiencies. Preliminary full cell measurements vs. nickel rich NMC cathodes (LiNi0.9Co0.05Mn0.05O2) provide a considerably improved average potential of 3.76 V leading to a projected energy density as high as 449 Wh kg 1 and reversible cycling for more than 60 cycles. 7Li Nuclear Magnetic Resonance spectroscopy was combined with ex situ Small Angle X ray Scattering to elucidate the storage mechanism of lithium inside the carbon matrix. The formation of extended quasi metallic lithium clusters after electrochemical lithiation was revealed.

Le marché du stockage de l'énergie est en perpétuelle expansion, tant pour les applications nomades que fixes. Afin de répondre aux exigences requises pour les diverses applications (appareils électroniques, véhicules hybrides et électriques, stockage des énergies renouvelables…), des batteries toujours plus performantes, compactes et légères doivent être développées. Pour cela, les batteries utilisant du lithium métallique en tant qu'anode sont les plus attractives en termes de densités d'énergies. Néanmoins, l'utilisation d'électrolytes liquides conventionnels, généralement des solvants organiques inflammables, dans de tels dispositifs soulève des problématiques de sécurité. Les travaux de recherche présentés dans ce manuscrit concernent l'étude de matériaux vitreux pouvant être utilisés en tant qu'électrolyte solide afin de permettre le développement de batteries tout-solide sûres et performantes. Des verres de sulfures au lithium, attractifs pour leurs propriétés de conduction ionique, sont étudiés et caractérisés. Les propriétés de conduction ionique dans les verres étant toujours mal comprises et sujettes à controverses, l'analyse structurale des verres présente ici un réel intérêt pour une meilleure compréhension des corrélations entre structure et propriétés. Un effort de recherche a donc été porté sur l'étude de l'ordre local dans les verres préparés via différentes techniques d'analyse structurale complémentaires. Enfin, les matériaux vitreux, sont de manière générale relativement faciles à mettre en forme. Les verres étudiés dans ce manuscrit peuvent alors également être utilisés en tant qu'électrolytes sous forme de couches minces dans les micro-batteries. Des premiers essais de dépôts par pulvérisation cathodique RF magnétron de couches minces conductrices ont donc été effectués et constituent la première brique à la fabrication de micro-batteries. / The energy storage market is in constant growth for both portable and stationary applications. To satisfy the requirements of various applications (electronic devices, hybrid-electric vehicles, renewable energy storage…), always more efficient, more compact and lightweight batteries have to be developed. Then, thanks to their high energy densities, batteries using Li metal anodes are the most promising to complete this challenge. However, the use of conventional liquid electrolytes raises safety issues, mainly related to the flammability of the organic liquid. In this thesis, glassy materials, exhibiting great interest towards developing solid electrolytes are considered and might enable the development of safe and efficient all-solid-state batteries. Here, Li-sulfide glasses, attractive for their ionic conduction properties, have been studied and characterized. The ionic conduction properties of glasses are still misunderstood and controversial, the structural investigation of glasses is of great interest in order to get a better understanding of structure-properties relationship. Then, the short and intermediate range order of prepared glasses have been investigated by the mean of various complementary structural analysis techniques. Finally, glassy materials are usually quite easy to shape. Thus, studied glasses in this thesis can also be used as thin-film electrolytes in microbatteries. First tests of sputtering of conducting thin-films have been performed by RF magnetron sputtering and constitute a first step in order to design microbatteries.