In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed and fabricated on a 425um thick silicon substrate. Electrostatic actuation is preferred over other actuation mechanisms due to low power consumption. The RF MEMS variable capacitor is designed in a CPW topology, with multiple beams supported (1 - 7 beams) on a single pedestal. The varactors are fabricated using surface micromachining techniques. A 1um thick silicon monoxide (Er - 6) is used as a dielectric layer for the varactor. The movable membrane is suspended on a 2.5um thick electroplated gold pedestal. The capacitance between the membrane and the bottom electrode increases as the bias voltage between the membrane and the bottom electrode is increased, eventually causing the membrane to snap down at the actuation voltage. For the varactors designed herein, the actuation voltage is approximately 30 - 90V. Full-wave electromagnetic simulations are performed from 1 - 25GHz to accurately predict the frequency response of the varactors. The EM simulations and the measurement results compare favorably. A series RLC equivalent circuit is used to model the varactor and used to extract the parasitics associated with the capacitor by optimizing the model with the measurement results. The measured capacitance ratio is approximately 12:1 with a tuning range from 0.5 - 6pF. Furthermore, the measured S-parameter data is used to extract the unloaded Q of the varactor (at 1GHz) and is found to be 234 in the up state and 27 in the down state. An improved anodic bonding technique to bond high resistivity Si substrate and low alkali borax glass substrate that finds potential application towards packaging of MEMS varactors is investigated. To facilitate the packaging of the varactors the temperature is maintained at 400°C. The bonding time is approximately 7min at an applied voltage of 1KV.

The objective of the dissertation is to develop and describe kinematic models (Pseudo-Rigid-Body Models) for approximating large-deflection of spatial (3D) cantilever beams that undergo multiple bending motions thru end-moment loading. Those models enable efficient design of compliant mechanisms, because they simply and accurately represent the bending and stiffness of compliant beams. To accomplish this goal, the approach can be divided into three stages: development of the governing equations of a flexible cantilever beam, development of a PRBM for axisymmetric cantilever beams and the development of spatial PRBMs for rectangular cross-section beam with multiple end moments. The governing equations of a cantilever beam that undergoes large deflection due to force and moment loading, contains the curvature, location and rotation of the beam. The results where validated with Ansys, which showed to have a Pearson's correlation factor higher than 0.91. The resulting deflections, curvatures and angles were used to develop a spatial pseudo-rigid-body model for the cantilever beam. The spatial pseudo-rigid-body model consists of two links connected thru a spherical joint. For an axisymmetric beam, the PRB parameters are comparable with existing planar PRBMs. For the rectangular PRBM, the parameters depend on the aspect ratio of the beam (the ratio of the beam width over the height of the cross-section). Tables with the parameters as a function of the aspect ratio are included in this work.

Title from PDF of title page. / Document formatted into pages; contains 88 pages. / Thesis (M.S.E.E.)--University of South Florida, 2003. / Includes bibliographical references. / Text (Electronic thesis) in PDF format. / ABSTRACT: In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed and fabricated on a 425um thick silicon substrate. Electrostatic actuation is preferred over other actuation mechanisms due to low power consumption. The RF MEMS variable capacitor is designed in a CPW topology, with multiple beams supported (1 - 7 beams) on a single pedestal. The varactors are fabricated using surface micromachining techniques. A 1um thick silicon monoxide (Er - 6) is used as a dielectric layer for the varactor. The movable membrane is suspended on a 2.5um thick electroplated gold pedestal. The capacitance between the membrane and the bottom electrode increases as the bias voltage between the membrane and the bottom electrode is increased, eventually causing the membrane to snap down at the actuation voltage. For the varactors designed herein, the actuation voltage is approximately 30 - 90V. / ABSTRACT: Full-wave electromagnetic simulations are performed from 1 - 25GHz to accurately predict the frequency response of the varactors. The EM simulations and the measurement results compare favorably. A series RLC equivalent circuit is used to model the varactor and used to extract the parasitics associated with the capacitor by optimizing the model with the measurement results. The measured capacitance ratio is approximately 12:1 with a tuning range from 0.5 - 6pF. Furthermore, the measured S-parameter data is used to extract the unloaded Q of the varactor (at 1GHz) and is found to be 234 in the up state and 27 in the down state. An improved anodic bonding technique to bond high resistivity Si substrate and low alkali borax glass substrate that finds potential application towards packaging of MEMS varactors is investigated. To facilitate the packaging of the varactors the temperature is maintained at 400°C. The bonding time is approximately 7min at an applied voltage of 1KV. / System requirements: World Wide Web browser and PDF reader. / Mode of access: World Wide Web.

Aeroelastic behavior prediction is often confined to analytical or highly computational methods, so I developed a low degree of freedom computational method using structural finite elements and unsteady loading to cover a gap in the literature. Finite elements are readily suitable for determination of the free vibration characteristics of eccentric, elastic structures, and the free vibration characteristics fundamentally determine the aeroelastic behavior. I used Theodorsen’s unsteady strip loading formulation to model the aerodynamic loading on linear elastic structures assuming harmonic motion. I applied Hassig’s ‘p-k’ method to predict the flutter boundary of nonsymmetric, aeroelastic systems. I investigated the application of a quintic interpolation assumed displacement shape to accurately predict higher order characteristic effects compared to linear analytical results. I show that quintic interpolation is especially accurate over cubic interpolation when multi-modal interactions are considered in low degree of freedom flutter behavior for high aspect ratio HALE aircraft wings.

Rotating and non-rotating beams are widely used to model important engineering struc-tures. Hence, the vibration analyses of these beams are an important problem from a structural dynamics point of view. Depending on the beam dimensions, they are mod-eled using different beam theories. In most cases, the governing differential equations of these types of beams do not yield any simple closed-form solutions; hence we look for the inverse problem approach in determining the beam property variations given certain solutions. The long and slender beams are generally modeled using the Euler-Bernoulli beam theory. Under the premise of this theory, we study (i) the second mode tailoring of non-rotating beams having six different boundary conditions, (ii) closed-form solutions for free vibration analysis of free-free beams, (iii) closed-form solutions for free vibration analysis for gravity-loaded cantilever beams, (iv) closed-form solutions for free vibration analysis of rotating cantilever and pinned-free beams and (v) beams with shared eigen-pair. Short and thick beams are generally modeled using the Timoshenko beam theory. Here, we provide analytical closed-form solutions for the free vibration analysis of ro-tating non-homogeneous Timoshenko beams. The Rayleigh beam provides a marginal improvement over the Euler-Bernoulli beam theory without venturing into the math-ematical complexities of the Timoshenko beam theory. Under this theory, we provide closed-form solutions for the free vibration analysis of cantilever Rayleigh beams under three different axial loading conditions - uniform loading, gravity-loading and centrifu-gally loaded. We assume simple polynomial mode shapes which satisfy the different boundary conditions of a particular beam, and derive the corresponding beam property variations. In case of the shared eigenpair, we use the mode shape of a uniform beam which has a closed-form solution and use it to derive the stiffness distribution of a corresponding axially loaded beam having same length, mass variation and boundary condition. For the Timoshenko beam, we assume polynomial functions for the bending displacement and the rotation due to bending. The derived properties are demonstrated as benchmark analytical solutions for approximate and numerical methods used for the free vibration analysis of beams. They can also aid in designing actual beams for a pre-specified frequency or nodal locations in some cases. The effect of different parameters in the derived property variations and the bounds on the pre-specified frequencies and nodal locations are also studied for certain cases. The derived analytical solutions can also serve as a benchmark solution for different statistical simulation tools to find the probabilistic nature of the derived stiffness distri-bution for known probability distributions of the pre-specified frequencies. In presence of uncertainty, this flexural stiffness is treated as a spatial random field. For known probability distributions of the natural frequencies, the corresponding distribution of this field is determined analytically for the rotating cantilever Euler-Bernoulli beams. The derived analytical solutions are also used to derive the coefficient of variation of the stiffness distribution, which is further used to optimize the beam profile to maximize the allowable tolerances during manufacturing.