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Effective treatment of carbon fiber components to improve delamination resistance is vital to the application of such materials since delamination is one of the biggest concerns regarding the use of composites in the aerospace sector. Due to the significant application benefit gained from increased stiffness to density ratio with composite materials, innovative developments resulting in improved through-thickness strength have been on the rise. The inherent anisotropy of composite materials results in an added difficulty in designing structural elements that make use of such materials. Proposed techniques to improve the through-thickness strength of laminar composites are many and varied; however all share the common goal of improving inter-laminar bond strength. This research makes use of novel materials in the field of wet flocking and Z-pinning. Cellulose nanofibers (CNFs) have already demonstrated excellent mechanical properties in terms of stiffness and strength, originating at the nano-scale. These materials were introduced into the laminate while in a sol-gel suspension in an effort to improve load transfer between laminate layers. The effect of CNFs as lightweight renewable reinforcement for CFRPs will be investigated. Carbon nanotube (CNT) additives were also considered for their beneficial structural properties. / Master of Science

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Since there is a continuous shrinking of feature sizes in ultra-large scale integrated (ULSI) circuits, requirements on materials and technology are going to rise dramatically in the near future. In particular, at the interconnect system this calls for new concepts and materials. Therefore, carbon nanotubes (CNTs) are considered as a promising material to replace partly or entirely metal interconnects in such devices. The present thesis aims to make a contribution to the CNT growth control with the thermal chemical vapor deposition (CVD) method and the integration of CNTs as vertical interconnects (vias) in ULSI circuits. Different support/catalyst systems are examined in processes for catalyst pretreatment and CNT growth. The investigations focus on the catalyst formation and the interactions at the interfaces. Those effects are related to the CNT growth. To get an insight into interactions at interfaces, film structure, composition, and CNT growth characteristics, samples are extensively characterized by techniques like AFM, SEM, TEM, XRD, XPS, and Raman spectroscopy. Screening studies on nanoparticle formation and CNT growth with the well known system SiO2/Ni are presented. This system is characterized by a weak support/catalyst interaction, which leads to undirected growth of multi-walled CNTs (MWCNTs). By contrast, at the Ta/Ni system a strong interaction causes a wetting of catalyst nanoparticles and vertically aligned MWCNT growth. At the system W/Ni a strong interaction at the interface is found as well, but there it induces Stranski-Krastanov catalyst film reformation upon pretreatment and complete CNT growth inhibition. Studies on the SiO2/Cr/Ni system reveal that Cr and Ni act as a bi-catalyst system, which leads to a novel nanostructure defined as interlayer CNT (ICNT) structure. The ICNT films are characterized by well crystallized vertically aligned MWCNTs, which grow out a Cr/Ni layer lifted off as a continuous and very smooth layer from the substrate with the growth. Besides, this nanostructure offers new possibilities for the integration of CNTs in different electronic applications. Based on the presented possibilities of manipulating CNT growth, an integration technology was derived to fabricate CNT vias. The technology uses a surface mediated site-selective CVD for the growth of MWCNTs in via structures. Developments are demonstrated with the fabrication of via test vehicles and the site-selective growth of MWCNTs in vias on 4 inch wafers. Furthermore, the known resistance problem of CNT vias, caused by too low CNT density, is addressed by a new approach. A CNT/metal heterostructure is considered, where the metal is implemented through atomic layer deposition (ALD). The first results of the coating of CNTs with readily reducible copper oxide nanoparticles are presented and discussed. / Aufgrund der kontinuierlichen Verkleinerung von Strukturen in extrem hoch integrierten (engl. Ultra-Large Scale Integration − ULSI) Schaltkreisen werden die Anforderungen an die Materialien und die Technologie in naher Zukunft dramatisch ansteigen. Besonders im Leitbahnsystem sind neue Materialien und Konzepte gefragt. Kohlenstoffnanoröhren (engl. Carbon Nanotubes − CNT) stellen hierbei ein vielversprechendes Material dar, um teilweise oder sogar vollständig metallische Leitbahnen zu ersetzen. Die vorliegende Arbeit liefert einen Beitrag zur CNT-Wachstumskontrolle mit der thermischen Gasphasenabscheidung (engl. Chemical Vapor Deposition − CVD) sowie der Integration von CNTs als vertikale Leitungsverbindungen (Via) in ULSI-Schaltkreisen. Verschiedene Untergrund/Katalysator-Systeme werden in Prozessen zur Katalysatorvorbehandlung sowie zum CNT-Wachstum betrachtet. Die Untersuchungen richten sich insbesondere auf die Katalysatorformierung und die Wechselwirkungen an den Grenzflächen. Diese werden mit dem CNT-Wachstum in Verbindung gebracht. Für Untersuchungen von Grenzflächeninteraktionen, Schichtstruktur, Zusammensetzung sowie CNT-Wachstumscharakteristik werden Analysen mit AFM, REM, TEM, XRD, XPS und Raman-Spektroskopie genutzt. Zunächst werden Voruntersuchungen an dem gut bekannten System SiO2/Ni zur Nanopartikelformierung und CNTWachstum vorgestellt. Dieses System ist gekennzeichnet durch eine schwache Wechselwirkung zwischen Untergrund und Katalysator sowie ungerichtetem Wachstum von mehrwandigen CNTs (MWCNTs). Im Gegensatz dazu hat bei dem System Ta/Ni eine starke Interaktion an der Grenzfläche eine Katalysatornanopartikelbenetzung und vertikales MWCNT-Wachstum zur Folge. Für das W/Ni-System gelten ebenfalls starke Interaktionen an der Grenzfläche. Bei diesem System wird allerdings eine Stranski-Krastanov-Schichtformierung des Katalysators und eine vollständige Unterbindung von CNT-Wachstum erreicht. Bei dem System SiO2/Cr/Ni agieren Cr und Ni als Bi- Katalysatorsystem. Dies führt zu einer neuartigen Nanostruktur, die als Zwischenschicht-CNT (engl. Interlayer Carbon Nanotubes − ICNTs) Struktur definiert wird. Die Schichten sind durch eine gute Qualität von gerichteten MWCNTs charakterisiert, die aus einer geschlossenen, sehr glatten und von den CNTs getragenen Cr/Ni-Schicht herauswachsen. Darüber hinaus bietet die Struktur neue Möglichkeiten für die Integration von CNTs in verschiedene elektronische Anwendungen. Auf der Grundlage der vorgestellten Manipulationsmöglichkeiten von CNT-Wachstum wurde eine Integrationstechnologie für CNTs in Vias abgeleitet. Der Ansatz ist eine oberflächeninduzierte selektive CVD von vertikal gerichteten MWCNTs in Via-Strukturen. Diese Technologie wird mit der Herstellung von einem Via-Testvehikel und dem selektiven CNT-Wachstum in Vias auf 4 Zoll Wafern demonstriert. Um das Widerstandsproblem von CNT-Vias, verursacht durch eine zu niedrige CNT-Dichte, zu reduzieren, wird eine Technologieerweiterung vorgeschlagen. Der Ansatz geht von einer CNT/Metall-Heterostruktur aus, bei der das Metall mit Hilfe der Atomlagenabscheidung (engl. Atomic Layer Deposition − ALD) implementiert wird. Es werden erste Ergebnisse zur CNT-Beschichtung mit reduzierbaren Kupferoxidnanopartikeln vorgestellt und diskutiert.

Since the rediscovery of carbon nanotubes (CNTs) due to the publication of Sumio Iijima's article Helical microtubules of graphitic carbon in the magazine Nature in 1991 the interest in carbon nanotubes has rapidly increased. This bachelor thesis also deals with this popular material with the aim to functionalize CNTs for further uses in the microelectronic industry. A promising approach is the functionalization of the CNTs with metal nanoparticles or metal films. To achieve this, one can perform an atomic layer deposition (ALD) on CNTs. In the present work the Trimethylaluminum (TMA) ALD is the chosen process for the functionalization of the CNTs, which will be studied here. Since the available knowledge on the CNT-functionalization by gas phase reactions is very limited, a theoretical study of possible reaction pathways is necessary. Those studies are carried out with two modern quantumchemical programs, Turbomole and DMol³, which are described together with an introduction into Density Functional Theory, as well as an introduction of CNTs and the ALD process. A basic model of a CNT with a Single Vacancy defect, which had been selected according to the demands of the studies, is introduced. Because the TMA ALD process requires hydroxyl groups as its starting point, not only is the performance of a TMA ALD cycle on a CNT studied, but also reactions which result in the CNTs owning of hydroxyl groups. Consequently, this bachelor thesis will focus on two di erent aspects: The performance of one TMA ALD cycle and the study of possible educts for the TMA ALD process. This study of the educts includes possible structures which can be formed when a CNT comes into contact with air.

The outstanding properties of carbon nanotubes (CNTs) keep attracting the attention of researchers from different fields. CNTs are promising candidates for applications e.g. in lightweight construction but also in electronics, medicine and many more. The basis for the realization of the manifold applications is a detailed knowledge of the material properties of the carbon nanotubes. In particular for applications in lightweight constructions or in composites, the knowledge of the mechanical behavior of the CNTs is of vital interest. Hence, a lot of effort is put into the experimental and theoretical determination of the mechanical material properties of CNTs. Due to their small size, special techniques have to be applied. In this research, a modified molecular structural mechanics model for the numerical determination of the mechanical behavior of carbon nanotubes is presented. It uses an advanced approach for the geometrical representation of the CNT structure while the covalent bonds in the CNTs are represented by beam elements. Furthermore, the model is specifically designed to overcome major drawbacks in existing molecular structural mechanics models. This includes energetic consistency with the underlying chemical force field. The model is developed further to enable the application of a more advanced chemical force field representation. The developed model is able to predict, inter alia, the lateral and radial stiffness properties of the CNTs. The results for the lateral stiffness are given and discussed in order to emphasize the progress made with the presented approach.