A study of the effect of catalyst properties on the synthesis of carbon nanotubes (CNTs) is done in this thesis. Three different metal alloy catalysts, Fe/Ti, Ni/Ti, Co/Ti, have been studied. Various atomic concentrations and thicknesses were cosputter deposited on clean Si wafers using AJA Orion 4 RF Magnetron sputter deposition tool at 5mtorr and 17��C, and the films were characterized using a scanning electron microscope, Energy-dispersive X-ray spectroscopy. All the alloys have been annealed at 650��C and 3 torr in an argon atmosphere at 100 SCCM, followed by ammonia gas plasma etch at different powers at 3 torr and 50 SCCM NH��� flow in a modified parallel plate RF chemical vapor deposition tool for 1 minute. The influence of plasma power, thickness of catalyst and concentration of Ti the secondary metal in the alloy composition, on the surface morphology of the catalyst are investigated by characterizing them with atomic force microscopy. The study has shown that the surface roughness is affected by Ti concentration, thickness and plasma power. The 35 W power NH��� plasma produced rougher surfaces when compared to the 75 W NH��� plasma. The result is interpreted as follows: ion bombardment leads to greater etching of the catalyst surface. Thus, plasma power must be optimized for catalyst thin film and etch time. The study has provided an in depth analysis and understanding of the various factors that influence catalyst surface morphology which can be applied into further study for optimizing parameters for synthesis of single walled CNTs. Following this, a study on catalysts for CNT synthesis was performed using Plasma enhanced chemical vapor deposition and characterized by scanning electron microscope. CNTs were synthesized on Ni, Ni-Ti, Co, Co-Ti and Fe catalyst. Ni, Ni-Ti catalyst produced forest like vertically aligned CNTs whereas Co, Co-Ti produced vertically aligned free standing CNTs. The growth was dense and uniform across the substrate. Initial growth runs on Fe, Fe-Ti alloy did not produce any CNTs until catalyst was restructured with a thicker Ti under layer after an investigation using Secondary ion mass spectrometry of suspected Fe catalyst poisoning due to reaction with Si substrate. A room temperature run was carried out on annealed and plasma etched Ni catalyst and no CNTs were produced indicating the importance of substrate temperature of CNTs. A deeper understanding of factors of influence on CNTs such as catalyst types, structure/morphology, and substrate temperature has been achieved with this study. / Graduation date: 2013

The recent breakthroughs in genomics and molecular diagnostics will not be reflected in health-care systems unless the biogenetic or other nucleic acid-based tests are transferred from the laboratory to clinical market. Developments in microfabrication techniques brought lab-on-a-chip (LOC) into being the best candidate for conducting sample preparation for such clinical devices, or point-of-care testing set-ups. Sample preparation procedure consists of several stages including cell transportation, separation, cell lysis and nucleic acid purification and detection. LOC, as a subset of Microelectromechanical systems (MEMS), refers to a tiny, compact, portable, automated and easy-to-use microchip capable of performing the sample-preparation stages together. Complexity in micro-fabrications and inconsistency of the stages oppose integration of them into one chip. Among the variety of mechanisms utilized in LOC for cell lysis, electrical methods have the highest potential to be integrated with other microchip-based mechanisms. There are, however, major limitations in electrical cell lysis methods: the difficulty and high-cost fabrication of microfluidic chips and the high voltage requirements for cell lysis. Addressing these limitations, the focus of this thesis is on realization of cell lysis microchips suitable for LOC applications. We have developed a new methodology of fabricating microfluidic chips with electrical functionality. Traditional lithography of microchannel with electrode, needed for making electro-microfluidic chips, is considerably complicated. We have combined several easy-to-implement techniques to realize electro-microchannel with laser-ablated polyimide. The current techniques for etching polyimide are by excimer lasers in bulky set-ups and with involvement of toxic gas. We present a method of ablating microfluidic channels in polyimide using a 30W CO2 laser. Although this technique has poorer resolution, this approach is more cost effective, safer and easier to handle. We have verified the performance of the fabricated electro-microfluidic chips on electroporation of mammalian cells. Electrical cell lysis mechanisms need an operational voltage that is relatively high compared to other cell manipulation techniques, especially for lysing bacteria. Microelectro-devices have dealt with this limitation mostly by reducing the inter-distance of electrodes. The technique has been realized in tiny flow-through microchips with built-in electrodes in a distance of a few micrometers which is in the scale of cell size. In addition to the low throughput of such devices, high probability of blocking cells in such tiny channels is a serious challenge. We have developed a cell lysis device featured with aligned carbon nanotube (CNT) to reduce the high voltage requirement and to improve the throughput. The vertically aligned CNT on an electrode inside a MEMS device provides highly strengthened electric field near the tip. The concept of strengthened electric field by means of CNT has been applied in field electron emission but not in cell lysis. The results show that the incorporation of CNT in lysing bacteria reduces the required operational voltage and improves throughput. This achievement is a significant progress toward integration of cell lysis in a low-voltage, high-throughput LOC. We further developed the proposed fabrication methodology of micro-electro-fluidic chips, described earlier, to perform electroporation of single mammalian cell. We have advanced the method of embedding CNT in microchannel so that on-chip fluorescent microscopy is also feasible. The results verify the enhancement of electroporation by incorporating CNT into electrical cell lysis. In addition, a novel methodology of making CNT-embedded microfluidic devices has been presented. The embedding methodology is an opening toward fabrication of a CNT-featured LOC for other applications.

Flexible electronics attract research and commercial interests in last 2 decades for its flexibility, low cost, light weight and etc. To develop and improve the electro-mechanical properties of flexible electrodes is the most critical and important step. In this work, we have performed nanomechanical and electro-mechanical characterization of materials for flexible electrode applications, including metallic nanowires (NWs), indium tin oxide (ITO)-based and carbon nanotube (CNT)-based electrodes. First, we designed and developed four different testing platforms for nanomechanical and electro-mechanical characterization purpose. For the nano/sub-micro size samples, the micro mechanical devices can be used for uni-axial and bi-axial loading tests. For the macro size samples, the micro tester will be used for in situ monotonic tensile test, while the fatigue tester can be used for in situ cyclic tensile or bending testing purpose. Secondly, we have investigated mechanical behaviors of single crystalline Ni nanowires and single crystalline Cu nanowires under uni-axial tensile loading inside a scanning electron microscope (SEM) chamber. We demonstrated both size and strain-rate dependence on yield stress of single-crystalline Ni NWs with varying diameters (from 100 nm to 300 nm), and themolecular dynamics (MD) simulation helped to confirm and understand the experimental phenomena. Also, two different fracture modes, namely ductile and brittle-like fractures, were found in the same batch of Cu nanowire samples. Finally, we studied the electro-mechanical behaviors of flexible electrodes in macro scale. We reported a coherent study integrating in situ electro-mechanical experiments and mechanics modeling to decipher the failure mechanics of ITO-based and CNT-based electrodes under tension. It is believed that our combined experimental and simulation results provide some further insights into the important yet complicated deformation mechanisms for nanoscale metals and fracture mechanism for flexible electrodes applications.

This report discuss the developement of a MATLAB-based tool for the analysis ofsurface area coverage of carbon nanotube networks from atomic force microscopyimages. The tool was compared with a manual method and the conclusion was that ithas, at least, the same accuracy as the manual mehtod, and it needs much less time forthe analysis. The tool couldn’t analyze images of carbon nanotube networks if theimages were to noisy or the networks to dense. The tool can help in the research ofthin-film transistors with carbon nanotube networks as the semiconducting channelmaterial.

Recent investigations in nanotechnology show that carbon nanotubes (CNT) have one of the most significant mechanical, electrical and optical properties. Interactions between those areas like electrical, optical and mechanical properties are also very promising in both research and industrial fields. Those unique characteristics are built by mainly the atomistic structure of the carbon nanotubes. In this thesis, the effects of vacant atoms on single walled carbon nanotubes (SWCNT) are investigated using matrix stiffness method. In order to use this technique a linkage between structural mechanics and molecular mechanics is established. A code has been developed to construct the SWCNT with the desired chirality, extracting the vacant atoms with the corresponding atomic bonds between the neighbor nodes and calculating the effect of those vacancies on its vibrational properties. A finite element software is also utilized for validation of the code and results. In order to investigate the convergence of the effect of those vacant nodes a numerous number of analyses have been carried out with randomly positioned vacant atoms. Also consecutive vacant nodes have been positioned in order to investigate the effect on the structural properties through the length of a CNT. In addition to those, as a case study, the reduction in Young&#039 / s modulus property because of the vacancies has also been investigated and the effects are tabulated in the report. It is concluded in this study that the any amount of vacant atoms have substantial effect on modal frequencies and Young&#039 / s modulus. Chirality and the position of the vacancies are the main parameters determining the structural properties of a CNT.

The recent breakthroughs in genomics and molecular diagnostics will not be reflected in health-care systems unless the biogenetic or other nucleic acid-based tests are transferred from the laboratory to clinical market. Developments in microfabrication techniques brought lab-on-a-chip (LOC) into being the best candidate for conducting sample preparation for such clinical devices, or point-of-care testing set-ups. Sample preparation procedure consists of several stages including cell transportation, separation, cell lysis and nucleic acid purification and detection. LOC, as a subset of Microelectromechanical systems (MEMS), refers to a tiny, compact, portable, automated and easy-to-use microchip capable of performing the sample-preparation stages together. Complexity in micro-fabrications and inconsistency of the stages oppose integration of them into one chip. Among the variety of mechanisms utilized in LOC for cell lysis, electrical methods have the highest potential to be integrated with other microchip-based mechanisms. There are, however, major limitations in electrical cell lysis methods: the difficulty and high-cost fabrication of microfluidic chips and the high voltage requirements for cell lysis. Addressing these limitations, the focus of this thesis is on realization of cell lysis microchips suitable for LOC applications. We have developed a new methodology of fabricating microfluidic chips with electrical functionality. Traditional lithography of microchannel with electrode, needed for making electro-microfluidic chips, is considerably complicated. We have combined several easy-to-implement techniques to realize electro-microchannel with laser-ablated polyimide. The current techniques for etching polyimide are by excimer lasers in bulky set-ups and with involvement of toxic gas. We present a method of ablating microfluidic channels in polyimide using a 30W CO2 laser. Although this technique has poorer resolution, this approach is more cost effective, safer and easier to handle. We have verified the performance of the fabricated electro-microfluidic chips on electroporation of mammalian cells. Electrical cell lysis mechanisms need an operational voltage that is relatively high compared to other cell manipulation techniques, especially for lysing bacteria. Microelectro-devices have dealt with this limitation mostly by reducing the inter-distance of electrodes. The technique has been realized in tiny flow-through microchips with built-in electrodes in a distance of a few micrometers which is in the scale of cell size. In addition to the low throughput of such devices, high probability of blocking cells in such tiny channels is a serious challenge. We have developed a cell lysis device featured with aligned carbon nanotube (CNT) to reduce the high voltage requirement and to improve the throughput. The vertically aligned CNT on an electrode inside a MEMS device provides highly strengthened electric field near the tip. The concept of strengthened electric field by means of CNT has been applied in field electron emission but not in cell lysis. The results show that the incorporation of CNT in lysing bacteria reduces the required operational voltage and improves throughput. This achievement is a significant progress toward integration of cell lysis in a low-voltage, high-throughput LOC. We further developed the proposed fabrication methodology of micro-electro-fluidic chips, described earlier, to perform electroporation of single mammalian cell. We have advanced the method of embedding CNT in microchannel so that on-chip fluorescent microscopy is also feasible. The results verify the enhancement of electroporation by incorporating CNT into electrical cell lysis. In addition, a novel methodology of making CNT-embedded microfluidic devices has been presented. The embedding methodology is an opening toward fabrication of a CNT-featured LOC for other applications.

The potential of filling carbon nanotubes in polymers has been widely acknowledged for composites with exceptional new properties owing to the high strength of carbon nanotubes. In the thesis, by employing Materials Studio 4.0 software, the buckling behaviour and vibration of polyethylene and carbon nanotube matrix composites are first discussed using molecular mechanics simulations. The research is aimed to acquire a high strength design of PE-CNT matrix with proper PE/CNT ratio as well as discovering the dynamic characteristics of the PE-CNT composites. Investigation results show that as the number of PE chains increases, the buckling strain and the resonance frequency will decrease. Van der Waals forces are collected to explain the relation of the PE chains to the buckling strain and the resonance frequency of the composites.

The ability to fabricate a charge-driven water pump is a crucial step toward mimicking the catalytic ability of natural enzyme systems. The first step towards making this water pump a reality is the ability to make a carbon nanotube (CNT) membrane with uniform, 0.8 nm pore diameter. Proposed in this work is a method for synthesizing these carbon nanotubes via VPI-5 zeolite templated, transition metal catalyzed pyrolysis. Using a membrane composed of these CNTs, it is possible to get water molecules to flow single file at a high flow rate, and to orient them in such a way that would maximize their ability to be catalyzed. Additionally, using the ability to plate a monolayer of precious metal catalyst molecules around the exit to the membrane, catalyst efficiency can be maximized by making every catalyst atom come into contact with a substrate molecule. In this work, we also demonstrate the ability to plate a monolayer of precious metal catalyst atoms onto an insulating, mesoporous, support material. By combining these two chemical processes, it is possible to mimic the catalytic efficiency of natural enzyme systems.

This thesis analyzes the chemical vapour deposition (CVD) growth of vertically aligned carbon nanotube (CNT) forests in order to understand how CNT forests grow, why they stop growing, and how to control the properties of the synthesized CNTs. In situ kinetics data of the growth of CNT forests are gathered by in situ optical microscopy. The overall morphology of the forests and the characteristics of the individual CNTs in the forests are investigated using scanning electron microscopy and Raman spectroscopy. The in situ data show that forest growth and termination are activated processes (with activation energies on the order of 1 eV), suggesting a possible chemical origin. The activation energy changes at a critical temperature for ethanol CVD (approximately 870°C). These activation energies and critical temperature are also seen in the temperature dependence of several important characteristics of the CNTs, including the defect density as determined by Raman spectroscopy. This observation is seen across several CVD processes and suggests a mechanism of defect healing. The CNT diameter also depends on the growth temperature. In this thesis, a thermodynamic model is proposed. This model predicts a temperature and pressure dependence of the CNT diameter from the thermodynamics of the synthesis reaction and the effect of strain on the enthalpy of formation of CNTs. The forest morphology suggests significant interaction between the constituent CNTs. These interactions may play a role in termination. The morphology, in particular a microscale rippling feature that is capable of diffracting light, suggest a non-uniform growth rate across the forest. A gas phase diffusion model predicts a non-uniform distribution of the source gas. This gas phase diffusion is suggested as a possible explanation for the non-uniform growth rate. The gas phase diffusion is important because growth by acetylene CVD is found to be very efficient (approximately 30% of the acetylene is converted to CNTs). It is seen that multiple mechanisms are active during CNT growth. The results of this thesis provide insight into both the basic understanding of the microscopic processes involved in CVD growth and how to control the properties of the synthesized CNTs.

The potential of filling carbon nanotubes in polymers has been widely acknowledged for composites with exceptional new properties owing to the high strength of carbon nanotubes. In the thesis, by employing Materials Studio 4.0 software, the buckling behaviour and vibration of polyethylene and carbon nanotube matrix composites are first discussed using molecular mechanics simulations. The research is aimed to acquire a high strength design of PE-CNT matrix with proper PE/CNT ratio as well as discovering the dynamic characteristics of the PE-CNT composites. Investigation results show that as the number of PE chains increases, the buckling strain and the resonance frequency will decrease. Van der Waals forces are collected to explain the relation of the PE chains to the buckling strain and the resonance frequency of the composites.