Este trabalho teve como objetivo estudar os transistores de tunelamento por efeito de campo em estruturas de nanofio (NW-TFET), sendo realizado através de analises com base em explicações teóricas, simulações numéricas e medidas experimentais. A fim de avaliar melhorar o desempenho do NW-TFET, este trabalho utilizou dispositivos com diferentes materiais de fonte, sendo eles: Si, liga SiGe e Ge, além da variação da espessura de HfO2 no material do dielétrico de porta. Com o auxílio de simulações numéricas foram obtidos os diagramas de bandas de energia dos dispositivos NW-TFET com fonte de Si0,73Ge0,27 e foi analisada a influência de cada um dos mecanismos de transporte de portadores para diversas condições de polarização, sendo observado a predominância da influência da recombinação e geração Shockley-Read-Hall (SRH) na corrente de desligamento, do tunelamento induzido por armadilhas (TAT) para baixos valores de tensões de porta (0,5V > VGS > 1,5V) e do tunelamento direto de banda para banda (BTBT) para maiores valores tensões de porta (VGS > 1,5V). A predominância de cada um desses mecanismos de transporte foi posteriormente comprovada com a utilização do método de Arrhenius, sendo este método adotado em todas as análises do trabalho. O comportamento relativamente constante da corrente dos NW-TFETs com a temperatura na região de BTBT tem chamado a atenção e por isso foi realizado o estudo dos parâmetros analógicos em função da temperatura. Este estudo foi realizado comparando a influência dos diferentes materiais de fonte. O uso de Ge na fonte, permitiu a melhora na corrente de tunelamento, devido à sua menor banda proibida, aumentando a corrente de funcionamento (ION) e a transcondutância do dispositivo. Porém, devido à forte dependência de BTBT com o campo elétrico, o uso de Ge na fonte resulta em uma maior degradação da condutância de saída. Entretanto, a redução da espessura de HfO2 no dielétrico de porta resultou no melhor acoplamento eletrostático, também aumentando a corrente de tunelamento, fazendo com que o dispositivo com fonte Ge e menor HfO2 apresentasse melhores resultados analógicos quando comparado ao puramente de Si. O uso de diferentes materiais durante o processo de fabricação induz ao aumento de defeitos nas interfaces do dispositivo. Ao longo deste trabalho foi realizado o estudo da influência da densidade de armadilhas de interface na corrente do dispositivo, demonstrando uma relação direta com o TAT e a formação de uma região de platô nas curvas de IDS x VGS, além de uma forte dependência com a temperatura, aumentando a degradação da corrente para temperaturas mais altas. Além disso, o uso de Ge introduziu maior número de impurezas no óxido, e através do estudo de ruído foi observado que o aumento na densidade de armadilhas no óxido resultou no aumento do ruído flicker em baixa frequência, que para o TFET, ocorre devido ao armadilhamento e desarmadilhamento de elétrons na região do óxido. E mais uma vez, o melhor acoplamento eletrostático devido a redução da espessura de HfO2, resultou na redução desse ruído tornando-se melhor quando comparado à um TFET puramente de Si. Neste trabalho foi proposto um modelo de ruído em baixa frequência para o NW-TFET baseado no modelo para MOSFET. Foram realizadas apenas algumas modificações, e assim, obtendo uma boa concordância com os resultados experimentais na região onde o BTBT é o mecanismo de condução predominante. / This work aims to study the nanowire tunneling field effect transistors (NW-TFET). The analyses were performed based on theoretical explanations, numerical simulations and experimental data. In order to improve the NW-TFET performance, it was used devices with different source compositions, such as Si, SiGe alloy and Ge, besides different thicknesses of HfO2 for the gate dielectric. With the aid of numerical simulations it was obtained the NW-TFET energy band diagrams and analyzed the influence of recombination and generation Shockley-Read-Hall (SRH) on the off current, the influence of the trap assisted tunneling (TAT) at low gate voltage bias (0,5V > VGS > 1,5V) and the direct band to band tunneling (BTBT) at higher gate voltage bias(VGS > 1,5V). The predominance of each conduction mechanisms was confirmed by the Arrhenius plot method, being this method adopted in all analysis in this work. The constant current with the temperature in the BTBT region has drawn attention and due to that, this work have studied the NW-TFET analog performance as function of temperature and also the influence of the source composition. The Ge source device shows an improved tunneling current, related to the bandgap narrowing, which leads to higher ION and transconductance. However, due to the strong BTBT dependence with the electric field, the use of Ge as source results in further ION/IOFF degradation. Despite this, the reduced HfO2 thickness in the gate dielectric, results in better electrostatic coupling, which also increases the tunneling current, making this device to present better analog performance when compared to devices with Si source. The use of different materials during the device fabrication leads to an increase of the interface defects. This work presented the influence of the interface trap density on the current, showing a direct relation with TAT and appearance of a plateau region in the IDS x VGS curves. In addition it was shown a strong temperature dependence increasing the current degradation at higher temperatures. Furthermore, the use of Ge has shown an increase of impurities in the oxide, and through the noise study it was observed the flicker noise increase at low frequency, which for TFETs, occurs due to the electrons trapping and detrapping in the oxide region. Once again, the reduced HfO2 thickness leads to better electrostatic coupling, resulting in noise reduction and becoming better when compared to a devices with Si source. In this work was proposed a low frequency noise model for a NW-TFET based on MOSFET models. Minor changes have been done, and thus a good agreement with the experimental results in the region where the BTBT is predominant conduction mechanism was obtained.

The Tunnel Field Effect Transistor (TFET) with sub-60mV/decade Sub-threshold slope and extremely high ION/IOFF ratio has attracted enough attention for low standby power (LSTP) applications where the battery life is very important. So far research in this area has been limited to numerical simulation and experimental analysis. It is however extremely necessary to develop compact models for TFET in order to use them in nano-scale integrated circuit design and simulation. In this work, for the first time, we develop analytical Sub-threshold slope model for n-channel double gate TFET (nDGTFET). Unlike conventional FETs, current in TFET is mainly controlled by the band-to-band tunneling mechanism at source/channel interface. As the total drain current is proportional to band-to-band generation rate, the main challenge in the present work is to find an explicit relationship between average electric field over the tunneling path and the applied gate voltage under nonlocal tunneling condition. Two dimensional Poisson’s equation (with Laplace approximation)is first solved in a rectangular coordinate system in order to obtain analytical expression for electron energy distribution over the channel region.Kane’s Model[J. Phy. Chem.Solids 12(181)1959]for band-to-band tunneling along with some analytical approximation techniques are then used to derive the expression for the Sub-threshold slope under nonlocal tunneling conditions. This Sub-threshold slope model is verified against professional numerical device simulator (MEDICI) for different device geometries. Being an asymmetric device, TFET fabrication suffers from source misalignment with gate. As the doping in source and drain-gate are different, conventional-FET-like self-aligned gate stack formation is not possible for TFET. Such misalignment, at source side, seriously degrades the performance of TFETs. To overcome this problem, in this work we explore the possibility of using “gate replacement” technique for TFET fabrication. We first develop process flow for single gate bulk nTFET, and then we extend it to n-channel double gate TFET (nDGTFET) using modified FinFET process. Good alignments between source and gate are observed with TCAD-simulations in both the cases.

Cette thèse est consacrée à la caractérisation et la modélisation du transport électronique dans des matériaux et dispositifs SOI avancés pour la microélectronique. Tous les matériaux innovants étudiés(ex: SOI fortement dopé, plaques obtenues par collage etc.) et les dispositifs SOI sont des solutions possibles aux défis technologiques liés à la réduction de taille et à l'intégration. Dans ce contexte,l'extraction des paramètres électriques clés, comme la mobilité, la tension de seuil et les courants de fuite est importante. Tout d'abord, la caractérisation classique pseudo-MOSFET a été étendue aux plaques SOI fortement dopées et un modèle adapté pour l'extraction de paramètres a été proposé. Nous avons également développé une méthode électrique pour estimer la qualité de l'interface de collage pour des plaquettes métalliques. Nous avons montré l'effet bipolaire parasite dans des MOSFET SOI totalement désertés. Il est induit par l’effet tunnel bande-à-bande et peut être entièrement supprimé par une polarisation arrière. Sur cette base, une nouvelle méthode a été développée pour extraire le gain bipolaire. Enfin, nous avons étudié l'effet de couplage dans le FinFET SOI double grille, en mode d’inversion. Un modèle analytique a été proposé et a été ensuite adapté aux FinFETs sans jonction(junctionless). Nous avons mis au point un modèle compact pour le profil des porteurs et des techniques d’extraction de paramètres. / This thesis is dedicated to the electrical characterization and transport modeling in advanced SOImaterials and devices for ultimate micro-nano-electronics. SOI technology is an efficient solution tothe technical challenges facing further downscaling and integration. Our goal was to developappropriate characterization methods and determine the key parameters. Firstly, the conventionalpseudo-MOSFET characterization was extended to heavily-doped SOI wafers and an adapted modelfor parameters extraction was proposed. We developed a nondestructive electrical method to estimatethe quality of bonding interface in metal-bonded wafers for 3D integration. In ultra-thin fully-depletedSOI MOSFETs, we evidenced the parasitic bipolar effect induced by band-to-band tunneling, andproposed new methods to extract the bipolar gain. We investigated multiple-gate transistors byfocusing on the coupling effect in inversion-mode vertical double-gate SOI FinFETs. An analyticalmodel was proposed and subsequently adapted to the full depletion region of junctionless SOI FinFETs.We also proposed a compact model of carrier profile and adequate parameter extraction techniques forjunctionless nanowires.